JPH0448481U - - Google Patents

Info

Publication number
JPH0448481U
JPH0448481U JP9086790U JP9086790U JPH0448481U JP H0448481 U JPH0448481 U JP H0448481U JP 9086790 U JP9086790 U JP 9086790U JP 9086790 U JP9086790 U JP 9086790U JP H0448481 U JPH0448481 U JP H0448481U
Authority
JP
Japan
Prior art keywords
bellows
shaft
flange
stem shaft
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9086790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0726623Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990090867U priority Critical patent/JPH0726623Y2/ja
Publication of JPH0448481U publication Critical patent/JPH0448481U/ja
Application granted granted Critical
Publication of JPH0726623Y2 publication Critical patent/JPH0726623Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Details Of Valves (AREA)
JP1990090867U 1990-08-29 1990-08-29 真空ゲート弁 Expired - Lifetime JPH0726623Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990090867U JPH0726623Y2 (ja) 1990-08-29 1990-08-29 真空ゲート弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990090867U JPH0726623Y2 (ja) 1990-08-29 1990-08-29 真空ゲート弁

Publications (2)

Publication Number Publication Date
JPH0448481U true JPH0448481U (nl) 1992-04-24
JPH0726623Y2 JPH0726623Y2 (ja) 1995-06-14

Family

ID=31825986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990090867U Expired - Lifetime JPH0726623Y2 (ja) 1990-08-29 1990-08-29 真空ゲート弁

Country Status (1)

Country Link
JP (1) JPH0726623Y2 (nl)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005098500A (ja) * 2003-09-01 2005-04-14 Toshiba Ceramics Co Ltd 切換え弁

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63177371U (nl) * 1987-05-08 1988-11-17
JPH01261573A (ja) * 1988-04-08 1989-10-18 Kokusai Electric Co Ltd 真空仕切弁

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63177371U (nl) * 1987-05-08 1988-11-17
JPH01261573A (ja) * 1988-04-08 1989-10-18 Kokusai Electric Co Ltd 真空仕切弁

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005098500A (ja) * 2003-09-01 2005-04-14 Toshiba Ceramics Co Ltd 切換え弁
JP4522195B2 (ja) * 2003-09-01 2010-08-11 株式会社アルバック 半導体製造装置用の切換え弁

Also Published As

Publication number Publication date
JPH0726623Y2 (ja) 1995-06-14

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term