JPH0443210U - - Google Patents

Info

Publication number
JPH0443210U
JPH0443210U JP8529590U JP8529590U JPH0443210U JP H0443210 U JPH0443210 U JP H0443210U JP 8529590 U JP8529590 U JP 8529590U JP 8529590 U JP8529590 U JP 8529590U JP H0443210 U JPH0443210 U JP H0443210U
Authority
JP
Japan
Prior art keywords
differential pressure
measured
attached
moving coil
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8529590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8529590U priority Critical patent/JPH0443210U/ja
Publication of JPH0443210U publication Critical patent/JPH0443210U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
JP8529590U 1990-08-10 1990-08-10 Pending JPH0443210U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8529590U JPH0443210U (zh) 1990-08-10 1990-08-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8529590U JPH0443210U (zh) 1990-08-10 1990-08-10

Publications (1)

Publication Number Publication Date
JPH0443210U true JPH0443210U (zh) 1992-04-13

Family

ID=31634352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8529590U Pending JPH0443210U (zh) 1990-08-10 1990-08-10

Country Status (1)

Country Link
JP (1) JPH0443210U (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006284376A (ja) * 2005-03-31 2006-10-19 Aisin Aw Co Ltd 位置合せ装置、エアマイクロ測定装置及び測定方法
US7797985B2 (en) 2004-12-15 2010-09-21 Asml Holding N.V. Method and system for operating an air gauge at programmable or constant standoff

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7797985B2 (en) 2004-12-15 2010-09-21 Asml Holding N.V. Method and system for operating an air gauge at programmable or constant standoff
JP2006284376A (ja) * 2005-03-31 2006-10-19 Aisin Aw Co Ltd 位置合せ装置、エアマイクロ測定装置及び測定方法
JP4713197B2 (ja) * 2005-03-31 2011-06-29 アイシン・エィ・ダブリュ株式会社 位置合せ装置及びエアマイクロ測定装置

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