JPH03106730U - - Google Patents

Info

Publication number
JPH03106730U
JPH03106730U JP1558590U JP1558590U JPH03106730U JP H03106730 U JPH03106730 U JP H03106730U JP 1558590 U JP1558590 U JP 1558590U JP 1558590 U JP1558590 U JP 1558590U JP H03106730 U JPH03106730 U JP H03106730U
Authority
JP
Japan
Prior art keywords
wafer
optical fiber
periphery
rotating
output end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1558590U
Other languages
English (en)
Japanese (ja)
Other versions
JPH085546Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990015585U priority Critical patent/JPH085546Y2/ja
Publication of JPH03106730U publication Critical patent/JPH03106730U/ja
Application granted granted Critical
Publication of JPH085546Y2 publication Critical patent/JPH085546Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990015585U 1990-02-21 1990-02-21 ウエハ周辺露光装置 Expired - Lifetime JPH085546Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990015585U JPH085546Y2 (ja) 1990-02-21 1990-02-21 ウエハ周辺露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990015585U JPH085546Y2 (ja) 1990-02-21 1990-02-21 ウエハ周辺露光装置

Publications (2)

Publication Number Publication Date
JPH03106730U true JPH03106730U (en:Method) 1991-11-05
JPH085546Y2 JPH085546Y2 (ja) 1996-02-14

Family

ID=31518884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990015585U Expired - Lifetime JPH085546Y2 (ja) 1990-02-21 1990-02-21 ウエハ周辺露光装置

Country Status (1)

Country Link
JP (1) JPH085546Y2 (en:Method)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006314264A (ja) * 2005-05-13 2006-11-24 Dai-Dan Co Ltd 実験動物飼育用のラック装置
JP2009095261A (ja) * 2007-10-15 2009-05-07 Hamurii Kk 実験動物用飼育装置
WO2016121023A1 (ja) * 2015-01-28 2016-08-04 三菱電機株式会社 周辺露光装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61117552A (ja) * 1984-11-13 1986-06-04 Ushio Inc 露光装置
JPH01243427A (ja) * 1988-03-24 1989-09-28 Tokyo Electron Ltd 露光方法及び露光装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61117552A (ja) * 1984-11-13 1986-06-04 Ushio Inc 露光装置
JPH01243427A (ja) * 1988-03-24 1989-09-28 Tokyo Electron Ltd 露光方法及び露光装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006314264A (ja) * 2005-05-13 2006-11-24 Dai-Dan Co Ltd 実験動物飼育用のラック装置
JP2009095261A (ja) * 2007-10-15 2009-05-07 Hamurii Kk 実験動物用飼育装置
WO2016121023A1 (ja) * 2015-01-28 2016-08-04 三菱電機株式会社 周辺露光装置
JPWO2016121023A1 (ja) * 2015-01-28 2017-11-16 三菱電機株式会社 周辺露光装置
US10073360B2 (en) 2015-01-28 2018-09-11 Mitsubishi Electric Corporation Edge exposure apparatus

Also Published As

Publication number Publication date
JPH085546Y2 (ja) 1996-02-14

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