JPH0444210B2 - - Google Patents
Info
- Publication number
- JPH0444210B2 JPH0444210B2 JP61056535A JP5653586A JPH0444210B2 JP H0444210 B2 JPH0444210 B2 JP H0444210B2 JP 61056535 A JP61056535 A JP 61056535A JP 5653586 A JP5653586 A JP 5653586A JP H0444210 B2 JPH0444210 B2 JP H0444210B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical grating
- emitting element
- gratings
- division frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 62
- 238000001514 detection method Methods 0.000 claims description 23
- 238000006073 displacement reaction Methods 0.000 claims description 14
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 5
- 238000005191 phase separation Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5653586A JPS62212517A (ja) | 1986-03-14 | 1986-03-14 | 光電式変位検出装置 |
| GB8719127A GB2194635B (en) | 1986-03-14 | 1987-03-12 | Photoelectric type displacement detecting instrument |
| US07/086,627 US4840488A (en) | 1986-03-14 | 1987-03-12 | Photoelectric type displacement detecting instrument |
| DE19873790038 DE3790038T1 (de) | 1986-03-14 | 1987-03-12 | |
| PCT/JP1987/000154 WO1987005693A1 (en) | 1986-03-14 | 1987-03-12 | Photoelectric displacement detector |
| GB9005627A GB2229812B (en) | 1986-03-14 | 1990-03-13 | Photoelectric type displacement detecting instrument |
| GB9005628A GB2229813B (en) | 1986-03-14 | 1990-03-13 | Photoelectric type displacement detecting instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5653586A JPS62212517A (ja) | 1986-03-14 | 1986-03-14 | 光電式変位検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62212517A JPS62212517A (ja) | 1987-09-18 |
| JPH0444210B2 true JPH0444210B2 (de) | 1992-07-21 |
Family
ID=13029783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5653586A Granted JPS62212517A (ja) | 1986-03-14 | 1986-03-14 | 光電式変位検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62212517A (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57198814A (en) * | 1981-06-01 | 1982-12-06 | Mitsutoyo Mfg Co Ltd | Optoelectrical encoder |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5792116U (de) * | 1980-11-26 | 1982-06-07 | ||
| JPS59152461U (ja) * | 1983-03-30 | 1984-10-12 | 三菱電機株式会社 | 回転数検出装置 |
-
1986
- 1986-03-14 JP JP5653586A patent/JPS62212517A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57198814A (en) * | 1981-06-01 | 1982-12-06 | Mitsutoyo Mfg Co Ltd | Optoelectrical encoder |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62212517A (ja) | 1987-09-18 |
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