JPH04361554A - Pellet tray and tray transfer device - Google Patents

Abstract

PURPOSE:To provide a pellet tray and a tray transfer device which are both simple in structure and whose transfer position of a pellet can be surely recognized from outside. CONSTITUTION:On each of pellet trays 20, pellet containers for containing semiconductor pellets 30 are arranged in a matrix. An index key groove 20b parallel to the transfer direction of the pallet tray 20 is formed on one side of the rectangular pellet tray 20. A key 10a is projecting provided on the transfer path 10 side of a tray transfer device in a point at a level corresponding to the index key groove 20b, and only the pellet ray 20 with the index key groove 20b formed in a normal place can be transferred passing through the point of the transfer path 10 where the key 10a is provided.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to pellet trays and tray conveyance techniques, and more particularly to techniques that are effective when applied to pellet trays used in semiconductor device assembly processes and their conveyance techniques.

0002

[Prior Art] For example, as described in documents such as "Latest Semiconductor Factory Automation System/Comprehensive Technology Collection" published by Science Forum Co., Ltd., July 25, 1980, pages 137-138, semiconductor devices are In pellet bonding, etc. in the assembly process, the wafer is divided into multiple pellets by attaching adhesive tape to the back side of the wafer, and each pellet is individually collected from the adhesive tape to form the desired lead frame, etc. However, considering the elongation of the adhesive tape over time, it is not preferable to store pellets attached to the adhesive tape for a long time, and it is difficult to handle pellets of a wide variety in small quantities. It is not suitable for the process.

[0003] For this reason, pellets on an adhesive tape are collected and stored in an aligned position on pellet trays according to attributes such as product type using a well-known die sorter or the like, and each pellet tray is supplied to a pellet bonding device or the like. It is known to do.

[0004] Furthermore, since pellets usually have an asymmetric structure, the feeding position of the pellet tray to the pellet bonding device is important.
Industrial Research Association Co., Ltd., published November 18, 1985, “
As described in documents such as "Electronic Materials" November 1985 issue, pages 131 to 137, the corners of a rectangular pellet tray are cut off to make it possible to identify the feeding posture of the pellet tray to a pellet bonding device, etc. things are being done.

[0005]

[Problems to be Solved by the Invention] However, in the method of simply cutting off the corners of the pellet tray as in the above-mentioned prior art, a complicated detection means such as a sensor is required to determine the conveyance posture, and the device configuration is The problem is that it becomes complicated.

Furthermore, unless the stored pellets themselves are examined using a metallurgical microscope or the like, there is no way to know the attribute information such as the type of pellets from the outside, and it takes a lot of man-hours to confirm the type of pellets. There is a problem in that it causes inconvenience in the assembly process of a wide variety of pellets in small quantities.

[0007] An object of the present invention is to provide a pellet tray and a tray conveyance device that have a simple structure and can reliably identify the suitability of the conveyance posture.

Another object of the present invention is to provide a pellet tray and a tray conveyance device that allow attribute information of loaded pellets to be easily grasped from the outside.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

0010

[Means for Solving the Problems] Among the inventions disclosed in this application, a brief overview of typical inventions will be as follows.
It is as follows.

That is, the pellet tray of the present invention is a pellet tray that stores a plurality of pellets in an aligned posture, and has index key grooves carved in asymmetrical positions on the outer periphery in parallel to the transport direction.

Further, the pellet tray of the present invention is a pellet tray that stores a plurality of pellets in an aligned posture, and is provided with notched grooves in which at least one of the engraved shape, engraved position, and engraved number is coded. This notched groove allows attribute information regarding the pellets stored in the pellet tray and the conveyance direction of the pellet tray to be recognized from the outside.

Further, the pellet tray of the present invention is a pellet tray that stores a plurality of pellets in an aligned posture, and is provided with a removable identification piece in which at least one of the mounting position and the number of pellets to be mounted is coded. The piece allows attribute information regarding the pellets stored in the pellet tray and the transport direction of the pellet tray to be recognized from the outside.

Furthermore, the conveyance device of the present invention has a pellet tray conveyance path in which an index key groove is carved at an asymmetrical position on the outer periphery so that the conveyance posture in the conveyance path can be uniquely identified from the outside. A tray conveying device,
A key part is provided on a part of the conveyance path so as to protrude relatively through the index key groove of the pellet tray in the normal conveyance position.

Further, the conveyance device of the present invention is a tray conveyance device having a conveyance path for a pellet tray provided with a notch groove in which at least one of the engraving shape, the engraving position, and the engraving number is coded, A first detection means for detecting a notched groove is provided in a part of the conveyance path.

Further, the conveying device of the present invention is a tray conveying device having a pellet tray conveying path equipped with a removable identification piece in which at least one of the mounting position and the number of installed pellets is coded. A portion thereof is provided with a second detection means for detecting the identification piece.

[0017]

[Function] According to the pellet tray of the present invention as set forth in claim 1 above, the key portion relatively passes through only the index key groove when the pellet tray is in the normal conveyance posture, on the conveyance path where the pellet tray is conveyed. With the simple structure of protruding the pellet tray, it is possible to reliably identify whether the transport posture of the pellet tray is appropriate or not, without requiring any special sensors.

Further, according to the pellet tray of the present invention as set forth in claim 2, at least one of the shape, position, and number of grooves to be carved is determined according to the attribute information of the pellets listed. By coding, information such as the type of pellet can be accurately identified from the outside.

Further, according to the pellet tray of the present invention as set forth in claim 3, at least one of the mounting position and the number of mounting identification pieces is coded according to the attribute information of the pellets stored, so that external Information such as pellet type can be accurately identified from the information.

Further, according to the conveying device of the present invention as set forth in claim 4, the simple structure is such that a key portion corresponding to the index key groove on the pellet tray side is protruded from a part of the conveying path. It is possible to reliably identify whether or not the conveyance posture of the pellet tray is appropriate without requiring a special sensor or the like.

Further, according to the conveying device of the present invention as set forth in claim 5, the first detection means recognizes the number and position of the notched grooves on the pellet tray side. Attribute information such as the types of pellets listed can be easily grasped from the outside.

Further, according to the above-mentioned conveying device of the present invention as set forth in claim 6, by recognizing the number of attached identification pieces and the attached position of the identification pieces on the pellet tray side by the second detection means, the identification pieces stored on the pellet tray are recognized. Attribute information such as the type of pellets being used can be easily grasped from the outside.

[0023]

[Embodiment 1] Hereinafter, a pellet tray and a conveying device as an embodiment of the present invention will be described in detail with reference to the drawings.

In the following description, as an example, a case where the present invention is applied to an assembly process of a semiconductor device will be explained.

FIG. 1 is a plan view showing an example of a pellet tray 20 and a conveying path 10 in a tray conveying device according to the present invention, and FIG. 2 is a schematic cross-sectional view of a portion indicated by arrow line II-II in FIG. It is.

[0026] Conveyance path 1 having a substantially concave cross section in the conveyance device
0 has a structure in which a plurality of rectangular pellet trays 20 are sequentially moved and supplied from a tray supply unit (not shown) located on the left end side of FIG. 1 to a pellet bonding device (not shown) located on the right end side. ing.

On the upper surface of each of the plurality of pellet trays 20, a plurality of pellet storage portions 20a for storing semiconductor pellets 30 are regularly arranged in a grid pattern.
A plurality of semiconductor pellets 30, which have been collected from cut wafers in the preceding die sorting process, are stored in an aligned posture.

In this case, an index key groove 20b parallel to the conveyance direction of the pellet tray 20 is carved on one side of the rectangular pellet tray 20.

Further, as shown in FIG. 2, on the side of the conveyance path 10, there is a hole at a position and height that matches the index key groove 20b of the pellet tray 20 in the normal conveyance posture moving on the conveyance path 10. , only the pellet tray 20 with the protruding key part 10a and whose index key groove 20b is in the correct position passes through the key part 10a without contacting it and reaches the pellet bonding device (not shown) on the right end side. The structure is such that

That is, in the example of FIG. 1, among the plurality of pellet trays 20 on the conveyance path 10, the pellet tray 20 located at the head in the feeding direction
Since the position b is normal, it passes through the position of the key part 10a and reaches the pellet bonding device (not shown).

On the other hand, the second pellet tray 20 from the top has an abnormal posture in which the direction of the index key groove 20b is perpendicular to the conveyance direction, so that the outer peripheral part is not connected to the key part of the conveyance path 10. It collides with 10a and is prevented from moving. That is, the plurality of semiconductor pellets 30 contained in the pellet tray 20 are prevented from being supplied to the pellet bonding apparatus in an incorrect orientation.

In this way, the pellet tray 2 of this embodiment
According to 0 and the tray conveyance device, the semiconductors placed on the pellet tray 20 can be transported using a simple structure of the index key groove 20b and the key part 10a arranged at a position that fits the index key groove 20b without arranging a complicated sensor. The pellets 30 can be reliably supplied to the pellet bonding device in a normal posture.

[0033]

Embodiment 2 FIG. 3 is a perspective view showing an example of a pellet tray 21 and a conveying path 11 of a tray conveying device according to another embodiment of the present invention.

In the case of this second embodiment, the engraved position and the number of engraved markings on the peripheral part of the pellet tray 21 indicate the type, etc. of the semiconductor pellets 30 stored in the pellet storage section 21a of the pellet tray 21. A plurality of cutout grooves 21b are formed that are coded in accordance with attribute information, and a plurality of optical sensors 11a are provided on the conveyance path 11 side to read the above-mentioned attribute information from the notch grooves 21b. ing.

Furthermore, the arrangement position of the plurality of optical sensors (first detection means) 11a in the conveyance path 11 is set in the passage area of the notch groove 21b when the pellet tray 21 is in the normal conveyance posture. .

[0036] Thereby, it is possible to accurately identify whether or not the conveyance posture of the pellet tray 21 is possible based on whether or not the notch grooves 21b are detected, and also to analyze the number of detected notch grooves 21b of the pellet tray 21 and the detected position. Therefore, various information such as the type of semiconductor pellets 30 listed on the pellet tray 21 can be easily grasped from the outside.

Therefore, for example, the pellet bonding process of semiconductor pellets 30 of various types and small quantities can be precisely and automatically controlled.

[0038]

[Embodiment 3] FIG. 4 shows a pellet tray 22 and a conveying path 12 of a tray conveying device according to still another embodiment of the present invention.
It is a perspective view showing an example.

In the case of this third embodiment, the mounting position and the number of mounting positions are indicated on the stepped portion 22b at the peripheral portion of the pellet tray 22, indicating the type of semiconductor pellets 30 stored in the pellet storage section 22a of the pellet tray 22. A plurality of identification pieces 22c coded corresponding to attribute information such as
is attached removably. The identification piece 22c is made of an elastic U-shaped metal piece, etc., and fits tightly into a desired position of the stepped portion 22b. Care has been taken to ensure that they are at the same height.

A magnetic sensor (first detection means) 12a that is sensitive to the identification piece 22c is arranged on the side of the conveyance path 12 along which the pellet tray 22 moves. It is now possible to read attribute information. Further, the arrangement positions of the plurality of magnetic sensors 12a in the conveyance path 11 are set in the passage area of the identification piece 22c when the pellet tray 22 is in a normal conveyance posture.

[0041] Accordingly, based on whether or not the identification piece 22c is detected by the magnetic sensor 12a,
In addition to accurately identifying whether or not the conveying posture of 2 is possible, by analyzing the number and mounting position of the identification pieces 22c of the pellet tray 22, it is possible to identify the variety of semiconductor pellets 30 contained in the pellet tray 22. information can be easily grasped from the outside.

Furthermore, since the mounting position and number of the identification pieces 22c are simply changed, even when handling a plurality of semiconductor pellets 30, if the semiconductor pellets 30 have the same size, it is necessary to prepare pellet trays 22 for each product type. There is no
Economical.

Therefore, for example, it is possible to finely control the pellet bonding process for semiconductor pellets 30 of various types and small quantities, and to easily realize automation of the pellet bonding process including the feeding mechanism of the pellet tray 22 and cost reduction.

[0044] Above, the invention made by the present inventor has been specifically explained based on practical examples, but the present invention is not limited to the above practical examples, and can be modified in various ways without departing from the spirit thereof. Needless to say, it is.

[0045]

[Effects of the Invention] Among the inventions disclosed in this application, the effects obtained by the typical inventions are briefly explained as follows.
It is as follows.

That is, according to the pellet tray of the present invention, it is possible to obtain the effect that the propriety of the conveying posture can be reliably identified from the outside with a simple structure.

Furthermore, according to the pellet tray of the present invention,
The effect is that the attribute information of the stored pellets can be easily grasped from the outside.

Furthermore, according to the tray conveying device of the present invention,
With a simple structure, it is possible to reliably identify whether or not the conveyance posture of the pellet tray on the conveyance path is appropriate.

Furthermore, according to the tray conveying device of the present invention,
This provides the advantage of being able to accurately grasp the attribute information of the pellets placed on the pellet tray on the conveyance path.

[Brief explanation of the drawing]

FIG. 1 is a plan view showing an example of a pellet tray and a conveyance path in a tray conveyance device of the present invention.

FIG. 2 is a schematic cross-sectional view of a portion indicated by II-II in FIG. 1;

FIG. 3 is a perspective view showing an example of a pellet tray and a conveying path of a tray conveying device according to another embodiment of the present invention.

FIG. 4 is a perspective view showing an example of a pellet tray and a conveying path of a tray conveying device according to still another embodiment of the present invention.

[Explanation of symbols]

10 Conveyance path 10a Key section 11 Conveyance path 11a Optical sensor (first detection means) 12 Conveyance path 12a Magnetic sensor (first detection means) 20 Pellet tray 20a Pellet storage section 20b Index key groove 21 Pellet tray 21a Pellet storage section 21b Notch groove 22 Pellet tray 22a Pellet storage section 22b Step section 22c Identification piece 30 Semiconductor pellet

Claims (6)

[Claims] 1. A pellet tray for storing a plurality of pellets in an aligned position, the pellet tray having index key grooves carved in asymmetrical positions on the outer periphery in parallel to the transport direction. 2. A pellet tray for storing a plurality of pellets in an aligned posture, comprising a notched groove in which at least one of the engraved shape, engraved position, and engraved number is coded, and the notched groove allows the A pellet tray characterized in that attribute information regarding the pellets stored in the pellet tray and a conveyance direction of the pellet tray can be recognized from the outside. 3. A pellet tray for storing a plurality of pellets in an aligned posture, comprising a removable identification piece in which at least one of the mounting position and the number of pellets to be mounted is coded,
A pellet tray characterized in that attribute information regarding the pellets stored in the pellet tray and the transport direction of the pellet tray can be recognized from the outside by the identification piece. 4. A tray conveyance device having a pellet tray conveyance path in which index key grooves parallel to the conveyance direction are carved at asymmetric positions on the outer periphery, wherein the index key is formed in a part of the conveyance path. A tray conveying device characterized by having a protruding key portion that passes relatively through a groove. 5. A tray conveyance device having a pellet tray conveyance path provided with a notch groove in which at least one of the engraving shape, the engraving position, and the engraving number is coded,
A tray conveyance device comprising a first detection means for detecting the notch groove in a part of the conveyance path. 6. A tray conveyance device comprising a pellet tray conveyance path including a removable identification piece in which at least one of the attachment position and the number of attachment pieces is coded, wherein a portion of the conveyance path is provided with the identification piece. A tray conveyance device comprising a second detection means for detecting a piece.