JPH044262U - - Google Patents

Info

Publication number
JPH044262U
JPH044262U JP4456890U JP4456890U JPH044262U JP H044262 U JPH044262 U JP H044262U JP 4456890 U JP4456890 U JP 4456890U JP 4456890 U JP4456890 U JP 4456890U JP H044262 U JPH044262 U JP H044262U
Authority
JP
Japan
Prior art keywords
pipe
window
scattered light
laser
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4456890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4456890U priority Critical patent/JPH044262U/ja
Publication of JPH044262U publication Critical patent/JPH044262U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
JP4456890U 1990-04-27 1990-04-27 Pending JPH044262U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4456890U JPH044262U (enrdf_load_stackoverflow) 1990-04-27 1990-04-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4456890U JPH044262U (enrdf_load_stackoverflow) 1990-04-27 1990-04-27

Publications (1)

Publication Number Publication Date
JPH044262U true JPH044262U (enrdf_load_stackoverflow) 1992-01-16

Family

ID=31557990

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4456890U Pending JPH044262U (enrdf_load_stackoverflow) 1990-04-27 1990-04-27

Country Status (1)

Country Link
JP (1) JPH044262U (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62215843A (ja) * 1985-12-10 1987-09-22 ハイ　イ−ルド　テクノロジ− ウエハ処理装置用の粒子検出器
JPH01184441A (ja) * 1988-01-19 1989-07-24 Fujitsu Ltd 粒子計数器
JPH0222534A (ja) * 1988-07-11 1990-01-25 Fujitsu Ltd 粒子測定装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62215843A (ja) * 1985-12-10 1987-09-22 ハイ　イ−ルド　テクノロジ− ウエハ処理装置用の粒子検出器
JPH01184441A (ja) * 1988-01-19 1989-07-24 Fujitsu Ltd 粒子計数器
JPH0222534A (ja) * 1988-07-11 1990-01-25 Fujitsu Ltd 粒子測定装置

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