JPH0442412A - Magnetic head - Google Patents

Abstract

PURPOSE:To improve characteristics, such as reproduced output, and to prevent the shortening of a life by wear by incorporating titanium nitride into the magnetic recording medium-sliding surface of a magnetic head specified in gap depth. CONSTITUTION:The magnetic head 7 specified in the depth of the gap to <=20[mum] is held by a water-cooled holder 8 by grinding the head with a lapping tape, etc. The inside of a vacuum vessel is maintained in a high-vacuum state and the thin film contg. the titanium nitride is formed on the magnetic recording medium-sliding surface 9 of the magnetic head 7 held in the water-cooled holder 8 by irradiating the surface with the ions 10' which is the ion contg. a nitrogen element or the ion contg. an inert gaseous element by an ion source 10 simultane ously or alternately with the vapor deposition of an evaporating material 11' contg. titanium by an evaporating source 11. The reproduced output characteristics, etc., are improved in this way and the shortening of the life of the magnetic recording medium-sliding surface by wear is prevented.

Description

[Detailed Description of the Invention] [Industrial Application Field] This invention relates to a magnetic recording medium device! The present invention particularly relates to magnetic heads used for recording and reproducing video signals of video tape recorders (VTRs).

[Conventional technology]

A conventional magnetic head used for recording and reproducing video signals, etc. of a video tape recorder (hereinafter referred to as rvtR),
For example, 9! FIG. 3(a) shows a magnetic head in which a magnetic gap is formed between magnetic cores made of J, Mi magnetic material.

The explanation will be based on (b).

FIG. 3 (al is a conceptual diagram showing the structure of a conventional magnetic head,
FIG. 3 (bl is a sectional view taken along line AA' in FIG. 3(a)).

In FIG. 3(a) and FIG. 3(g)), 1. 2
are each half of a 1% core made of a magnetic material such as ferrite, and a single magnetic core is constructed by butting magnetic core half 1 and magnetic core half 2 together. In addition, one of the magnetic cores is half closed (Fig. 3 (al, [available])
A winding groove 3 is formed on the half-open abutting surface of the magnetic core.

Half 1 of the magnetic core and half 2 of the magnetic core are butted against each other with a gap material (not shown) made of a non-magnetic material in between, and this gap material creates a sliding surface with the magnetic tape (not shown). 9, the gap 15 (for example, the gap length is about 0)
．． 2 [μm] to 0.5 [μm)) is formed.

16 is a track width regulating groove, which extends from both ends of the gap 15 on the sliding surface 9 to the winding groove 3.
This is a groove that regulates the width of approximately 20 [μm] to 30 [μm].

Reference numeral 4 denotes glass that partially fills the trunk width regulating groove 16 and the winding groove 3, and this glass 4 is made of glass having a softening point of, for example, 500°C or higher.

5 is a winding guide, and this Ill guide 5 and the winding groove 3
A coil (not shown) is wound using this.

Further, d indicates the depth of the gap 15, for example, household 1
In a /2 inch VTR or the like, the depth d of this gap 15 is approximately 30 (, um) to 40 (μm).

In recent years, VT using a magnetic herad Y configured as described above has been developed.
There is an increasing demand for higher image quality for R. Therefore, in order to achieve high image quality, it is required to improve horizontal resolution and S/N ratio, etc.
Accordingly, there is a need to reduce noise in amplifier systems by improving the reproduction output characteristics of the magnetic head and increasing the Q value of the magnetic head. One way to meet these demands is to increase the gap 15 of the magnetic head Y.
One possible method is to reduce the depth d.

For example, a magnetic head with a gap depth of 40 (μm),
In order to compare the reproduction output characteristics with a magnetic head with a gap depth of 5 [μm], using each of these magnetic heads, the running speed of the magnetic tape relative to the magnetic head was set to 5.8 (μm).
Table 1 shows the results of reproducing the magnetic tape. The magnetic tape was made of ferrite and had a coercive force of 900 (Oe) and a residual magnetic flux density of 1500 [G]. In addition, in a magnetic head with a magnetic gap depth d of 40 (, um), the reproduction output of frequency 9 (Ml (zl) is set to 0
(dB).

(Table 1) As is clear from Table 1, in the frequency band of 3 to 9 (MHz), the reproduction output of a magnetic head with a gap depth of 5 [μm] is lower than that with a gap depth of 40 (Ilm). It can be seen that the reproduction output is improved by 6 (dB) compared to the reproduction output of the magnetic head.

In addition, the results of measuring the Q value of a magnetic head with a similar gap depth of 5 (tIm) and a magnetic head with a gap depth of 40 (pm) are shown in (Table 2). was 5 (MHz), and the inductance value of the magnetic head with a gap depth of 40 [μm] at the frequency (MHz) was set to 2 [μH].

(Table 2) As is clear from (Table 2), the Q of the magnetic head with a magnetic gap depth of 5 [μm] at a frequency of 5 (MHz) is
This value is larger than the Q value of the magnetic gap depth of 40 [μm].

From the results shown above (Table 1) and (Table 2), it can be seen that an effective method for improving the characteristics of the magnetic head is to reduce the depth d of the gear 15 of the magnetic head Y.

[Problem to be solved by the invention]

However, since the depth d of the gap 15 of the magnetic head Y is greatly involved in the wear of the sliding surface 9 of the magnetic head Y with the magnetic recording medium, if the depth d of the gap 15 is made too small, the magnetic head There was a problem that the life of Y was shortened. That is, since the magnetic helad Y used in VTRs etc. is used by sliding a magnetic recording medium (M1 tape), the sliding surface 9 of the magnetic helad Y with the magnetic recording medium is worn out during use. It is inevitable that the lifespan of the magnetic herad Y is determined by this.

Specifically, the greater the depth d of the gap 15 of the magnetic head Y, the longer the life of the magnetic head. In a magnetic head, the depth of the gap of the magnetic head required to guarantee a life of about 1000 hours is 20 [μm] to 25 [μm].

Currently, the magnetic heads actually used have a gap depth of 30 [μm] to 40 [μm] in consideration of the type of magnetic tape and to guarantee a long service life to the user.
] The reality is that

As described above, improvements in the characteristics of magnetic heads and the lifespan of magnetic heads tend to contradict each other, and the current situation is that the characteristics of conventional magnetic heads have not been sufficiently improved.

SUMMARY OF THE INVENTION In view of the above-mentioned problems, an object of the present invention is to provide a magnetic head that improves reproduction output characteristics and prevents shortening of life due to friction.

[Means to solve the problem]

The method for manufacturing a magnetic head of the present invention includes vacuum deposition of a substance containing a titanium element and ions or It is characterized in that a thin film containing titanium nitride is formed using irradiation with ions containing an inert gas element.

FIG. 1 is a conceptual diagram showing an embodiment of the magnetic head of the present invention.

In FIG. 1, reference numeral 1.2 indicates a half hole of the magnetic core, 3 indicates a winding groove, 4 indicates a glass, and 5 indicates a winding guide, and the description of the same reference numerals as in FIG. 3 will be omitted.

In FIG. 1, 6 is a thin film containing titanium nitride (hereinafter referred to as "titanium nitride-containing i16") formed on a sliding surface 9 with a magnetic recording medium (not shown).

This magnetic head X has a gap depth of 20 (arn) or less by polishing with a roughening tape, etc.
is -30 Cμm) to 40 [μm] for boat fishing. ) has improved magnetic head characteristics.

FIG. 2 is a conceptual diagram showing an example of an yl film forming apparatus used for manufacturing the magnetic head shown in FIG.

As shown in FIG. 2, the magnetic nodule 7 on which the titanium nitride-containing thin film 6 is to be formed is held in a water-cooled holder 8.

This magnetic head 7 is polished with a lapping tape or the like so that the gap depth is 20 [μm] or less. Further, an ion source 10 and an evaporation source 11 are arranged at a position facing a sliding surface 9 of the magnetic nozzle 7 that contacts a magnetic recording medium (not shown). On both sides of the magnetic head 7, there are film thickness gauges 12 for measuring the thickness of one film formed on the sliding surface 9.
and an ion current measuring device 3 for measuring the current of ions 10' irradiated by ions s10. Further, 14 is a gas introduction nozzle for introducing gas.

In addition, magnetic head 7. Holder 8. Ion source 10 evaporation 11E
t+1. Film thickness gauge 12. The ion current measuring device 13 and the gas introduction nozzle 14 are housed in a vacuum container (not shown).

The ion source 10 irradiates the sliding surface 9 with ions 10'', and is, for example, a Kaufmann type or a packet type using a Kaps magnetic field to confine plasma, and its type is not particularly limited.

The evaporation source 11 evaporates the evaporation substance 11' and deposits it on the sliding surface 9 of the magnetic head 7, and uses, for example, an electron beam, a laser beam, or a high frequency wave, and the method thereof is not particularly limited.

The film thickness meter 12 measures the film thickness of the trace material 10 deposited on the sliding surface 9 and the number of titanium particles, and is, for example, a vibrating film thickness meter using a crystal oscillator.

The ion current measuring device 13 uses ions to irradiate the sliding surface 9]
The number of 0 degrees is measured, and for example, a cup-shaped structure having a secondary electron suppressing electrode such as a Faraday cup is used.

A method of manufacturing the magnetic nodal shown in FIG. 1 using such a thin film forming apparatus will be described.

Using the thin film forming apparatus shown in FIG.
It is a material containing titanium by evaporation +1911 on the sliding surface 9 of the magnetic head 7 which is maintained in a high vacuum state of X 10-' (Torr) or less and held in a water-cooled holder 8 with the magnetic recording medium. Simultaneously or alternately with the deposition of the evaporative substance 11', ions l, which are ions containing a nitrogen element or ions containing an inert gas element, are produced by the ions StO.
A titanium nitride-containing thin film 6 is formed by irradiating at 0°.

At this time, 10゛ ions irradiated by the ion source 10,
A mixed layer of atoms constituting both is formed at the interface between the sliding surface 9 of the magnetic head X and the titanium nitride-containing thin film 6 due to the collision and recoil with the evaporated substance 11 due to the evaporation att. A titanium nitride-containing thin film 6 having excellent adhesion to the sliding surface 9 can be obtained.

The substance 11° evaporated by the evaporation source 11 is a substance containing titanium element, such as titanium metal, titanium oxide, or titanium nitride.

The ions 10 irradiated by the ion source 10 are ions containing a nitrogen element, ions containing an inert gas element, or mixed ions of nitrogen ions and inert gas ions. Further, the ions 10 may be only inert gas ions, but in this case, a gas containing nitrogen element is introduced into the vicinity of the magnetic nozzle 7 through the gas introduction nozzle 14.

The acceleration energy of 10' ions to be irradiated is preferably 40 (keV3 or less) per ion. The number of defects generated in the titanium nitride-containing thin film 6 increases, resulting in deterioration of film characteristics.Also, the lower limit of the acceleration energy of 10゜ ions is not particularly limited, but is lower than the actual ion 1 lil.
Considering the structure of lO, it is thought to be around 100 (eV).

Furthermore, the titanium element contained in the titanium nitride-containing thin film 6,
The ratio of the number of particles to nitrogen element (hereinafter referred to as rTi/N & [l acid ratio]) is preferably in the range of 1 to 10. If it deviates from this range, titanium nitride in fII#6 containing titanium nitride (TiN) content decreases,
The hardness of the titanium nitride-containing thin film 6 decreases.

Furthermore, even if the Ti/N&ll composition ratio is the same throughout the nitride oxide-containing thin film 6, the sliding surface 9 and the titanium nitride-containing thin film 6
It may be decreased stepwise or continuously from the interface with the titanium nitride-containing thin film 6 toward the surface of the titanium nitride-containing IM 6. In this case, since titanium is an active metal, the sliding of the titanium nitride-containing thin film 6 and the magnetic head 7 This is effective in improving the adhesion with the surface 9.

Furthermore, since the titanium nitride-containing thin film 6 can be formed at a temperature below the softening point of the glass 7 constituting the magnetic head 7, it does not cause characteristic deterioration to the magnetic head 7 due to thermal damage. By holding the magnetic helad 7 on which the thin film 6 is to be formed in a water-cooled holder 8, the titanium nitride-containing thin film 6 can be formed on the sliding surface 9 at room temperature.

In this way, the sliding surface 9 of the magnetic head 7 and the magnetic recording medium
Furthermore, by forming the titanium nitride-containing thin film 6 which has excellent adhesion and hardness without causing any characteristic deterioration to the magnetic head 7, the wear resistance of the sliding surface 9 is improved.

Note that the titanium nitride content M6 is determined by introducing a gas containing nitrogen element into the vicinity of the magnetic nozzle 7 from the gas introduction nozzle 14, and containing titanium element from the evaporation source 11 on the sliding surface 9 with the magnetic recording medium. Evaporated matter! Simultaneously or alternately with the 1" vacuum evaporation, only inert gas ions are applied by the ion source 10.
Alternatively, it may be formed by irradiation with ions containing a nitrogen element and an inert gas element.

However, at this time, the acceleration energy of the irradiated ions (40k
eV or less) and the Ti/Nll composition ratio (range of 1 to acid ratio) are preferably within the same range as above,
Further, it is preferable that the inflow amount of the gas containing nitrogen element introduced into the gas introduction nozzle 14 is in the range of 5 X 10-' (Torr) or more to I X 10-' (Torr) or less, and it is preferable that If the amount of gas flowing in is less than 5 x 10-' (Torr), it will evaporate!
Because titanium (Ti), which is IIFltll', is not sufficiently nitrided, the Ti/N&n composition ratio deviates from the 1-acid ratio range, and the inflow amount is IX l O-' (
Torr), it will adversely affect the vacuum evacuation system.

[Effect]

According to the configuration of this invention, on the sliding surface with the magnetic recording medium,
The f! Since the abrasion resistance of the sliding surface is improved by the film, the depth of the gap can be reduced to 20 μm or less without deteriorating the abrasion resistance of the sliding surface.

[Example] 21 Base 1 Using the thin film forming apparatus shown in Fig. 2, the inside of the vacuum container (not shown) was evacuated to 2 x 10-'' (Torr), and then the gap depth was set to 5 (μm). At the same time as titanium (purity 99%) is deposited by evaporation 11111 on the sliding surface 9 of the magnetic spatula 7 that contacts the magnetic recording medium, nitrogen gas (purity 99°999%) is introduced into the ion source 10. A titanium nitride thin film was formed by ion irradiation.

At this time, the acceleration energy of nitrogen ions is 2(ke
V), and the particle number ratio between titanium and nitrogen (Ti/N composition ratio) contained in the formed titanium nitride Tl 11m was set to 1. The thickness of the titanium nitride thin film was 300.

Note that the evaporation source 11 used was an electron beam, and the ion source 9 used a packet type ion source.

The magnetic helad 7 is polished with a diamond lapping tape so that the depth d of the gap 15 shown in FIG. 3(a) and (bl) is set to 5 μm. The core material is made of Mn-Zn ferrite, the track width 17 is about 27 [μm], and the gap length is about 0.25 [μm].

Further, the magnetic head 7 was held in a water-cooled holder 8, so that the magnetic head 7 was not thermally damaged.

A titanium nitride thin film having a thickness of 300 mm was formed on the sliding surface 9 of the magnetic head 7 that contacts the magnetic recording medium using the same process as in Example 1.

However, when forming a titanium nitride thin film, the acceleration energy of the irradiated nitrogen ions is to (keV), and T
The i/N composition ratio was set to 1.

Comparison ■ As a comparative example, a conventional magnetic head was used. In this magnetic head, the depth d of the gap 15 is 40 [μm], and the titanium nitride thin film is not formed on the sliding surface 9 that contacts the magnetic recording medium.

Example 1 below. The reproduction output characteristics of each magnetic head were measured by reproducing a magnetic tape serving as a magnetic recording medium using each of the magnetic heads of Example 2 and Comparative Example. The measurement results are shown in (Table 3).

The magnetic tape used to measure the reproduction output characteristics of each magnetic head was a ferrite-based one with a coercive force of 900 [Oe] and a residual magnetic flux density of 1500 (G). The relative velocity is 5.8 (m
/S).

However, the measured value of the reproduction output of each magnetic head shown in (Table 3) shows that the reproduction output at a frequency of 9 [MHz] is 0 (dB) for a magnetic head with a gap depth of 40 [μm] as a comparative example. This is the value determined by

(Table 3) As is clear from (Table 3), each Example 1. It can be seen that the magnetic head t' of No. 2 has superior reproduction output in each frequency band compared to the magnetic head of the comparative example.

Next, Example 1. Table 4 shows the Q(11!) of each magnetic head of Example 2 and Comparative Example.

However, the frequency used is 5 (Mt(z)), and the inductance value at frequency 5 (MHz) is 2 [μ
H).

(The following is a blank space) (Table 4) As is clear from (Table 4), it can be seen that the magnetic heads of each Example 1.2 have superior Q values compared to the magnetic heads of Comparative Examples.

As shown above, it has become clear that the magnetic heads of Examples 1 and 2 have improved reproduction output and Q value compared to the magnetic heads of Comparative Examples.

Next, the FI resistance of the magnetic heads of each example 1.2 and comparative example
A wear test was conducted.

The abrasion resistance test was conducted under a certain environment (room temperature, humidity 60%).
]), using the magnetic tape used to measure the above-mentioned reproduction output characteristics, the relative speed between the magnetic head and the magnetic tape was set to 5.
．． 8 (m/S), run for 1000 hours, and then
When the amount of wear on the sliding surface of the magnetic head with the magnetic tape of each Example 1.2 was observed using a scanning electron microscope (SEM), the amount of wear in Example 1 was about 120 people, and in Example 2 The amount of wear and tear was approximately 110 people.

In this way, the magnetic heads of Examples 1 and 2 can improve the characteristics of the magnetic head by reducing the depth of the gap (20 (8 m) or less) and improve the sliding performance with the magnetic recording medium. By forming a titanium nitride thin film on the surface, wear resistance can be obtained, and the user can use it for a long time equivalent to that guaranteed by the conventional magnetic head with a large gap as a comparative example. I could guarantee it.

〔Effect of the invention〕

According to the magnetic head of the present invention, the sliding surface of the magnetic head with the magnetic recording medium is vacuum-deposited with a substance containing a titanium element and irradiated with ions containing a nitrogen element or ions containing an inert gas element. The abrasion resistance of the sliding surface is improved by the hard titanium nitride-containing thin film formed in combination with the above, so the gap depth can be reduced to 20 μm or less without deteriorating the abrasion resistance of the sliding surface. It can be a small one. As a result, the reciprocating output characteristics etc. are improved,
Moreover, it is possible to obtain a magnetic head whose lifespan is prevented from being shortened due to wear of the sliding surface.

[Brief explanation of the drawing]

FIG. 1 is a conceptual diagram showing an embodiment of the magnetic head of the present invention, FIG. 2 is a conceptual diagram showing an example of a thin film forming apparatus used for manufacturing the magnetic head of FIG. 1, and FIG. A conceptual diagram showing the structure of a conventional magnetic head (Fig. 3, etc.) is shown in Fig. 3 (a).
) is a sectional view taken along line AA'. X...Magnetic head, 6...Titanium nitride-containing bacteria # (thin film containing titanium nitride), 9...Sliding surface, 10'.
...Ion, lbi...evaporated substance＼ (b) 9...Sliding surface diagram

Claims (1)

[Claims] Vacuum deposition of a material containing a titanium element and irradiation with ions containing a nitrogen element or ions containing an inert gas element on the sliding surface of a magnetic head with a gap depth of 20 μm or less between the magnetic recording medium. A magnetic head characterized in that a thin film containing titanium nitride is formed using a combination of the above.