JPH0441704U - - Google Patents

Info

Publication number
JPH0441704U
JPH0441704U JP8112190U JP8112190U JPH0441704U JP H0441704 U JPH0441704 U JP H0441704U JP 8112190 U JP8112190 U JP 8112190U JP 8112190 U JP8112190 U JP 8112190U JP H0441704 U JPH0441704 U JP H0441704U
Authority
JP
Japan
Prior art keywords
filter unit
air
case
filter
air vent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8112190U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8112190U priority Critical patent/JPH0441704U/ja
Publication of JPH0441704U publication Critical patent/JPH0441704U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図、第２図、第３図はそれぞれ本考案の第
１、第２、第３の実施例を示すウエハー洗浄機の
構成図、第４図はウエハー洗浄機の従来例の構成
図、第５図は第４図中のフイルターユニツト１０
の縦断面図である。 １，６，８……フイルターユニツト、１ａ，６
ａ……フイルター部、８ａ……フイルターエレメ
ント、１ｂ，６ｂ，８ｂ……エア溜り、１ｃ，１
ｄ，１ｅ，１ｆ，６ｃ，６ｄ，６ｅ，８ｃ，８ｄ
……出入口、２……薬液槽、３……オーバーフロ
ー槽、６ｆ，６ｇ……センサー、４……ポンプ、
５，７……バルブ、９，１０……細管。

Claims (1)

  1. 【実用新案登録請求の範囲】 １ エアダンパーになりうるエア溜りを内部に有
    するフイルターユニツト。 ２ フイルターユニツトのケースの、フイルター
    エレメントの脇にエア抜口を有する請求項１記載
    のフイルターユニツト。 ３ 液面をフイルターユニツトの外部から検出す
    るセンサと、フイルターユニツトのケースの、エ
    ア溜り上部に設けられたエア抜口を有する請求項
    １記載のフイルターユニツト。
JP8112190U 1990-08-01 1990-08-01 Pending JPH0441704U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8112190U JPH0441704U (ja) 1990-08-01 1990-08-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8112190U JPH0441704U (ja) 1990-08-01 1990-08-01

Publications (1)

Publication Number Publication Date
JPH0441704U true JPH0441704U (ja) 1992-04-09

Family

ID=31626781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8112190U Pending JPH0441704U (ja) 1990-08-01 1990-08-01

Country Status (1)

Country Link
JP (1) JPH0441704U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04176125A (ja) * 1990-11-08 1992-06-23 Nec Corp ウエハー処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53126304A (en) * 1977-04-08 1978-11-04 Ishikawajima Harima Heavy Ind Screen apparatus without vibration
JPH021211B2 (ja) * 1984-06-27 1990-01-10 Nippon Steel Corp

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53126304A (en) * 1977-04-08 1978-11-04 Ishikawajima Harima Heavy Ind Screen apparatus without vibration
JPH021211B2 (ja) * 1984-06-27 1990-01-10 Nippon Steel Corp

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04176125A (ja) * 1990-11-08 1992-06-23 Nec Corp ウエハー処理装置

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