JPH044168Y2 - - Google Patents

Info

Publication number
JPH044168Y2
JPH044168Y2 JP6920486U JP6920486U JPH044168Y2 JP H044168 Y2 JPH044168 Y2 JP H044168Y2 JP 6920486 U JP6920486 U JP 6920486U JP 6920486 U JP6920486 U JP 6920486U JP H044168 Y2 JPH044168 Y2 JP H044168Y2
Authority
JP
Japan
Prior art keywords
axis direction
main body
axis
attached
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6920486U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62180710U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6920486U priority Critical patent/JPH044168Y2/ja
Publication of JPS62180710U publication Critical patent/JPS62180710U/ja
Application granted granted Critical
Publication of JPH044168Y2 publication Critical patent/JPH044168Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
JP6920486U 1986-05-08 1986-05-08 Expired JPH044168Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6920486U JPH044168Y2 (enrdf_load_html_response) 1986-05-08 1986-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6920486U JPH044168Y2 (enrdf_load_html_response) 1986-05-08 1986-05-08

Publications (2)

Publication Number Publication Date
JPS62180710U JPS62180710U (enrdf_load_html_response) 1987-11-17
JPH044168Y2 true JPH044168Y2 (enrdf_load_html_response) 1992-02-07

Family

ID=30909719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6920486U Expired JPH044168Y2 (enrdf_load_html_response) 1986-05-08 1986-05-08

Country Status (1)

Country Link
JP (1) JPH044168Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS62180710U (enrdf_load_html_response) 1987-11-17

Similar Documents

Publication Publication Date Title
US6058618A (en) Coordinate measuring machine
EP0196711A1 (en) A positioning device comprising pre-stressed contactless bearings
JPH0439011B2 (enrdf_load_html_response)
JPH0620965Y2 (ja) 三次元測定機
GB2163256A (en) Surface tracer
CN219574594U (zh) 一种一维运动装置
JPH044168Y2 (enrdf_load_html_response)
JPH07139936A (ja) 座標測定機
JPH0618007B2 (ja) 非接触駆動形平面移動台
JPH0421051Y2 (enrdf_load_html_response)
JPH0518498Y2 (enrdf_load_html_response)
JP2837756B2 (ja) 位置決ステージ
JPH0422253Y2 (enrdf_load_html_response)
JP5717914B1 (ja) 三次元座標測定機
JPH05166B2 (enrdf_load_html_response)
JPS62265519A (ja) 三次元測定機
JP2837716B2 (ja) 垂直可動ベアリング装置およびそれを用いた垂直可動ステージ装置
JPH0320688B2 (enrdf_load_html_response)
JP6025905B2 (ja) 三次元座標測定機
JPS61239307A (ja) 位置決め装置
JPS63237831A (ja) Xyテ−ブルの位置決め装置
JPH0449530Y2 (enrdf_load_html_response)
JPH09216137A (ja) 位置決め装置
JPH0639042B2 (ja) テ−ブルの駆動装置
JPH0349364B2 (enrdf_load_html_response)