JPH0445712B2 - - Google Patents
Info
- Publication number
- JPH0445712B2 JPH0445712B2 JP61134734A JP13473486A JPH0445712B2 JP H0445712 B2 JPH0445712 B2 JP H0445712B2 JP 61134734 A JP61134734 A JP 61134734A JP 13473486 A JP13473486 A JP 13473486A JP H0445712 B2 JPH0445712 B2 JP H0445712B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- flow path
- block
- gas
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 238000009434 installation Methods 0.000 claims description 10
- 238000005406 washing Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 71
- 239000012159 carrier gas Substances 0.000 description 8
- 238000010276 construction Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 150000002902 organometallic compounds Chemical class 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000011010 flushing procedure Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- IGOGAEYHSPSTHS-UHFFFAOYSA-N dimethylgallium Chemical compound C[Ga]C IGOGAEYHSPSTHS-UHFFFAOYSA-N 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Valve Housings (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US74331785A | 1985-06-10 | 1985-06-10 | |
| US743317 | 1985-06-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS622081A JPS622081A (ja) | 1987-01-08 |
| JPH0445712B2 true JPH0445712B2 (fr) | 1992-07-27 |
Family
ID=24988332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13473486A Granted JPS622081A (ja) | 1985-06-10 | 1986-06-10 | モジユ−ル式ガス取扱装置 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS622081A (fr) |
| GB (1) | GB2176270B (fr) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4892115A (en) * | 1988-06-16 | 1990-01-09 | Continental Can Company, Inc. | Control valve assembly |
| FR2670270B1 (fr) * | 1990-12-05 | 1993-04-02 | Spirax Sarco | Poste de purge monobloc a robinets d'isolement incorpores. |
| US5163475A (en) * | 1991-11-26 | 1992-11-17 | Praxair Technology, Inc. | Gas delivery panels |
| DE4324867A1 (de) * | 1993-07-23 | 1995-01-26 | Roemer J C Avs Gmbh | Kugelhahn, Verteilergehäuse und modulares Bausystem mit Kugelhähnen |
| US6293310B1 (en) * | 1996-10-30 | 2001-09-25 | Unit Instruments, Inc. | Gas panel |
| US5992463A (en) * | 1996-10-30 | 1999-11-30 | Unit Instruments, Inc. | Gas panel |
| ATE375613T1 (de) * | 1999-08-23 | 2007-10-15 | Jerry Moscovitch | Universelle schnellbefestigungsvorrichtung für einen lcd monitor |
| JP5213341B2 (ja) * | 2007-03-20 | 2013-06-19 | 東京エレクトロン株式会社 | 気化器，気化モジュール，成膜装置 |
| US11091837B2 (en) * | 2016-10-24 | 2021-08-17 | Fujikin Incorporated | Fluid control system and product manufacturing method using fluid control system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5054923A (fr) * | 1973-09-14 | 1975-05-14 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1062506B (de) * | 1956-04-09 | 1959-07-30 | William Carls | Anschlusssockel fuer eine Vielzahl von Steuerventilen fuer druckmittelbetaetigte Arbeitszylinder |
| US3171435A (en) * | 1961-12-05 | 1965-03-02 | Parker Hannifin Corp | Solenoid operated valve assembly |
| US3538947A (en) * | 1967-11-27 | 1970-11-10 | Teldix Gmbh | Multiple valve araangement |
| DE1775516C3 (de) * | 1968-08-16 | 1975-10-02 | Basf Ag, 6700 Ludwigshafen | Mischventil für Kunststoff-Gießmaschinen |
| GB1512255A (en) * | 1975-07-04 | 1978-05-24 | Schwelm & Towler Hydraulics | Hydraulic machine control |
| US4078574A (en) * | 1976-10-22 | 1978-03-14 | Modular Controls Corporation | Modular control valve |
| GB2053422A (en) * | 1979-05-12 | 1981-02-04 | Gkn Sankey Ltd | Valve block |
-
1986
- 1986-06-10 JP JP13473486A patent/JPS622081A/ja active Granted
- 1986-06-10 GB GB8614112A patent/GB2176270B/en not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5054923A (fr) * | 1973-09-14 | 1975-05-14 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS622081A (ja) | 1987-01-08 |
| GB2176270B (en) | 1989-08-23 |
| GB8614112D0 (en) | 1986-07-16 |
| GB2176270A (en) | 1986-12-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4714091A (en) | Modular gas handling apparatus | |
| US6039360A (en) | Couplings for fluid controllers | |
| KR100538130B1 (ko) | 모듈형 표면 실장 매니폴드 | |
| US5605179A (en) | Integrated gas panel | |
| US7225835B2 (en) | Modular substrate gas panel having manifold connections in a common plane | |
| US5836355A (en) | Building blocks for integrated gas panel | |
| US6302141B1 (en) | Building blocks for integrated gas panel | |
| JP7140402B2 (ja) | バルブ装置、このバルブ装置を用いた流体制御装置および半導体製造装置 | |
| JP7161780B2 (ja) | バルブ装置 | |
| JPH0445712B2 (fr) | ||
| JP5462926B2 (ja) | ガスパネルアッセンブリ | |
| US11365830B2 (en) | Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device | |
| US7299825B2 (en) | Gas-panel assembly | |
| JPH05501447A (ja) | 分岐通路への接続を制御するバルブ | |
| US11320056B2 (en) | Valve device | |
| US6102640A (en) | Bolt retainer for members to be fixed together by the bolt | |
| US5722457A (en) | Integrated manifold for coplanar pressure transmitter | |
| JPH0351566Y2 (fr) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
| R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
| R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
| LAPS | Cancellation because of no payment of annual fees | ||
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |