JPH0216554U - - Google Patents

Info

Publication number
JPH0216554U
JPH0216554U JP9469788U JP9469788U JPH0216554U JP H0216554 U JPH0216554 U JP H0216554U JP 9469788 U JP9469788 U JP 9469788U JP 9469788 U JP9469788 U JP 9469788U JP H0216554 U JPH0216554 U JP H0216554U
Authority
JP
Japan
Prior art keywords
voltage
accelerating
comparator
output
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9469788U
Other languages
Japanese (ja)
Other versions
JPH0545014Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9469788U priority Critical patent/JPH0545014Y2/ja
Publication of JPH0216554U publication Critical patent/JPH0216554U/ja
Application granted granted Critical
Publication of JPH0545014Y2 publication Critical patent/JPH0545014Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Electron Sources, Ion Sources (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図はこの考案の実施例を示す回路図である。 1……直流高電圧発生装置、2……電子線加速
装置、5……電圧調整装置、17……比較器、1
8……制御回路、20……電子量検出用の電圧変
換器、22……加算器。
The figure is a circuit diagram showing an embodiment of this invention. 1... DC high voltage generator, 2... Electron beam accelerator, 5... Voltage regulator, 17... Comparator, 1
8... Control circuit, 20... Voltage converter for detecting the amount of electrons, 22... Adder.

Claims (1)

【実用新案登録請求の範囲】 直流高電圧発生装置と、前記直流高電圧発生装
置からの出力電圧を調整する電圧調整装置と、前
記直流高電圧発生装置からの出力電圧を加速電圧
として印加される加速管を備えた電子線加速装置
と、加速電圧の設定値と前記加速電圧とを比較す
る比較器と、前記比較器による比較結果に基づい
て、前記加速電圧が前記設定値と一致するように
、前記電圧調整装置を制御する制御装置とを有す
る電子線照射装置において、 前記加速管の内部で発生する電子量に対応する
電子量信号を、電子流の立ち上がり時に前記制御
回路の出力に加算する加算器を、前記制御装置と
前記電圧調整装置との間に設けてなる電子線照射
装置。
[Claims for Utility Model Registration] A DC high voltage generator, a voltage regulator that adjusts the output voltage from the DC high voltage generator, and a voltage regulator that applies the output voltage from the DC high voltage generator as an accelerating voltage. an electron beam accelerator including an accelerating tube; a comparator that compares a set value of an accelerating voltage with the accelerating voltage; and a comparator that adjusts the accelerating voltage to match the set value based on a comparison result by the comparator. , and a control device that controls the voltage adjustment device, an electron amount signal corresponding to the amount of electrons generated inside the accelerator tube is added to the output of the control circuit at the rise of the electron flow. An electron beam irradiation device comprising an adder provided between the control device and the voltage adjustment device.
JP9469788U 1988-07-18 1988-07-18 Expired - Lifetime JPH0545014Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9469788U JPH0545014Y2 (en) 1988-07-18 1988-07-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9469788U JPH0545014Y2 (en) 1988-07-18 1988-07-18

Publications (2)

Publication Number Publication Date
JPH0216554U true JPH0216554U (en) 1990-02-02
JPH0545014Y2 JPH0545014Y2 (en) 1993-11-16

Family

ID=31319264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9469788U Expired - Lifetime JPH0545014Y2 (en) 1988-07-18 1988-07-18

Country Status (1)

Country Link
JP (1) JPH0545014Y2 (en)

Also Published As

Publication number Publication date
JPH0545014Y2 (en) 1993-11-16

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