JPH0445058B2 - - Google Patents

Info

Publication number
JPH0445058B2
JPH0445058B2 JP27558084A JP27558084A JPH0445058B2 JP H0445058 B2 JPH0445058 B2 JP H0445058B2 JP 27558084 A JP27558084 A JP 27558084A JP 27558084 A JP27558084 A JP 27558084A JP H0445058 B2 JPH0445058 B2 JP H0445058B2
Authority
JP
Japan
Prior art keywords
substrate
strain
region
strain gauge
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP27558084A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61155829A (ja
Inventor
Nobuo Myaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP27558084A priority Critical patent/JPS61155829A/ja
Publication of JPS61155829A publication Critical patent/JPS61155829A/ja
Publication of JPH0445058B2 publication Critical patent/JPH0445058B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
    • G01L9/045—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges with electric temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP27558084A 1984-12-28 1984-12-28 圧力計 Granted JPS61155829A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27558084A JPS61155829A (ja) 1984-12-28 1984-12-28 圧力計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27558084A JPS61155829A (ja) 1984-12-28 1984-12-28 圧力計

Publications (2)

Publication Number Publication Date
JPS61155829A JPS61155829A (ja) 1986-07-15
JPH0445058B2 true JPH0445058B2 (sv) 1992-07-23

Family

ID=17557434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27558084A Granted JPS61155829A (ja) 1984-12-28 1984-12-28 圧力計

Country Status (1)

Country Link
JP (1) JPS61155829A (sv)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019195186A1 (en) 2018-04-02 2019-10-10 Magic Leap, Inc. Hybrid polymer waveguide and methods for making the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019195186A1 (en) 2018-04-02 2019-10-10 Magic Leap, Inc. Hybrid polymer waveguide and methods for making the same

Also Published As

Publication number Publication date
JPS61155829A (ja) 1986-07-15

Similar Documents

Publication Publication Date Title
JPS5855732A (ja) 静電容量型圧力センサ
EP0136249B1 (en) Three plate, silicon-glass-silicon capacitive pressure transducer
GB2042257A (en) Pressure sensor
JPS5817421B2 (ja) 半導体圧力センサ
US7808365B2 (en) Pressure sensor
US3315200A (en) Strain gauges
US5444901A (en) Method of manufacturing silicon pressure sensor having dual elements simultaneously mounted
US5440931A (en) Reference element for high accuracy silicon capacitive pressure sensor
JPH0445058B2 (sv)
US4455744A (en) Method of making a precision resistor with improved temperature characteristics
JPH0447244A (ja) 半導体圧力センサ
JPS6155263B2 (sv)
JPH0688802A (ja) 雰囲気センサ
US7367234B2 (en) Pressure sensor
JPS5845533A (ja) 圧力検出器
JPS5854676A (ja) 半導体圧力変換器
JPS63195537A (ja) 絶対圧形半導体圧力センサ
JPH0419495B2 (sv)
JPS63298128A (ja) 圧力センサ
JPH098326A (ja) 半導体圧力センサ
GB2107924A (en) Strain gauge pressure transducers
JPS5646583A (en) Semiconductor device and manufacture thereof
JPH04131721A (ja) 応力センサ
JPH07318445A (ja) 静電容量型圧力センサとその製造方法
JPH10242479A (ja) 半導体圧力センサ