JPH0447157B2 - - Google Patents
Info
- Publication number
- JPH0447157B2 JPH0447157B2 JP60291884A JP29188485A JPH0447157B2 JP H0447157 B2 JPH0447157 B2 JP H0447157B2 JP 60291884 A JP60291884 A JP 60291884A JP 29188485 A JP29188485 A JP 29188485A JP H0447157 B2 JPH0447157 B2 JP H0447157B2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- pump
- gas
- stage pump
- rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000006837 decompression Effects 0.000 claims description 12
- 238000007789 sealing Methods 0.000 claims description 4
- 239000003921 oil Substances 0.000 description 19
- 230000000694 effects Effects 0.000 description 5
- 239000010720 hydraulic oil Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000007906 compression Methods 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
- F04C27/009—Shaft sealings specially adapted for pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
- F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
- F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
- F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
- F04C18/3442—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation the surfaces of the inner and outer member, forming the inlet and outlet opening
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、２段真空ポンプの１段側ポンプロー
タと２段側ポンプロータとを連結する回転軸の軸
封装置に関し、特に、２段ガスバラストポンプに
用いられる。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a shaft sealing device for a rotating shaft that connects a first-stage pump rotor and a second-stage pump rotor of a two-stage vacuum pump. Used in gas ballast pumps.
（従来の技術）
従来の２段式油回転真空ポンプは、第３図に示
すように、ポンプケーシング１のシリンダ室１
ａ，１ｂ内に偏心して、１段側（高真空側）の第
１ロータ２と２段側（低真空側）の第２ロータ３
が共通の回転軸４によつて取付けられ、１台のモ
ータで駆動されるようになつている。そして１段
側ポンプの吸気口５は被排気容器に接続され、同
排気口６は、第４図の展開図にも示すように、２
段側ポンプの吸気口７に通路８を介して接続さ
れ、２段側ポンプの排気口９は、図示しないばね
で押圧された排気弁１０を経て外気に解放されて
いる。(Prior Art) A conventional two-stage oil rotary vacuum pump has a cylinder chamber 1 of a pump casing 1, as shown in FIG.
a, 1b, the first rotor 2 on the first stage side (high vacuum side) and the second rotor 3 on the second stage side (low vacuum side)
are attached to a common rotating shaft 4 and driven by one motor. The intake port 5 of the first-stage pump is connected to the evacuated container, and the exhaust port 6 is connected to the 2-stage pump as shown in the exploded view of FIG.
It is connected to the intake port 7 of the stage side pump via a passage 8, and the exhaust port 9 of the second stage side pump is opened to the outside air through an exhaust valve 10 pressed by a spring (not shown).
上記のように、２段真空ポンプでは、真空容器
からポンプ外界へ至るまでの間を多数の空間で仕
切られており、各仕切部はそれぞれ油でシールさ
れており、これらの各シール部によつて、仕切ら
れた部分の圧力差が１段式ポンプにおけるよりも
少なくて済むので、それだけ漏れにくい構造にな
つている。 As mentioned above, in a two-stage vacuum pump, the space from the vacuum container to the outside of the pump is partitioned into many spaces, and each partition is sealed with oil. Therefore, the pressure difference between the partitioned parts is smaller than in a single-stage pump, so the structure is less likely to leak.
また、１段側ポンプの作動油を２段側ポンプか
ら給油させるようにすることによつて、１段側ポ
ンプでは、脱気された油を作動油とすることがで
きる。更に、１段側ポンプの排気弁近傍の空間は
２段側ポンプの吸気口と連通しているので１段側
ポンプの死容積（デツドボリユーム）は生じな
い。そのため、該死容積をなくして排気効率を良
くするために通常用いられる油が不要となる。従
つて、１段側ポンプの作動油量を徹底的に削減す
ることができる。これらの特徴は、真空ポンプの
到達圧力を引き下げるために有効である。 Further, by supplying the hydraulic oil for the first-stage pump from the second-stage pump, the first-stage pump can use deaerated oil as the hydraulic oil. Furthermore, since the space near the exhaust valve of the first-stage pump communicates with the intake port of the second-stage pump, no dead volume is generated in the first-stage pump. Therefore, oil, which is normally used to eliminate the dead volume and improve exhaust efficiency, becomes unnecessary. Therefore, the amount of hydraulic oil for the first-stage pump can be completely reduced. These features are effective for lowering the ultimate pressure of the vacuum pump.
しかしながら、排気される空気の中に水蒸気な
どの凝縮し易い蒸気が多く含まれている場合、２
段側ポンプをガスバラストポンプ即ち、油回転ポ
ンプが圧縮工程にかかつた時、適量の空気をポン
プ内に入れて、排気している凝縮性の蒸気が凝縮
して油と懸濁してしまわないうちにポンプ外に追
い出すようにした真空ポンプとして使用すること
が行われているが、この場合、第４図に示すよう
に、２段側ポンプの排気口９の手前に設けられた
ガスバラストバルブ１１が開かれると、ロータ３
が矢印方向に回転して、ベーン３ａによつてポン
プ吸入空間が吸気口７つまり１段側ポンプの排気
側と遮断された段階で、空気が外からポンプ室
（部屋）Ｆに流入し、ロータ３が更に回転したと
き、排気弁１０を押し上げて空気と共に水蒸気を
排出させるようになされている。 However, if the exhausted air contains a lot of steam that easily condenses, such as water vapor,
The stage side pump is a gas ballast pump, i.e., when the oil rotary pump is in the compression process, an appropriate amount of air is introduced into the pump to prevent the condensable vapor being exhausted from condensing and becoming suspended in the oil. In some cases, the pump is used as a vacuum pump that exhausts the air outside the pump, but in this case, as shown in Figure 4, the gas ballast valve installed in front of the exhaust port 9 of the second-stage pump 11 is opened, the rotor 3
rotates in the direction of the arrow, and when the vane 3a blocks the pump suction space from the intake port 7, that is, the exhaust side of the first stage pump, air flows into the pump chamber (chamber) F from the outside, and the rotor 3 rotates further, the exhaust valve 10 is pushed up to exhaust water vapor along with the air.
この場合、上記の室Ｆは、常に大気圧のガスが
存在することになるため、２段側ポンプから１段
側ポンプへ回転軸４を伝つてガスが逆流する。こ
の逆流を防ぐために従来は、回転軸４の途中にオ
イルシールを設けていた。 In this case, since gas at atmospheric pressure always exists in the chamber F, the gas flows backward from the second-stage pump to the first-stage pump along the rotating shaft 4. In order to prevent this backflow, an oil seal has conventionally been provided in the middle of the rotating shaft 4.
（発明が解決しようとする問題点）
上記した従来の２段真空ポンプにおいては、両
ロータを連結する回転軸に沿う逆流に対して、該
回転軸上にオイルシールを取付けることによつて
対策されて来た。(Problems to be Solved by the Invention) In the conventional two-stage vacuum pump described above, counterflow along the rotating shaft connecting both rotors is countered by installing an oil seal on the rotating shaft. I came.
そのため、回転軸部分を伝つて軸受を潤滑しつ
つ２段側から１段側へ供給される作動油まで遮断
されてしまい、１段側ポンプへの給油には特別な
配慮と複雑な構造を必要として来た。また、真空
ポンプには特にオイルシールを設けるスペースを
１段側ポンプと２段側ポンプの間に必要とし、そ
のため真空ポンプの小型化を妨げて来た。更にま
た、回転軸とオイルリツプとの摺動によつて機械
損失や発熱の原因となつて好ましくないという各
問題点があつた。 As a result, the hydraulic oil that is supplied from the second stage side to the first stage side while lubricating the bearing through the rotating shaft is also cut off, requiring special consideration and a complicated structure to supply oil to the first stage pump. I came as. Further, vacuum pumps especially require a space for providing an oil seal between the first-stage pump and the second-stage pump, which has hindered miniaturization of vacuum pumps. Furthermore, there are various problems in that sliding between the rotating shaft and the oil lip causes mechanical loss and heat generation, which is undesirable.
（問題点を解決するための手段）
本発明は、上記した従来技術の問題点を解決す
るために、２段真空ポンプにおいて、１段側ロー
タと２段側ロータを連結する回転軸上に、２段側
ポンプの吸気側へ連通された減圧室を設けると共
に、２段側ポンプの排気口の手前にガスバラスト
バルブを設けたことを特徴としている。(Means for Solving the Problems) In order to solve the problems of the prior art described above, the present invention provides, in a two-stage vacuum pump, a rotary shaft that connects the first-stage rotor and the second-stage rotor. It is characterized by providing a decompression chamber communicating with the intake side of the second-stage pump, as well as providing a gas ballast valve in front of the exhaust port of the second-stage pump.
（作用）
本発明は、上記にように構成されているので、
２段側ポンプのガスバラストバルブを開けてガス
バラスト作用をさせているとき、２段側ポンプの
排気弁近傍の室に大気圧のガスが進入し、２段側
ポンプの軸部分に微少な漏れによるガスによつて
圧力が上昇し、該ガスは、１段側軸部分へ差圧に
よつて流れようとするが、途中に設けられた２段
側ポンプの吸気側に連なる減圧室によつて２段側
ポンプに引き戻され、１段側ポンプへのガスの逆
流は著しく軽減される。(Function) Since the present invention is configured as described above,
When the gas ballast valve of the second-stage pump is opened to perform gas ballast action, atmospheric pressure gas enters the chamber near the exhaust valve of the second-stage pump, causing a small leak in the shaft of the second-stage pump. The pressure rises due to the gas generated by the pump, and the gas tries to flow to the first-stage side shaft part due to the differential pressure, but due to the decompression chamber connected to the intake side of the second-stage pump installed in the middle, The gas is drawn back to the second-stage pump, and the backflow of gas to the first-stage pump is significantly reduced.
（実施例）
次に、本発明の実施例を図面に基づいて説明す
る。(Example) Next, an example of the present invention will be described based on the drawings.
第１図は、本発明の一実施例を示す減圧軸封装
置を備えた２段真空ポンプの概略側断面図であ
り、第２図は、第１図における１段側及び２段側
の両ポンプを左右に展開して示した説明用図面で
あつて、図中、第３図及び第４図に記載した符号
と同一のものは、同一ないし同類部分を示すもの
とし、これらの部分については再度の説明を省略
する。図において、１段側の第１ロータ２と２段
側の第２ロータ３が共通の回転軸４に直結され、
１段側ポンプの排気口６と２段側ポンプの吸気口
７は通路８で接続されている点は、従来のもの
（第３図）と変りはないが、本実施例では、第１
及び第２の両ロータを連結する回転軸４の途中
に、上記通路８に連通された減圧室２０が設けら
れている。 FIG. 1 is a schematic side sectional view of a two-stage vacuum pump equipped with a decompression shaft sealing device showing one embodiment of the present invention, and FIG. 2 shows both the first-stage side and second-stage side in FIG. This is an explanatory drawing showing the pump expanded from side to side, and the same reference numerals as those in FIGS. 3 and 4 indicate the same or similar parts, and these parts are Repeated explanation will be omitted. In the figure, a first rotor 2 on the first stage side and a second rotor 3 on the second stage side are directly connected to a common rotating shaft 4,
The point that the exhaust port 6 of the first-stage pump and the intake port 7 of the second-stage pump are connected by a passage 8 is the same as in the conventional system (Fig. 3), but in this embodiment, the first stage pump
A decompression chamber 20 that communicates with the passage 8 is provided in the middle of the rotating shaft 4 that connects both the second and second rotors.
次に作用について説明する。該真空ポンプが作
動されると、２段側ポンプの軸部分のガス圧力
は、第２図のＤ，Ｅ，Ｆの各室の平均的な圧力で
あると考えられ、また１段側ポンプの軸部分のガ
ス圧力は、Ａ，Ｂ，Ｃの各部屋の平均的な圧力で
あると考えられる。そして真空ポンプが到達圧力
に達すると、Ａ〜Ｆの各室はほぼ到達圧力に近い
圧力となると考えられる。 Next, the effect will be explained. When the vacuum pump is operated, the gas pressure at the shaft portion of the second-stage pump is considered to be the average pressure of each chamber D, E, and F in Figure 2, and the gas pressure of the first-stage pump is The gas pressure in the shaft portion is considered to be the average pressure in each chamber A, B, and C. When the vacuum pump reaches the ultimate pressure, it is considered that each chamber A to F has a pressure substantially close to the ultimate pressure.
いま、ガスバラストバルブ１１を開けると、室
Ｆには大気圧のガスが充満する。この時、２段側
ポンプの軸部分は室Ｆからの微少な漏れによつて
ガスによる圧力上昇がある。このガスによる圧力
上昇のため、２段側軸部分のガスは、１段側軸部
分へ差圧によつて流れようとするが、途中で、２
段側ポンプの吸気側の室Ｄと連通された減圧室Ｇ
に到達し、ここでガスは、２段側ポンプによつて
引き戻されてしまう。 Now, when the gas ballast valve 11 is opened, the chamber F is filled with gas at atmospheric pressure. At this time, the pressure in the shaft portion of the second-stage pump increases due to gas due to a slight leak from chamber F. Due to the pressure increase caused by this gas, the gas in the second-stage side shaft portion attempts to flow to the first-stage side shaft portion due to the differential pressure, but on the way,
Decompression chamber G communicating with chamber D on the intake side of the stage side pump
, at which point the gas is drawn back by the second stage pump.
このようにして、１段側ポンプへのガスの逆流
は著しく軽減される。 In this way, backflow of gas to the first stage pump is significantly reduced.
この実施例によれば、従来、１段側ポンプと２
段側ポンプの間の軸封のために用いられていたオ
イルシールを省くことができるので、真空ポンプ
を小型化することに役立つばかりでなく、１段側
及び２段側の両ロータを連結する回転軸にはオイ
ルシールのような障害物が設けられていないの
で、２段側ポンプから１段側ポンプへの給油に
は、軸受部に沿つた経路を使うことができる。従
つて、潤滑系統を簡略化することができる。 According to this embodiment, conventionally, the first stage side pump and the second stage side pump
Since the oil seal used to seal the shaft between the stage side pumps can be omitted, this not only helps in downsizing the vacuum pump, but also connects both the first and second stage side rotors. Since there is no obstacle such as an oil seal on the rotating shaft, a path along the bearing can be used to supply oil from the second-stage pump to the first-stage pump. Therefore, the lubrication system can be simplified.
なお、上記実施例において、回転軸４上に設け
られる減圧室２０を、１段側ポンプの排気口６と
２段側ポンプの吸気口７とを連通する通路８を介
して、２段側ポンプの吸気側に連通させるように
した構造について説明したが、減圧室２０を直
接、２段側ポンプの吸気側に連通させるようにす
ることも可能である。 In the above embodiment, the decompression chamber 20 provided on the rotating shaft 4 is connected to the second-stage pump via the passage 8 that communicates the exhaust port 6 of the first-stage pump with the intake port 7 of the second-stage pump. Although the structure has been described in which the decompression chamber 20 is communicated directly with the intake side of the second-stage pump, it is also possible to directly communicate the decompression chamber 20 with the intake side of the second-stage pump.
（発明の効果）
以上説明したように、本発明によれば、１段側
ロータと２段側ロータを連結する回転軸上に、２
段側ポンプの吸気側へ連通された減圧室を設ける
と共に、２段側ポンプの排気口の手前にガスバラ
ストバルブを設けたことにより、ガスバラスト効
果、即ち、排気される空気の中に水蒸気などの凝
縮し易い蒸気が多く含まれている場合２段側ポン
プの排気口の手前に設けられたガスバラストバル
ブを開き、当該油回転ポンプが圧縮工程にかかつ
た時適量の空気をポンプ内に入れて、排気してい
る凝縮性の蒸気が凝縮して油と懸濁してしまわな
いうちにポンプ外に追い出すことにより到達圧力
を高めるというガスバラスト効果を奏すると共
に、上記にように２段側ポンプの排気弁近傍の室
に進入した大気圧のガスが２段側ポンプの軸部分
に漏れて圧力が上昇し１段側軸部分へ差圧によつ
て逆流しようとするガスを、１段側ロータと２段
側ロータを連結する回転軸上に設けられた減圧室
によつて捕え、吸気側へ戻して上記の逆流を防ぐ
ことができるという、ガスバラストポンプに特有
の効果を奏することができる。(Effects of the Invention) As explained above, according to the present invention, two
By providing a depressurization chamber that communicates with the intake side of the stage side pump and providing a gas ballast valve in front of the exhaust port of the second stage pump, a gas ballast effect is created, that is, water vapor etc. are removed from the exhausted air. If there is a large amount of vapor that easily condenses, open the gas ballast valve installed in front of the exhaust port of the second stage pump, and when the oil rotary pump starts the compression process, an appropriate amount of air will be pumped into the pump. It has a gas ballast effect that increases the ultimate pressure by expelling condensable steam from the pump before it condenses and becomes suspended in the oil. Atmospheric pressure gas that entered the chamber near the exhaust valve leaks to the shaft of the second-stage pump, the pressure rises, and the gas that attempts to flow back to the first-stage shaft due to the differential pressure is transferred to the first-stage rotor. The gas ballast pump can produce an effect unique to gas ballast pumps in that it can be captured by a decompression chamber provided on the rotating shaft connecting the second-stage rotor and returned to the intake side to prevent the above-mentioned backflow.
また、従来、１段側ポンプと２段側ポンプの間
の軸封のために用いられていたオイルシールを省
くことができるので、部品点数やコストが軽減で
き、ポンプを小型化することができる。 Additionally, since the oil seal that was conventionally used to seal the shaft between the first-stage pump and the second-stage pump can be omitted, the number of parts and costs can be reduced, and the pump can be made smaller. .
また、１段側及び２段側の両ロータを連結する
回転軸にはオイルシールのような障害物が設けら
れていないので、２段側ポンプから１段側ポンプ
への給油には、軸受部に沿つた経路を使うことが
できる。従つて、潤滑系統を簡略化することがで
きる。 In addition, since there is no obstacle such as an oil seal on the rotating shaft that connects both the first and second stage rotors, the bearing must be used to supply oil from the second stage pump to the first stage pump. You can use the route along Therefore, the lubrication system can be simplified.
第１図は本発明の一実施例を示す減圧軸封装置
を備えた２段真空ポンプの概略側断面図、第２図
は第１図の１段側及び２段側の両ポンプを左右に
展開して示した説明用図面、第３図及び第４図は
従来のものを示す第１図及び第２図と同様の図面
である。
２……１段側ポンプの第１ロータ、３……２段
側ポンプの第２ロータ、４……回転軸、６……１
段側ポンプの排気口、７……２段側ポンプの吸気
口、８……通路、１１……ガスバラストバルブ、
２０……減圧室。
Fig. 1 is a schematic side sectional view of a two-stage vacuum pump equipped with a decompression shaft sealing device showing an embodiment of the present invention, and Fig. 2 shows both the first-stage and second-stage pumps in Fig. The expanded explanatory drawings, FIGS. 3 and 4, are similar to FIGS. 1 and 2 showing the conventional structure. 2...First rotor of the first-stage pump, 3...Second rotor of the second-stage pump, 4...Rotating shaft, 6...1
Exhaust port of the stage side pump, 7... Intake port of the second stage side pump, 8... Passage, 11... Gas ballast valve,
20...Decompression chamber.
Claims (1)
段側ロータを連結する回転軸上に、２段側ポンプ
の吸気側へ連通された減圧室を設けると共に、２
段側ポンプの排気口の手前にガスバラストバルブ
を設けたことを特徴とする２段ガスバラストポン
プの減圧軸封装置。1 In a two-stage vacuum pump, the first-stage rotor and the second
A decompression chamber communicating with the intake side of the second-stage pump is provided on the rotating shaft connecting the stage-side rotor, and
A pressure reducing shaft sealing device for a two-stage gas ballast pump, characterized in that a gas ballast valve is provided in front of the exhaust port of the stage-side pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29188485A JPS62153592A (en) | 1985-12-26 | 1985-12-26 | Pressure reducing shaft seal device for two stage vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29188485A JPS62153592A (en) | 1985-12-26 | 1985-12-26 | Pressure reducing shaft seal device for two stage vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62153592A JPS62153592A (en) | 1987-07-08 |
| JPH0447157B2 true JPH0447157B2 (en) | 1992-08-03 |
Family
ID=17774689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29188485A Granted JPS62153592A (en) | 1985-12-26 | 1985-12-26 | Pressure reducing shaft seal device for two stage vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62153592A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0810101B2 (en) * | 1991-02-04 | 1996-01-31 | ホシザキ電機株式会社 | Ice machine |
| JPH0654990U (en) * | 1991-05-20 | 1994-07-26 | 日研システム株式会社 | Device for connecting functional parts |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6217389A (en) * | 1985-05-30 | 1987-01-26 | ザ ビ−オ−シ− グル−プ ピ−エルシ− | Machine pump |
-
1985
- 1985-12-26 JP JP29188485A patent/JPS62153592A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6217389A (en) * | 1985-05-30 | 1987-01-26 | ザ ビ−オ−シ− グル−プ ピ−エルシ− | Machine pump |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62153592A (en) | 1987-07-08 |
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|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |