JPH04374A - Production of hardened protective film on surface of plastic substrate - Google Patents

Production of hardened protective film on surface of plastic substrate

Info

Publication number
JPH04374A
JPH04374A JP9773490A JP9773490A JPH04374A JP H04374 A JPH04374 A JP H04374A JP 9773490 A JP9773490 A JP 9773490A JP 9773490 A JP9773490 A JP 9773490A JP H04374 A JPH04374 A JP H04374A
Authority
JP
Japan
Prior art keywords
surface
plastic substrate
protective film
production
hardened protective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9773490A
Inventor
Masayoshi Murata
Original Assignee
Mitsubishi Heavy Ind Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Ind Ltd filed Critical Mitsubishi Heavy Ind Ltd
Priority to JP9773490A priority Critical patent/JPH04374A/en
Publication of JPH04374A publication Critical patent/JPH04374A/en
Application status is Pending legal-status Critical

Links

Abstract

PURPOSE: To form a hardened protective film on the surface of a plastic substrate with satisfactory bonding strength by forming an active layer on the surface of the substrate by plasma treatment.
CONSTITUTION: At least one kind of inert gas selected among He, Ne, Xe, Kr and Ar, SiH4, N2O and CH4 are used as reactive gases and an active layer is first formed on the surface of a plastic substrate 10 with plasma of the inert gas. A CVD reaction is then caused with a gaseous mixture of SiH4 with N2O and CH4 to form an SiO2-SiC-SiN film having high adhesive strength to the plastic substrate and high hardness.
COPYRIGHT: (C)1992,JPO&Japio
JP9773490A 1990-04-16 1990-04-16 Production of hardened protective film on surface of plastic substrate Pending JPH04374A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9773490A JPH04374A (en) 1990-04-16 1990-04-16 Production of hardened protective film on surface of plastic substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9773490A JPH04374A (en) 1990-04-16 1990-04-16 Production of hardened protective film on surface of plastic substrate

Publications (1)

Publication Number Publication Date
JPH04374A true JPH04374A (en) 1992-01-06

Family

ID=14200126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9773490A Pending JPH04374A (en) 1990-04-16 1990-04-16 Production of hardened protective film on surface of plastic substrate

Country Status (1)

Country Link
JP (1) JPH04374A (en)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0790592A (en) * 1993-09-23 1995-04-04 Becton Dickinson & Co Method for barrier coating of plastic product
US5523124A (en) * 1992-06-17 1996-06-04 L'air Liquide, Societe Anonyme Pour L'etude Et L'expoloitation Des Procedes Georges Claude Process for producing a silicon oxide deposit on the surface of a metallic or metallized polymer substrate using corona discharge at pressures up to approximately atmospheric
JP2000212312A (en) * 1999-01-19 2000-08-02 Leybold Syst Gmbh Coating of substrate comprising synthetic resin
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
US8834954B2 (en) 2009-05-13 2014-09-16 Sio2 Medical Products, Inc. Vessel inspection apparatus and methods
JP2015098617A (en) * 2013-11-18 2015-05-28 株式会社島津製作所 Film deposition apparatus
US9664626B2 (en) 2012-11-01 2017-05-30 Sio2 Medical Products, Inc. Coating inspection method
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
US10016338B2 (en) 2013-03-11 2018-07-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US10189603B2 (en) 2011-11-11 2019-01-29 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US10201660B2 (en) 2012-11-30 2019-02-12 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5523124A (en) * 1992-06-17 1996-06-04 L'air Liquide, Societe Anonyme Pour L'etude Et L'expoloitation Des Procedes Georges Claude Process for producing a silicon oxide deposit on the surface of a metallic or metallized polymer substrate using corona discharge at pressures up to approximately atmospheric
JPH0790592A (en) * 1993-09-23 1995-04-04 Becton Dickinson & Co Method for barrier coating of plastic product
JP2000212312A (en) * 1999-01-19 2000-08-02 Leybold Syst Gmbh Coating of substrate comprising synthetic resin
US7985188B2 (en) 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
US8834954B2 (en) 2009-05-13 2014-09-16 Sio2 Medical Products, Inc. Vessel inspection apparatus and methods
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US10189603B2 (en) 2011-11-11 2019-01-29 Sio2 Medical Products, Inc. Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus
US9664626B2 (en) 2012-11-01 2017-05-30 Sio2 Medical Products, Inc. Coating inspection method
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
US10201660B2 (en) 2012-11-30 2019-02-12 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like
US9662450B2 (en) 2013-03-01 2017-05-30 Sio2 Medical Products, Inc. Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
US10016338B2 (en) 2013-03-11 2018-07-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
JP2015098617A (en) * 2013-11-18 2015-05-28 株式会社島津製作所 Film deposition apparatus

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