JPH0436759U - - Google Patents
Info
- Publication number
- JPH0436759U JPH0436759U JP7959090U JP7959090U JPH0436759U JP H0436759 U JPH0436759 U JP H0436759U JP 7959090 U JP7959090 U JP 7959090U JP 7959090 U JP7959090 U JP 7959090U JP H0436759 U JPH0436759 U JP H0436759U
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- lens barrel
- particle beam
- relay means
- accelerating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims 3
- 230000001133 acceleration Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
添付図は本考案の一実施例として示した電子顕
微鏡の概略図である。
１……電子顕微鏡本体の鏡筒、２……加速管部
、３……主要部、４……基台、５……中継器、６
……高電圧電源、７，８……高電圧ケーブル。
The attached figure is a schematic diagram of an electron microscope shown as an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Lens barrel of electron microscope main body, 2... Accelerator tube section, 3... Main part, 4... Base, 5... Relay, 6
...High voltage power supply, 7,8...High voltage cable.
Claims (1)
る手段が備え付けられた鏡筒の基台上に中継手段
を設け、前記加速手段と、前記鏡筒外に設置され
た高圧電源とを前記中継手段を経由して高電圧ケ
ーブルで繋いで成る荷電粒子ビーム装置。 A relay means is provided on a base of a lens barrel equipped with a means for accelerating a charged particle beam from a charged particle generation source, and the relay means connects the acceleration means and a high voltage power source installed outside the lens barrel. A charged particle beam device connected via a high-voltage cable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7959090U JPH0436759U (en) | 1990-07-26 | 1990-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7959090U JPH0436759U (en) | 1990-07-26 | 1990-07-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0436759U true JPH0436759U (en) | 1992-03-27 |
Family
ID=31623884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7959090U Pending JPH0436759U (en) | 1990-07-26 | 1990-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0436759U (en) |
-
1990
- 1990-07-26 JP JP7959090U patent/JPH0436759U/ja active Pending