JPH044058U - - Google Patents
Info
- Publication number
- JPH044058U JPH044058U JP4506890U JP4506890U JPH044058U JP H044058 U JPH044058 U JP H044058U JP 4506890 U JP4506890 U JP 4506890U JP 4506890 U JP4506890 U JP 4506890U JP H044058 U JPH044058 U JP H044058U
- Authority
- JP
- Japan
- Prior art keywords
- target holder
- electrostatic chuck
- lead wire
- negative terminal
- built
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000000919 ceramic Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4506890U JPH044058U (hu) | 1990-04-26 | 1990-04-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4506890U JPH044058U (hu) | 1990-04-26 | 1990-04-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH044058U true JPH044058U (hu) | 1992-01-14 |
Family
ID=31558928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4506890U Pending JPH044058U (hu) | 1990-04-26 | 1990-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH044058U (hu) |
-
1990
- 1990-04-26 JP JP4506890U patent/JPH044058U/ja active Pending
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