JPH0444359U - - Google Patents
Info
- Publication number
- JPH0444359U JPH0444359U JP8545990U JP8545990U JPH0444359U JP H0444359 U JPH0444359 U JP H0444359U JP 8545990 U JP8545990 U JP 8545990U JP 8545990 U JP8545990 U JP 8545990U JP H0444359 U JPH0444359 U JP H0444359U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- prevention plate
- evaporation device
- target surface
- vacuum arc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002265 prevention Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 239000000470 constituent Substances 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 238000010891 electric arc Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8545990U JPH0444359U (me) | 1990-08-14 | 1990-08-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8545990U JPH0444359U (me) | 1990-08-14 | 1990-08-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0444359U true JPH0444359U (me) | 1992-04-15 |
Family
ID=31816744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8545990U Pending JPH0444359U (me) | 1990-08-14 | 1990-08-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0444359U (me) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010159439A (ja) * | 2009-01-06 | 2010-07-22 | Shinko Seiki Co Ltd | 成膜装置 |
| JP2012057198A (ja) * | 2010-09-07 | 2012-03-22 | Ulvac-Riko Inc | 微粒子形成装置およびその方法 |
-
1990
- 1990-08-14 JP JP8545990U patent/JPH0444359U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010159439A (ja) * | 2009-01-06 | 2010-07-22 | Shinko Seiki Co Ltd | 成膜装置 |
| JP2012057198A (ja) * | 2010-09-07 | 2012-03-22 | Ulvac-Riko Inc | 微粒子形成装置およびその方法 |
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