JPH0438315B2 - - Google Patents

Info

Publication number
JPH0438315B2
JPH0438315B2 JP61062675A JP6267586A JPH0438315B2 JP H0438315 B2 JPH0438315 B2 JP H0438315B2 JP 61062675 A JP61062675 A JP 61062675A JP 6267586 A JP6267586 A JP 6267586A JP H0438315 B2 JPH0438315 B2 JP H0438315B2
Authority
JP
Japan
Prior art keywords
rod
gas
light receiving
receiving element
cylindrical rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61062675A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62218888A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP61062675A priority Critical patent/JPS62218888A/ja
Publication of JPS62218888A publication Critical patent/JPS62218888A/ja
Publication of JPH0438315B2 publication Critical patent/JPH0438315B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Geophysics And Detection Of Objects (AREA)
JP61062675A 1986-03-20 1986-03-20 センサ装置 Granted JPS62218888A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61062675A JPS62218888A (ja) 1986-03-20 1986-03-20 センサ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61062675A JPS62218888A (ja) 1986-03-20 1986-03-20 センサ装置

Publications (2)

Publication Number Publication Date
JPS62218888A JPS62218888A (ja) 1987-09-26
JPH0438315B2 true JPH0438315B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-06-24

Family

ID=13207091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61062675A Granted JPS62218888A (ja) 1986-03-20 1986-03-20 センサ装置

Country Status (1)

Country Link
JP (1) JPS62218888A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51140643U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1975-05-06 1976-11-12
JPS5332782U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-08-26 1978-03-22

Also Published As

Publication number Publication date
JPS62218888A (ja) 1987-09-26

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