JPH044262U - - Google Patents
Info
- Publication number
- JPH044262U JPH044262U JP4456890U JP4456890U JPH044262U JP H044262 U JPH044262 U JP H044262U JP 4456890 U JP4456890 U JP 4456890U JP 4456890 U JP4456890 U JP 4456890U JP H044262 U JPH044262 U JP H044262U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- window
- scattered light
- laser
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4456890U JPH044262U (cs) | 1990-04-27 | 1990-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4456890U JPH044262U (cs) | 1990-04-27 | 1990-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH044262U true JPH044262U (cs) | 1992-01-16 |
Family
ID=31557990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4456890U Pending JPH044262U (cs) | 1990-04-27 | 1990-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH044262U (cs) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62215843A (ja) * | 1985-12-10 | 1987-09-22 | ハイ イ−ルド テクノロジ− | ウエハ処理装置用の粒子検出器 |
| JPH01184441A (ja) * | 1988-01-19 | 1989-07-24 | Fujitsu Ltd | 粒子計数器 |
| JPH0222534A (ja) * | 1988-07-11 | 1990-01-25 | Fujitsu Ltd | 粒子測定装置 |
-
1990
- 1990-04-27 JP JP4456890U patent/JPH044262U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62215843A (ja) * | 1985-12-10 | 1987-09-22 | ハイ イ−ルド テクノロジ− | ウエハ処理装置用の粒子検出器 |
| JPH01184441A (ja) * | 1988-01-19 | 1989-07-24 | Fujitsu Ltd | 粒子計数器 |
| JPH0222534A (ja) * | 1988-07-11 | 1990-01-25 | Fujitsu Ltd | 粒子測定装置 |
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