JPH0448004A - Fe base soft magnetic alloy powder and manufacture thereof and powder compact magnetic core with the same - Google Patents

Abstract

PURPOSE:To develop Fe base soft magnetic alloy powder for powder compact magnetic core having low iron loss, high saturation magnetic flux density and low magnetic strain in high frequency range by executing heat treatment at the specific temp. after rapidly cooling and pulverizing molten Fe base alloy of the specific composition incorporating ceramic. CONSTITUTION:Base alloy of the composition shown with the general formula (in the formula, X: soluble oxide base ceramic at the time of manufacturing the rapidly cooled body, M: at least one kind among Ti, Zr, Hf, Nb, V, Ta, Cr and W, M': at least one kind among Mn. platinum group metals, Ag, Au, Zn, Al, Ga, In, Sn and rare earth elements, A: at least one kind of Co and Ni, Z: at least one kind among B, C, P and Ge, (a) - (f): atomic%, 0.1<=a<=5, 0.1<=b<=10, 0<=c<=10, 0<=d<=40, 5<=e<=25, 2<=f<=20) is melted and rapidly cooled with the atomizing method, etc., to make amorphous powder. The heat treatment is executed to this at near the crystallized temp. to precipitate super fine crystals.

Description

[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention provides an F
The present invention relates to a method for producing an e-based soft magnetic alloy powder and a dust core using the same.

(Prior Art) Permalloy, Fe-Al-8i alloy, silicon steel, ferrite, and the like have been used as soft magnetic materials for various magnetic parts for power supplies and magnetic heads.

Incidentally, in recent years, there has been an increasing demand for electronic devices to be smaller, lighter, and have higher performance. There is a strong demand for improved characteristics of the soft magnetic material that constitutes the magnetic material, such as lower loss in the high frequency range and increased saturation magnetic flux density.

However, since the above-mentioned conventional materials cannot fully satisfy these requirements, amorphous alloys have recently attracted attention as soft magnetic materials compatible with high frequencies.

Amorphous alloys exhibit excellent soft magnetic properties such as high magnetic permeability and low coercive force, and also have properties such as low iron loss and high squareness ratio in high frequency ranges, so they are used as magnetic components for switching power supplies. It has been partially put into practical use. For example, CO-based amorphous alloys have been put to practical use as saturable reactors, and Fe-based amorphous alloys have been put to practical use as choke coils.

However, even with these amorphous alloys, there are many problems that must be solved. For example, Co-based amorphous alloys have excellent properties such as low iron loss and high squareness ratio in high frequency ranges, but they have the drawbacks of being relatively expensive and lacking in versatility. In addition, although Fe-based amorphous alloys are inexpensive and have excellent versatility, they do not have zero magnetostriction, so they suffer from relatively large deterioration of magnetic properties due to resin molding, etc., and also have drawbacks such as large noise generation due to magnetostrictive vibrations. There is.

On the other hand, recently, an Fe-based magnetomagnetic alloy has been proposed in which ultrafine crystal grains are precipitated and has soft magnetic properties almost equivalent to that of a Co-based amorphous alloy (Japanese Patent Laid-Open No. 63-320504
No. 64-79342, etc.). This F
E-based ultra-ultrafine crystal alloy has excellent soft magnetic properties, satisfies low magnetostriction, and is relatively inexpensive because it mainly contains Fe, so it is attracting attention as a soft magnetic material that can replace Co-based amorphous alloys. There is.

(Problems to be Solved by the Invention) However, the soft magnetic properties of the Fe-based ultrafine-crystalline alloy have a drawback that they are highly dependent on the heat treatment temperature in the manufacturing process.

That is, by partially making the Fe-based ultra-ultrafine crystal alloy master alloy amorphous and then heat-treating it in a temperature range near the crystallization temperature, fine crystal grains are precipitated and excellent soft magnetic properties are imparted. .

However, because the temperature range of the above heat treatment is relatively narrow and the amount of energy released when crystallizing from an amorphous state is large, there is a high risk of exceeding the set temperature range during heat treatment, which may cause deterioration of soft magnetic properties. The problem was that it was easy to invite. The present invention has been made to address these issues, and is an inexpensive product that satisfies low core loss, high saturation magnetic flux density, and low magnetostriction in a high frequency range, and provides these characteristics without depending too much on heat treatment conditions. The object of the present invention is to provide a method for producing a Fe-based soft magnetic alloy powder with excellent versatility, and a dust core using the same.

[Structure of the invention] (Means and effects for solving the problem) That is, the general formula of the Fe-based soft magnetic alloy powder of the present invention is: % formula % (wherein, At least one selected compound, Ml, tT
i, Zr, Hf, ■, Nb, Ta, CrS
At least one element selected from Mo and W, M
' is Mn, platinum group element, Ag, Au, Zn, AI,
At least one element selected from Ga, In, Sn, and rare earth elements, A is at least one element selected from Co and Ni, and 2 is at least one element selected from B, C, P, and Ge. Represents the species elements a, b, c,
d, e, and f are numbers that satisfy the following formula. However, all numbers in the formula below indicate at%.

0.1≦a≦5 0.1≦b≦10 0≦C≦10 0≦d≦40 5≦e≦25 2≦f≦20 12≦e+f≦30° or less. ) and has a composition substantially represented by
It is characterized in that 0% or more is composed of fine crystal grains.

Further, the method for producing a Fe-based soft magnetic alloy powder of the present invention includes a step of rapidly cooling a molten metal containing a molten Fe-based alloy and a ceramic material, and a quenched body obtained in the quenching step.
The method is characterized by a step of performing heat treatment at a temperature near or higher than the crystallization temperature of the rapidly cooled body to precipitate fine crystal grains within the structure.

The reasons for limiting the composition of the Fe-based soft magnetic alloy powder of the present invention will be explained below.

X in the above formula (I) is essential for precipitating fine crystal grains at a relatively low temperature by heat treatment, and suppresses coarsening of the crystal grains. These improve the soft magnetic properties such as core loss and magnetic permeability, reduce the dependence of the soft magnetic properties on heat treatment temperature, and improve the reproducibility of the soft magnetic properties.

Ru.

As this X, the effect can be obtained at least if it is a ceramic material that can be melted at the time of producing the quenched body, that is, an inorganic compound, but due to the ease of melting, the melting point is 1800
Compounds of 6C or less are preferred. Further, in consideration of this meltability, oxides are preferable.

Such oxides include Cu0SCu20, SnO
, Bi O, WO, Ta ○Nb O, MoO,
Examples include MnO, Gem2Ga203, CdO, etc.
Particularly preferred are CuO and CuO.

These effects of X can be obtained when the content is around 0.1 at%, but if it exceeds 5 at%, it becomes brittle and it becomes difficult to form a long ribbon during rapid cooling in the manufacturing process. Therefore, the content of X is 0
．． The range is 1 at% to 5 at%. A more preferable content of X is in the range of 0.3 at% to 4 at%.

Like X, M suppresses coarsening of crystal grains, and
This suppresses the precipitation of compounds that degrade soft magnetic properties, such as Fe2B and Fe2B when B is used as 2. Among the above-mentioned M elements, Nb, Ta, Mo, W, and V are particularly preferable when fabricating in the atmosphere.

The effect of these M is that its content is 0.1 at%
However, if it exceeds 10 at%, it becomes difficult to make it amorphous, so the content of M is set in the range of 0.1 at% to 10 at%. A more preferable content of M is in the range of 0.5 at% to 8 at%.

Furthermore, M' is an effective element for further improving the soft magnetic properties of the alloy in which fine crystal grains are precipitated.

However, if the content of M'' is too large, the saturation magnetic flux density will decrease, so the content is set to 10 at % or less.

Among the above-mentioned M' elements, platinum group elements are particularly effective in improving corrosion resistance, and AI and Ga are effective in stabilizing the bee-Fe solid solution which is the main phase of fine crystal grains. Si
and 2 are essential elements for making the molten alloy containing ceramics in a molten state amorphous during rapid cooling, and are elements that assist the precipitation of fine crystal grains. In particular, Si dissolves in Fe, which is the main component of the fine grains, and contributes to reducing magnetic anisotropy and magnetostriction.

If the Si content is 5 at% without vortex, it will be difficult to make it amorphous, and if it exceeds 25 at%, the ultra-quenching effect will be reduced and relatively coarse crystal grains will easily precipitate. range. Moreover, magnetostriction becomes zero when the Si content is in the range of 1.2 at% to 20 at%, which is particularly preferable. In addition, the content of 2 is 2at
If it is less than 20at%, it will be difficult to make it amorphous, and if the
%, the magnetic properties tend to deteriorate when crystallized by heat treatment, so it is set in the range of 2 at % to 20 at %. Among the above-mentioned two elements, B is particularly preferable from the viewpoint of ease of manufacturing the ribbon. Note that the total amount of Si and 2 is 1
The range of 2at% to 30at% is preferable, and Si/H
It is preferable that the ratio is 1 or more in order to obtain excellent soft magnetic properties.

It is also possible to partially replace Fe with Co or Ni, but if the amount of substitution is too large, the soft magnetic properties will deteriorate, so the amount should be 40 at % or less.

In addition, in the Fe-based soft magnetic alloy powder of the present invention, 0, S
Even if it contains trace amounts of unavoidable impurities such as those contained in ordinary Fe-based alloys such as , N, etc., the effects of the present invention will not be impaired.

In the Fe-based soft magnetic alloy powder of the present invention having the above composition, 50% or more of the alloy structure in area ratio is composed of fine crystal grains, and the fine crystal grains are uniformly distributed in the alloy structure. It exists. These fine crystal grains are
-Fe solid solution is the main component, and excellent soft magnetic properties can be obtained especially when an ordered lattice exists in at least a portion. Here, the existence of the above-mentioned regular lattice is confirmed by the appearance of a peak of the regular lattice by X-ray diffraction. The reason why the composition ratio of the alloy structure made up of fine crystal grains was specified as 50% or more in terms of area ratio is that if the presence of fine crystal grains is less than 50% in terms of area ratio, magnetostriction becomes large and magnetic permeability becomes low. This is because the loss increases and the desired soft magnetic properties cannot be obtained. A more preferable composition ratio of the alloy structure by fine crystal grains is in the range of 60% to 100% in terms of area ratio. The abundance ratio of fine crystal grains mentioned here is measured by enlarging the alloy structure at a high magnification (for example, 200,000 times using a transmission electron microscope).

The fine crystal grains present in the Fe-based soft magnetic alloy powder of the present invention are ultra-fine due to the presence of a ceramic material such as an oxide represented by X in the above formula (I),
It has an extremely small average particle size of 50 nm or less. This ultra-fine grain formation occurs because ceramic materials such as oxides hardly form a solid solution with Fe, so they exist at grain boundaries or triple points formed by the precipitation of ceramic materials, thereby inhibiting the growth of crystal grains. This is thought to be caused by being suppressed.

Furthermore, when heat-treated at a temperature higher than that at which excellent soft magnetic properties are obtained, diffraction lines of the ceramics used to make the ribbon can be seen.
In some cases, the metal may be partially reduced during melting, and the diffraction lines of the metal may be observed.

For example, WO2, Ta205, CuO5Cu20, etc.

When these are reduced to WSTa and Cu, they show peaks at 40.3.3B and 5.43.3 in diffraction #i2θ (deg), respectively.

In the Fe-based soft magnetic alloy powder of the present invention, as described above, by making the crystal grains present in the alloy structure ultra-fine, the dependence of the soft magnetic properties on the heat treatment temperature is suppressed, Improves reproducibility of excellent soft magnetic properties.

That is, by making the grain size of the crystal grains ultra-fine, the magnetic anisotropy becomes smaller, which relaxes the H degree condition (heat treatment).

Further, essentially, the refinement of crystal grains improves the soft magnetic properties, and if the average crystal grain size exceeds 50 nm, the initial magnetic properties cannot be obtained. From the viewpoint of reducing the dependence of the soft magnetic properties on the heat treatment temperature, the average crystal grain size is preferably 20 nm or less. Note that the above average crystal grain size is a value obtained by measuring the maximum diameter of each crystal grain and averaging them.

Next, a method for producing the Fe-based soft magnetic alloy powder of the present invention.

I will explain about it.

First, a molten metal containing a molten Fe-based alloy and a ceramic material is produced. In order to produce the Fe-based soft magnetic alloy powder of the present invention described above, the composition of the molten metal is made to satisfy the composition of formula (I).

Such a molten metal is: (1) At the stage of producing a master alloy, a ceramic material is blended in the same way as other metal materials to produce a master alloy that satisfies the composition of formula (I) above, and the melting point is higher than the melting point of this master alloy. Heat to melt.

■ Prepare a master alloy with the composition of the above formula (I) except for X, mix this master alloy with a ceramic material so as to satisfy the composition of the above formula (I), and add this mixture to the above master alloy and ceramic material. Melt by heating above the melting point of the powder.

It is produced by methods such as.

Next, the above molten metal is subjected to atomization method, cavitation method,
A method for producing powder in an amorphous state by injection into a high-speed moving liquid, or simply.

Rapid cooling is performed by a known ultra-quenching method such as a roll method or a twin roll method.

Here, in the present invention, it is preferable to obtain a good amorphous state by the above-mentioned quenching step in order to obtain ultrafine crystal grains. Next, the amorphous ribbon or thin wire made brittle by heat treatment is crushed or cut to obtain a powder. The shape of the powder can be selected from various shapes depending on the purpose, such as plate, linear, spherical, flake, etc., but it is preferable that the major axis of the powder is 1 μm to 500 μm. Further, the aspect ratio (lengthwise axis l plate thickness) is preferably in the range of 5 to 15,000.

Thereafter, the amorphous quenched body is subjected to heat treatment at a temperature near or higher than the crystallization temperature of the quenched body to precipitate ultrafine crystal grains mainly composed of bcc-Fe solid solution.

The above heat treatment is performed by -50' with respect to the crystallization temperature of the rapidly cooled body.
It is possible to carry out within the range of C to +200'C. If the heat treatment temperature condition is lower than -50°C relative to the crystallization temperature, fine crystal grains will precipitate.

Moreover, if the temperature exceeds +2000C relative to the crystallization temperature, phases other than the bee-Fe solid solution tend to precipitate.

The Fe-based soft magnetic alloy powder that satisfies the desired soft magnetic properties under the wide range of heat treatment temperature conditions described above can be obtained because it is possible to ultra-fine the precipitated crystal grains as described above. This is one of the important features of the present invention. This makes it possible to obtain Fe-based soft magnetic alloy powder having excellent soft magnetic properties with good reproducibility. In addition, the actual set temperature is preferably in the range of -20°C to +150°C with respect to the crystallization temperature of the rapidly cooled body, taking into account uncertain factors such as temperature rise during heat treatment (heat generation due to crystallization). .

Note that the crystallization temperature in the present invention indicates a value measured using a differential scanning calorimeter at a temperature increase rate of 10 deg/min.

Further, the heat treatment time is appropriately set depending on the alloy composition used and the heat treatment temperature, but it is usually preferably in the range of 2 minutes to 24 hours. This is because if the heat treatment time is less than 2 minutes, it is difficult to sufficiently precipitate crystal grains, and if it exceeds 24 hours, phases other than the bcc-Fe solid solution tend to precipitate.

A more preferable heat treatment time is in the range of 5 minutes to 10 hours. Further, as the atmosphere during the heat treatment, various atmospheres can be used, such as an inert atmosphere such as nitrogen or argon, a reducing atmosphere such as vacuum or hydrogen, or air.

Note that the cooling after the above heat treatment may be rapid cooling or slow cooling, and is not particularly limited.

The density of the powder magnetic core using the Fe-based soft magnetic alloy powder having ultrafine crystal grains of the present invention is increased by press molding using an epoxy resin or phenol resin as a binder, or by explosive compression molding.

Furthermore, when molding using amorphous powder, heat treatment is performed after press molding using heat-resistant and electrically insulating materials such as water glass, inorganic polymers, and metal alkoxides as binders to improve properties. . When these binders and the powder used in the present invention are mixed and compression molded under pressure at a crystallization temperature of -50°C to +200°C for 2 minutes to 24 hours, the soft magnetic properties are improved.

In addition, in the cooling process after the above heat treatment, or after cooling, a magnetic field heat treatment is included in which a magnetic field is applied to the core made of Fe-based soft magnetic alloy powder in which fine crystal grains are not precipitated),
It is also possible to change the properties and provide magnetic properties suitable for the application. The magnetic field at this time may be either a direct current magnetic field or an alternating current magnetic field, and the direction of application of the magnetic field may be either parallel or perpendicular to the excitation direction, or may be a rotating magnetic field.

The Fe-based magnetomagnetic alloy powder core of the present invention has excellent soft magnetic properties in the high frequency range, so it can be used, for example, in high frequency transformers including those for high power, common mode choke coils, smooth choke coils, normal mode choke coils, high voltage It has excellent properties as a magnetic core for various sensors such as pulse noise filters and current sensors. Furthermore, by combining it with resin etc., it can also be applied to magnetic shielding, etc.

(Example) Examples of the present invention will be described below.

Example 1 A master alloy having a composition represented by the formula: Fe (Cu20)1Nb3Si14B9 was heated to 1350°C and melted,
A molten metal containing a molten Fe-based alloy and a ceramic material was produced. Next, this molten metal was rapidly cooled by water atomization to obtain an amorphous powder having an average particle size of 30 μm. The crystallization temperature of this powder (measured at a heating rate of 10 deg/min) is 507
The saturated Cidong density at °C was 13.2KG.

Subsequently, (A) the obtained powder was heat-treated at 580° C. for 1 hour in a vacuum to precipitate ultrafine crystal grains.

Further, (B) the rapidly cooled powder was heat-treated in a N2 atmosphere at 580° C. for 1 hour using a hot press to precipitate ultrafine crystal grains, thereby producing a powder magnetic core. Note that water glass was used as a binder.

Characteristic evaluation in Example 1(B) above will be described below.

In the above example, X-ray diffraction was performed on the powder before heat treatment (after quenching) of the powder magnetic core heat-treated at 580'C and on the ribbon after heat treatment and obtained as a powder magnetic core. . Figure 1 shows their X-ray diffraction patterns (before heat treatment:
Figure 1(a) and after heat treatment: Figure 1(b)).

As is clear from Figure 1, it was in an amorphous state before heat treatment, and after heat treatment at 580°C, it was in an amorphous state.
Diffraction lines of only the e-Fe solid solution are also observed. Diffraction lines based on regular gratings are also observed on the low angle side.

Also, from the half-width of the X-ray diffraction peak, the above 580°C
The crystal grain size of the powder magnetic core heat-treated was determined to be 9.4 nm. This value almost coincided with the value measured using a transmission electron microscope. Note that the crystal grain size in the comparative example was 16 nm. Further, the area ratio occupied by fine crystal grains in the alloy structure was determined from an enlarged image (200,000 times) with a transmission electron microscope, and was found to be 90%.

The coercive force of this sample is 0.0200e, and the iron loss is:
Using a U function needle, frequency 100KHz, magnetic flux density 2K
When measured under G conditions, a low value of 620 (mW/cc) was obtained.

Moreover, these characteristics were also the same in the soft magnetic alloy powder shown in (A).

Example 2 Amorphous powders having the respective compositions shown in Table 1 were rapidly cooled by a single roll method, then heat treated at 400° C. for 1 hour to make them brittle, and then ground using a vibration mill to produce powders. Next, heat treatment was performed in a N2 atmosphere for 1.5 hours at a temperature of +60° C. relative to the crystallization temperature of each composition.

Further, a powder magnetic core was produced in the same manner as in Example 1 using a heat-resistant inorganic polymer as a binder.

The properties of each of the Fe-based soft magnetic alloy powders and dust cores thus obtained were determined in the same manner as in Example 1. The measurement results are shown in Table 1 together with the measurement results of Sendust powder and powder magnetic core.

(Margin below) Table 1 ``l: Measured from the half width of the X-ray diffraction peak.

Umbrella 2: Measured under the conditions of 100kHz and 2kG.

(Continued from Table 1) As is clear from the measurement results in Table 1, the Fe-based soft magnetic alloy powder according to Example 2 has extremely fine crystal grains.
It can be seen that low iron loss and low coercive force are obtained.

Example 3 Amorphous powders having the respective compositions shown in Table 2 were produced by cavitation, and heat treatment was performed in the air for 2 hours at a temperature of +40° C. relative to the crystallization temperature of each powder composition. Further, a powder magnetic core was produced in the same manner as in Example 1 using an epoxy resin as a binder.

The properties of each of the Fe-based soft magnetic alloy powders and dust cores thus obtained were determined in the same manner as in Example 1. The measurement results are shown in Table 2 together with the measurement results of Sendust core.

As is clear from the measurement results in Table 2, the Fe-based soft magnetic alloy powder and powder magnetic core according to Example 3 have extremely fine crystal grains, and low iron loss and low coercive force are obtained. I understand.

Example 4 Amorphous powders were produced by injecting molten metals having the respective compositions shown in Table 3 into a liquid moving at high speed, and the crystallization temperatures of each of these powders and powder magnetic cores were determined.

A heat treatment was performed at a temperature of +60° C. for 2 hours in an N2 atmosphere. Further, a powder magnetic core was produced in the same manner as in Example 1 using an epoxy resin as a binder.

The properties of each of the Fe-based soft magnetic alloy powders and dust cores thus obtained were determined in the same manner as in Example 1. The measurement results are shown in Table 3 together with the measurement results of Sendust core.

(Left below) (J Togen 0) As is clear from the measurement results in Table 3, the Fe-based soft magnetic alloy powder and dust core according to Example 4 have extremely fine crystal grains and have low iron loss. , it can be seen that a low coercive force is obtained.

[Effects of the Invention] As explained above, according to the present invention, an Fe-based soft magnetic alloy powder that satisfies low iron loss, high saturation magnetic flux density, and low magnetostriction in a high frequency range, is inexpensive, and has excellent versatility. It becomes possible to provide Since the soft magnetic properties of the Fe-based soft magnetic alloy powder of the present invention can be obtained under a wide range of heat treatment conditions, stable supply is possible, and it can be used for toroidal or various switching power supply magnetic parts, magnetic heads, various sensors, etc. Effective for magnetic shielding, etc.

[Brief explanation of the drawing]

FIG. 1(a) is a diagram showing the X-ray diffraction pattern of the alloy powder and dust core used in the present invention before heat treatment, and FIG. 1(b)
1 is a diagram showing an X-ray diffraction pattern when the alloy powder and powder magnetic core used in the present invention are subjected to optimal heat treatment.

Claims (1)

[Claims] (1) General formula: Fe_1_0_0_-_a_-_b_-_c_-_d_
-_e_-_fX_aM_bM'_cA_dSi_eZ
__f (wherein,
i, Zr, Hf, V, Nb, Ta, Cr, Mo and W
M' is Mn, a platinum group element, Ag, Au, Zn, Al, Ga, In, Sn.
, at least one element selected from rare earth elements, A
is at least one element selected from Co and Ni, and Z is at least one element selected from B, C, P and Ge.
represents a species element, and a, b, c, d, e, and f are numbers that satisfy the following formula. However, all numbers in the formula below indicate at%. 0.1≦a≦5 0.1≦b≦10 0≦c≦10 0≦d≦40 5≦e≦25 2≦f≦20 12≦e+f≦30. ) and has a composition substantially represented by
An Fe-based soft magnetic alloy powder characterized in that 0% or more of the powder is composed of fine crystal grains. (2) In the Fe-based soft magnetic alloy powder according to claim 1,
An Fe-based soft magnetic alloy powder, wherein the average diameter of the fine crystal grains is 50 nm or less. (3) In the Fe-based soft magnetic alloy powder according to claim 1,
The Fe-based soft magnetic alloy powder is characterized in that the fine crystal grains are mainly composed of a bcc-Fe solid solution, and at least a portion thereof is an ordered phase. (4) In the Fe-based soft magnetic alloy powder according to claim 1,
The X is CuO, Cu_2O, SnO_2, Bi_2
O_3, WO_3, Ta_2O_5, Nb_2O_5,
An Fe-based soft magnetic alloy powder characterized by being at least one oxide selected from MoO_3, MnO, GeO_2, Ga_2O_3 and CdO. (5) A step of rapidly cooling a molten metal containing a molten Fe-based alloy and a ceramic material, and heat-treating the quenched body obtained in the quenching step at a temperature near or higher than the crystallization temperature of the quenched body. A method for producing an Fe-based soft magnetic alloy powder, comprising the steps of: precipitating fine crystal grains within the structure. (6) In the method for producing Fe-based soft magnetic alloy powder according to claim 5, the composition of the molten metal has the general formula: Fe_1_0_0_-_a_-_b_-_c_-_d_
-_e_-_fX_aM_bM'_cA_dSi_eZ
__f (wherein,
i, Zr, Hf, V, Nb, Ta, Cr, Mo and W
M' is Mn, a platinum group element, Ag, Au, Zn, Al, Ga, In, Sn.
, at least one element selected from rare earth elements, A
is at least one element selected from Co and Ni, and Z is at least one element selected from B, C, P and Ge.
represents a species element, and a, b, c, d, e, and f are numbers that satisfy the following formula. However, all numbers in the formula below indicate at%. 0.1≦a≦5 0.1≦b≦10 0≦c≦10 0≦d≦40 5≦e≦25 2≦f≦20 12≦e+f≦30. ) A method for producing a Fe-based soft magnetic alloy powder, characterized in that it is substantially represented by: (7) In the method for producing a Fe-based soft magnetic alloy powder according to claim 5, the heat treatment is performed at -5 degrees with respect to the crystallization temperature measured at a heating temperature of the rapidly solidified body of 10 deg/min.
A method for producing Fe-based soft magnetic alloy powder, characterized in that it is carried out at a temperature in the range of 0°C to +200°C. (8) The method for producing Fe-based soft magnetic alloy powder according to claim 5, characterized in that the heat treatment precipitates fine crystal grains with an average grain size of 50 nm or less so as to account for 50% or more of the structure in terms of area ratio. A method for producing a Fe-based soft magnetic alloy powder. (9) A powder magnetic core, characterized in that the Fe-based soft magnetic alloy powder according to claim 1 is molded through an electrical insulator.