JPH0447624U - - Google Patents

Info

Publication number
JPH0447624U
JPH0447624U JP8789290U JP8789290U JPH0447624U JP H0447624 U JPH0447624 U JP H0447624U JP 8789290 U JP8789290 U JP 8789290U JP 8789290 U JP8789290 U JP 8789290U JP H0447624 U JPH0447624 U JP H0447624U
Authority
JP
Japan
Prior art keywords
flow rate
detection membrane
pipe
high voltage
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8789290U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8789290U priority Critical patent/JPH0447624U/ja
Publication of JPH0447624U publication Critical patent/JPH0447624U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案に係る流量計の一実施例を示す
縦断面図、第2図は第1図のアクチユエータ拡開
状態を示す縦断面図、第3図は従来の流量計を示
す断面図である。 1……配管、2……開口、3……検出膜、8…
…アクチユエータ、10……演算器、12……流
量切換器、13……昇圧器。
Fig. 1 is a longitudinal sectional view showing an embodiment of the flowmeter according to the present invention, Fig. 2 is a longitudinal sectional view showing the actuator in Fig. 1 in an expanded state, and Fig. 3 is a sectional view showing a conventional flowmeter. It is. 1... Piping, 2... Opening, 3... Detection membrane, 8...
... Actuator, 10 ... Arithmetic unit, 12 ... Flow rate switch, 13 ... Booster.

Claims (1)

【実用新案登録請求の範囲】 配管の内部を流れる流体の流量を測定するため
の流量計において、 上記配管の内部に複数の開口を有する感圧素子
からなる薄板状の検出膜を配設し、この検出膜の
上流側に高電圧を印加することにより拡開変形さ
れるバイモルフ型のアクチユエータを配設し、上
記検出膜の歪みにより生じる電圧を入力して所定
の演算式に基づいて流量を演算する演算回路と、
この演算回路により算出された流量値が一定値以
上になつた時に、上記アクチユエータに高電圧を
印加する流量切換回路とを有する制御回路を配設
したことを特徴とする流量計。
[Claim for Utility Model Registration] A flowmeter for measuring the flow rate of fluid flowing inside a pipe, in which a thin plate-like detection membrane made of a pressure-sensitive element having a plurality of openings is disposed inside the pipe, A bimorph actuator that expands and deforms by applying a high voltage is installed on the upstream side of this detection membrane, and the flow rate is calculated based on a predetermined calculation formula by inputting the voltage generated by the distortion of the detection membrane. an arithmetic circuit that performs
A flow meter comprising a control circuit having a flow rate switching circuit that applies a high voltage to the actuator when the flow rate value calculated by the arithmetic circuit exceeds a certain value.
JP8789290U 1990-08-24 1990-08-24 Pending JPH0447624U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8789290U JPH0447624U (en) 1990-08-24 1990-08-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8789290U JPH0447624U (en) 1990-08-24 1990-08-24

Publications (1)

Publication Number Publication Date
JPH0447624U true JPH0447624U (en) 1992-04-22

Family

ID=31820647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8789290U Pending JPH0447624U (en) 1990-08-24 1990-08-24

Country Status (1)

Country Link
JP (1) JPH0447624U (en)

Similar Documents

Publication Publication Date Title
Bae et al. A bidirectional electrostatic microvalve with microsecond switching performance
ATE314596T1 (en) VALVE
JPH0447624U (en)
JP3818547B2 (en) Mass flow controller
JPS62102815U (en)
US3721257A (en) Electro-fluidic signal converter
JPS6310858Y2 (en)
JP4012306B2 (en) Pressure flow control device
JPS6126123U (en) fluidic flow meter
JPS5821820U (en) Bypass type fluidic flowmeter
JPS6434515U (en)
JPH0464667U (en)
SU855399A1 (en) Jet-type liquid and gas flow meter
JPS61119722U (en)
JPS60184475U (en) Temperature compensated flow control valve
JPH0547378Y2 (en)
JPS6161734U (en)
JPS6318072B2 (en)
JPS6010315U (en) electric valve control device
JPH0390312U (en)
JPS62158317U (en)
JPH06114779A (en) Fluid type grasping device
JPS6082741A (en) Water heating device
JPS6328976U (en)
JPH05187575A (en) Pilot valve