JPH0443210U - - Google Patents
Info
- Publication number
- JPH0443210U JPH0443210U JP8529590U JP8529590U JPH0443210U JP H0443210 U JPH0443210 U JP H0443210U JP 8529590 U JP8529590 U JP 8529590U JP 8529590 U JP8529590 U JP 8529590U JP H0443210 U JPH0443210 U JP H0443210U
- Authority
- JP
- Japan
- Prior art keywords
- differential pressure
- measured
- attached
- moving coil
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 2
Landscapes
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
Description
図は本考案の一実施例に係る非接触変位測定装
置の構成である。
１……ノズル、６……被測定面、７……ロツド
、８……ムービングコイル、２１……差圧計、２
７……増幅器、Ｃ……隙間。
The figure shows the configuration of a non-contact displacement measuring device according to an embodiment of the present invention. 1... Nozzle, 6... Surface to be measured, 7... Rod, 8... Moving coil, 21... Differential pressure gauge, 2
7...Amplifier, C...Gap.
Claims (1)
に支持されたロツドの被測定面に対向する一端に
エアマイクロ式ノズルを取付け、このノズルの背
圧と基準圧力との差圧を検出する差圧計を設け、
ロツドの他端にムービングコイルを取付け、差圧
計からの出力に応じた電流をムービングコイルに
印加する手段を設けたことを特徴とする非接触変
位測定装置。 An air micro nozzle is attached to one end facing the surface to be measured of a rod supported movably in an axial direction approximately perpendicular to the surface to be measured, and the differential pressure between the back pressure of this nozzle and the reference pressure is detected. Install a differential pressure gauge to
A non-contact displacement measuring device, characterized in that a moving coil is attached to the other end of the rod, and means is provided for applying a current to the moving coil according to the output from a differential pressure gauge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8529590U JPH0443210U (en) | 1990-08-10 | 1990-08-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8529590U JPH0443210U (en) | 1990-08-10 | 1990-08-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0443210U true JPH0443210U (en) | 1992-04-13 |
Family
ID=31634352
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8529590U Pending JPH0443210U (en) | 1990-08-10 | 1990-08-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0443210U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006284376A (en) * | 2005-03-31 | 2006-10-19 | Aisin Aw Co Ltd | Positioning device, air micro measuring device, and measuring method thereof |
| US7797985B2 (en) | 2004-12-15 | 2010-09-21 | Asml Holding N.V. | Method and system for operating an air gauge at programmable or constant standoff |
-
1990
- 1990-08-10 JP JP8529590U patent/JPH0443210U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7797985B2 (en) | 2004-12-15 | 2010-09-21 | Asml Holding N.V. | Method and system for operating an air gauge at programmable or constant standoff |
| JP2006284376A (en) * | 2005-03-31 | 2006-10-19 | Aisin Aw Co Ltd | Positioning device, air micro measuring device, and measuring method thereof |
| JP4713197B2 (en) * | 2005-03-31 | 2011-06-29 | アイシン・エィ・ダブリュ株式会社 | Positioning device and air micro measurement device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0443210U (en) | ||
| JPS6292455U (en) | ||
| JPH0195605U (en) | ||
| JPS61129149U (en) | ||
| JPH0378202U (en) | ||
| JPH0438505U (en) | ||
| JPH02129808U (en) | ||
| JPH047303U (en) | ||
| JPH0385258U (en) | ||
| JPS629712U (en) | ||
| JPH02140437U (en) | ||
| JPH03122304U (en) | ||
| JPH0197201U (en) | ||
| JPH0473873U (en) | ||
| JPS62114304U (en) | ||
| JPS62124536U (en) | ||
| JPH02101243U (en) | ||
| JPS63190908U (en) | ||
| JPS61131606U (en) | ||
| JPS62132404U (en) | ||
| JPS6247938U (en) | ||
| JPS6144507U (en) | Polygonal tube inner dimension measuring device | |
| JPH02118203U (en) | ||
| JPH0397605U (en) | ||
| JPH0371621U (en) |