JPH0444361U - - Google Patents

Info

Publication number

JPH0444361U

JPH0444361U JP8359190U JP8359190U JPH0444361U JP H0444361 U JPH0444361 U JP H0444361U JP 8359190 U JP8359190 U JP 8359190U JP 8359190 U JP8359190 U JP 8359190U JP H0444361 U JPH0444361 U JP H0444361U

Authority

JP

Japan

Prior art keywords

holding plate

substrate

deposition

source

hole

Prior art date

1990-08-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 4
• 238000001704 evaporation Methods 0.000 claims description 2
• 230000008020 evaporation Effects 0.000 claims description 2
• 230000008021 deposition Effects 0.000 claims 4
• 239000000463 material Substances 0.000 claims 2
• 238000007738 vacuum evaporation Methods 0.000 claims 1