JPH04367721A - Chemically adsorbed fluorine contained laminated monomolecular film and method for preparing the same - Google Patents

Chemically adsorbed fluorine contained laminated monomolecular film and method for preparing the same

Info

Publication number
JPH04367721A
JPH04367721A JP3143497A JP14349791A JPH04367721A JP H04367721 A JPH04367721 A JP H04367721A JP 3143497 A JP3143497 A JP 3143497A JP 14349791 A JP14349791 A JP 14349791A JP H04367721 A JPH04367721 A JP H04367721A
Authority
JP
Japan
Prior art keywords
group
monomolecular
substrate
film
chlorosilyl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3143497A
Other languages
Japanese (ja)
Other versions
JP2633747B2 (en
Inventor
Kazufumi Ogawa
一文 小川
Sanemori Soga
眞守 曽我
Norihisa Mino
規央 美濃
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3143497A priority Critical patent/JP2633747B2/en
Priority to DE1992620717 priority patent/DE69220717T2/en
Priority to EP19920106460 priority patent/EP0511548B1/en
Priority to US07/872,185 priority patent/US5981056A/en
Priority to CA 2067435 priority patent/CA2067435C/en
Priority to KR92007355A priority patent/KR970008069B1/en
Publication of JPH04367721A publication Critical patent/JPH04367721A/en
Priority to US08/281,681 priority patent/US5451459A/en
Priority to US08/443,376 priority patent/US5635246A/en
Application granted granted Critical
Publication of JP2633747B2 publication Critical patent/JP2633747B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites

Abstract

PURPOSE:To provide a chemically adsorbed fluorine contained thin laminated monomolecular film free from pinholes which has a good adhesion with a substrate and excellent water-oil repellent or hydrophilic oil-repellent properties and its preparation method. CONSTITUTION:A substrate 1 having hydroxy groups 2 on the surface is brought into contact with a solution containing compounds having more than one chlorosilyl groups at least at the ends of the molecule, for example CCl3 Si-(CH2)2-(CF2)6-(CH2)2-SiCl3. The treated substrate, after being washed, is reacted with water to form the first monomolecular film 3. The first monomolecular film 3 is again treated with the solution, washed and reacted with water to form the second monomolecular film. A laminated monomolecular film 4 is thus formed. The laminated film can have more than two layers.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、フッ化炭素系化学吸着
単分子累積膜およびその製造方法に関するものである。 さらに詳しくは、撥水撥油性や親水撥油性を必要とする
電化製品、乗り物、産業機器等で用いる従来のフロロカ
ーボン系コーティング膜の代替を目的としたフッ化炭素
系化学吸着単分子膜を累積する発明に関するものである
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluorocarbon chemisorbed monomolecular cumulative film and a method for producing the same. More specifically, we are accumulating fluorocarbon-based chemically adsorbed monomolecular films that are intended to replace conventional fluorocarbon-based coatings used in electrical appliances, vehicles, industrial equipment, etc. that require water and oil repellency and hydrophilic and oil repellency. It is about invention.

【0002】0002

【従来の技術】従来より広く用いられているフロロカー
ボン系コーティング膜の製造方法は、一般に、Al(ア
ルミ)、鋼、ステンレスなどの金属基体などの表面をワ
イヤブラシや化学エッチング等で荒し、さらにプライマ
ー等を塗布した後、ポリ4フッ化エチレン等のフロロカ
ーボン系微粉末をエタノール等に懸濁させた塗料を塗布
し乾燥後、400℃程度で1時間程度加熱(ベーキング
)をおこない、基体表面にフロロカーボン系ポリマーを
焼き付ける方法が用いられてきた。
[Prior Art] The manufacturing method of fluorocarbon coating film, which has been widely used in the past, generally involves roughening the surface of a metal substrate such as Al (aluminum), steel, stainless steel, etc. using a wire brush or chemical etching, and then applying a primer. After coating, a paint made by suspending fine fluorocarbon powder such as polytetrafluoroethylene in ethanol, etc. is applied, and after drying, it is heated (baked) at about 400°C for about 1 hour to coat the surface of the substrate with fluorocarbon. Methods of baking the polymers have been used.

【0003】0003

【発明が解決しようとする課題】しかしながら、この方
法では製造が容易である反面、ポリマーと基体は単にア
ンカー効果でのみ接着されているに過ぎないため、基体
との密着性に限界があり、また、コーティング膜表面は
400℃の高温ベーキングをおこなうため表面が平坦化
されて良好な撥水撥油面が得られなかった。従って、電
化製品や自動車、産業機器等の撥水撥油性のコーティン
グ膜を必要とする機器の製造方法としては不十分であっ
た。
[Problems to be Solved by the Invention] However, while this method is easy to manufacture, there is a limit to the adhesion with the base because the polymer and the base are only bonded by an anchor effect. Since the surface of the coating film was baked at a high temperature of 400° C., the surface was flattened and a good water- and oil-repellent surface could not be obtained. Therefore, it has been unsatisfactory as a manufacturing method for appliances, automobiles, industrial equipment, etc. that require water- and oil-repellent coating films.

【0004】さらにまた、コートされたフロロカーボン
系コーティング膜の表面を親水性とするためプラズマ処
理する方法が用いられているが特性的には満足できるも
のがなかった。
Furthermore, a method of plasma treatment has been used to make the surface of the fluorocarbon coating film hydrophilic, but none of the methods have been satisfactory in terms of characteristics.

【0005】以上述べてきた従来法の欠点に鑑み、本発
明の目的は、基体と密着性よく且つ薄くてピンホールも
無く、しかも撥水撥油性あるいは親水撥油性が優れたフ
ッ素系コーティング膜に代わる薄膜の作成方法を提供し
、電化製品や乗り物、産業機器等に必要とされる撥水撥
油性や親水撥油性、耐熱性、耐候性、耐摩耗性コーティ
ングを必要とする機器の性能を向上させることにある。
In view of the drawbacks of the conventional methods described above, the object of the present invention is to provide a fluorine-based coating film that has good adhesion to a substrate, is thin, has no pinholes, and has excellent water and oil repellency or hydrophilic and oil repellency. Provides an alternative method for creating thin films to improve the performance of equipment that requires water- and oil-repellent, hydrophilic, oil-repellent, heat-resistant, weather-resistant, and abrasion-resistant coatings such as those required for electrical appliances, vehicles, and industrial equipment. It's about letting people know.

【0006】[0006]

【課題を解決するための手段】前記目的を達成するため
、本発明のフッ素系化学吸着単分子累積膜は、基体表面
に、第1の単分子膜が基体とシロキサン結合を介して形
成され、その表面にシロキサン架橋結合を介して少なく
とも第2の単分子膜が形成された累積膜であって、前記
累積膜には少なくともフッ素を側鎖に含む分子鎖が存在
していることを特徴とする。
[Means for Solving the Problems] In order to achieve the above object, the fluorine-based chemically adsorbed monomolecular cumulative film of the present invention has a first monomolecular film formed on the surface of a substrate through siloxane bonds with the substrate, A cumulative film having at least a second monomolecular film formed on its surface via siloxane cross-linking, characterized in that the cumulative film has at least a molecular chain containing fluorine in its side chain. .

【0007】前記本発明の累積膜の構成においては、最
外層の単分子膜の表面が水酸基を有し、累積膜が親水撥
油性を有することが好ましい。また前記本発明の累積膜
の構成においては、最外層の単分子膜の表面がフッ化炭
素基を有し、累積膜が撥水撥油性を有するものであるこ
とが好ましい。
In the structure of the cumulative film of the present invention, it is preferable that the surface of the outermost monomolecular film has hydroxyl groups and that the cumulative film has hydrophilic and oil-repellent properties. Further, in the structure of the cumulative film of the present invention, it is preferable that the surface of the outermost monomolecular film has a fluorocarbon group, and the cumulative film has water and oil repellency.

【0008】次に本発明の第1の製造方法は、表面に水
酸基を含む基体を用意し、クロロシリル基を分子両末端
に含むフッ化炭素系界面活性剤を混ぜた非水系溶媒に接
触させて、前記基体表面の水酸基と前記フッ化炭素系界
面活性剤の一端のクロロシリル基とを反応させる工程と
、非水系有機溶媒を用い前記基体上に残った余分な前記
活性剤を洗浄除去し、次いで水と反応させて、前記基体
上にシロキサン結合を介して第1の単分子膜を形成する
工程とを含み、次いで下記AまたはBから選ばれる工程
を含むことを特徴とする。A:前記第1の単分子膜の表
面に、前記第1の単分子膜を形成する工程を少なくとも
1回繰り返して第2の単分子膜を累積させる。B:前記
第1の単分子膜の表面に、一端にクロロシリル基を有し
他の一端にフッ化炭素基を有する直鎖状フッ化炭素分子
からなるフッ素系界面活性剤を混ぜた非水系溶媒を接触
させて、前記第1の単分子膜の表面の水酸基と前記直鎖
状フッ化炭素分子のクロロシリル基とを反応させ、第2
の単分子膜を累積させる。
Next, in the first production method of the present invention, a substrate containing hydroxyl groups on the surface is prepared, and the substrate is brought into contact with a non-aqueous solvent mixed with a fluorocarbon surfactant containing chlorosilyl groups at both ends of the molecule. , a step of reacting the hydroxyl group on the surface of the substrate with the chlorosilyl group at one end of the fluorocarbon surfactant, washing and removing the excess active agent remaining on the substrate using a non-aqueous organic solvent, and then The method is characterized by comprising a step of reacting with water to form a first monomolecular film on the substrate via siloxane bonds, and then a step selected from A or B below. A: The step of forming the first monomolecular film is repeated at least once on the surface of the first monomolecular film to accumulate a second monomolecular film. B: A non-aqueous solvent mixed with a fluorinated surfactant consisting of a linear fluorocarbon molecule having a chlorosilyl group at one end and a fluorocarbon group at the other end on the surface of the first monomolecular film. to react the hydroxyl groups on the surface of the first monomolecular film and the chlorosilyl groups of the linear fluorocarbon molecules, and
to accumulate a monolayer of

【0009】前記第1の製造方法においては、クロロシ
リル基を分子両末端に含むフッ化炭素系界面活性剤とし
て、     Xp Cl3−p Si−R1 −(CF2 
)n −R2 −SiXq Cl3−q (ただし、n
は整数、R1 ,R2 はアルキル基またはシリコン若
しくは酸素原子を含む置換基を表わすがなくとも良い、
XはHまたはアルキル基の置換基、p、qは0または1
または2)を用いることが好ましい。
In the first production method, Xp Cl3-p Si-R1 -(CF2
)n -R2 -SiXq Cl3-q (however, n
is an integer, R1 and R2 represent an alkyl group or a substituent containing a silicon or oxygen atom, but may be omitted;
X is H or a substituent of an alkyl group, p and q are 0 or 1
Or 2) is preferably used.

【0010】次に本発明の第2の製造方法は、表面に水
酸基を含む基体を用意し、クロロシリル基を一端に含み
他の一端に反応性官能基を含む界面活性剤を混ぜた非水
系溶媒に接触させて、前記基体表面の水酸基と前記活性
剤の一端のクロロシリル基とを反応させる工程と、非水
系有機溶媒を用い前記基体上に残った余分な前記活性剤
を洗浄除去し前記基体上に第1の単分子膜を形成する工
程と、第1の単分子膜表面の反応性官能基をクロロシリ
ル基に対して活性な基に変化させる工程とを含み、次い
で下記AまたはBから選ばれる工程を含むことを特徴と
する。A:前記第1の単分子膜の表面に、一端にクロロ
シリル基を有し他の一端にフッ化炭素基を有する直鎖状
フッ化炭素分子からなるフッ素系界面活性剤を混ぜた非
水系溶媒を接触させて、前記第1の単分子膜の表面の水
酸基と前記直鎖状フッ化炭素分子のクロロシリル基とを
反応させ、第2の単分子膜を累積させる。B:前記第1
の単分子膜の表面に、クロロシリル基を分子両末端に含
むフッ化炭素系界面活性剤を混ぜた非水系溶媒を接触さ
せて、前記第1の単分子膜表面の反応性官能基と前記フ
ッ化炭素系界面活性剤の一端のクロロシリル基とを反応
させる工程と、非水系有機溶媒を用い前記基体上に残っ
た余分な前記活性剤を洗浄除去し、次いで水と反応させ
、第2の単分子膜を累積させる。
Next, in the second production method of the present invention, a substrate containing a hydroxyl group on the surface is prepared, and a non-aqueous solvent mixed with a surfactant containing a chlorosilyl group at one end and a reactive functional group at the other end is prepared. a step of reacting the hydroxyl group on the surface of the substrate with a chlorosilyl group at one end of the activator, and washing and removing the excess activator remaining on the substrate using a non-aqueous organic solvent; a step of forming a first monomolecular film, and a step of changing a reactive functional group on the surface of the first monomolecular film into a group active toward a chlorosilyl group, and then a step of forming a first monomolecular film selected from A or B below. It is characterized by including a process. A: A non-aqueous solvent mixed with a fluorine-based surfactant consisting of a linear fluorocarbon molecule having a chlorosilyl group at one end and a fluorocarbon group at the other end on the surface of the first monomolecular film. are brought into contact with each other to cause the hydroxyl groups on the surface of the first monomolecular film to react with the chlorosilyl groups of the linear fluorocarbon molecules, thereby accumulating a second monomolecular film. B: Said first
A non-aqueous solvent mixed with a fluorocarbon surfactant containing chlorosilyl groups at both ends of the molecule is brought into contact with the surface of the first monolayer, and the reactive functional groups on the surface of the first monolayer are combined with the fluorocarbon surfactant. A step of reacting the chlorosilyl group at one end of the carbonated carbon-based surfactant, washing off the excess active agent remaining on the substrate using a non-aqueous organic solvent, and then reacting with water to form a second monomer. Accumulate molecular membranes.

【0011】前記第2の製造方法においては、クロロシ
リル基を一端に複数個含み他の一端に反応性官能基を含
む界面活性剤として、 R1 −R2 −(CF2 )n −R3 −SiXp
 Cl3−p (ただし、nは整数、R1 は不飽和基
またはジメチルシリル基,R2 、R3 はアルキル基
またはシリコン若しくは酸素原子を含む置換基を表わす
がなくとも良い、XはHまたはアルキル基の置換基、p
は0または1または2)を用いることが好ましい。
In the second production method, R1 -R2 -(CF2)n -R3 -SiXp is used as a surfactant containing a plurality of chlorosilyl groups at one end and a reactive functional group at the other end.
Cl3-p (where n is an integer, R1 is an unsaturated group or a dimethylsilyl group, R2 and R3 represent an alkyl group or a substituent containing silicon or an oxygen atom, but may be omitted; X is H or a substituent of an alkyl group) group, p
It is preferable to use 0, 1 or 2).

【0012】また前記第2の製造方法においては、クロ
ロシリル基を一端に複数個含み他の一端に反応性官能基
を含む界面活性剤として、     HSi(CH3 )2 −R1−(CF2 )
n −R2 −SiXp Cl3−p (ただし、nは
整数、R1、R2 はアルキル基またはシリコン若しく
は酸素原子を含む置換基を表わすがなくとも良い、Xは
Hまたはアルキル基の置換基、pは0または1または2
)を用い、HSi(CH3 )2 −基を化学処理して
HO−基に変換することが好ましい。
In the second production method, HSi(CH3)2-R1-(CF2) is used as the surfactant containing a plurality of chlorosilyl groups at one end and a reactive functional group at the other end.
n -R2 -SiXp Cl3-p (where n is an integer, R1 and R2 represent an alkyl group or a substituent containing a silicon or oxygen atom, but may be omitted, X is H or a substituent of an alkyl group, p is 0 or 1 or 2
) is preferably used to chemically treat the HSi(CH3)2- group to convert it into a HO- group.

【0013】また前記第2の製造方法においては、クロ
ロシリル基を一端に複数個含み他の一端に反応性官能基
を含む界面活性剤として     CH2 =CH−R1−(CF2 )n −R
2 −SiXp Cl3−p (ただし、nは整数、R
1、R2 はアルキル基またはシリコン若しくは酸素原
子を含む置換基を表わすがなくとも良い、XはHまたは
アルキル基の置換基、pは0または1または2)を用い
、反応性ガス雰囲気中でエネルギービームを照射してク
ロルシリル基に対して活性な官能基に変換することが好
ましい。
In the second production method, the surfactant containing a plurality of chlorosilyl groups at one end and a reactive functional group at the other end is CH2=CH-R1-(CF2)n-R.
2 -SiXp Cl3-p (where n is an integer, R
1, R2 represents an alkyl group or a substituent containing a silicon or oxygen atom, but may be omitted; X is H or a substituent of an alkyl group; p is 0, 1, or 2); It is preferable to irradiate the chlorosilyl group with a beam to convert it into an active functional group.

【0014】また、表面に水酸基を含む基体としては、
金属またはセラミックやガラスを用いることが可能であ
り、また、予め表面を酸素を含むプラズマ雰囲気で処理
して親水性化したプラスチックを用いることも可能であ
る。
[0014] Furthermore, as a substrate containing a hydroxyl group on the surface,
It is possible to use metal, ceramic, or glass, and it is also possible to use plastic whose surface has been previously treated in a plasma atmosphere containing oxygen to make it hydrophilic.

【0015】[0015]

【作用】前記本発明の構成によれば、任意の基体表面に
、少なくともフッ素を含むシロキサン系単分子膜が累積
された状態で基体と化学結合(共有結合)を介して形成
できるので、基体と密着性よく且つピンホール無く、厚
さの薄い累積膜とすることができる。
[Operation] According to the structure of the present invention, a siloxane monomolecular film containing at least fluorine can be formed on the surface of any substrate in an accumulated state through chemical bonds (covalent bonds) with the substrate. A thin cumulative film with good adhesion and no pinholes can be obtained.

【0016】また最表面層はフッ化炭素基や水酸基に置
換できるので、撥水撥油性あるいは親水撥油性が優れた
フッ素系コーティング膜に代わる薄膜を提供でき、電化
製品や乗り物、産業機器等に必要とされる撥水撥油性や
親水撥油性、耐熱性、耐候性、耐摩耗性コーティングを
必要とする製品の性能を向上させることができる。
Furthermore, since the outermost layer can be substituted with fluorocarbon groups or hydroxyl groups, it is possible to provide a thin film that can replace fluorine-based coatings with excellent water and oil repellency or hydrophilic oil repellency, and can be used in electrical appliances, vehicles, industrial equipment, etc. It is possible to improve the performance of products that require water and oil repellency, hydrophilic oil repellency, heat resistance, weather resistance, and wear-resistant coatings.

【0017】また本発明の前記第1〜2の製造方法によ
れば、前記累積膜を効率良く合理的にかつ均一に形成で
きる。
Further, according to the first and second manufacturing methods of the present invention, the cumulative film can be formed efficiently, rationally, and uniformly.

【0018】[0018]

【実施例】以下に本発明のフッ化炭素系化学吸着単分子
膜の累積に用いる化学吸着剤と単分子膜の累積方法の実
施例を順に説明する。
EXAMPLES Examples of the chemical adsorbent used for accumulating a fluorocarbon chemically adsorbed monomolecular film and the method of accumulating a monomolecular film according to the present invention will be described below in order.

【0019】本発明に関するフッ化炭素系単分子累積膜
の作製には、両端にクロルシラン基(SiCln X3
−n 基、n=1、2、3、Xは官能基)を有し、内部
にフッ化炭素鎖を有する直鎖状のクロロシラン系界面活
性剤なら殆どすべてが使用可能であるが、特に、クロロ
シリル基を分子両末端に複数個含むフッ化炭素系界面活
性剤としてXp Cl3−p Si−R1 −(CF2
 )n −R2 −SiXq Cl3−q (ただし、
nは整数、R1 ,R2 はアルキル基またはシリコン
や酸素原子を含む置換基を表わすがなくとも良い、Xは
Hまたはアルキル基等の置換基、p、qは0または1ま
たは2)や、CF3 −(CF2 )n −R−SiX
q Cl3−q (ただし、nは整数、Rはアルキル基
またはシリコンや酸素原子を含む置換基を表わすがなく
とも良い、XはHまたはアルキル基等の置換基、qは0
または1または2)を用いると好都合である。
In the production of the fluorocarbon-based monomolecular cumulative film according to the present invention, chlorosilane groups (SiCln
-n group, n = 1, 2, 3, Xp Cl3-p Si-R1 -(CF2
)n -R2 -SiXq Cl3-q (However,
n is an integer, R1 and R2 represent an alkyl group or a substituent containing a silicon or oxygen atom, but may be omitted; X is H or a substituent such as an alkyl group; p and q are -(CF2)n-R-SiX
q Cl3-q (However, n is an integer, R represents an alkyl group or a substituent containing a silicon or oxygen atom, but may be omitted, X is a substituent such as H or an alkyl group, q is 0
or 1 or 2) is conveniently used.

【0020】また、他のフッ化炭素系化学吸着単分子膜
を累積する方法として、一端にクロルシラン基(SiC
ln X3−n 基、n=1、2、3、Xは官能基)を
他の一端に不飽和基を有し、内部にフッ化炭素鎖を有す
る直鎖状のクロロシラン系界面活性剤なら殆どすべてが
使用可能であるが、特に、フッ化炭素系界面活性剤とし
て、R1 −R2 −(CF2 )n −R3 −Si
Xp Cl3−p (ただし、nは整数、R1 は不飽
和基またはジメチルシリル基,R2 、R3 はアルキ
ル基またはシリコンや酸素原子を含む置換基を表わすが
なくとも良い、XはHまたはアルキル基等の置換基、p
は0または1または2)を用いると好都合であるが、以
下、Cl3 Si−(CH2 )2 −(CF2 )6
 −(CH2 )2 −SiCl3 、CF3 −(C
F2 )7 −(CH2 )2 −SiCl3 、CH
2 =CH−(CF2 )6 −(CH2 )2 −S
iCl3 、HSi(CH3 )2 −(CH2 )2
 −(CF2 )6 −(CH2 )2 −SiCl3
 を用いてそれぞれ説明する。
[0020] In addition, as another method for accumulating a fluorocarbon-based chemically adsorbed monomolecular film, a chlorosilane group (SiC
If it is a linear chlorosilane surfactant that has a ln All can be used, but especially as fluorocarbon surfactants, R1-R2-(CF2)n-R3-Si
Xp Cl3-p (where n is an integer, R1 is an unsaturated group or dimethylsilyl group, R2 and R3 represent an alkyl group or a substituent containing silicon or oxygen atom, but may be omitted, X is H or an alkyl group, etc.) substituent, p
It is convenient to use 0 or 1 or 2), but below, Cl3Si-(CH2)2-(CF2)6
-(CH2)2-SiCl3, CF3-(C
F2)7-(CH2)2-SiCl3, CH
2 =CH-(CF2)6-(CH2)2-S
iCl3, HSi(CH3)2-(CH2)2
-(CF2)6 -(CH2)2 -SiCl3
Each will be explained using

【0021】実施例1 まず、図1に示すように、親水性基体1(金属やセラミ
ック、ガラス、その他表面が酸化された基体ならよいが
、プラスチック等の撥水性基体の場合は、表面を重クロ
ム酸で処理して酸化し親水性にすればよい)を用意し(
図1(a))、よく乾燥した後、分子両末端にクロロシ
リル基を複数個含む物質、例えばCl3 Si−(CH
2 )2 −(CF2 )6 −(CH2 )2 −S
iCl3 を用い、2wt%程度の濃度で溶かした80
wt%ヘキサデカン(トルエン、キシレン、ジシクロヘ
キシル等でもよい)、12wt%四塩化炭素、8wt%
クロロホルム溶液を調整し、前記基体を2時間程度浸漬
すると、親水性基体の表面は水酸基2が多数含まれてい
るので、クロロシリル(−SiCl)基を分子両末端に
複数個含む物質の何れか片方のSiCl基と前記水酸基
が反応し脱塩酸反応が生じ基体表面全面に亘り、下記化
1に示す結合が生成される。
Example 1 First, as shown in FIG. 1, a hydrophilic substrate 1 (metal, ceramic, glass, or other substrate with an oxidized surface may be used, but in the case of a water-repellent substrate such as plastic, the surface is Prepare (by treating it with chromic acid to oxidize and make it hydrophilic).
Figure 1(a)), after drying thoroughly, a substance containing multiple chlorosilyl groups at both ends of the molecule, such as Cl3Si-(CH
2)2-(CF2)6-(CH2)2-S
80 dissolved at a concentration of about 2 wt% using iCl3.
wt% hexadecane (toluene, xylene, dicyclohexyl, etc. may also be used), 12 wt% carbon tetrachloride, 8 wt%
When a chloroform solution is prepared and the substrate is immersed for about 2 hours, the surface of the hydrophilic substrate contains a large number of hydroxyl groups 2, so either one of the substances containing multiple chlorosilyl (-SiCl) groups at both ends of the molecule. The SiCl group reacts with the hydroxyl group to cause a dehydrochlorination reaction, and the bond shown in Formula 1 below is generated over the entire surface of the substrate.

【0022】[0022]

【化1】[Chemical formula 1]

【0023】そこでさらに、有機溶剤でよく洗浄し基体
表面に残留した余分の界面活性剤を除去し、水洗すると
、下記化2で表わされるシロキサン系単分子膜3が、基
体表面と化学結合(共有結合)した状態でおよそ15オ
ングストロームの膜厚で形成できた(図1(b))。
Then, the siloxane monomolecular film 3 represented by the following formula 2 is chemically bonded (covalently In the bonded state, a film thickness of approximately 15 angstroms could be formed (FIG. 1(b)).

【0024】[0024]

【化2】[Case 2]

【0025】つぎに、化学吸着工程から水洗工程までを
もう一度繰り返せば図1(c)で示される2分子膜4を
作成できる。以下、同様に化学吸着工程から水洗工程を
必要とする層数分繰り返すと、表面が水酸基で被われた
親水撥油性できわめて密着強度の高いフッ化炭素系化学
吸着単分子累積膜を作成できた。
Next, by repeating the chemical adsorption step to the water washing step once again, the bimolecular film 4 shown in FIG. 1(c) can be produced. By repeating the chemisorption process and water washing process for the required number of layers, a fluorocarbon chemisorption monomolecular cumulative film with a hydrophilic and oil-repellent surface covered with hydroxyl groups and extremely high adhesion strength was created. .

【0026】実施例2 実施例1で2層単分子膜を累積した後、一端にクロロシ
リル基を複数個含み他の一端が3フッ化炭素で置換され
た物質、例えばF3 C−(CF2)7 −(CH2 
)2 −SiCl3   を用い、2wt%程度の濃度
で溶かした80wt%ヘキサデカン(トルエン、キシレ
ン、ジシクロヘキシル等でもよい)、12wt%四塩化
炭素、8wt%クロロホルム溶液を調整し、前記累積膜
の作成された基体を2時間程度浸漬すると、累積膜の表
面は水酸基2が多数含まれているので、一端にクロロシ
リル基を複数個含み他の一端が3フッ化炭素で置換され
た物質のSiCl基と前記水酸基が反応し脱塩酸反応が
生じ基体表面全面に亘り、下記化3で示す結合が生成さ
れる。
Example 2 After accumulating a two-layer monomolecular film in Example 1, a substance containing a plurality of chlorosilyl groups at one end and the other end substituted with carbon trifluoride, such as F3 C-(CF2)7 -(CH2
)2 -SiCl3, a solution of 80 wt% hexadecane (toluene, xylene, dicyclohexyl, etc. may also be used), 12 wt% carbon tetrachloride, and 8 wt% chloroform dissolved at a concentration of about 2 wt% was prepared, and the cumulative film was prepared. When the substrate is immersed for about 2 hours, the surface of the cumulative film contains a large number of hydroxyl groups 2, so that the SiCl group of the substance containing multiple chlorosilyl groups at one end and substituted with carbon trifluoride at the other end and the hydroxyl group. reacts, a dehydrochlorination reaction occurs, and a bond shown in the following formula 3 is generated over the entire surface of the substrate.

【0027】[0027]

【化3】[Chemical formula 3]

【0028】そこで、さらに、有機溶剤でよく洗浄し基
体表面に残留した余分の界面活性剤を除去すると、表面
がフッ化炭素基で被われた撥水撥油性できわめて密着強
度の高いフッ化炭素系化学吸着単分子累積膜5を製造で
きた(図2)。
Therefore, when the excess surfactant remaining on the surface of the substrate is removed by thorough washing with an organic solvent, the surface of the substrate is covered with fluorocarbon groups, which is water- and oil-repellent and has extremely high adhesion strength. A chemically adsorbed monomolecular cumulative film 5 could be produced (FIG. 2).

【0029】なお、上記実施例では、Cl3 Si−(
CH2 )2 −(CF2 )6 −(CH2 )2 
−SiCl3 、F3 C−(CF2 )7 −(CH
2 )2 −SiCl3 を用いたが、他の例として下
記に示す化合物なども使用できる。
[0029] In the above example, Cl3 Si-(
CH2)2-(CF2)6-(CH2)2
-SiCl3,F3C-(CF2)7-(CH
2) Although 2-SiCl3 was used, the following compounds can also be used as other examples.

【0030】Cl3 Si−(CH2 )2 −(CF
2 )8 −(CH2 )2 −SiCl3 、Cl(
CH3 )2 Si−(CH2 )2 −(CF2 )
6 −(CH2 )2 −SiCl3 、Cl(CH3
 )2 Si−(CH2 )2 −(CF2 )8 −
(CH2 )2 −SiCl3 、Cl3 Si−(C
H2 )2 −(CF2 )6 −(CH2 )2 −
Si(CH3 )2 Cl、Cl3 Si−(CH2 
)2 −(CF2 )8 −(CH2 )2 −Si(
CH3 )2 Cl、F3 C−(CF2 )9 −(
CH2 )2 −SiCl3 、F3 C−(CF2 
)5 −(CH2 )2 −SiCl3 、CF3 C
H2 O(CH2 )15SiCl3 、CF3 (C
H2 )2 Si(CH3 )2 (CH2 )15S
iCl3 、CCF3 (CF2 )2 Si(CH3
 )2 (CH2 )9 SiCl3 、CF3 CO
O(CH2 )15SiCl3 、などである。
Cl3Si-(CH2)2-(CF
2)8-(CH2)2-SiCl3, Cl(
CH3)2Si-(CH2)2-(CF2)
6-(CH2)2-SiCl3, Cl(CH3
)2 Si-(CH2)2-(CF2)8-
(CH2)2-SiCl3, Cl3Si-(C
H2)2-(CF2)6-(CH2)2-
Si(CH3)2Cl, Cl3Si-(CH2
)2-(CF2)8-(CH2)2-Si(
CH3)2Cl, F3C-(CF2)9-(
CH2)2-SiCl3, F3C-(CF2
)5-(CH2)2-SiCl3, CF3C
H2O(CH2)15SiCl3, CF3(C
H2)2Si(CH3)2(CH2)15S
iCl3 , CCF3 (CF2 )2 Si(CH3
)2 (CH2)9 SiCl3, CF3 CO
O(CH2)15SiCl3, etc.

【0031】実施例3 まず、図3に示すように、親水性基体1(金属やセラミ
ック、ガラス、その他表面が酸化された基体ならよいが
、プラスチック等の撥水性基体の場合は、表面を重クロ
ム酸で処理して酸化し親水性にすればよい)を用意し(
図3(a))、よく乾燥した後、一端にクロロシリル基
(−SiCl)を複数個含み他の一端にビニル基を含む
物質、例えばCH2 =CH−(CF2 )6 −(C
H2 )2 −SiCl3 を用い、2wt%程度の濃
度で溶かした80wt%ヘキサデカン(トルエン、キシ
レン、ジシクロヘキシル等でもよい)、12wt%四塩
化炭素、8wt%クロロホルム溶液を調整し、前記基体
を2時間程度浸漬すると、親水性基体の表面は水酸基2
が多数含まれているので、一端にクロロシリル基(−S
iCl)を複数個含み他の一端にビニル基を含む物質の
SiCl基と前記水酸基が反応し脱塩酸反応が生じ基体
表面全面に亘り、下記化4に示す単分子膜6が生成され
る(図3(b))。
Example 3 First, as shown in FIG. 3, a hydrophilic substrate 1 (metal, ceramic, glass, or other substrate with an oxidized surface may be used, but in the case of a water-repellent substrate such as plastic, the surface is Prepare (by treating it with chromic acid to oxidize and make it hydrophilic).
In Figure 3(a)), after drying thoroughly, a substance containing multiple chlorosilyl groups (-SiCl) at one end and a vinyl group at the other end, such as CH2 = CH-(CF2)6 -(C
Using H2)2-SiCl3, a solution of 80 wt% hexadecane (toluene, xylene, dicyclohexyl, etc. may also be used), 12 wt% carbon tetrachloride, and 8 wt% chloroform dissolved at a concentration of about 2 wt% was prepared, and the substrate was heated for about 2 hours. When immersed, the surface of the hydrophilic substrate has 2 hydroxyl groups.
contains a large number of chlorosilyl groups (-S) at one end.
The hydroxyl group reacts with the SiCl group of a substance containing a plurality of iCl) containing a vinyl group at the other end to cause a dehydrochloric acid reaction, and a monomolecular film 6 shown in the following chemical formula 4 is generated over the entire surface of the substrate (Fig. 3(b)).

【0032】[0032]

【化4】[C4]

【0033】そこで、さらに、有機溶剤でよく洗浄し基
体表面に残留した余分の界面活性剤を除去し反応性ガス
雰囲気中でエネルギービーム(電子線やイオンビーム、
ガンマ線、紫外線等)を照射(例えば、空気中で電子線
を5Mrad程度照射)すると、下記化5〜7で表わさ
れる分子の集まった単分子膜7が表面と化学結合した状
態で形成できた(図3(c))。
Therefore, the substrate is thoroughly washed with an organic solvent to remove excess surfactant remaining on the surface of the substrate, and then subjected to an energy beam (electron beam, ion beam, etc.) in a reactive gas atmosphere.
When irradiated with gamma rays, ultraviolet rays, etc. (for example, irradiated with an electron beam of about 5 Mrad in the air), a monomolecular film 7 consisting of molecules represented by the following formulas 5 to 7 was formed in a state of chemical bonding with the surface ( Figure 3(c)).

【0034】[0034]

【化5】[C5]

【0035】[0035]

【化6】[C6]

【0036】[0036]

【化7】[C7]

【0037】つぎに、CH2 =CH−(CF2 )6
 −(CH2 )2 −SiCl3 を用いた化学吸着
工程から水洗工程をもう一度繰り返すと図3(d)で示
されるフッ化炭素基を含む2分子膜8を作成できた。
Next, CH2=CH-(CF2)6
By repeating the chemical adsorption process using -(CH2)2-SiCl3 and the water washing process once again, a bilayer film 8 containing fluorocarbon groups as shown in FIG. 3(d) was created.

【0038】以下、同様に化学吸着工程からエネルギー
ビーム照射工程を必要とする層数分繰り返すと、表面が
水酸基やイミノ基等で被われた親水撥油性できわめて密
着強度の高いフッ化炭素系化学吸着単分子累積膜を作成
できた。
Thereafter, by repeating the chemical adsorption process to the energy beam irradiation process for the number of layers required, a fluorocarbon chemical whose surface is covered with hydroxyl groups, imino groups, etc. has hydrophilic oil repellency and extremely high adhesion strength. We were able to create an adsorbed monomolecular cumulative film.

【0039】実施例4 実施例3で1層単分子膜を形成した後、一端にクロロシ
リル基を複数個含み他の一端が3フッ化炭素で置換され
た物質、例えばF3 C−(CF2)7 −(CH2 
)2 −SiCl3 を用い、2wt%程度の濃度で溶
かした80wt%ヘキサデカン(トルエン、キシレン、
ジシクロヘキシル等でもよい)、12wt%四塩化炭素
、8wt%クロロホルム溶液を調整し、前記累積膜の作
成された基体を2時間程度浸漬すると、累積膜の表面は
水酸基やイミノ基が多数含まれているので、一端にクロ
ロシリル基を複数個含み他の一端が3フッ化炭素で置換
された物質のSiCl基と前記水酸基が反応し脱塩酸反
応が生じ基体表面全面に亘り、下記化8に示す結合が生
成される。
Example 4 After forming a one-layer monomolecular film in Example 3, a substance containing a plurality of chlorosilyl groups at one end and substituted with carbon trifluoride at the other end, for example, F3 C-(CF2)7 -(CH2
)2 -SiCl3, 80 wt% hexadecane (toluene, xylene,
Dicyclohexyl, etc.), 12wt% carbon tetrachloride, 8wt% chloroform solution is prepared and the substrate on which the cumulative film has been formed is immersed for about 2 hours.The surface of the cumulative film contains a large number of hydroxyl groups and imino groups. Therefore, the SiCl group of a substance containing multiple chlorosilyl groups at one end and substituted with carbon trifluoride at the other end reacts with the hydroxyl group to cause a dehydrochlorination reaction, and the bond shown in the following chemical formula 8 is formed over the entire surface of the substrate. generated.

【0040】[0040]

【化8】[Chemical formula 8]

【0041】そこで、さらに、有機溶剤でよく洗浄し基
体表面に残留した余分の界面活性剤を除去すると、表面
がフッ化炭素基で被われた撥水撥油性できわめて密着強
度の高いフッ化炭素系化学吸着単分子累積膜9を製造で
きた(図4)。
Therefore, when the excess surfactant remaining on the surface of the substrate is removed by thorough washing with an organic solvent, the surface of the substrate is covered with fluorocarbon groups, which is water- and oil-repellent and has extremely high adhesion strength. A chemically adsorbed monomolecular cumulative film 9 could be produced (FIG. 4).

【0042】なお、上記実施例で、最後の吸着工程でC
l3 Si−(CH2 )2 −(CF2 )6 −(
CH2 )2 −SiCl3   を用いれば表面が親
水性のフッ化炭素系化学吸着単分子累積膜を製造できる
[0042] In the above example, in the final adsorption step, C
l3Si-(CH2)2-(CF2)6-(
If CH2)2-SiCl3 is used, a fluorocarbon-based chemically adsorbed monomolecular cumulative film having a hydrophilic surface can be produced.

【0043】また、上記実施例では、CH2 =CH−
(CF2 )6 −(CH2 )2 −SiCl3 や
F3 C−(CF2 )7 −(CH2 )2 −Si
Cl3 を用いたが、下記の化合物でも利用できる。
Furthermore, in the above embodiment, CH2=CH-
(CF2)6-(CH2)2-SiCl3 and F3C-(CF2)7-(CH2)2-Si
Although Cl3 was used, the following compounds can also be used.

【0044】   CH2 =CH−(CF2 )8 −(CH2 )
2 −SiCl3   F3 C−(CF2 )9 −
(CH2 )2 −SiCl3         F3
 C−(CF2 )5 −(CH2 )2 −SiCl
3         CF3 CH2 O(CH2 )
15SiCl3   CF3 (CH2 )2 Si(
CH3 )2 (CH2 )15SiCl3   F(
CF2 )4 (CH2 )2 Si(CH3 )2 
(CH2 )9 SiCl3   CF3 COO(C
H2 )15SiCl3   などである。
CH2=CH-(CF2)8-(CH2)
2-SiCl3F3C-(CF2)9-
(CH2)2-SiCl3F3
C-(CF2)5-(CH2)2-SiCl
3 CF3 CH2 O(CH2 )
15SiCl3 CF3 (CH2 )2 Si(
CH3 )2 (CH2 )15SiCl3 F(
CF2 )4 (CH2 )2 Si(CH3 )2
(CH2 )9 SiCl3 CF3 COO(C
H2)15SiCl3, etc.

【0045】実施例5 まず、図5に示すように、親水性基体1(金属やセラミ
ック、ガラス、その他表面が酸化された基体ならよいが
、プラスチック等の撥水性基体の場合は、表面を重クロ
ム酸で処理して酸化し親水性にすればよい)を用意し(
図5(a))、よく乾燥した後、一端にクロロシリル基
(−SiCl)を複数個含み他の一端にジメチルシリル
基(HSi(CH3 )2 −)を含む物質、例えばH
Si(CH3 )2 −(CH2 )2 −(CF2 
)6 −(CH2 )2 −SiCl3 を用い、2w
t%程度の濃度で溶かした80wt%ヘキサデカン(ト
ルエン、キシレン、ジシクロヘキシル等でもよい)、1
2wt%四塩化炭素、8wt%クロロホルム溶液を調整
し、前記基体を2時間程度浸漬すると、親水性基体の表
面は水酸基2が多数含まれているので、一端にクロロシ
リル基(−SiCl)を複数個含み他の一端にジメチル
シリル基を含む物質のSiCl基と前記水酸基が反応し
脱塩酸反応が生じ基体表面全面に亘り、下記化9で示す
単分子膜10が生成される(図5(b))。
Example 5 First, as shown in FIG. 5, a hydrophilic substrate 1 (metal, ceramic, glass, or any other substrate with an oxidized surface may be used; however, in the case of a water-repellent substrate such as plastic, the surface is Prepare (by treating it with chromic acid to oxidize and make it hydrophilic).
In Figure 5(a)), after being thoroughly dried, a substance containing a plurality of chlorosilyl groups (-SiCl) at one end and a dimethylsilyl group (HSi(CH3)2-) at the other end, such as H
Si(CH3)2-(CH2)2-(CF2
)6-(CH2)2-SiCl3, 2w
80wt% hexadecane (toluene, xylene, dicyclohexyl, etc. may also be used) dissolved at a concentration of about t%, 1
When a 2wt% carbon tetrachloride and 8wt% chloroform solution is prepared and the substrate is immersed for about 2 hours, the surface of the hydrophilic substrate contains a large number of hydroxyl groups 2, so a plurality of chlorosilyl groups (-SiCl) are added to one end. The SiCl group of the substance containing a dimethylsilyl group at the other end reacts with the hydroxyl group to cause a dehydrochloric acid reaction, and a monomolecular film 10 shown in the following formula 9 is formed over the entire surface of the substrate (FIG. 5(b)) ).

【0046】[0046]

【化9】[Chemical formula 9]

【0047】そこで、さらに、有機溶剤でよく洗浄し基
体表面に残留した余分の界面活性剤を除去した後、KF
およびKHCO3 、MeOH、THFを含むH2 O
2 溶液で10時間程度処理すると、下記化10で表わ
される単分子膜11が表面と化学結合した状態で形成で
きた(図5(c))。
Therefore, after thoroughly washing with an organic solvent to remove excess surfactant remaining on the surface of the substrate, KF
and H2O containing KHCO3, MeOH, THF
2 solution for about 10 hours, a monomolecular film 11 represented by the following chemical formula 10 was formed in a state chemically bonded to the surface (FIG. 5(c)).

【0048】[0048]

【化10】[Chemical formula 10]

【0049】つぎに、HSi(CH3 )2 −(CH
3 )2 −(CF2 )6 −(CH2 )2 −S
iCl3 を用いた化学吸着工程からH2 O2 処理
工程をもう一度繰り返すと、図5(d)で示されるフッ
化炭素基を含む2分子膜12を作成できた。
Next, HSi(CH3)2-(CH
3)2-(CF2)6-(CH2)2-S
By repeating the chemisorption process using iCl3 and the H2O2 treatment process once again, a bilayer film 12 containing fluorocarbon groups as shown in FIG. 5(d) was created.

【0050】以下、同様に化学吸着工程からH2 O2
 処理工程を必要とする層数分繰り返せば、表面が水酸
基で被われた親水撥油性できわめて密着強度の高いフッ
化炭素系化学吸着単分子累積膜を作成できた。
[0050] Similarly, H2 O2 is extracted from the chemical adsorption step.
By repeating the treatment process for the required number of layers, it was possible to create a fluorocarbon chemisorbed monomolecular cumulative film whose surface was covered with hydroxyl groups, which was hydrophilic and oil-repellent and had extremely high adhesion strength.

【0051】なお、上記実施例で、最後の吸着工程でC
F3 −(CF2 )7 −(CH2 )2 −SiC
l3 を用いれば表面が撥水撥油性のフッ化炭素系化学
吸着単分子累積膜を製造できる。
[0051] In the above example, in the last adsorption step, C
F3-(CF2)7-(CH2)2-SiC
By using l3, it is possible to produce a fluorocarbon chemisorbed monomolecular cumulative film whose surface is water- and oil-repellent.

【0052】[0052]

【発明の効果】以上本発明によれば、任意の基体表面に
、少なくともフッ素を含むフッ化炭素系単分子膜が累積
された状態で基体と化学結合(共有結合)を介して形成
でき、しかも最表面層はフッ化炭素基や水酸基に置換で
きるので、基体と密着性よく且つピンホール無く、しか
も撥水撥油性あるいは親水撥油性が優れたフッ素系コー
ティング膜に代わる薄膜を提供でき、電化製品や乗り物
、産業機器等に必要とされる撥水撥油性や親水撥油性、
耐熱性、耐候性、耐摩耗性コーティングを必要とする機
器の性能を向上できる効果がある。
[Effects of the Invention] According to the present invention, a fluorocarbon monomolecular film containing at least fluorine can be formed on the surface of any substrate in an accumulated state through chemical bonds (covalent bonds) with the substrate. Since the outermost layer can be substituted with fluorocarbon groups or hydroxyl groups, it is possible to provide a thin film that has good adhesion to the substrate, has no pinholes, and has excellent water and oil repellency or hydrophilic oil repellency as an alternative to fluorine-based coating films, making it ideal for electrical appliances. Water and oil repellency and hydrophilic oil repellency required for vehicles, industrial equipment, etc.
It has the effect of improving the performance of equipment that requires heat-resistant, weather-resistant, and wear-resistant coatings.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】本願発明の表面が親水基で被われた親水撥油性
フッ化炭素系化学吸着単分子累積膜の製造方法を説明す
るために用いた工程概念図である。
FIG. 1 is a process conceptual diagram used to explain the method for producing a hydrophilic and oil-repellent fluorocarbon chemisorption monomolecular cumulative film whose surface is covered with hydrophilic groups according to the present invention.

【図2】本願発明の表面がフッ化炭素基被われた撥水撥
油性フッ化炭素系化学吸着単分子累積膜の製造方法を説
明するために用いた工程概念図である。
FIG. 2 is a process conceptual diagram used to explain the method of manufacturing a water- and oil-repellent fluorocarbon-based chemically adsorbed monomolecular cumulative film whose surface is covered with fluorocarbon groups according to the present invention.

【図3】本願発明の表面が親水基で被われた親水撥油性
フッ化炭素系化学吸着単分子累積膜の製造方法を説明す
るために用いた工程概念図である。
FIG. 3 is a process conceptual diagram used to explain the method of manufacturing a hydrophilic and oil-repellent fluorocarbon-based chemically adsorbed monomolecular cumulative film whose surface is covered with hydrophilic groups according to the present invention.

【図4】本願発明の表面がフッ化炭素基被われた撥水撥
油性フッ化炭素系化学吸着単分子累積膜の製造方法を説
明するために用いた工程概念図である。
FIG. 4 is a process conceptual diagram used to explain the method of manufacturing a water- and oil-repellent fluorocarbon-based chemically adsorbed monomolecular cumulative film whose surface is covered with fluorocarbon groups according to the present invention.

【図5】本願発明の表面がフッ化炭素基被われた親水撥
油性フッ化炭素系化学吸着単分子累積膜の製造方法を説
明するために用いた工程概念図である。
FIG. 5 is a process conceptual diagram used to explain the method of manufacturing a hydrophilic and oil-repellent fluorocarbon-based chemically adsorbed monomolecular cumulative film whose surface is covered with fluorocarbon groups according to the present invention.

【符号の説明】[Explanation of symbols]

1    基体 2    水酸基 1 Base 2 Hydroxyl group

Claims (11)

【特許請求の範囲】[Claims] 【請求項1】  基体表面に、第1の単分子膜が基体と
シロキサン結合を介して形成され、その表面にシロキサ
ン架橋結合を介して少なくとも第2の単分子膜が形成さ
れた累積膜であって、前記累積膜には少なくともフッ素
を側鎖に含む分子鎖が存在していることを特徴とするフ
ッ素系化学吸着単分子累積膜。
1. A cumulative film in which a first monomolecular film is formed on the surface of a substrate through siloxane bonds with the substrate, and at least a second monomolecular film is formed on the surface of the first monomolecular film through siloxane crosslinks. The fluorine-based chemically adsorbed monomolecular cumulative film is characterized in that the cumulative film contains at least a molecular chain containing fluorine in its side chain.
【請求項2】  最外層の単分子膜の表面が水酸基を有
し、累積膜が親水撥油性を有する請求項1に記載のフッ
素系化学吸着単分子累積膜。
2. The fluorine-based chemically adsorbed monomolecular cumulative film according to claim 1, wherein the surface of the outermost monomolecular film has hydroxyl groups, and the cumulative film has hydrophilic and oil-repellent properties.
【請求項3】  最外層の単分子膜の表面がフッ化炭素
基を有し、累積膜が撥水撥油性を有する請求項1に記載
のフッ素系化学吸着単分子累積膜。
3. The fluorine-based chemically adsorbed monomolecular cumulative film according to claim 1, wherein the surface of the outermost monomolecular film has a fluorocarbon group, and the cumulative film has water and oil repellency.
【請求項4】  表面に水酸基を含む基体を用意し、ク
ロロシリル基を分子両末端に含むフッ化炭素系界面活性
剤を混ぜた非水系溶媒に接触させて、前記基体表面の水
酸基と前記フッ化炭素系界面活性剤の一端のクロロシリ
ル基とを反応させる工程と、非水系有機溶媒を用い前記
基体上に残った余分な前記活性剤を洗浄除去し、次いで
水と反応させて、前記基体上にシロキサン結合を介して
第1の単分子膜を形成する工程とを含み、次いで下記A
またはBから選ばれる工程を含むことを特徴とするフッ
素系化学吸着単分子累積膜の製造方法。A:前記第1の
単分子膜の表面に、前記第1の単分子膜を形成する工程
を少なくとも1回繰り返して第2の単分子膜を累積させ
る。B:前記第1の単分子膜の表面に、一端にクロロシ
リル基を有し他の一端にフッ化炭素基を有する直鎖状フ
ッ化炭素分子からなるフッ素系界面活性剤を混ぜた非水
系溶媒を接触させて、前記第1の単分子膜の表面の水酸
基と前記直鎖状フッ化炭素分子のクロロシリル基とを反
応させ、第2の単分子膜を累積させる。
4. A substrate having a hydroxyl group on its surface is prepared, and the hydroxyl group on the surface of the substrate is brought into contact with a non-aqueous solvent mixed with a fluorocarbon surfactant containing chlorosilyl groups at both ends of the molecule, so that the hydroxyl group on the surface of the substrate and the fluoride A step of reacting the carbon-based surfactant with the chlorosilyl group at one end, washing off the excess surfactant remaining on the substrate using a non-aqueous organic solvent, and then reacting with water to form a carbon-based surfactant on the substrate. forming a first monomolecular film through siloxane bonds, and then the following A
A method for producing a fluorine-based chemically adsorbed monomolecular cumulative film, comprising a step selected from B or B. A: The step of forming the first monomolecular film is repeated at least once on the surface of the first monomolecular film to accumulate a second monomolecular film. B: A non-aqueous solvent mixed with a fluorinated surfactant consisting of a linear fluorocarbon molecule having a chlorosilyl group at one end and a fluorocarbon group at the other end on the surface of the first monomolecular film. are brought into contact with each other to cause the hydroxyl groups on the surface of the first monomolecular film to react with the chlorosilyl groups of the linear fluorocarbon molecules, thereby accumulating a second monomolecular film.
【請求項5】  クロロシリル基を分子両末端に含むフ
ッ化炭素系界面活性剤として、     Xp Cl3−p Si−R1 −(CF2 
)n −R2 −SiXq Cl3−q (ただし、n
は整数、R1 ,R2 はアルキル基またはシリコン若
しくは酸素原子を含む置換基を表わすがなくとも良い、
XはHまたはアルキル基の置換基、p、qは0または1
または2)を用いる請求項4に記載のフッ素系化学吸着
単分子累積膜の製造方法。
5. Xp Cl3-p Si-R1 -(CF2
)n -R2 -SiXq Cl3-q (however, n
is an integer, R1 and R2 represent an alkyl group or a substituent containing a silicon or oxygen atom, but may be omitted;
X is H or a substituent of an alkyl group, p and q are 0 or 1
or 2), the method for producing a fluorine-based chemically adsorbed monomolecular cumulative film according to claim 4.
【請求項6】  表面に水酸基を含む基体を用意し、ク
ロロシリル基を一端に含み他の一端に反応性官能基を含
む界面活性剤を混ぜた非水系溶媒に接触させて、前記基
体表面の水酸基と前記活性剤の一端のクロロシリル基と
を反応させる工程と、非水系有機溶媒を用い前記基体上
に残った余分な前記活性剤を洗浄除去し前記基体上に第
1の単分子膜を形成する工程と、第1の単分子膜表面の
反応性官能基をクロロシリル基に対して活性な基に変化
させる工程とを含み、次いで下記AまたはBから選ばれ
る工程を含むことを特徴とするフッ素系化学吸着単分子
累積膜の製造方法。A:前記第1の単分子膜の表面に、
一端にクロロシリル基を有し他の一端にフッ化炭素基を
有する直鎖状フッ化炭素分子からなるフッ素系界面活性
剤を混ぜた非水系溶媒を接触させて、前記第1の単分子
膜の表面の水酸基と前記直鎖状フッ化炭素分子のクロロ
シリル基とを反応させ、第2の単分子膜を累積させる。 B:前記第1の単分子膜の表面に、クロロシリル基を分
子両末端に含むフッ化炭素系界面活性剤を混ぜた非水系
溶媒を接触させて、前記第1の単分子膜表面の反応性官
能基と前記フッ化炭素系界面活性剤の一端のクロロシリ
ル基とを反応させる工程と、非水系有機溶媒を用い前記
基体上に残った余分な前記活性剤を洗浄除去し、次いで
水と反応させ、第2の単分子膜を累積させる。
6. A substrate having a hydroxyl group on the surface is prepared, and the hydroxyl group on the surface of the substrate is removed by contacting it with a non-aqueous solvent mixed with a surfactant containing a chlorosilyl group at one end and a reactive functional group at the other end. and a chlorosilyl group at one end of the activator, and washing away excess activator remaining on the substrate using a non-aqueous organic solvent to form a first monomolecular film on the substrate. and a step of converting a reactive functional group on the surface of the first monolayer into a group active toward a chlorosilyl group, and then a step selected from A or B below. A method for producing a chemisorbed monomolecular cumulative film. A: On the surface of the first monolayer,
A non-aqueous solvent mixed with a fluorine-based surfactant consisting of a linear fluorocarbon molecule having a chlorosilyl group at one end and a fluorocarbon group at the other end is brought into contact with the first monomolecular film. The hydroxyl groups on the surface react with the chlorosilyl groups of the linear fluorocarbon molecules to accumulate a second monomolecular film. B: The reactivity of the surface of the first monomolecular film is determined by contacting the surface of the first monomolecular film with a nonaqueous solvent mixed with a fluorocarbon surfactant containing chlorosilyl groups at both ends of the molecule. A step of reacting a functional group with a chlorosilyl group at one end of the fluorocarbon surfactant, washing off excess of the active agent remaining on the substrate using a non-aqueous organic solvent, and then reacting with water. , to accumulate a second monolayer.
【請求項7】  クロロシリル基を一端に複数個含み他
の一端に反応性官能基を含む界面活性剤として、R1 
−R2 −(CF2 )n −R3 −SiXp Cl
3−p (ただし、nは整数、R1 は不飽和基または
ジメチルシリル基,R2 、R3 はアルキル基または
シリコン若しくは酸素原子を含む置換基を表わすがなく
とも良い、XはHまたはアルキル基の置換基、pは0ま
たは1または2)を用いる請求項6記載のフッ素系化学
吸着単分子累積膜の製造方法。
7. R1 as a surfactant containing a plurality of chlorosilyl groups at one end and a reactive functional group at the other end;
-R2-(CF2)n-R3-SiXpCl
3-p (However, n is an integer, R1 is an unsaturated group or a dimethylsilyl group, R2 and R3 represent an alkyl group or a substituent containing silicon or an oxygen atom, but may be omitted, X is H or a substituent of an alkyl group) 7. The method for producing a fluorine-based chemically adsorbed monomolecular cumulative film according to claim 6, wherein p is 0, 1 or 2).
【請求項8】  クロロシリル基を一端に複数個含み他
の一端に反応性官能基を含む界面活性剤として、   
 HSi(CH3 )2 −R1 −(CF2 )n 
−R2 −SiXp Cl3−p (ただし、nは整数
、R1、R2 はアルキル基またはシリコン若しくは酸
素原子を含む置換基を表わすがなくとも良い、XはHま
たはアルキル基の置換基、pは0または1または2)を
用い、HSi(CH3 )2 −基を化学処理してHO
−基に変換する請求項6に記載のフッ素系化学吸着単分
子累積膜の製造方法。
[Claim 8] A surfactant containing a plurality of chlorosilyl groups at one end and a reactive functional group at the other end,
HSi(CH3)2-R1-(CF2)n
-R2 -SiXp Cl3-p (where n is an integer, R1 and R2 represent an alkyl group or a substituent containing a silicon or oxygen atom, but may be omitted, X is H or a substituent of an alkyl group, p is 0 or 1 or 2), the HSi(CH3)2- group is chemically treated to form HO
The method for producing a fluorine-based chemically adsorbed monomolecular cumulative film according to claim 6, wherein the fluorine-based chemical adsorption monomolecular cumulative film is converted into a - group.
【請求項9】  クロロシリル基を一端に複数個含み他
の一端に反応性官能基を含む界面活性剤として    
CH2 =CH−R1−(CF2 )n −R2 −S
iXp Cl3−p (ただし、nは整数、R1、R2
 はアルキル基またはシリコン若しくは酸素原子を含む
置換基を表わすがなくとも良い、XはHまたはアルキル
基の置換基、pは0または1または2)を用い、反応性
ガス雰囲気中でエネルギービームを照射してクロルシリ
ル基に対して活性な官能基に変換する請求項6に記載の
フッ素系化学吸着単分子累積膜の製造方法。
[Claim 9] As a surfactant containing a plurality of chlorosilyl groups at one end and a reactive functional group at the other end.
CH2=CH-R1-(CF2)n-R2-S
iXp Cl3-p (where n is an integer, R1, R2
represents an alkyl group or a substituent containing a silicon or oxygen atom, but may be omitted; X is H or a substituent of an alkyl group; 7. The method for producing a fluorine-based chemically adsorbed monomolecular cumulative film according to claim 6, wherein the chlorosilyl group is converted into an active functional group.
【請求項10】  表面に水酸基を含む基体として金属
、セラミック、またはガラスを用いる請求項4または6
に記載のフッ素系化学吸着単分子累積膜の製造方法。
10. Claim 4 or 6, wherein metal, ceramic, or glass is used as the substrate having a hydroxyl group on the surface.
A method for producing a fluorine-based chemically adsorbed monomolecular cumulative film as described in .
【請求項11】  表面に水酸基を含む基体として、予
め表面を酸素を含むプラズマ雰囲気で処理して親水性化
したプラスチックを用いる請求項4または6に記載のフ
ッ素系化学吸着単分子累積膜の製造方法。
11. The production of a fluorine-based chemically adsorbed monomolecular cumulative film according to claim 4 or 6, wherein the substrate having a hydroxyl group on its surface is a plastic whose surface has been previously treated in a plasma atmosphere containing oxygen to make it hydrophilic. Method.
JP3143497A 1991-04-30 1991-06-14 Fluorine-based chemisorbed monomolecular cumulative film and method for producing the same Expired - Lifetime JP2633747B2 (en)

Priority Applications (8)

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JP3143497A JP2633747B2 (en) 1991-06-14 1991-06-14 Fluorine-based chemisorbed monomolecular cumulative film and method for producing the same
DE1992620717 DE69220717T2 (en) 1991-04-30 1992-04-14 Chemically adsorbed layer and process for its production
EP19920106460 EP0511548B1 (en) 1991-04-30 1992-04-14 Chemically adsorbed film and method of manufacturing the same
US07/872,185 US5981056A (en) 1991-04-30 1992-04-22 Chemically adsorbed film
CA 2067435 CA2067435C (en) 1991-04-30 1992-04-28 Chemically adsorbed film and method of manufacturing the same
KR92007355A KR970008069B1 (en) 1991-04-30 1992-04-30 Chemically absorbed film and method of manufacturing the same
US08/281,681 US5451459A (en) 1991-04-30 1994-07-28 Chemically absorbed film comprising fluorocarbon chains
US08/443,376 US5635246A (en) 1991-04-30 1995-05-17 Chemically adsorbed film and method of manufacturing the same

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