JPH0446347U - - Google Patents

Info

Publication number

JPH0446347U

JPH0446347U JP8874090U JP8874090U JPH0446347U JP H0446347 U JPH0446347 U JP H0446347U JP 8874090 U JP8874090 U JP 8874090U JP 8874090 U JP8874090 U JP 8874090U JP H0446347 U JPH0446347 U JP H0446347U

Authority

JP

Japan

Prior art keywords

sample chamber

chamber

preliminary

exhaust system

gate valve

Prior art date

1990-08-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010894 electron beam technology Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1

Cited By (3)