JPH0437894Y2 - - Google Patents
Info
- Publication number
- JPH0437894Y2 JPH0437894Y2 JP1776686U JP1776686U JPH0437894Y2 JP H0437894 Y2 JPH0437894 Y2 JP H0437894Y2 JP 1776686 U JP1776686 U JP 1776686U JP 1776686 U JP1776686 U JP 1776686U JP H0437894 Y2 JPH0437894 Y2 JP H0437894Y2
- Authority
- JP
- Japan
- Prior art keywords
- coil
- thermocouple
- tip
- temperature
- furnace body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007789 sealing Methods 0.000 claims description 8
- 238000000137 annealing Methods 0.000 claims description 7
- 238000003780 insertion Methods 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1776686U JPH0437894Y2 (cg-RX-API-DMAC7.html) | 1986-02-10 | 1986-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1776686U JPH0437894Y2 (cg-RX-API-DMAC7.html) | 1986-02-10 | 1986-02-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62129057U JPS62129057U (cg-RX-API-DMAC7.html) | 1987-08-15 |
| JPH0437894Y2 true JPH0437894Y2 (cg-RX-API-DMAC7.html) | 1992-09-04 |
Family
ID=30810818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1776686U Expired JPH0437894Y2 (cg-RX-API-DMAC7.html) | 1986-02-10 | 1986-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0437894Y2 (cg-RX-API-DMAC7.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009042070A (ja) * | 2007-08-09 | 2009-02-26 | Sei Hybrid Kk | 半導体製造装置用測温装置及びそれを搭載した半導体製造装置 |
-
1986
- 1986-02-10 JP JP1776686U patent/JPH0437894Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009042070A (ja) * | 2007-08-09 | 2009-02-26 | Sei Hybrid Kk | 半導体製造装置用測温装置及びそれを搭載した半導体製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62129057U (cg-RX-API-DMAC7.html) | 1987-08-15 |
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