JPH0442835B2 - - Google Patents

Info

Publication number
JPH0442835B2
JPH0442835B2 JP59197348A JP19734884A JPH0442835B2 JP H0442835 B2 JPH0442835 B2 JP H0442835B2 JP 59197348 A JP59197348 A JP 59197348A JP 19734884 A JP19734884 A JP 19734884A JP H0442835 B2 JPH0442835 B2 JP H0442835B2
Authority
JP
Japan
Prior art keywords
bsf
optical sensor
manufacturing
wafer
infrared irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59197348A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6174378A (ja
Inventor
Akira Usami
Hirobumi Suga
Yoshimaro Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP59197348A priority Critical patent/JPS6174378A/ja
Publication of JPS6174378A publication Critical patent/JPS6174378A/ja
Publication of JPH0442835B2 publication Critical patent/JPH0442835B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14Photovoltaic cells having only PN homojunction potential barriers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells

Landscapes

  • Light Receiving Elements (AREA)
  • Photovoltaic Devices (AREA)
JP59197348A 1984-09-20 1984-09-20 赤外線照射により浅い接合とbsfを同時に形成する光センサの製造方法 Granted JPS6174378A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59197348A JPS6174378A (ja) 1984-09-20 1984-09-20 赤外線照射により浅い接合とbsfを同時に形成する光センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59197348A JPS6174378A (ja) 1984-09-20 1984-09-20 赤外線照射により浅い接合とbsfを同時に形成する光センサの製造方法

Publications (2)

Publication Number Publication Date
JPS6174378A JPS6174378A (ja) 1986-04-16
JPH0442835B2 true JPH0442835B2 (enrdf_load_stackoverflow) 1992-07-14

Family

ID=16372984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59197348A Granted JPS6174378A (ja) 1984-09-20 1984-09-20 赤外線照射により浅い接合とbsfを同時に形成する光センサの製造方法

Country Status (1)

Country Link
JP (1) JPS6174378A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62256427A (ja) * 1986-04-28 1987-11-09 Nec Corp 不純物拡散法
US5223453A (en) * 1991-03-19 1993-06-29 The United States Of America As Represented By The United States Department Of Energy Controlled metal-semiconductor sintering/alloying by one-directional reverse illumination
GB0114896D0 (en) 2001-06-19 2001-08-08 Bp Solar Ltd Process for manufacturing a solar cell
JP4957042B2 (ja) * 2006-03-29 2012-06-20 三菱電機株式会社 太陽電池の製造方法
JP2013042042A (ja) * 2011-08-18 2013-02-28 Tohoku Univ シリコン太陽電池の製造方法

Also Published As

Publication number Publication date
JPS6174378A (ja) 1986-04-16

Similar Documents

Publication Publication Date Title
Narasimha et al. An optimized rapid aluminum back surface field technique for silicon solar cells
CA1067609A (en) Barrier type photovoltaic cells with enhanced open-circuit voltage, and process of manufacture
Ortega et al. Optoelectronic properties of CdO/Si photodetectors
US5510271A (en) Processes for producing low cost, high efficiency silicon solar cells
US4132999A (en) Semiconductor devices
JPS6252478B2 (enrdf_load_stackoverflow)
KR20020010584A (ko) 알루미늄 합금이 후면 접합된 태양 전지와 그것의 제조 방법
TW201349547A (zh) 具選擇性射極的太陽能電池製作方法
US20130247981A1 (en) Solar cell fabrication using a pre-doping dielectric layer
Wang et al. Determination of electron affinity of in2 o 3 from its heterojunction photovoltaic properties
US4318217A (en) Method of manufacturing an infra-red detector device
Lee et al. Boron back surface field using spin-on dopants by rapid thermal processing
US4005468A (en) Semiconductor photoelectric device with plural tin oxide heterojunctions and common electrical connection
TW201818560A (zh) 矽材料之加工方法
JPH0442835B2 (enrdf_load_stackoverflow)
Schroder Transparent gate silicon photodetectors
Saim et al. Properties of indium-tin-oxide (ITO)/silicon heterojunction solar cells by thick-film techniques
US4004342A (en) Fabrication of ion implanted P-N junction devices
JP2928433B2 (ja) 光電変換素子の製造方法
JPH0661516A (ja) 太陽電池の製造方法
Tsaur et al. Hydrogen annealing of PtSi‐Si Schottky barrier contacts
JPS59117276A (ja) 太陽電池の製造方法
JP3091882B2 (ja) 半導体装置及びその製造方法
Livingstone et al. Si/CdS heterojunction solar cells
JP2911291B2 (ja) 半導体装置の製造方法