JPH0441651U - - Google Patents
Info
- Publication number
- JPH0441651U JPH0441651U JP8386690U JP8386690U JPH0441651U JP H0441651 U JPH0441651 U JP H0441651U JP 8386690 U JP8386690 U JP 8386690U JP 8386690 U JP8386690 U JP 8386690U JP H0441651 U JPH0441651 U JP H0441651U
- Authority
- JP
- Japan
- Prior art keywords
- light
- spherical
- objective lens
- inspected
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Closed-Circuit Television Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8386690U JPH0441651U (sv) | 1990-08-07 | 1990-08-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8386690U JPH0441651U (sv) | 1990-08-07 | 1990-08-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0441651U true JPH0441651U (sv) | 1992-04-08 |
Family
ID=31631893
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8386690U Pending JPH0441651U (sv) | 1990-08-07 | 1990-08-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0441651U (sv) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011107092A (ja) * | 2009-11-20 | 2011-06-02 | Kobelco Kaken:Kk | 表面検査装置及び表面検査システム |
-
1990
- 1990-08-07 JP JP8386690U patent/JPH0441651U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011107092A (ja) * | 2009-11-20 | 2011-06-02 | Kobelco Kaken:Kk | 表面検査装置及び表面検査システム |
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