JPH04353850A - Production of photosensitive resin composition, photosensitive element, and printed circuit board - Google Patents
Production of photosensitive resin composition, photosensitive element, and printed circuit boardInfo
- Publication number
- JPH04353850A JPH04353850A JP3129626A JP12962691A JPH04353850A JP H04353850 A JPH04353850 A JP H04353850A JP 3129626 A JP3129626 A JP 3129626A JP 12962691 A JP12962691 A JP 12962691A JP H04353850 A JPH04353850 A JP H04353850A
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive resin
- resin composition
- acid
- isocyanate
- photosensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011342 resin composition Substances 0.000 title claims description 49
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000003822 epoxy resin Substances 0.000 claims abstract description 25
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 25
- 229920003986 novolac Polymers 0.000 claims abstract description 17
- 239000002253 acid Substances 0.000 claims abstract description 16
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims abstract description 16
- 150000001732 carboxylic acid derivatives Chemical class 0.000 claims abstract description 8
- 125000003700 epoxy group Chemical group 0.000 claims abstract description 5
- 239000007795 chemical reaction product Substances 0.000 claims abstract description 4
- 150000001875 compounds Chemical class 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 22
- 229920006395 saturated elastomer Polymers 0.000 claims description 11
- 238000011161 development Methods 0.000 claims description 8
- 150000008064 anhydrides Chemical class 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 2
- 238000013007 heat curing Methods 0.000 claims description 2
- 238000007747 plating Methods 0.000 abstract description 22
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 13
- 229910052737 gold Inorganic materials 0.000 abstract description 13
- 239000010931 gold Substances 0.000 abstract description 13
- 238000004080 punching Methods 0.000 abstract description 12
- 229920005989 resin Polymers 0.000 abstract description 4
- 239000011347 resin Substances 0.000 abstract description 4
- 150000008065 acid anhydrides Chemical class 0.000 abstract description 2
- 150000007519 polyprotic acids Polymers 0.000 abstract description 2
- 239000003513 alkali Substances 0.000 abstract 1
- 239000004593 Epoxy Substances 0.000 description 23
- -1 methyl 2-substituted butenyltetrahydrophthalic anhydride Chemical class 0.000 description 23
- 229910000679 solder Inorganic materials 0.000 description 23
- QWVGKYWNOKOFNN-UHFFFAOYSA-N o-cresol Chemical compound CC1=CC=CC=C1O QWVGKYWNOKOFNN-UHFFFAOYSA-N 0.000 description 16
- 239000000243 solution Substances 0.000 description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- 238000005406 washing Methods 0.000 description 11
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 8
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 8
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 7
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 7
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 239000000945 filler Substances 0.000 description 7
- 239000012948 isocyanate Substances 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- UOCLXMDMGBRAIB-UHFFFAOYSA-N 1,1,1-trichloroethane Chemical compound CC(Cl)(Cl)Cl UOCLXMDMGBRAIB-UHFFFAOYSA-N 0.000 description 6
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 6
- 239000002243 precursor Substances 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- 238000003756 stirring Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 5
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Chemical compound O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 description 5
- 239000003063 flame retardant Substances 0.000 description 5
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 description 4
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000007259 addition reaction Methods 0.000 description 4
- 229930016911 cinnamic acid Natural products 0.000 description 4
- 235000013985 cinnamic acid Nutrition 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- RBQRWNWVPQDTJJ-UHFFFAOYSA-N methacryloyloxyethyl isocyanate Chemical compound CC(=C)C(=O)OCCN=C=O RBQRWNWVPQDTJJ-UHFFFAOYSA-N 0.000 description 4
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 239000011324 bead Substances 0.000 description 3
- KXHPPCXNWTUNSB-UHFFFAOYSA-M benzyl(trimethyl)azanium;chloride Chemical compound [Cl-].C[N+](C)(C)CC1=CC=CC=C1 KXHPPCXNWTUNSB-UHFFFAOYSA-M 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- IIQWTZQWBGDRQG-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate;isocyanic acid Chemical compound N=C=O.CCOC(=O)C(C)=C IIQWTZQWBGDRQG-UHFFFAOYSA-N 0.000 description 3
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 3
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 3
- 150000002989 phenols Chemical class 0.000 description 3
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 239000000376 reactant Substances 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 2
- BPXVHIRIPLPOPT-UHFFFAOYSA-N 1,3,5-tris(2-hydroxyethyl)-1,3,5-triazinane-2,4,6-trione Chemical compound OCCN1C(=O)N(CCO)C(=O)N(CCO)C1=O BPXVHIRIPLPOPT-UHFFFAOYSA-N 0.000 description 2
- PEQMJVGRHNZPAM-UHFFFAOYSA-N 1,4-dichloro-2-isocyanatobenzene Chemical compound ClC1=CC=C(Cl)C(N=C=O)=C1 PEQMJVGRHNZPAM-UHFFFAOYSA-N 0.000 description 2
- SQZCAOHYQSOZCE-UHFFFAOYSA-N 1-(diaminomethylidene)-2-(2-methylphenyl)guanidine Chemical compound CC1=CC=CC=C1N=C(N)N=C(N)N SQZCAOHYQSOZCE-UHFFFAOYSA-N 0.000 description 2
- ADAKRBAJFHTIEW-UHFFFAOYSA-N 1-chloro-4-isocyanatobenzene Chemical compound ClC1=CC=C(N=C=O)C=C1 ADAKRBAJFHTIEW-UHFFFAOYSA-N 0.000 description 2
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- MFUVCHZWGSJKEQ-UHFFFAOYSA-N 3,4-dichlorphenylisocyanate Chemical compound ClC1=CC=C(N=C=O)C=C1Cl MFUVCHZWGSJKEQ-UHFFFAOYSA-N 0.000 description 2
- BVYPJEBKDLFIDL-UHFFFAOYSA-N 3-(2-phenylimidazol-1-yl)propanenitrile Chemical compound N#CCCN1C=CN=C1C1=CC=CC=C1 BVYPJEBKDLFIDL-UHFFFAOYSA-N 0.000 description 2
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 2
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- 229940126062 Compound A Drugs 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- ZRALSGWEFCBTJO-UHFFFAOYSA-N Guanidine Chemical compound NC(N)=N ZRALSGWEFCBTJO-UHFFFAOYSA-N 0.000 description 2
- NLDMNSXOCDLTTB-UHFFFAOYSA-N Heterophylliin A Natural products O1C2COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC2C(OC(=O)C=2C=C(O)C(O)=C(O)C=2)C(O)C1OC(=O)C1=CC(O)=C(O)C(O)=C1 NLDMNSXOCDLTTB-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- OWYWGLHRNBIFJP-UHFFFAOYSA-N Ipazine Chemical compound CCN(CC)C1=NC(Cl)=NC(NC(C)C)=N1 OWYWGLHRNBIFJP-UHFFFAOYSA-N 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 2
- UKLDJPRMSDWDSL-UHFFFAOYSA-L [dibutyl(dodecanoyloxy)stannyl] dodecanoate Chemical compound CCCCCCCCCCCC(=O)O[Sn](CCCC)(CCCC)OC(=O)CCCCCCCCCCC UKLDJPRMSDWDSL-UHFFFAOYSA-L 0.000 description 2
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 2
- 239000012965 benzophenone Substances 0.000 description 2
- HTZCNXWZYVXIMZ-UHFFFAOYSA-M benzyl(triethyl)azanium;chloride Chemical compound [Cl-].CC[N+](CC)(CC)CC1=CC=CC=C1 HTZCNXWZYVXIMZ-UHFFFAOYSA-M 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 238000001723 curing Methods 0.000 description 2
- 238000005238 degreasing Methods 0.000 description 2
- 239000012975 dibutyltin dilaurate Substances 0.000 description 2
- QGBSISYHAICWAH-UHFFFAOYSA-N dicyandiamide Chemical compound NC(N)=NC#N QGBSISYHAICWAH-UHFFFAOYSA-N 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- 150000002513 isocyanates Chemical class 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical compound CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- DGTNSSLYPYDJGL-UHFFFAOYSA-N phenyl isocyanate Chemical compound O=C=NC1=CC=CC=C1 DGTNSSLYPYDJGL-UHFFFAOYSA-N 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 150000003254 radicals Chemical class 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000000454 talc Substances 0.000 description 2
- 229910052623 talc Inorganic materials 0.000 description 2
- 150000003512 tertiary amines Chemical class 0.000 description 2
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 2
- FEIQOMCWGDNMHM-KBXRYBNXSA-N (2e,4e)-5-phenylpenta-2,4-dienoic acid Chemical compound OC(=O)\C=C\C=C\C1=CC=CC=C1 FEIQOMCWGDNMHM-KBXRYBNXSA-N 0.000 description 1
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 1
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 description 1
- 229920002818 (Hydroxyethyl)methacrylate Polymers 0.000 description 1
- CDUQMGQIHYISOP-RMKNXTFCSA-N (e)-2-cyano-3-phenylprop-2-enoic acid Chemical compound OC(=O)C(\C#N)=C\C1=CC=CC=C1 CDUQMGQIHYISOP-RMKNXTFCSA-N 0.000 description 1
- KYVBNYUBXIEUFW-UHFFFAOYSA-N 1,1,3,3-tetramethylguanidine Chemical compound CN(C)C(=N)N(C)C KYVBNYUBXIEUFW-UHFFFAOYSA-N 0.000 description 1
- XHXSXTIIDBZEKB-UHFFFAOYSA-N 1,2,3,4,5,6,7,8-octamethylanthracene-9,10-dione Chemical compound CC1=C(C)C(C)=C2C(=O)C3=C(C)C(C)=C(C)C(C)=C3C(=O)C2=C1C XHXSXTIIDBZEKB-UHFFFAOYSA-N 0.000 description 1
- OPNUROKCUBTKLF-UHFFFAOYSA-N 1,2-bis(2-methylphenyl)guanidine Chemical compound CC1=CC=CC=C1N\C(N)=N\C1=CC=CC=C1C OPNUROKCUBTKLF-UHFFFAOYSA-N 0.000 description 1
- JIHQDMXYYFUGFV-UHFFFAOYSA-N 1,3,5-triazine Chemical compound C1=NC=NC=N1 JIHQDMXYYFUGFV-UHFFFAOYSA-N 0.000 description 1
- VDYWHVQKENANGY-UHFFFAOYSA-N 1,3-Butyleneglycol dimethacrylate Chemical compound CC(=C)C(=O)OC(C)CCOC(=O)C(C)=C VDYWHVQKENANGY-UHFFFAOYSA-N 0.000 description 1
- OWRCNXZUPFZXOS-UHFFFAOYSA-N 1,3-diphenylguanidine Chemical compound C=1C=CC=CC=1NC(=N)NC1=CC=CC=C1 OWRCNXZUPFZXOS-UHFFFAOYSA-N 0.000 description 1
- VZXPHDGHQXLXJC-UHFFFAOYSA-N 1,6-diisocyanato-5,6-dimethylheptane Chemical compound O=C=NC(C)(C)C(C)CCCCN=C=O VZXPHDGHQXLXJC-UHFFFAOYSA-N 0.000 description 1
- GONOHGQPZFXJOJ-SNVBAGLBSA-N 1-[(1r)-1-isocyanatoethyl]naphthalene Chemical compound C1=CC=C2C([C@H](N=C=O)C)=CC=CC2=C1 GONOHGQPZFXJOJ-SNVBAGLBSA-N 0.000 description 1
- FYBFGAFWCBMEDG-UHFFFAOYSA-N 1-[3,5-di(prop-2-enoyl)-1,3,5-triazinan-1-yl]prop-2-en-1-one Chemical compound C=CC(=O)N1CN(C(=O)C=C)CN(C(=O)C=C)C1 FYBFGAFWCBMEDG-UHFFFAOYSA-N 0.000 description 1
- CZQIJQFTRGDODI-UHFFFAOYSA-N 1-bromo-4-isocyanatobenzene Chemical compound BrC1=CC=C(N=C=O)C=C1 CZQIJQFTRGDODI-UHFFFAOYSA-N 0.000 description 1
- NOHQUGRVHSJYMR-UHFFFAOYSA-N 1-chloro-2-isocyanatobenzene Chemical compound ClC1=CC=CC=C1N=C=O NOHQUGRVHSJYMR-UHFFFAOYSA-N 0.000 description 1
- BCMYXYHEMGPZJN-UHFFFAOYSA-N 1-chloro-2-isocyanatoethane Chemical compound ClCCN=C=O BCMYXYHEMGPZJN-UHFFFAOYSA-N 0.000 description 1
- HHIRBXHEYVDUAM-UHFFFAOYSA-N 1-chloro-3-isocyanatobenzene Chemical compound ClC1=CC=CC(N=C=O)=C1 HHIRBXHEYVDUAM-UHFFFAOYSA-N 0.000 description 1
- HILAYQUKKYWPJW-UHFFFAOYSA-N 1-dodecylguanidine Chemical compound CCCCCCCCCCCCN=C(N)N HILAYQUKKYWPJW-UHFFFAOYSA-N 0.000 description 1
- YAOJJEJGPZRYJF-UHFFFAOYSA-N 1-ethenoxyhexane Chemical compound CCCCCCOC=C YAOJJEJGPZRYJF-UHFFFAOYSA-N 0.000 description 1
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- GCNKJQRMNYNDBI-UHFFFAOYSA-N [2-(hydroxymethyl)-2-(2-methylprop-2-enoyloxymethyl)butyl] 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(CO)(CC)COC(=O)C(C)=C GCNKJQRMNYNDBI-UHFFFAOYSA-N 0.000 description 1
- TUOBEAZXHLTYLF-UHFFFAOYSA-N [2-(hydroxymethyl)-2-(prop-2-enoyloxymethyl)butyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(CC)COC(=O)C=C TUOBEAZXHLTYLF-UHFFFAOYSA-N 0.000 description 1
- JUDXBRVLWDGRBC-UHFFFAOYSA-N [2-(hydroxymethyl)-3-(2-methylprop-2-enoyloxy)-2-(2-methylprop-2-enoyloxymethyl)propyl] 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(CO)(COC(=O)C(C)=C)COC(=O)C(C)=C JUDXBRVLWDGRBC-UHFFFAOYSA-N 0.000 description 1
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 1
- APZPSKFMSWZPKL-UHFFFAOYSA-N [3-hydroxy-2,2-bis(hydroxymethyl)propyl] 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(CO)(CO)CO APZPSKFMSWZPKL-UHFFFAOYSA-N 0.000 description 1
- ZCZFEIZSYJAXKS-UHFFFAOYSA-N [3-hydroxy-2,2-bis(hydroxymethyl)propyl] prop-2-enoate Chemical compound OCC(CO)(CO)COC(=O)C=C ZCZFEIZSYJAXKS-UHFFFAOYSA-N 0.000 description 1
- YSKCRYMJUCLQDG-UHFFFAOYSA-N [4-[2-(2,3-diethoxy-4-prop-2-enoyloxyphenyl)propan-2-yl]-2,3-diethoxyphenyl] prop-2-enoate Chemical compound CCOC1=C(OC(=O)C=C)C=CC(C(C)(C)C=2C(=C(OCC)C(OC(=O)C=C)=CC=2)OCC)=C1OCC YSKCRYMJUCLQDG-UHFFFAOYSA-N 0.000 description 1
- SJSXBTSSSQCODU-UHFFFAOYSA-N [4-[2-[2,3-diethoxy-4-(2-methylprop-2-enoyloxy)phenyl]propan-2-yl]-2,3-diethoxyphenyl] 2-methylprop-2-enoate Chemical compound CCOC1=C(OC(=O)C(C)=C)C=CC(C(C)(C)C=2C(=C(OCC)C(OC(=O)C(C)=C)=CC=2)OCC)=C1OCC SJSXBTSSSQCODU-UHFFFAOYSA-N 0.000 description 1
- YKTSYUJCYHOUJP-UHFFFAOYSA-N [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] Chemical compound [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] YKTSYUJCYHOUJP-UHFFFAOYSA-N 0.000 description 1
- 239000003377 acid catalyst Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 229920003180 amino resin Polymers 0.000 description 1
- HAMNKKUPIHEESI-UHFFFAOYSA-N aminoguanidine Chemical compound NNC(N)=N HAMNKKUPIHEESI-UHFFFAOYSA-N 0.000 description 1
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 150000008365 aromatic ketones Chemical class 0.000 description 1
- 125000003118 aryl group Chemical class 0.000 description 1
- LHMRXAIRPKSGDE-UHFFFAOYSA-N benzo[a]anthracene-7,12-dione Chemical compound C1=CC2=CC=CC=C2C2=C1C(=O)C1=CC=CC=C1C2=O LHMRXAIRPKSGDE-UHFFFAOYSA-N 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 1
- GCTPMLUUWLLESL-UHFFFAOYSA-N benzyl prop-2-enoate Chemical compound C=CC(=O)OCC1=CC=CC=C1 GCTPMLUUWLLESL-UHFFFAOYSA-N 0.000 description 1
- NIVZHWNOUVJHKV-UHFFFAOYSA-N bethanidine Chemical compound CN\C(=N/C)NCC1=CC=CC=C1 NIVZHWNOUVJHKV-UHFFFAOYSA-N 0.000 description 1
- PIPBVABVQJZSAB-UHFFFAOYSA-N bis(ethenyl) benzene-1,2-dicarboxylate Chemical compound C=COC(=O)C1=CC=CC=C1C(=O)OC=C PIPBVABVQJZSAB-UHFFFAOYSA-N 0.000 description 1
- AJCHRUXIDGEWDK-UHFFFAOYSA-N bis(ethenyl) butanedioate Chemical compound C=COC(=O)CCC(=O)OC=C AJCHRUXIDGEWDK-UHFFFAOYSA-N 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 1
- CQEYYJKEWSMYFG-UHFFFAOYSA-N butyl acrylate Chemical compound CCCCOC(=O)C=C CQEYYJKEWSMYFG-UHFFFAOYSA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- BGTFCAQCKWKTRL-YDEUACAXSA-N chembl1095986 Chemical compound C1[C@@H](N)[C@@H](O)[C@H](C)O[C@H]1O[C@@H]([C@H]1C(N[C@H](C2=CC(O)=CC(O[C@@H]3[C@H]([C@@H](O)[C@H](O)[C@@H](CO)O3)O)=C2C=2C(O)=CC=C(C=2)[C@@H](NC(=O)[C@@H]2NC(=O)[C@@H]3C=4C=C(C(=C(O)C=4)C)OC=4C(O)=CC=C(C=4)[C@@H](N)C(=O)N[C@@H](C(=O)N3)[C@H](O)C=3C=CC(O4)=CC=3)C(=O)N1)C(O)=O)=O)C(C=C1)=CC=C1OC1=C(O[C@@H]3[C@H]([C@H](O)[C@@H](O)[C@H](CO[C@@H]5[C@H]([C@@H](O)[C@H](O)[C@@H](C)O5)O)O3)O[C@@H]3[C@H]([C@@H](O)[C@H](O)[C@@H](CO)O3)O[C@@H]3[C@H]([C@H](O)[C@@H](CO)O3)O)C4=CC2=C1 BGTFCAQCKWKTRL-YDEUACAXSA-N 0.000 description 1
- XKQTZYDZYSXGBD-UHFFFAOYSA-N chloro(isocyanato)methane Chemical compound ClCN=C=O XKQTZYDZYSXGBD-UHFFFAOYSA-N 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 229910052570 clay Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- OIWOHHBRDFKZNC-UHFFFAOYSA-N cyclohexyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1CCCCC1 OIWOHHBRDFKZNC-UHFFFAOYSA-N 0.000 description 1
- KQWGXHWJMSMDJJ-UHFFFAOYSA-N cyclohexyl isocyanate Chemical compound O=C=NC1CCCCC1 KQWGXHWJMSMDJJ-UHFFFAOYSA-N 0.000 description 1
- KBLWLMPSVYBVDK-UHFFFAOYSA-N cyclohexyl prop-2-enoate Chemical compound C=CC(=O)OC1CCCCC1 KBLWLMPSVYBVDK-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 150000001991 dicarboxylic acids Chemical class 0.000 description 1
- XSBSXJAYEPDGSF-UHFFFAOYSA-N diethyl 3,5-dimethyl-1h-pyrrole-2,4-dicarboxylate Chemical compound CCOC(=O)C=1NC(C)=C(C(=O)OCC)C=1C XSBSXJAYEPDGSF-UHFFFAOYSA-N 0.000 description 1
- YSCOODQOCWOXNL-UHFFFAOYSA-N diethylamino 2-methylprop-2-enoate Chemical compound CCN(CC)OC(=O)C(C)=C YSCOODQOCWOXNL-UHFFFAOYSA-N 0.000 description 1
- 239000000539 dimer Substances 0.000 description 1
- OWMBTIRJFMGPAC-UHFFFAOYSA-N dimethylamino 2-methylprop-2-enoate Chemical compound CN(C)OC(=O)C(C)=C OWMBTIRJFMGPAC-UHFFFAOYSA-N 0.000 description 1
- SWSQBOPZIKWTGO-UHFFFAOYSA-N dimethylaminoamidine Natural products CN(C)C(N)=N SWSQBOPZIKWTGO-UHFFFAOYSA-N 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000007590 electrostatic spraying Methods 0.000 description 1
- YCUBDDIKWLELPD-UHFFFAOYSA-N ethenyl 2,2-dimethylpropanoate Chemical compound CC(C)(C)C(=O)OC=C YCUBDDIKWLELPD-UHFFFAOYSA-N 0.000 description 1
- XJELOQYISYPGDX-UHFFFAOYSA-N ethenyl 2-chloroacetate Chemical compound ClCC(=O)OC=C XJELOQYISYPGDX-UHFFFAOYSA-N 0.000 description 1
- MPOGZNTVZCEKSW-UHFFFAOYSA-N ethenyl 2-hydroxypropanoate Chemical compound CC(O)C(=O)OC=C MPOGZNTVZCEKSW-UHFFFAOYSA-N 0.000 description 1
- MEGHWIAOTJPCHQ-UHFFFAOYSA-N ethenyl butanoate Chemical compound CCCC(=O)OC=C MEGHWIAOTJPCHQ-UHFFFAOYSA-N 0.000 description 1
- LZWYWAIOTBEZFN-UHFFFAOYSA-N ethenyl hexanoate Chemical compound CCCCCC(=O)OC=C LZWYWAIOTBEZFN-UHFFFAOYSA-N 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 1
- MENMOBMPDFLUHJ-UHFFFAOYSA-N ethyl acetate;isocyanic acid Chemical compound N=C=O.CCOC(C)=O MENMOBMPDFLUHJ-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- WUDNUHPRLBTKOJ-UHFFFAOYSA-N ethyl isocyanate Chemical compound CCN=C=O WUDNUHPRLBTKOJ-UHFFFAOYSA-N 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 125000002485 formyl group Chemical class [H]C(*)=O 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 1
- 150000002357 guanidines Chemical class 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- FLBJFXNAEMSXGL-UHFFFAOYSA-N het anhydride Chemical compound O=C1OC(=O)C2C1C1(Cl)C(Cl)=C(Cl)C2(Cl)C1(Cl)Cl FLBJFXNAEMSXGL-UHFFFAOYSA-N 0.000 description 1
- PYGSKMBEVAICCR-UHFFFAOYSA-N hexa-1,5-diene Chemical group C=CCCC=C PYGSKMBEVAICCR-UHFFFAOYSA-N 0.000 description 1
- ANJPRQPHZGHVQB-UHFFFAOYSA-N hexyl isocyanate Chemical compound CCCCCCN=C=O ANJPRQPHZGHVQB-UHFFFAOYSA-N 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 239000011256 inorganic filler Substances 0.000 description 1
- 229910003475 inorganic filler Inorganic materials 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 239000000391 magnesium silicate Substances 0.000 description 1
- 229910052919 magnesium silicate Inorganic materials 0.000 description 1
- 235000019792 magnesium silicate Nutrition 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- YDKNBNOOCSNPNS-UHFFFAOYSA-N methyl 1,3-benzoxazole-2-carboxylate Chemical compound C1=CC=C2OC(C(=O)OC)=NC2=C1 YDKNBNOOCSNPNS-UHFFFAOYSA-N 0.000 description 1
- CRVGTESFCCXCTH-UHFFFAOYSA-N methyl diethanolamine Chemical compound OCCN(C)CCO CRVGTESFCCXCTH-UHFFFAOYSA-N 0.000 description 1
- HAMGRBXTJNITHG-UHFFFAOYSA-N methyl isocyanate Chemical compound CN=C=O HAMGRBXTJNITHG-UHFFFAOYSA-N 0.000 description 1
- NFWSQSCIDYBUOU-UHFFFAOYSA-N methylcyclopentadiene Chemical compound CC1=CC=CC1 NFWSQSCIDYBUOU-UHFFFAOYSA-N 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- CIXSDMKDSYXUMJ-UHFFFAOYSA-N n,n-diethylcyclohexanamine Chemical compound CCN(CC)C1CCCCC1 CIXSDMKDSYXUMJ-UHFFFAOYSA-N 0.000 description 1
- KJWDFJXMZXZWTC-UHFFFAOYSA-N n-(2-hydroxyethyl)-n,2-dimethylprop-2-enamide Chemical compound OCCN(C)C(=O)C(C)=C KJWDFJXMZXZWTC-UHFFFAOYSA-N 0.000 description 1
- OMNKZBIFPJNNIO-UHFFFAOYSA-N n-(2-methyl-4-oxopentan-2-yl)prop-2-enamide Chemical compound CC(=O)CC(C)(C)NC(=O)C=C OMNKZBIFPJNNIO-UHFFFAOYSA-N 0.000 description 1
- KCTMTGOHHMRJHZ-UHFFFAOYSA-N n-(2-methylpropoxymethyl)prop-2-enamide Chemical compound CC(C)COCNC(=O)C=C KCTMTGOHHMRJHZ-UHFFFAOYSA-N 0.000 description 1
- HNHVTXYLRVGMHD-UHFFFAOYSA-N n-butyl isocyanate Chemical compound CCCCN=C=O HNHVTXYLRVGMHD-UHFFFAOYSA-N 0.000 description 1
- ZIWDVJPPVMGJGR-UHFFFAOYSA-N n-ethyl-2-methylprop-2-enamide Chemical compound CCNC(=O)C(C)=C ZIWDVJPPVMGJGR-UHFFFAOYSA-N 0.000 description 1
- KKFHAJHLJHVUDM-UHFFFAOYSA-N n-vinylcarbazole Chemical compound C1=CC=C2N(C=C)C3=CC=CC=C3C2=C1 KKFHAJHLJHVUDM-UHFFFAOYSA-N 0.000 description 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 1
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 1
- 125000003261 o-tolyl group Chemical group [H]C1=C([H])C(*)=C(C([H])=C1[H])C([H])([H])[H] 0.000 description 1
- KCAMXZBMXVIIQN-UHFFFAOYSA-N octan-3-yl 2-methylprop-2-enoate Chemical compound CCCCCC(CC)OC(=O)C(C)=C KCAMXZBMXVIIQN-UHFFFAOYSA-N 0.000 description 1
- NZIDBRBFGPQCRY-UHFFFAOYSA-N octyl 2-methylprop-2-enoate Chemical compound CCCCCCCCOC(=O)C(C)=C NZIDBRBFGPQCRY-UHFFFAOYSA-N 0.000 description 1
- 239000012766 organic filler Substances 0.000 description 1
- RPQRDASANLAFCM-UHFFFAOYSA-N oxiran-2-ylmethyl prop-2-enoate Chemical compound C=CC(=O)OCC1CO1 RPQRDASANLAFCM-UHFFFAOYSA-N 0.000 description 1
- ULDDEWDFUNBUCM-UHFFFAOYSA-N pentyl prop-2-enoate Chemical compound CCCCCOC(=O)C=C ULDDEWDFUNBUCM-UHFFFAOYSA-N 0.000 description 1
- PNJWIWWMYCMZRO-UHFFFAOYSA-N pent‐4‐en‐2‐one Natural products CC(=O)CC=C PNJWIWWMYCMZRO-UHFFFAOYSA-N 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- FSDNTQSJGHSJBG-UHFFFAOYSA-N piperidine-4-carbonitrile Chemical compound N#CC1CCNCC1 FSDNTQSJGHSJBG-UHFFFAOYSA-N 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920005596 polymer binder Polymers 0.000 description 1
- 239000002491 polymer binding agent Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920001289 polyvinyl ether Polymers 0.000 description 1
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical class C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 1
- FBCQUCJYYPMKRO-UHFFFAOYSA-N prop-2-enyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC=C FBCQUCJYYPMKRO-UHFFFAOYSA-N 0.000 description 1
- BOQSSGDQNWEFSX-UHFFFAOYSA-N propan-2-yl 2-methylprop-2-enoate Chemical compound CC(C)OC(=O)C(C)=C BOQSSGDQNWEFSX-UHFFFAOYSA-N 0.000 description 1
- LYBIZMNPXTXVMV-UHFFFAOYSA-N propan-2-yl prop-2-enoate Chemical compound CC(C)OC(=O)C=C LYBIZMNPXTXVMV-UHFFFAOYSA-N 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- NHARPDSAXCBDDR-UHFFFAOYSA-N propyl 2-methylprop-2-enoate Chemical compound CCCOC(=O)C(C)=C NHARPDSAXCBDDR-UHFFFAOYSA-N 0.000 description 1
- PNXMTCDJUBJHQJ-UHFFFAOYSA-N propyl prop-2-enoate Chemical compound CCCOC(=O)C=C PNXMTCDJUBJHQJ-UHFFFAOYSA-N 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 150000004053 quinones Chemical class 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 150000003440 styrenes Chemical class 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 229940014800 succinic anhydride Drugs 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- MUTNCGKQJGXKEM-UHFFFAOYSA-N tamibarotene Chemical compound C=1C=C2C(C)(C)CCC(C)(C)C2=CC=1NC(=O)C1=CC=C(C(O)=O)C=C1 MUTNCGKQJGXKEM-UHFFFAOYSA-N 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- YWDBSCORAARPPF-VWUMJDOOSA-N tixocortol Chemical compound O=C1CC[C@]2(C)[C@H]3[C@@H](O)C[C@](C)([C@@](CC4)(O)C(=O)CS)[C@@H]4[C@@H]3CCC2=C1 YWDBSCORAARPPF-VWUMJDOOSA-N 0.000 description 1
- 229960004631 tixocortol Drugs 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- KOZCZZVUFDCZGG-UHFFFAOYSA-N vinyl benzoate Chemical compound C=COC(=O)C1=CC=CC=C1 KOZCZZVUFDCZGG-UHFFFAOYSA-N 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は、プリント配線板製造、
金属精密加工等の分野において保護膜形成に好適な感光
性樹脂組成物、これを用いた感光性エレメント及びこれ
を用いて保護膜を形成するプリント配線板の製造技術に
関する。[Industrial Application Field] The present invention relates to printed wiring board manufacturing,
The present invention relates to a photosensitive resin composition suitable for forming a protective film in the field of metal precision processing, a photosensitive element using the same, and a manufacturing technique for a printed wiring board using the same to form a protective film.
【0002】0002
【従来の技術】従来、印刷配線板業界において、ソルダ
ーマスク、化学めっき用レジスト等には、優れた特性を
有する感光性樹脂組成物が用いられている。ソルダマス
クの主な目的は、ハンダ付け時のハンダ付け領域を限定
し、ハンダブリッジ等を防ぐこと、裸の銅導体の腐食を
防止すること及び長期にわたる導体間の電気絶縁性を保
持することにある。2. Description of the Related Art Conventionally, in the printed wiring board industry, photosensitive resin compositions having excellent properties have been used for solder masks, resists for chemical plating, and the like. The main purpose of a solder mask is to limit the soldering area during soldering, prevent solder bridging, etc., prevent corrosion of bare copper conductors, and maintain electrical insulation between conductors over a long period of time. .
【0003】ところで、通常ソルダマスクとしては、エ
ポキシ樹脂、アミノプラスト樹脂等が熱硬化性樹脂を主
成分とするもの(印刷マスク)が用いられる。しかし、
近年、印刷配線板の配線密度が高まり、また導体間の電
気絶縁性の要求も厳しくなり、それらに用いるソルダマ
スクも厚膜で、寸法精度の優れたものが要求されるよう
になり、スクリーン印刷方式のものでは対処できなくな
っている。By the way, as a solder mask, one (printed mask) whose main component is a thermosetting resin such as epoxy resin or aminoplast resin is usually used. but,
In recent years, the wiring density of printed wiring boards has increased, and the requirements for electrical insulation between conductors have also become stricter, and the solder masks used for them are also required to be thick and have excellent dimensional accuracy. It is no longer possible to deal with it.
【0004】また、ソルダマスクを有するプリント配線
板を所定の形状に製造するために打抜き機が使用される
が、前記ソルダマスクの柔軟性が乏しいため、ソルダマ
スク上又はその近傍を打抜くと、ソルダマスクにクラッ
クが生じ、信頼性が低下する欠点がある。この欠点をな
くすため、ソルダマスク部と切断部間に大きなクリアラ
ンスを設けたり、ルーター加工を施したりしている。し
かし、前者の方法は、高密度化には不利な方法であり、
後者の方法は、加工に長時間必要であり、生産性の低下
及びコスト高となる欠点がある。[0004]Also, a punching machine is used to manufacture a printed wiring board having a solder mask into a predetermined shape, but since the solder mask has poor flexibility, when punching on or near the solder mask, the solder mask may crack. This has the disadvantage of reducing reliability. In order to eliminate this drawback, a large clearance is provided between the solder mask part and the cut part, and a router process is applied. However, the former method is disadvantageous for increasing density;
The latter method requires a long time for processing, and has the drawback of reduced productivity and increased costs.
【0005】そこで、像状露光及び現像により画像を形
成する写真法によって、例えば、導体上に25μm程度
の厚膜で、寸法精度に優れた高信頼性のソルダマスクを
形成しうる耐熱性及び柔軟性に優れた感光性樹脂組成物
であって、前記写真法による製造工程を自動化し、安価
なカバー材料を得ることができる感光性樹脂組成物の出
現が望まれている。[0005] Therefore, by using a photographic method in which an image is formed by imagewise exposure and development, it is possible to form a highly reliable solder mask with excellent dimensional accuracy and heat resistance and flexibility, for example, on a conductor with a thickness of about 25 μm. There is a desire for the emergence of a photosensitive resin composition that has excellent properties and that can automate the manufacturing process using the photographic method to obtain an inexpensive cover material.
【0006】また、プリント配線板の外部との電気的な
接続の方法として、プリント配線板の外周部に接続端子
を形成し、外部コネクターに挿入する方法が数多く使わ
れているが、端子部には耐摩耗性、信頼性が要求され、
これに答えるためニッケル、金めっきが施されており、
一般に、ソルダマスク形成後にこの端子めっきが行われ
るため、耐めっき性に優れたソルダマスク用感光性樹脂
組成物が望まれている。[0006] Furthermore, as a method for electrically connecting a printed wiring board to the outside, many methods are used in which connecting terminals are formed on the outer periphery of the printed wiring board and inserted into an external connector. requires wear resistance and reliability,
To answer this question, nickel and gold plating is applied.
Generally, this terminal plating is performed after forming a solder mask, so a photosensitive resin composition for a solder mask that has excellent plating resistance is desired.
【0007】従来、ソルダマスク形成用感光性樹脂組成
物としては、例えば、■アクリル系ポリマー及び光重合
性モノマーを主成分とする感光性樹脂組成物(特開昭5
3−56018号公報、特開昭54−1018号公報等
)、■光反応性が付与されたエポキシ樹脂及びエポキシ
樹脂硬化剤を主成分とする感光性樹脂組成物(特開昭5
2−37996号公報、特開昭58−62636号公報
、特開昭62−74920号公報等)、■イソシアナー
トエチルメタクリレート変性感光性樹脂組成物(特開昭
61−132947号公報)■多塩基酸変性エポキシア
クリレート感光性樹脂組成物(特公平1−54390号
公報)等が知られている。Conventionally, photosensitive resin compositions for forming solder masks include, for example,
3-56018, JP-A-54-1018, etc.); ■ Photosensitive resin compositions containing photoreactive epoxy resins and epoxy resin curing agents as main components (JP-A-54-1018, etc.);
2-37996, JP 58-62636, JP 62-74920, etc.), ■ Isocyanatoethyl methacrylate modified photosensitive resin composition (JP 61-132947, etc.) ■ Polybasic Acid-modified epoxy acrylate photosensitive resin compositions (Japanese Patent Publication No. 1-54390) are known.
【0008】しかしながら、上記■の感光性樹脂組成物
は、通常のエッチング及びめっき用フィルム状感光材料
(例えばデュポン社製、商品名リストン、日立化成工業
(株)製、商品名フオテック等)に使用されている難燃
性の1,1,1−トリクロルエタンで現像可能であり、
高感度のソルダマスクを形成することができるが、この
ような感光性樹脂組成物はフィルム性を付与するため、
アクリル系ポリマーを多量に使用するので、硬化被膜の
耐熱性が充分でないという欠点がある。However, the above photosensitive resin composition (2) cannot be used in ordinary film-like photosensitive materials for etching and plating (for example, manufactured by DuPont, trade name Riston, manufactured by Hitachi Chemical Co., Ltd., trade name Photec, etc.). It can be developed with flame-retardant 1,1,1-trichloroethane, which is
A highly sensitive solder mask can be formed, but since such a photosensitive resin composition imparts film properties,
Since a large amount of acrylic polymer is used, there is a drawback that the heat resistance of the cured film is insufficient.
【0009】また、上記■の(特開昭52−37996
号公報、特開昭58−62636号公報)記載の感光性
樹脂組成物は、エポキシ樹脂をベースとしており、硬化
被膜の耐熱性には優れているが、1,1,1−トリクロ
ルエタンなどの難燃性有機溶剤に不溶性であるため、現
像液としてシクロヘキサノン等の可燃性有機溶剤を使用
する必要があり、安全上好ましくないという欠点がある
。[0009] Also, the above (1) (Japanese Patent Laid-Open No. 52-37996
The photosensitive resin composition described in Japanese Patent Application Laid-open No. 58-62636 is based on an epoxy resin and has excellent heat resistance of the cured film, but it is Since it is insoluble in flame-retardant organic solvents, it is necessary to use a flammable organic solvent such as cyclohexanone as a developer, which is disadvantageous in terms of safety.
【0010】さらに、特開昭62−74920号公報記
載の感光性樹脂組成物は、1,1,1−トリクロルエタ
ンなどの難燃性現像液を使用できるが、打抜き加工時に
クラックが生じ易いという欠点がある。さらに、上記■
の感光性樹脂組成物は、1,1,1−トリクロルエタン
などの現像液で現像でき、かつ解像度、耐熱性などにも
優れ、特開昭58−62636号公報に示されているタ
ルクを主体とした充填剤を混合すると、印刷配線板と硬
化被膜との粘着力を向上させ、高信頼性のソルダマスク
を形成するが、現像のダメージによって被膜表面に光沢
がないという欠点がある。このため、電子部品等の最終
製品に使用されるまでに外的要因で擦り傷を生じ、ソル
ダマスク商品価値を損なうという問題点がある。Furthermore, the photosensitive resin composition described in JP-A No. 62-74920 can use a flame-retardant developer such as 1,1,1-trichloroethane, but it is said that cracks are likely to occur during punching. There are drawbacks. Furthermore, the above ■
The photosensitive resin composition can be developed with a developer such as 1,1,1-trichloroethane, has excellent resolution and heat resistance, and is mainly composed of talc as disclosed in JP-A-58-62636. When such a filler is mixed, the adhesion between the printed wiring board and the cured film is improved and a highly reliable solder mask is formed, but there is a drawback that the film surface lacks gloss due to damage during development. For this reason, there is a problem in that the solder mask becomes scratched due to external factors before it is used in final products such as electronic parts, which impairs the commercial value of the solder mask.
【0011】また、前記■〜■の感光性樹脂組成物の硬
化被膜は、基板との密着力が乏しいため、端子めっき工
程中にめっきもぐりや硬化被膜の剥がれが生じ、信頼性
の低下を引き起こすという欠点がある。これらの問題点
を解決するため、ポリヒドロキシエーテルを含むエポキ
シ樹脂に不飽和イソシアナートを反応させ、更に不飽和
カルボン酸変性エポキシ樹脂との混合品(特願平1−9
2398号公報、特願平1−244153号公報、特願
平2−229241号公報)が知られている。これら特
許に開示されている感光性樹脂組成物は、塩素系有機溶
剤を現像液として使用しているため、大気汚染の問題が
ある。[0011] Furthermore, since the cured film of the photosensitive resin composition of items (1) to (3) has poor adhesion to the substrate, plating cracking and peeling of the cured film occur during the terminal plating process, resulting in a decrease in reliability. There is a drawback. In order to solve these problems, we reacted an epoxy resin containing polyhydroxyether with an unsaturated isocyanate, and then mixed it with an unsaturated carboxylic acid-modified epoxy resin (Patent Application No.
No. 2398, Japanese Patent Application No. 1-244153, and Japanese Patent Application No. 2-229241) are known. Since the photosensitive resin compositions disclosed in these patents use chlorinated organic solvents as developing solutions, there is a problem of air pollution.
【0012】そこで前記■の(特公平1−54390号
公報)感光性樹脂組成物が知られているが、打抜き加工
時にクラックが生じ易いという欠点がある。[0012] Therefore, the photosensitive resin composition mentioned in (1) (Japanese Patent Publication No. 1-54390) is known, but it has the drawback that cracks are likely to occur during punching.
【0013】[0013]
【発明が解決しようとする課題】本発明は、前記従来技
術の欠点を解消し、希アルカリ水溶液で現像でき、打抜
き加工性に優れ、厚膜でも解像性、耐熱性、耐金めっき
性に優れた高信頼性ソルダマスクを形成することができ
る感光性樹脂組成物、これを用いた感光性エレメント及
びこれらを用いたプリント配線板の製造法を提供するも
のである。[Problems to be Solved by the Invention] The present invention eliminates the drawbacks of the prior art, can be developed with a dilute alkaline aqueous solution, has excellent punching workability, and has excellent resolution, heat resistance, and gold plating resistance even in thick films. The present invention provides a photosensitive resin composition capable of forming an excellent and highly reliable solder mask, a photosensitive element using the same, and a method for manufacturing a printed wiring board using the same.
【0014】[0014]
【課題を解決するための手段】本発明は、(a)ノボラ
ック型エポキシ樹脂と不飽和カルボン酸との反応物の二
級水酸基に飽和もしくは不飽和無水多塩基酸を酸当量/
水酸基当量の比0.1〜0.8の範囲として反応させ、
残存水酸基に飽和もしくは不飽和モノイソシアナートを
付加させて得られる光重合性不飽和化合物、(b)エポ
キシ基を少なくとも1個有する化合物、並びに(c)活
性光線により遊離ラジカルを生成する増感剤及び/又は
増感剤系を含有してなる感光性樹脂組成物、該感光性樹
脂組成物をフィルム上に塗布、乾燥して得られる感光性
エレメント並びに導電性パターンの形成されたプリント
配線板に前記感光性樹脂組成物及び/又は前記感光性エ
レメントの層を形成し、次いで像的な活性光線の照射及
び現像、加熱硬化によって硬化被膜を形成することを特
徴とするプリント配線板の製造法に関する。[Means for Solving the Problems] The present invention provides (a) adding a saturated or unsaturated polybasic anhydride acid to the secondary hydroxyl group of a reaction product of a novolac type epoxy resin and an unsaturated carboxylic acid in acid equivalents/
React with a hydroxyl group equivalent ratio in the range of 0.1 to 0.8,
A photopolymerizable unsaturated compound obtained by adding a saturated or unsaturated monoisocyanate to a residual hydroxyl group, (b) a compound having at least one epoxy group, and (c) a sensitizer that generates free radicals when exposed to actinic rays. and/or a photosensitive resin composition containing a sensitizer system, a photosensitive element obtained by coating and drying the photosensitive resin composition on a film, and a printed wiring board on which a conductive pattern is formed. A method for producing a printed wiring board, which comprises forming a layer of the photosensitive resin composition and/or the photosensitive element, and then forming a cured film by irradiation with imagewise actinic light, development, and heat curing. .
【0015】本発明になる感光性樹脂組成物は、必須成
分(a)として、ノボラック型エポキシ樹脂と不飽和カ
ルボン酸との反応物の二級水酸基に飽和もしくは不飽和
無水多塩基酸を酸当量/水酸基当量の比を0.1〜0.
8の範囲として反応させ、残存水酸基に飽和もしくは不
飽和モノイソシアナートを付加させて得られる光重合性
不飽和化合物を含有する。In the photosensitive resin composition of the present invention, as an essential component (a), a saturated or unsaturated polybasic anhydride is added to the secondary hydroxyl group of a reaction product of a novolac type epoxy resin and an unsaturated carboxylic acid in an acid equivalent amount. / hydroxyl group equivalent ratio from 0.1 to 0.
8, and contains a photopolymerizable unsaturated compound obtained by adding a saturated or unsaturated monoisocyanate to the remaining hydroxyl group.
【0016】本発明に用いられるノボラック型エポキシ
樹脂は、例えばオルソクレゾール、フェノール、ハロゲ
ン化フェノール等とアルデヒドを酸触媒の存在下に反応
させて得られるノボラック型樹脂のフェノール性水酸基
に、アルカリ存在下に、エピクロルヒドリンを反応させ
て得られるもので、商業的にも入手可能である。The novolac type epoxy resin used in the present invention is obtained by reacting, for example, orthocresol, phenol, halogenated phenol, etc. with an aldehyde in the presence of an acid catalyst. It is obtained by reacting epichlorohydrin and is commercially available.
【0017】オルソクレゾールノボラック型エポキシ樹
脂としては、例えばチバ・ガイギー社製アラルダイトE
CN1299(軟化点99℃、エポキシ当量230)、
ECN1280(軟化点80℃、エポキシ当量230)
、ECN1273(軟化点73℃、エポキシ当量230
)、日本化薬(株)製EOCN104(軟化点90〜1
00℃、エポキシ当量225〜245)、EOCN10
3(軟化点80〜90℃、エポキシ当量215〜235
)、EOCN102(軟化点70〜80℃、エポキシ当
量215〜235)、EOCN101(軟化点65〜6
9℃、エポキシ当量205〜225)等が挙げられる。Examples of the orthocresol novolac type epoxy resin include Araldite E manufactured by Ciba Geigy.
CN1299 (softening point 99°C, epoxy equivalent 230),
ECN1280 (softening point 80°C, epoxy equivalent 230)
, ECN1273 (softening point 73°C, epoxy equivalent 230
), EOCN104 manufactured by Nippon Kayaku Co., Ltd. (softening point 90-1
00℃, epoxy equivalent 225-245), EOCN10
3 (softening point 80~90℃, epoxy equivalent 215~235
), EOCN102 (softening point 70-80°C, epoxy equivalent 215-235), EOCN101 (softening point 65-6
9° C., epoxy equivalent: 205 to 225).
【0018】フェノールノボラック型エポキシ樹脂とし
ては、例えば、シェル社製エピコート154(エポキシ
当量176〜181)、ダウケミカル社製DEN431
(エポキシ当量172〜179)、DEN438(エポ
キシ当量175〜182)、東都化成(株)製YDPN
−638(エポキシ当量170〜190)、YDPN−
601(エポキシ当量180〜220)、YDPN−6
02(エポキシ当量180〜220)等が挙げられる。Examples of the phenol novolac type epoxy resin include Epikote 154 (epoxy equivalent weight 176 to 181) manufactured by Shell Co., Ltd. and DEN431 manufactured by Dow Chemical Company.
(Epoxy equivalent: 172-179), DEN438 (Epoxy equivalent: 175-182), YDPN manufactured by Toto Kasei Co., Ltd.
-638 (epoxy equivalent 170-190), YDPN-
601 (epoxy equivalent 180-220), YDPN-6
02 (epoxy equivalent: 180 to 220).
【0019】ハロゲン化フェノールノボラック型エポキ
シ樹脂としては、例えば日本化薬(株)製BREN(エ
ポキシ当量270〜300、臭素含有量35〜37%、
軟化点80〜90℃)等の臭素化フェノールノボラック
型エポキシ樹脂等が挙げられる。また、不飽和カルボン
酸としては、アクリル酸、メタクリル酸、β−フリルア
クリル酸、β−スチリルアクリル酸、α−シアノケイ皮
酸、ケイ皮酸等を用いることができる。Examples of the halogenated phenol novolak type epoxy resin include BREN manufactured by Nippon Kayaku Co., Ltd. (epoxy equivalent: 270-300, bromine content: 35-37%,
Examples include brominated phenol novolak type epoxy resins having a softening point of 80 to 90°C. Further, as the unsaturated carboxylic acid, acrylic acid, methacrylic acid, β-furylacrylic acid, β-styrylacrylic acid, α-cyanocinnamic acid, cinnamic acid, etc. can be used.
【0020】本発明において(a)成分である光重合性
不飽和化合物を製造する際の上記ノボラック型エポキシ
樹脂と不飽和カルボン酸との付加反応は、常法により下
記の式(I)に示すように、酸当量/エポキシ当量の比
を0.1〜0.8の範囲として行われる。[0020] In the production of the photopolymerizable unsaturated compound which is component (a) in the present invention, the addition reaction between the novolak type epoxy resin and the unsaturated carboxylic acid is carried out by a conventional method as shown in the following formula (I). Thus, the acid equivalent/epoxy equivalent ratio is set in the range of 0.1 to 0.8.
【化1】[Chemical formula 1]
【0021】酸当量/エポキシ当量の比が0.1未満で
はイメージ露光後の現像処理により、光硬化被膜が膨潤
しやすい。一方、酸当量/エポキシ当量の比が0.8を
超える場合には、密着性、耐熱性等が低下する。If the acid equivalent/epoxy equivalent ratio is less than 0.1, the photocured film is likely to swell during development after image exposure. On the other hand, if the ratio of acid equivalent/epoxy equivalent exceeds 0.8, adhesiveness, heat resistance, etc. will decrease.
【0022】ノボラック型エポキシ樹脂と不飽和カルボ
ン酸との付加反応は公知の反応であり、条件を適宜設定
することにより容易に行うことができるが、例えば、上
記ノボラック型エポキシ樹脂をメチルエチルケトン、メ
チルセロソルブアセテート、エチルセロソルブアセテー
ト、シクロヘキサノン等の不活性有機溶剤に溶解し、触
媒としてトリエチルアミン、トリ−n−ブチルアミン、
ジエチルシクロヘキシルアミン等の3級アミン、塩化ベ
ンジルトリメチルアンモニウム、塩化ベンジルトリエチ
ルアンモニウム等の4級アンモニウム塩などを、また、
重合禁止剤としてハイドロキノン、p−メトキシフェノ
ール等を用い、70〜110℃で前記不飽和カルボン酸
と、上記の当量比の範囲で撹拌反応させることにより付
加反応を行うことができ、(a)成分の光重合性不飽和
化合物の前駆体Aを得ることができる。The addition reaction between a novolac type epoxy resin and an unsaturated carboxylic acid is a known reaction, and can be easily carried out by appropriately setting the conditions. It is dissolved in an inert organic solvent such as acetate, ethyl cellosolve acetate, cyclohexanone, etc., and as a catalyst triethylamine, tri-n-butylamine,
Tertiary amines such as diethylcyclohexylamine, quaternary ammonium salts such as benzyltrimethylammonium chloride, benzyltriethylammonium chloride, etc.
The addition reaction can be carried out by stirring and reacting with the unsaturated carboxylic acid at 70 to 110°C in the equivalence ratio range described above using hydroquinone, p-methoxyphenol, etc. as a polymerization inhibitor. A precursor A of a photopolymerizable unsaturated compound can be obtained.
【0023】この前駆体Aと反応させる飽和又は不飽和
無水多塩基酸としては、例えば無水フタル酸、無水テト
ラヒドロフタル酸、無水ヘキサヒドロフタル酸、無水メ
チルテトラヒドロフタル酸、無水メチル2置換ブテニル
テトラヒドロフタル酸、無水イタコン酸、無水コハク酸
、無水シトラコン酸、無水アルケニル酸、無水ドデセニ
ルコハク酸、無水トリカルバリル酸、無水マレイン酸、
無水マレイン酸のリノレイン酸付加物、無水クロレンデ
ィック酸、メチルシクロペンタジエンの無水マレイン酸
付加物、無水アルキル化エンドアルキレンテトラヒドロ
フタル酸等を挙げることができる。Examples of the saturated or unsaturated polybasic anhydride to be reacted with the precursor A include phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methyltetrahydrophthalic anhydride, and methyl 2-substituted butenyltetrahydrophthalic anhydride. Phthalic acid, itaconic anhydride, succinic anhydride, citraconic anhydride, alkenylic anhydride, dodecenylsuccinic anhydride, tricarballylic anhydride, maleic anhydride,
Examples include linoleic acid adducts of maleic anhydride, chlorendic anhydride, maleic anhydride adducts of methylcyclopentadiene, and alkylated endoalkylenetetrahydrophthalic anhydride.
【0024】本発明において、これらの多塩基酸無水物
と前駆体Aとの付加反応は、通常100〜150℃で行
い前駆体Bが得られる。アルカリ水溶液により現像性及
び光硬化膜の膨潤性の点から酸当量/水酸基当量の比を
0.1〜0.8の範囲として常法により行うことが好ま
しい。In the present invention, the addition reaction between these polybasic acid anhydrides and precursor A is usually carried out at 100 to 150°C to obtain precursor B. From the viewpoint of developability with an alkaline aqueous solution and swellability of the photocured film, it is preferable to carry out a conventional method with the acid equivalent/hydroxyl group equivalent ratio in the range of 0.1 to 0.8.
【0025】前駆体Bの無水多塩基酸反応物中に残存す
る水酸基に飽和もしくは不飽和モノイソシアナートを付
加させる。飽和モノイソシアナートは、1分子中に少な
くとも1個のイソシアナート基を有するものであり、例
えば、フェニルイソシアナート、パラクロルフェニルイ
ソシアナート、オルソクロルフェニルイソシアナート、
メタクリルフェニルイソシアナート、3,4−ジクロロ
フェニルイソシアナート、2,5−ジクロルフェニルイ
ソシアナート、ポリメチレンポリフェニルイソシアナー
ト等の芳香族イソシアナート化合物;メチルイソシアナ
ート、クロロメチルイソシアナート、エチルイソシアナ
ート、β−クロロエチルイソシアナート、n−プロピル
イソシアナート、イソプロピルイソシアナート、n−ブ
チルイソシアナート、t−ブチルイソシアナート、ペン
チルイソシアナート、ヘキシルイソシアナート、シクロ
ヘキシルイソシアナート、t−オクチルイソシアナート
、デシルイソシアナート、ウンデシルイソシアナート、
ドデシルイソシアナート、ヘキサデシルイソシアナート
、オクタデシルイソシアナート、フェニルイソシアナー
ト、p−ブロモフェニルイソシアナート、m−クロロフ
ェニルイソシアナート、o−クロロフェニルイソシアナ
ート、p−クロロフェニルイソシアナート、2,5−ジ
クロロフェニルイソシアナート、3,4−ジクロロフェ
ニルイソシアナート、α−メチルベンジルイソシアナー
ト、α−ナフチルイソシアナート、1−(1−ナフチル
)エチルイソシアナート、m−トリルイソシアナート、
p−トリルイソシアナート、m−トリフルオロメチルフ
ェニルイソシアナート、イソシアナートアセティックア
シドエチルエステルなどの脂肪族イソシアナートが用い
られる。これらの飽和イソシアナート化合物は、1種類
単独でも2種類以上組合わせても使用することができる
。また、これらのうち組成物に現像性及び硬化膜に可と
う性を付与するためには脂肪族イソシアナート化合物は
使用することが好ましい。A saturated or unsaturated monoisocyanate is added to the hydroxyl groups remaining in the polybasic anhydride reactant of precursor B. Saturated monoisocyanates have at least one isocyanate group in one molecule, such as phenyl isocyanate, parachlorophenylisocyanate, orthochlorophenylisocyanate,
Aromatic isocyanate compounds such as methacryl phenyl isocyanate, 3,4-dichlorophenylisocyanate, 2,5-dichlorophenylisocyanate, polymethylene polyphenylisocyanate; methyl isocyanate, chloromethyl isocyanate, ethyl isocyanate, β-chloroethyl isocyanate, n-propylisocyanate, isopropylisocyanate, n-butyl isocyanate, t-butyl isocyanate, pentyl isocyanate, hexyl isocyanate, cyclohexyl isocyanate, t-octyl isocyanate, decyl isocyanate , undecyl isocyanate,
Dodecyl isocyanate, hexadecyl isocyanate, octadecyl isocyanate, phenyl isocyanate, p-bromophenyl isocyanate, m-chlorophenylisocyanate, o-chlorophenylisocyanate, p-chlorophenylisocyanate, 2,5-dichlorophenylisocyanate, 3,4-dichlorophenylisocyanate, α-methylbenzyl isocyanate, α-naphthyl isocyanate, 1-(1-naphthyl)ethyl isocyanate, m-tolyl isocyanate,
Aliphatic isocyanates such as p-tolyl isocyanate, m-trifluoromethylphenyl isocyanate, and isocyanate acetic acid ethyl ester are used. These saturated isocyanate compounds can be used singly or in combination of two or more. Further, among these compounds, it is preferable to use an aliphatic isocyanate compound in order to impart developability to the composition and flexibility to a cured film.
【0026】不飽和モノイソシアナートは、1分子中に
少なくとも1個のイソシアナート基を有するものであり
、例えば、メタクリロイルイソシアナート、イソシアナ
ートエチルアクリレート、イソシアナートプロピルアク
リレート、イソシアナートブチルアクリレート、イソシ
アナートペンチルアクリレート、イソシアナートヘキシ
ルアクリレート、イソシアナートオクチルアクリレート
、イソシアナートデシルアクリレート、イソシアナート
オクタデシルアクリレート、イソシアナートエチルメタ
クリレート、イソシアナートプロピルメタクリレート、
イソシアナートブチルメタクリレート、イソシアナート
ペンチルメタクリレート、イソシアナートヘキシルメタ
クリレート、イソシアナートオクチルメタクリレート、
イソシアナートデシルメタクリレート、イソシアナート
オクタデシルメタクリレート、イソシアナートエチルク
ロトネート、イソシアナートプロピルクロトネート、イ
ソシアナートヘキシルクロトネート等を用いることがで
きる。これらの不飽和イソシアナート化合物は、1種類
単独でも2種類以上を組合わせても使用することができ
る。[0026] Unsaturated monoisocyanates have at least one isocyanate group in one molecule, and examples include methacryloyl isocyanate, isocyanatoethyl acrylate, isocyanatopropyl acrylate, isocyanatobutyl acrylate, and isocyanate. Pentyl acrylate, isocyanatohexyl acrylate, isocyanatooctyl acrylate, isocyanatodecyl acrylate, isocyanatooctadecyl acrylate, isocyanatoethyl methacrylate, isocyanatopropyl methacrylate,
Isocyanatobutyl methacrylate, isocyanatopentyl methacrylate, isocyanatohexyl methacrylate, isocyanatooctyl methacrylate,
Isocyanatodecyl methacrylate, isocyanato octadecyl methacrylate, isocyanatoethyl crotonate, isocyanatopropyl crotonate, isocyanatohexyl crotonate, etc. can be used. These unsaturated isocyanate compounds can be used alone or in combination of two or more.
【0027】前駆体Bと飽和もしくは不飽和モノイソシ
アナートとを通常0〜100℃、好ましくは、20〜7
0℃で反応させることにより光重合性不飽和化合物(a
)を得ることができる。このときのイソシアナート基当
量/水酸基当量は、0.02〜0.9とされることが好
ましく、0.2〜0.9とされることがより好ましい。[0027] Precursor B and saturated or unsaturated monoisocyanate are heated at a temperature of usually 0 to 100°C, preferably 20 to 7°C.
A photopolymerizable unsaturated compound (a
) can be obtained. The isocyanate group equivalent/hydroxyl group equivalent at this time is preferably 0.02 to 0.9, more preferably 0.2 to 0.9.
【0028】本発明(b)エポキシ基を少なくとも1個
有する化合物としては、例えば次式(II)で示される
化合物が挙げられる。The compound having at least one epoxy group (b) of the present invention includes, for example, a compound represented by the following formula (II).
【化2】[Case 2]
【0028】これらの化合物の重量平均分子量は、30
00〜10000の範囲が好ましく、3500〜600
0の範囲がより好ましい。式(II)で表される化合物
としては、例えば、油化シェルエポキシ(株)製エピコ
ート1009(エポキシ当量2400〜3300、平均
分子量3750)、エピコート1010(エポキシ当量
3000〜5000、平均分子量5500)等が挙げら
れる。The weight average molecular weight of these compounds is 30
The range is preferably from 00 to 10,000, and from 3,500 to 600
A range of 0 is more preferable. Examples of the compound represented by formula (II) include Epicote 1009 (epoxy equivalent weight 2400-3300, average molecular weight 3750) manufactured by Yuka Shell Epoxy Co., Ltd., Epicote 1010 (epoxy equivalent weight 3000-5000, average molecular weight 5500), etc. can be mentioned.
【0029】本発明の感光性樹脂組成物は、必須成分(
c)として活性光線によって遊離ラジカルを生成する増
感剤及び/又は増感剤系を含有する。増感剤としては、
例えば、2−エチルアントラキノン、2−t−ブチルア
ントラキノン、オクタメチルアントラキノン、1,2−
ベンズアントラキノン、2,3−ジフェニルアントラキ
ノン等の置換又は非置換の多核キノン類、ジアセチルベ
ンジル等のケトアルドニル化合物、ベンゾイン、ピバロ
ン等のα−ケタルドニルアルコール類及びエーテル類、
α−フェニル−ベンゾイン、α,α−ジエトキシアセト
フェノン等のα−炭化水素置換芳香族アシロイン類、ベ
ンゾフェノン、4,4’−ビスジアルキルアミノベンゾ
フェノン等の芳香族ケトン類、2−メチルチオキサント
ン、2,4−ジエチルチオキサントン、2−クロルチオ
キサントン、2−イソプロピルチオキサントン、2−エ
チルチオキサントン等のチオキサントン類、2−メチル
−1−〔4−(メチルチオ)フェニル〕−2−モルホリ
ノ−プロパノン−1などが用いられ、これらは単独又は
組み合わせて使用することができる。また、増感剤系と
しては、例えば、2,4,5−トリアリルイミダゾール
二量体と2−メチルカプトベンゾキナゾール、ロイコク
リスタルバイオレット、トリス(4−ジエチルアミノ−
2−メチルフェニル)メタン等の組み合わせが用いられ
る。また、それ自体で光開始性はないが、前記物質と組
み合わせることによって、全体として光開始性能が向上
するような添加剤を用いることができる。これらの添加
剤としては、例えば、ベンゾフェノンに対するトリエタ
ノールアミン等の3級アミン、チオキサントン類に対す
るジメチルアミノ安息香酸イソアミル、N−メチルジエ
タノールアミン、ビスエチルアミノベンゾフェノン等が
挙げられる。The photosensitive resin composition of the present invention contains essential components (
As c), it contains a sensitizer and/or a sensitizer system that generates free radicals by actinic radiation. As a sensitizer,
For example, 2-ethylanthraquinone, 2-t-butylanthraquinone, octamethylanthraquinone, 1,2-
Substituted or unsubstituted polynuclear quinones such as benzanthraquinone and 2,3-diphenylanthraquinone, ketoaldonyl compounds such as diacetylbenzyl, α-ketaldonyl alcohols and ethers such as benzoin and pivalone,
α-hydrocarbon-substituted aromatic acyloins such as α-phenyl-benzoin and α,α-diethoxyacetophenone, aromatic ketones such as benzophenone and 4,4'-bisdialkylaminobenzophenone, 2-methylthioxanthone, 2, Thioxanthone such as 4-diethylthioxanthone, 2-chlorothioxanthone, 2-isopropylthioxanthone, 2-ethylthioxanthone, 2-methyl-1-[4-(methylthio)phenyl]-2-morpholino-propanone-1, etc. are used. , these can be used alone or in combination. Examples of sensitizer systems include 2,4,5-triallylimidazole dimer, 2-methylcaptobenzoquinazole, leuco crystal violet, and tris(4-diethylamino-
A combination such as 2-methylphenyl)methane is used. Further, additives can be used which do not have photoinitiation properties by themselves, but which, when combined with the above-mentioned substances, improve the photoinitiation performance as a whole. Examples of these additives include tertiary amines such as triethanolamine for benzophenone, isoamyl dimethylaminobenzoate, N-methyldiethanolamine, and bisethylaminobenzophenone for thioxanthone.
【0030】本願発明の感光性樹脂組成物における(a
),(b)及び(c)成分の配合割合は、(a)成分1
00重量部に対して、(b)成分2〜20重量部,(c
)成分1〜10重量部とすることが耐熱性,密着性,耐
溶剤性等の点から好ましい。In the photosensitive resin composition of the present invention, (a
), (b) and (c) components are (a) component 1
00 parts by weight, component (b) 2 to 20 parts by weight, (c
) component is preferably 1 to 10 parts by weight from the viewpoint of heat resistance, adhesion, solvent resistance, etc.
【0031】本発明の感光性樹脂組成物には、例えば、
ジシアンジアミド、グアニジン、アミノグアニジン、1
,1,3,3−テトラメチルグアニジン、n−ドデシル
グアニジン、1,6−ジグアニジノヘキサン、メチロー
ルグアニジン、ビグアニド、1−フェニルグアニジン、
1,3−ジフェニルグアニジン、1,3−ジ−o−トリ
ルグアニジン、1−o−トリルビグアニド、1−ベンジ
ル−2,3−ジメチルグアニジン等のグアニジン系化合
物を添加することが耐熱性、密着性、耐溶剤性の点で好
ましい。その使用量としては(a)成分100重量部に
対して0.1〜10重量部が好ましい。The photosensitive resin composition of the present invention includes, for example,
Dicyandiamide, guanidine, aminoguanidine, 1
, 1,3,3-tetramethylguanidine, n-dodecylguanidine, 1,6-diguanidinohexane, methylolguanidine, biguanide, 1-phenylguanidine,
Heat resistance and adhesion can be improved by adding guanidine compounds such as 1,3-diphenylguanidine, 1,3-di-o-tolylguanidine, 1-o-tolyl biguanide, and 1-benzyl-2,3-dimethylguanidine. , preferred in terms of solvent resistance. The amount used is preferably 0.1 to 10 parts by weight per 100 parts by weight of component (a).
【0032】本発明の感光性樹脂組成物には、例えば、
2−エチル−4−メチルイミダゾール、1−シアノエチ
ル−2−フェニルイミダゾール、2,4−ジアミノ−6
−〔2−ウンデシル−イミダゾール(1)〕−エチル−
s−トリアジン、2−メチルイミダゾール等のイミダゾ
ール系化合物を添加することが、耐熱性、密着性、耐溶
剤性の点で好ましい。その使用量としては(a)100
重量部に対して0.1〜10重量部が好ましい。The photosensitive resin composition of the present invention includes, for example,
2-ethyl-4-methylimidazole, 1-cyanoethyl-2-phenylimidazole, 2,4-diamino-6
-[2-undecyl-imidazole (1)]-ethyl-
It is preferable to add imidazole compounds such as s-triazine and 2-methylimidazole in terms of heat resistance, adhesion, and solvent resistance. The amount used is (a) 100
It is preferably 0.1 to 10 parts by weight.
【0033】本発明の感光性樹脂組成物には、さらに副
次的成分として微粒状充填剤を添加することができる。
微粒状充填剤としては、例えば、タルク、シリカ、酸化
チタン、クレイ、炭酸カルシウム、含水珪酸、水酸化ア
ルミニウム、アルミナ、硫酸バリウム、三酸化アンチモ
ン、炭酸マグネシウム、マイカ粉、珪酸アルミニウム、
珪酸マグネシウム等の無機充填剤の他、有機充填剤とし
て、例えば、ポリエチレンビーズ、架橋ポリスチレンビ
ーズ、硬化エポキシ樹脂ビーズ等が用いられる。微粒状
充填剤の粒径は、解像度、硬化被膜の密着性等の低下防
止の点から、好ましくは0.01〜10μm、より好ま
しくは0.01〜1.5μmである。また、微粒状充填
剤は、感光性樹脂組成物中に均一に分散されていること
が好ましい。また、充填剤と前記光重合性不飽和化合物
との間の接着力を増すために、充填剤の表面を、水酸基
、アミノ基、エポキシ基、ビニル基等の官能基を有する
シランカップリング剤で処理することもできる。該シラ
ンカップリング剤としては、例えば、γ−アミノプロピ
ルトリエトキシシラン、β−アミノエチル−γ−アミノ
プロピルトリメトキシシラン、γ−グリシドキシプロピ
ルトリメトキシシラン、γ−メタクリロキシプロピルト
リメトキシシラン等が挙げられる。[0033] The photosensitive resin composition of the present invention may further contain a fine particulate filler as a secondary component. Examples of fine particulate fillers include talc, silica, titanium oxide, clay, calcium carbonate, hydrated silicic acid, aluminum hydroxide, alumina, barium sulfate, antimony trioxide, magnesium carbonate, mica powder, aluminum silicate,
In addition to inorganic fillers such as magnesium silicate, organic fillers such as polyethylene beads, crosslinked polystyrene beads, and cured epoxy resin beads can be used. The particle size of the particulate filler is preferably 0.01 to 10 μm, more preferably 0.01 to 1.5 μm, from the viewpoint of preventing deterioration of resolution, adhesion of the cured film, and the like. Moreover, it is preferable that the particulate filler is uniformly dispersed in the photosensitive resin composition. In addition, in order to increase the adhesive strength between the filler and the photopolymerizable unsaturated compound, the surface of the filler is coated with a silane coupling agent having a functional group such as a hydroxyl group, an amino group, an epoxy group, or a vinyl group. It can also be processed. Examples of the silane coupling agent include γ-aminopropyltriethoxysilane, β-aminoethyl-γ-aminopropyltrimethoxysilane, γ-glycidoxypropyltrimethoxysilane, γ-methacryloxypropyltrimethoxysilane, etc. can be mentioned.
【0034】また、本発明の感光性樹脂組成物には、他
の光重合性化合物を含有してもよい。該光重合性化合物
としては、例えば、トリメチルヘキサメチレンジイソシ
アナート/2−ヒドロキシエチルアクリレート(1/2
モル比)反応物、イソシアナートエチルメタクリレート
/水(2/1モル比)反応物、メチルアクリレート、エ
チルアクリレート、n−プロピルアクリレート、イソプ
ロピルアクリレート、n−ブチルアクリレート、イソブ
チルアクリレート、シクロヘキシルアクリレート、ベン
ジルアクリレート、カルビトールアクリレート、メトキ
シエチルアクリレート、エトキシエチルアクリレート、
ブトキシエチルアクリレート、ヒドロキシエチルアクリ
レート、ヒドロキシプロピルアクリレート、ブチレング
リコールモノアクリレート、N,N−ジメチルアミノエ
チルアクリレート、N,N−ジエチルアミノエチルアク
リレート、グリシジルアクリレート、テトラヒドロフル
フリルアクリレート、ペンタエリスリトールモノアクリ
レート、トリメチロールプロパンモノアクリレート、ア
クリルアクリレート、1,3−プロピレングリコールジ
アクリレート、1,4−ブチレングリコールジアクリレ
ート、1,6−ヘキシレングリコールジアクリレート、
ネオペンチルグリコールジアクリレート、ジプロピレン
グリコールジアクリレート、2,2−ビス−(4−アク
リロキシジエトキシフェニル)プロパン、2,2−ビス
−(4−アクリロキシプロポキシフェニル)プロパン、
トリメチロールプロパンジアクリレート、ペンタエリト
リットジアクリレート、トリメチロールプロパントリア
クリレート、ペンタエリトリットトリアクリレート、ト
リアクリルホルマール、テトラメチロールメタンテトラ
アクリレート、トリス(2−ヒドロキシエチル)イソシ
アヌル酸のアクリル酸エステル、The photosensitive resin composition of the present invention may also contain other photopolymerizable compounds. As the photopolymerizable compound, for example, trimethylhexamethylene diisocyanate/2-hydroxyethyl acrylate (1/2
Molar ratio) Reactant, isocyanate ethyl methacrylate/water (2/1 molar ratio) Reactant, methyl acrylate, ethyl acrylate, n-propyl acrylate, isopropyl acrylate, n-butyl acrylate, isobutyl acrylate, cyclohexyl acrylate, benzyl acrylate, carbitol acrylate, methoxyethyl acrylate, ethoxyethyl acrylate,
Butoxyethyl acrylate, hydroxyethyl acrylate, hydroxypropyl acrylate, butylene glycol monoacrylate, N,N-dimethylaminoethyl acrylate, N,N-diethylaminoethyl acrylate, glycidyl acrylate, tetrahydrofurfuryl acrylate, pentaerythritol monoacrylate, trimethylolpropane Monoacrylate, acrylic acrylate, 1,3-propylene glycol diacrylate, 1,4-butylene glycol diacrylate, 1,6-hexylene glycol diacrylate,
Neopentyl glycol diacrylate, dipropylene glycol diacrylate, 2,2-bis-(4-acryloxydiethoxyphenyl)propane, 2,2-bis-(4-acryloxypropoxyphenyl)propane,
Trimethylolpropane diacrylate, pentaerythritol diacrylate, trimethylolpropane triacrylate, pentaerythritol triacrylate, triacryl formal, tetramethylolmethanetetraacrylate, acrylic ester of tris(2-hydroxyethyl)isocyanuric acid,
【化3】[Chemical formula 3]
【化4】
メタクリル酸、メチルメタクリレート、エチルメタクリ
レート、プロピルメタクリレート、イソプロピルメタク
リレート、ブチルメタクリレート、イソブチルメタクリ
レート、シクロヘキシルメタクリレート、ベンジルメタ
クリレート、オクチルメタクリレート、エチルヘキシル
メタクリレート、メトキシエチルメタクリレート、エト
キシエチルメタクリレート、ブトキシエチルメタクリレ
ート、ヒドロキシエチルメタクリレート、ヒドロキシプ
ロピルメタクリレート、ヒドロキシブチルメタクリレー
ト、ヒドロキシペンチルメタクリレート、N,N−ジメ
チルアミノメタクリレート、N,N−ジエチルアミノメ
タクリレート、グリシジルメタクリレート、テトラヒド
ロフルフリルメタクリレート、メタクリロキシプロピル
トリメトキシシラン、アリルメタクリレート、トリメチ
ロールプロパンモノメタクリレート、ペンタエリスリト
ールモノメタクリレート、1,3−ブチレングリコール
ジメタクリレート、1,6−ヘキシレングリコールジメ
タクリレート、ネオペンチルグリコールジメタクリレー
ト、2,2−ビス(4−メタクリロキシジエトキシフェ
ニル)プロパン、トリメチロールプロパンジメタクリレ
ート、ペンタエリスリトールジメタクリレート、トリメ
チロールプロパントリアクリレート、ペンタエリスリト
ールトリメタクリレート、テトラメチロールメタンテト
ラメタクリレート、トリス(2−ヒドロキシエチル)イ
ソシアヌル酸のメタクリル酸エステル、[Chemical 4] Methacrylic acid, methyl methacrylate, ethyl methacrylate, propyl methacrylate, isopropyl methacrylate, butyl methacrylate, isobutyl methacrylate, cyclohexyl methacrylate, benzyl methacrylate, octyl methacrylate, ethylhexyl methacrylate, methoxyethyl methacrylate, ethoxyethyl methacrylate, butoxyethyl methacrylate, hydroxy Ethyl methacrylate, hydroxypropyl methacrylate, hydroxybutyl methacrylate, hydroxypentyl methacrylate, N,N-dimethylamino methacrylate, N,N-diethylamino methacrylate, glycidyl methacrylate, tetrahydrofurfuryl methacrylate, methacryloxypropyltrimethoxysilane, allyl methacrylate, trimethylol Propane monomethacrylate, pentaerythritol monomethacrylate, 1,3-butylene glycol dimethacrylate, 1,6-hexylene glycol dimethacrylate, neopentyl glycol dimethacrylate, 2,2-bis(4-methacryloxydiethoxyphenyl)propane, Trimethylolpropane dimethacrylate, pentaerythritol dimethacrylate, trimethylolpropane triacrylate, pentaerythritol trimethacrylate, tetramethylolmethanetetramethacrylate, methacrylic acid ester of tris(2-hydroxyethyl)isocyanuric acid,
【化5】[C5]
【化6】
クロトン酸ブチル、グリセリンモノクロネート、ビニル
ブチレート、ビニルトリメチルアセテート、ビニルカプ
ロエート、ビニルクロルアセテート、ビニルラクテート
、安息香酸ビニル、ジビニルサクシネート、ジビニルフ
タレート、メタクリルアミド、N−メチルメタクリルア
ミド、N−エチルメタクリルアミド、N−アリールメタ
クリルアミド、N−ヒドロキシエチル−N−メチルメタ
クリルアミド、アクリルアミド、N−t−ブチルアクリ
ルアミド、N−メチロールアクリルアミド、N−イソブ
トキシメチルアクリルアミド、N−ブトシキメチルアク
リルアミド、ダイアセトンアクリルアミド、ヘキシルビ
ニルエーテル、エチルヘキシルビニルエーテル、ビニル
トリエーテル、多価アルコールのポリビニルエーテル、
スチレン誘導体として、例えばオルト及びパラ位にアル
キル基、アルコキシ基、ハロゲン、カルボキシル基、ア
リル基などの置換基を持ったスチレン、ジビニルベンゼ
ン、アリルオキシエタノール、ジカルボン酸のジアリル
エステル、N−ビニルオキサゾリドン、N−ビニルイミ
ダゾール、N−ビニルピロリドン、N−ビニルカルバゾ
ールなど挙げられる。[Chemical 6] Butyl crotonate, glycerin monoclonate, vinyl butyrate, vinyl trimethyl acetate, vinyl caproate, vinyl chloroacetate, vinyl lactate, vinyl benzoate, divinyl succinate, divinyl phthalate, methacrylamide, N-methyl methacrylate Amide, N-ethylmethacrylamide, N-arylmethacrylamide, N-hydroxyethyl-N-methylmethacrylamide, acrylamide, Nt-butylacrylamide, N-methylolacrylamide, N-isobutoxymethylacrylamide, N-butoshiki Methylacrylamide, diacetone acrylamide, hexyl vinyl ether, ethylhexyl vinyl ether, vinyltriether, polyvinyl ether of polyhydric alcohols,
Examples of styrene derivatives include styrene having substituents such as alkyl groups, alkoxy groups, halogens, carboxyl groups, and allyl groups at the ortho and para positions, divinylbenzene, allyloxyethanol, diallyl esters of dicarboxylic acids, N-vinyloxazolidone, Examples include N-vinylimidazole, N-vinylpyrrolidone, and N-vinylcarbazole.
【0035】これらの光重合性化合物の使用量は、耐熱
性の点から光重合性不飽和化合物(a)に対して20重
量%以下であることが好ましい。From the viewpoint of heat resistance, the amount of these photopolymerizable compounds used is preferably 20% by weight or less based on the photopolymerizable unsaturated compound (a).
【0036】本発明の感光性樹脂組成物には、さらに、
高分子結合剤、熱重合防止剤、染料、顔料、塗工性向上
剤、消泡剤、難燃剤、密着性向上剤、エポキシ樹脂の潜
在性硬化剤等を含有させることができる。The photosensitive resin composition of the present invention further includes:
It can contain a polymer binder, a thermal polymerization inhibitor, a dye, a pigment, a coatability improver, an antifoaming agent, a flame retardant, an adhesion improver, a latent curing agent for epoxy resin, and the like.
【0037】本発明の感光性樹脂組成物は、ディップコ
ート法、ロールコート法、フローコート法、スクリーン
印刷法、スプレー法、静電スプレー法等の常法により、
加工保護すべき基板又はプリント配線板上に直接塗工し
、厚さ10〜150μmの感光層を容易に形成すること
ができる。塗工する際には、必要に応じて感光性樹脂組
成物を溶剤に溶解させて行うこともできる。この溶剤と
しては、例えばメチルエチルケトン、メチルセロソルブ
アセテート、エチルセロソルブアセテート、シクロヘキ
サノン、メチルセロソルブ、塩化メチレン、1,1,1
−トリクロルエタン等を挙げることができる。The photosensitive resin composition of the present invention can be prepared by conventional methods such as dip coating, roll coating, flow coating, screen printing, spraying, and electrostatic spraying.
A photosensitive layer having a thickness of 10 to 150 μm can be easily formed by directly coating a substrate or printed wiring board to be processed and protected. When coating, the photosensitive resin composition can be dissolved in a solvent if necessary. Examples of the solvent include methyl ethyl ketone, methyl cellosolve acetate, ethyl cellosolve acetate, cyclohexanone, methyl cellosolve, methylene chloride, 1,1,1
-trichloroethane and the like.
【0038】また、前記組成物又はその溶液を、例えば
ポリエチレンテレフタレートフィルム、ポリイミドフィ
ルム等のフィルム上に、ナイフコート法、ロールコート
法等によって塗布、乾燥して感光性エレメントを作製し
、該感光性エレメントを熱ロールを用いて基板又はプリ
ント配線板上に加熱加圧積層して感光層を形成すること
もできる。この際、基板が10μm以上の凹凸を有する
場合には、空気の巻き込みを防ぐため、200mmHg
以下の真空下で積層することが好ましい。この装置とし
ては、例えば特公昭55−13341号公報に記載され
る積層装置が用いられる。活性光に不透明な支持体フィ
ルムを用いる場合には、露光時に支持体フィルムを剥離
する必要がある。[0038] Further, the above composition or its solution is applied onto a film such as a polyethylene terephthalate film or a polyimide film by a knife coating method, a roll coating method, etc. and dried to prepare a photosensitive element. The photosensitive layer can also be formed by laminating the element on a substrate or printed wiring board under heat and pressure using a hot roll. At this time, if the substrate has irregularities of 10 μm or more, the
It is preferable to laminate under the following vacuum conditions. As this device, for example, a laminating device described in Japanese Patent Publication No. 55-13341 is used. When using a support film that is opaque to actinic light, it is necessary to peel the support film during exposure.
【0039】こうして形成された感光層の露光及び現像
は常法により行われる。すなわち、光源として超高圧水
銀灯、高圧水銀灯等を用い、感光性樹脂組成物の層上に
直接又はポリエチレンテレフタレートフィルム等の透明
フィルムを介し、ネガマスクを通して像的に露光する。
露光後、透明フィルムが残っている場合には、これを剥
離した後現像する。Exposure and development of the photosensitive layer thus formed is carried out by conventional methods. That is, using an ultra-high-pressure mercury lamp, a high-pressure mercury lamp, or the like as a light source, the layer of the photosensitive resin composition is imagewise exposed directly or through a negative mask through a transparent film such as a polyethylene terephthalate film. If a transparent film remains after exposure, it is peeled off and developed.
【0040】上記の方法で得られた像的な保護被膜は、
通常のエッチング、めっき等のための耐食膜としての特
性を持っているが、現像後に活性光の露光及び/又は8
0〜200℃での加熱処理を行うことによって密着性、
耐熱性、耐溶剤性等の特性を向上でき、ソルダマスクと
しての特性を満足する永久的な保護膜及びこの保護膜が
形成された基板、あるいはプリント配線板が得られる。
これらの活性光の露光及び加熱処理の順序はどちらが先
でもよい。The image-like protective coating obtained by the above method is
It has properties as a corrosion-resistant film for ordinary etching, plating, etc., but after development, it is exposed to active light and/or
Adhesion is improved by heat treatment at 0 to 200°C.
A permanent protective film that can improve properties such as heat resistance and solvent resistance and satisfies the properties as a solder mask, and a substrate or printed wiring board on which this protective film is formed can be obtained. The order of exposure to active light and heat treatment may be in any order.
【0041】[0041]
【実施例】次に、本発明を実施例により詳しく説明する
。なお、「部」は、「重量部」を意味するものとする。EXAMPLES Next, the present invention will be explained in detail by examples. In addition, "parts" shall mean "parts by weight."
【0042】実施例1
(a)光重合性不飽和化合物の合成
A.オルソクレゾールノボラック型エポキシ樹脂(
日本化薬 230部 (株)製E
OCN−102、エポキシ当量230)
エチルセロソルブアセテー
ト
210部 B.アクリル酸
72部
塩化ベンジルトリメチルアンモニウム塩
2
部 p−メトキシフェノール
1部 C.テトラヒドロ無水フタル
酸
76部 D.イソシアナー
トエチルメタクリレート
77部 ジブチル
チンジラウレート
0.2部
エチルセロソルブアセテート
7
0部 E.メタノール
5部Example 1 (a) Synthesis of photopolymerizable unsaturated compound A. Orthocresol novolak type epoxy resin (
Nippon Kayaku 230 copies E manufactured by Co., Ltd.
OCN-102, epoxy equivalent weight 230)
Ethyl cellosolve acetate
210 copies B. acrylic acid
72 copies
Benzyltrimethylammonium chloride salt
2
Part p-methoxyphenol
Part 1 C. Tetrahydrophthalic anhydride
Part 76 D. Isocyanate ethyl methacrylate
77 parts dibutyltin dilaurate
0.2 parts
Ethyl cellosolve acetate
7
Part 0 E. methanol
5th part
【0043】温度計、
かくはん装置、冷却管及び滴下器の付いた加熱及び冷却
可能な1lの反応器に、前記Aを加え、かくはんしなが
ら60℃に昇温し、均一に溶解させた。反応温度を60
℃に保ちながら、空気気流下、これに1時間かけてBを
滴下した。Bの滴下後、100℃に昇温し30時間かく
はん続け、反応系の酸価を5以下にした。次いで反応温
度を100℃に保ちながらCを加え5時間かくはん続け
、反応系の酸価を62にした(A+B;酸当量/エポキ
シ当量=0.5/1,(A+B)+C;酸当量/小酸基
当量=0.5/1)。[0043] Thermometer,
The above A was added to a 1-liter reactor equipped with a stirring device, a cooling tube, and a dropper capable of heating and cooling, and the temperature was raised to 60° C. while stirring to uniformly dissolve the mixture. Reaction temperature to 60
B was added dropwise thereto over 1 hour under a stream of air while maintaining the temperature at °C. After dropping B, the temperature was raised to 100°C and stirring was continued for 30 hours to bring the acid value of the reaction system to 5 or less. Next, while maintaining the reaction temperature at 100°C, C was added and stirring was continued for 5 hours to bring the acid value of the reaction system to 62 (A+B; acid equivalent/epoxy equivalent = 0.5/1, (A+B)+C; acid equivalent/small). Acid group equivalent = 0.5/1).
【0044】次いで、反応温度を60℃に下げ、反応温
度60℃に保ちながら約3時間かけて均一にDを滴下し
た。Dの滴下後、約5時間かけて徐々に反応温度を80
℃まで昇温した後、温度を60℃に下げ、Eを加え、約
1時間かくはんを続けた。こうして不揮発分62%のオ
ルソクレゾールノボラック型エポキシ樹脂/アクリル酸
/テトラヒドロ無水フタル酸/イソシアナートエチルメ
タクリレート系の光重合性不飽和化合物の溶液(I)を
得た〔(A+B)+C〕+D;イソシアナート基当量/
小酸基当量=0.5/0.5)。Next, the reaction temperature was lowered to 60°C, and D was uniformly added dropwise over about 3 hours while maintaining the reaction temperature at 60°C. After dropping D, the reaction temperature was gradually increased to 80°C over about 5 hours.
After raising the temperature to 60°C, the temperature was lowered to 60°C, E was added, and stirring was continued for about 1 hour. In this way, a solution (I) of a photopolymerizable unsaturated compound of orthocresol novolac type epoxy resin/acrylic acid/tetrahydrophthalic anhydride/isocyanatoethyl methacrylate system with a nonvolatile content of 62% was obtained [(A+B)+C]+D; Nato group equivalent/
Small acid group equivalent = 0.5/0.5).
【0045】
(b)感光性樹脂組成物の調整
・(a)で得られた光重合性不飽和化合物の溶液(1)
160部 ・50%エピコ
ート100g(油化シェル(株)製、50%エチル
20部セロソルブア セテート溶液)
・2.4−ジエチルチオキサントン
5部・安息香酸イソブチル
7部・ジシアンジアシド
1部・シリカ粉(
龍森(株)製、商品名CRS−210−41、平均粒
15部径1.2μm)
・フタロシアニングリーン
0.5部を配合しロールミルで混合分散させ本発明の感
光性樹脂組成物(I−1)を調整した。(b) Preparation of photosensitive resin composition - Solution (1) of photopolymerizable unsaturated compound obtained in (a)
160 parts ・50% Epicoat 100g (manufactured by Yuka Shell Co., Ltd., 50% ethyl
20 parts cellosolve acetate solution) ・2,4-diethylthioxanthone
5 parts/Isobutyl benzoate
Part 7/Dicyandiacid
1 part silica powder (
Manufactured by Ryumori Co., Ltd., product name CRS-210-41, average grain
15 part diameter 1.2μm) ・Phthalocyanine green
A photosensitive resin composition (I-1) of the present invention was prepared by blending 0.5 parts and mixing and dispersing with a roll mill.
【0046】(c)硬化被膜形成及びプリント配線板の
製造
(b)で得られた感光性樹脂組成物(I−1)の溶液を
銅張り積層板(日立化成(株)製、MCL−E−67)
にサブトラクティブ法で回路パターンが形成された基板
上に、バーコータで塗布し、80℃で20分間乾燥し、
厚さ40μm(回路上20μm)の感光層を形成した。
次いでネガマスクを通してオーク製作所製HMW−68
0型露光機を用い、350mJ/cm2で露光した。露
光後、1%炭酸ナトリウム水溶液を用い、30℃で60
秒間スプレー現像した。その後150℃で45分間加熱
処理し、ネガマスクに相応する寸法精度の優れたソルダ
マスク及び該ソルダマスの形成されたプリント配線板を
得た。このプリント配線板をブレス打抜き機(山田ドビ
ー社製、C型フレーム、荷重20トン)に米国、AST
M−D61744に示す金型を用い、パンチとダイスの
クリアランスを0.06mmとして30℃でストローク
数毎分90回で打抜き、クラック剥がれを目視で観察し
たところ切断部にクラック剥がれは見られなかった。(c) Formation of cured film and production of printed wiring board The solution of the photosensitive resin composition (I-1) obtained in (b) was applied to a copper-clad laminate (manufactured by Hitachi Chemical Co., Ltd., MCL-E). -67)
It was applied with a bar coater onto a substrate on which a circuit pattern was formed using a subtractive method, and dried at 80°C for 20 minutes.
A photosensitive layer having a thickness of 40 μm (20 μm on the circuit) was formed. Then, through a negative mask, the HMW-68 manufactured by Oak Manufacturing Co., Ltd.
Exposure was carried out at 350 mJ/cm2 using a type 0 exposure machine. After exposure, use 1% sodium carbonate aqueous solution at 30°C for 60°C.
Spray developed for seconds. Thereafter, heat treatment was performed at 150° C. for 45 minutes to obtain a solder mask with excellent dimensional accuracy suitable for a negative mask and a printed wiring board on which the solder mass was formed. This printed wiring board was cut into a press punching machine (manufactured by Yamada Dobby Co., Ltd., C-shaped frame, load: 20 tons) at AST in the United States.
Using the mold shown in M-D61744, punching was performed at 30° C. with a stroke rate of 90 strokes per minute with a clearance between the punch and the die of 0.06 mm, and when visually inspected for crack peeling, no crack peeling was observed at the cut portion. .
【0047】また耐熱試験としてロジン系フラックスM
H−820V(タムラ化研社製)を用いて260℃で1
0秒間半田付け処理し、さらに1,1,1−トリクロロ
エタンで25℃で10分間洗浄した後、MIL−STD
−202E 107D条件B(−65℃/30分間→
常温5分以内→125℃/30分間)50サイクルの冷
熱衝撃試験でクラックの発生及び被膜の剥がれは認めら
れず、長期間の信頼性が非常に優れていることがわかっ
た。In addition, as a heat resistance test, rosin flux M
1 at 260℃ using H-820V (manufactured by Tamura Kaken Co., Ltd.)
After soldering for 0 seconds and washing with 1,1,1-trichloroethane at 25°C for 10 minutes, MIL-STD
-202E 107D Condition B (-65℃/30 minutes →
No cracking or peeling of the coating was observed in the thermal shock test of 50 cycles (at room temperature for 5 minutes or less → 125° C. for 30 minutes), indicating that the product has excellent long-term reliability.
【0048】また、冷熱衝撃試験とは別途に、前記で1
,1,1−トリクロロエタンで25℃/10分間洗浄処
理した後のものを下記の工程及び条件で金めっき処理を
施したところ、液もぐり、剥がれは認められず、耐金め
っき性に優れていることが分かった。[0048] Separately from the thermal shock test, the above
, 1,1-Trichloroethane at 25°C for 10 minutes, and then gold plating was performed using the following process and conditions, and no liquid leakage or peeling was observed, indicating excellent gold plating resistance. That's what I found out.
【0049】金めっき処理の工程及び条件(イ)脱脂工
程
シェーリング社製のアシッドクリーナFRを7容量%及
び硫酸を7容量%含む脱脂液を用いて室温で5分行った
。
(ロ)水洗工程
1分
(ハ)ソフトエッチング工程
25重量%過硫酸アンモニウム水を用いて1分30秒行
った。
(ニ)水洗工程
溜め水で1分、さらに流水で1分行った。
(ホ)硫酸浸漬工程
10容量%硫酸を用いて室温で1分行った。
(ヘ)水洗工程
30秒行った。
(ト)ニッケルメッキ工程
ワット浴(硫酸ニッケル及び塩化ニッケルを含む)及び
半光沢添加剤(メルテックス社製のナイカルPC−3)
を用いて3A/dm2で、50℃で10分間行った。
(チ)水洗工程
室温で1分行った。
(リ)金ストライク工程
オーロボンドTN(日本高純度化学社製)を用いて5A
/dm2で、40℃で20秒間行った。
(ヌ)水洗工程
室温で10秒行った。
(ル)金メッキ工程
オートロネクスCI(EEJA社製)を用いて1A/d
m2で、50℃で6分間行い、メッキ厚1μmにメッキ
を行った。
(オ)水洗工程
室温で溜め水で10秒、さらに流水で1分間行った。Gold plating process and conditions (a) Degreasing process The process was carried out at room temperature for 5 minutes using a degreasing solution containing 7% by volume of Acid Cleaner FR manufactured by Schering Co. and 7% by volume of sulfuric acid. (b) Water washing step for 1 minute; (c) Soft etching step using 25% by weight ammonium persulfate water for 1 minute and 30 seconds. (d) Water washing step Washing was carried out for 1 minute with standing water and then for 1 minute with running water. (e) Sulfuric acid immersion step The sulfuric acid immersion step was carried out for 1 minute at room temperature using 10% by volume sulfuric acid. (f) Water washing step was carried out for 30 seconds. (g) Nickel plating process Watt bath (contains nickel sulfate and nickel chloride) and semi-bright additive (Nical PC-3 manufactured by Meltex)
The test was carried out at 50°C for 10 minutes at 3A/dm2 using (H) Water washing step The washing process was carried out for 1 minute at room temperature. (li) Gold strike process 5A using Aurobond TN (manufactured by Japan Kojundo Kagaku Co., Ltd.)
/dm2 for 20 seconds at 40°C. (v) Water washing step The washing process was carried out at room temperature for 10 seconds. (Le) Gold plating process 1A/d using Autoronex CI (manufactured by EEJA)
plating was carried out at 50° C. for 6 minutes to achieve a plating thickness of 1 μm. (E) Water washing step Washing was carried out at room temperature for 10 seconds with standing water and then for 1 minute with running water.
【0050】実施例2
(a)感光性樹脂組成物の調整
・実施例1(a)で得られた光重合性不飽和化合物の溶
液 160部・50%エピコート1
010(油化シェル(株)製、50%メチ
30部ルセロソルグアセテート溶液)
・2−メチル−1−〔4−(メチルチオ)フェニル〕−
2−モル 7部ホリノ−プロパン−1
・ミヒラーケトン
0.8部・1−o−トリルビグアニド
5部・三酸化アンチモン
3部・クリ
スタライト5V(龍森社製、平均粒径5μm)
15部・2,2−ビス〔4−
(メタクリロキシ、ポリエトキシ)フェニル〕 10
部プロパン(新中村化社製、商品名NKエステル B
PE−10)・フタロシアニングリーン
0.5部・1−シアノエチル−2−フェニ
ルイミダゾール(四国化成社製、 2部商品
名キュアゾール2E4MZ−CN)を配合し、ロールミ
ルで混合分散させ本発明の感光性樹脂組成物(I−2)
を調整した。Example 2 (a) Preparation of photosensitive resin composition 160 parts of solution of photopolymerizable unsaturated compound obtained in Example 1 (a) 50% Epicote 1
010 (manufactured by Yuka Shell Co., Ltd., 50% methi
30 parts lucerosorg acetate solution) ・2-Methyl-1-[4-(methylthio)phenyl]-
2-mol 7 parts holino-propane-1 Michler ketone
0.8 parts 1-o-tolyl biguanide
5 parts/antimony trioxide
3 parts Crystallite 5V (manufactured by Ryumorisha, average particle size 5 μm)
15 parts 2,2-bis [4-
(Methacryloxy, polyethoxy)phenyl] 10
Propane (manufactured by Shin-Nakamura Kasha, product name: NK Ester B)
PE-10) Phthalocyanine green
0.5 parts of 1-cyanoethyl-2-phenylimidazole (manufactured by Shikoku Kasei Co., Ltd., 2 parts, trade name Curazol 2E4MZ-CN) was blended and mixed and dispersed using a roll mill to obtain the photosensitive resin composition (I-2) of the present invention.
adjusted.
【0051】(b)硬化被膜の形成及びプリント配線板
の製造
実施例1(c)において、感光性樹脂組成物(I−1)
を使用した以外は、実施例1(c)と同様にして、打抜
き加工性、耐熱性、信頼性及び金めっき性に優れた硬化
被膜及びこの硬化被膜の形成されたプリント配線板を得
た。また、前記感光性樹脂組成物(I−2)を厚さ0.
8mmUL94V−0のガラスエポキシ難燃基材(日立
化成(株)製、商品名MCL−E−67)の両面に、厚
さ50μmの硬化被膜を形成させた場合には、UL94
V−0の難燃性が保持された。(b) Formation of cured film and production of printed wiring board In Example 1(c), photosensitive resin composition (I-1)
A cured film having excellent punching workability, heat resistance, reliability, and gold plating property and a printed wiring board on which this cured film was formed were obtained in the same manner as in Example 1(c), except that . Further, the photosensitive resin composition (I-2) was coated with a thickness of 0.
When a 50 μm thick cured film is formed on both sides of an 8 mm UL94V-0 glass epoxy flame retardant base material (manufactured by Hitachi Chemical Co., Ltd., trade name MCL-E-67), the UL94 V-0
V-0 flame retardancy was maintained.
【0052】実施例3
(a)光重合性不飽和化合物の合成
A.オルソクレゾールノボラック型エポキシ樹脂(
東都化成(株) 180部 製YDPN−
638、エポキシ当量180) プロピレン
グリコールモノエチルエーテルアセテート
150部 B.ケイ皮酸
44部
アクリル酸
44部 塩化ベンジルトリメ
チルアンモニウム塩
2部 p−メトキシフ
ェノール
1部
エチルセロソルブアセテート
3
0部 C.テトラヒドロ無水フタル酸
76部 D.イソシアナートエチルメタクリ
レート
30部 ジブチルチンジラウレート
0.2部 エチルセロソ
ルブアセテート
50部 E.メタ
ノール
4部上記A〜Eを用い、その他は実施例1(
a)と同様にして、不揮発分62%のオルソクレゾール
ノボラック型エポキシ樹脂/ケイ皮酸/アクリル酸/テ
トラヒドロ無水フタル酸/イソシアナートエチルメタク
リレート系の光重合性不飽和化合物の溶液(II)を得
た。Example 3 (a) Synthesis of photopolymerizable unsaturated compound A. Orthocresol novolak type epoxy resin (
YDPN- manufactured by Toto Kasei Co., Ltd. 180 copies
638, epoxy equivalent 180) Propylene glycol monoethyl ether acetate
150 copies B. cinnamic acid
44 copies
acrylic acid
44 parts Benzyltrimethylammonium chloride salt
2 parts p-methoxyphenol
Part 1
Ethyl cellosolve acetate
3
Part 0 C. Tetrahydrophthalic anhydride
Part 76 D. Isocyanate ethyl methacrylate
30 parts dibutyltin dilaurate
0.2 parts ethyl cellosolve acetate
50 copies E. methanol
4 parts Using A to E above, others were as in Example 1 (
In the same manner as in a), a solution (II) of a photopolymerizable unsaturated compound of orthocresol novolac type epoxy resin/cinnamic acid/acrylic acid/tetrahydrophthalic anhydride/isocyanatoethyl methacrylate with a nonvolatile content of 62% was obtained. Ta.
【0053】
(b)感光性樹脂組成物の調整
・(a)で得られた光重合性不飽和化合物の溶液(II
) 160部・50%エピコート1
009(50%メチルエチルケトン溶液)
10部・ベンジルジメチルケタール(チバガイギー社製
、商品名イルガ 6部キュア651)
・2−メチル−1−〔4−(メチルチオ)フェニル〕−
2−モル 5部ホリノープロパン−1
・ジシアンジアミド
5部・三酸化アンチモン
3部・フタロシアニ
ングリーン
1部を
ロールミルで混合分散させ本発明の感光性樹脂組成物(
II−1)を調整した。(b) Preparation of photosensitive resin composition - Solution (II) of the photopolymerizable unsaturated compound obtained in (a)
) 160 parts/50% Epicote 1
009 (50% methyl ethyl ketone solution)
10 parts ・Benzyl dimethyl ketal (manufactured by Ciba Geigy, trade name Irga 6 parts Cure 651) ・2-Methyl-1-[4-(methylthio)phenyl]-
2-mol 5 parts holinopropane-1 dicyandiamide
5 parts/antimony trioxide
Part 3: Phthalocyanine green
One part of the photosensitive resin composition of the present invention (
II-1) was adjusted.
【0054】(c)硬化被膜形成及びプリント配線板の
製造
実施例1(c)において感光性樹脂組成物(II−1)
を使用し、現像後東芝電機社製紫外線照射装置で1J/
cm2照射した以外は、実施例1(c)と同様にして、
打抜き加工性、耐熱性、信頼性及び耐金めっき性に優れ
た硬化被膜及び硬化被膜の形成されたプリント配線板を
得た。(c) Formation of cured film and production of printed wiring board In Example 1 (c), photosensitive resin composition (II-1)
After development, 1J/
Same as Example 1(c) except that cm2 irradiation was performed,
A cured film having excellent punching workability, heat resistance, reliability, and gold plating resistance, and a printed wiring board on which the cured film was formed were obtained.
【0055】比較例1、2
実施例1(a)及び実施例3(a)の光重合性不飽和化
合物の合成において、D、Eを除いて得られたオルソク
レゾールノボラック型エポキシ樹脂/アクリル酸/テト
ラヒドロ無水フタル酸系の光重合性不飽和化合物の溶液
(III)及びオルソクレゾールノボラック型エポキシ
樹脂/ケイ皮酸/アクリル酸/テトラヒドロ無水フタル
酸系の光重合性不飽和化合物の溶液(IV)を用い、実
施例1(b)と同様に感光性樹脂組成物(III−1)
、(IV−1)を調整した。感光性樹脂組成物(III
−1)、(IV−1)を用い実施例1(c)において、
感光性樹脂組成物(I−1)を使用した以外は、実施例
1(c)と同様にして行った結果両者とも打抜き加工性
、耐熱性及び信頼性は優れていたが、金めっき処理を施
したところ、液もぐり、剥がれが認められ、耐金めっき
性が劣っていた。Comparative Examples 1 and 2 Orthocresol novolak type epoxy resin/acrylic acid obtained by excluding D and E in the synthesis of the photopolymerizable unsaturated compounds of Example 1(a) and Example 3(a) /Tetrahydrophthalic anhydride-based photopolymerizable unsaturated compound solution (III) and orthocresol novolac type epoxy resin/cinnamic acid/acrylic acid/tetrahydrophthalic anhydride-based photopolymerizable unsaturated compound solution (IV) A photosensitive resin composition (III-1) was prepared in the same manner as in Example 1(b) using
, (IV-1) was adjusted. Photosensitive resin composition (III
-1), (IV-1) in Example 1(c),
Except for using the photosensitive resin composition (I-1), the same procedure as in Example 1(c) was carried out. As a result, both had excellent punching workability, heat resistance, and reliability, but the gold plating treatment When applied, liquid leakage and peeling were observed, and the gold plating resistance was poor.
【0056】[0056]
【発明の効果】本発明によれば、希アルカリ水溶液で現
像でき、打抜き加工性、解像性、耐熱性、耐金めっき性
に優れた高信頼性のソルダマスクを形成することができ
る。According to the present invention, it is possible to form a highly reliable solder mask that can be developed with a dilute aqueous alkaline solution and has excellent punching workability, resolution, heat resistance, and gold plating resistance.
Claims (3)
飽和カルボン酸との反応物の二級水酸基に飽和もしくは
不飽和無水多塩基酸を酸当量/水酸基当量の比0.1〜
0.8の範囲として反応させ、残存水酸基に飽和もしく
は不飽和モノイソシアナートを付加させて得られる光重
合性不飽和化合物、(b)エポキシ基を少なくとも1個
有する化合物、並びに (c)活性光線により遊離ラジカルを生成する増感剤及
び/又は増感剤系を含有してなる感光性樹脂組成物。Claim 1: (a) A saturated or unsaturated polybasic anhydride is added to the secondary hydroxyl group of the reaction product of a novolac type epoxy resin and an unsaturated carboxylic acid at a ratio of acid equivalent/hydroxyl group equivalent of 0.1 to
A photopolymerizable unsaturated compound obtained by reacting in a range of 0.8 and adding a saturated or unsaturated monoisocyanate to the remaining hydroxyl group, (b) a compound having at least one epoxy group, and (c) actinic rays. A photosensitive resin composition comprising a sensitizer and/or a sensitizer system that generates free radicals.
ィルム上に塗布、乾燥して得られる感光性エレメント。2. A photosensitive element obtained by applying the photosensitive resin composition according to claim 1 onto a film and drying it.
配線板に請求項1記載の感光性樹脂組成物及び/又は請
求項2の感光性エレメントの層を形成し、次いで像的な
活性光線の照射及び現像、加熱硬化によって硬化被膜を
形成することを特徴とするプリント配線板の製造法。3. A layer of the photosensitive resin composition according to claim 1 and/or the photosensitive element according to claim 2 is formed on a printed wiring board on which a conductive pattern is formed, and then imagewise irradiation with actinic light is performed. and a method for manufacturing a printed wiring board, characterized by forming a cured film by development and heat curing.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3129626A JPH04353850A (en) | 1991-05-31 | 1991-05-31 | Production of photosensitive resin composition, photosensitive element, and printed circuit board |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3129626A JPH04353850A (en) | 1991-05-31 | 1991-05-31 | Production of photosensitive resin composition, photosensitive element, and printed circuit board |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04353850A true JPH04353850A (en) | 1992-12-08 |
Family
ID=15014141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3129626A Pending JPH04353850A (en) | 1991-05-31 | 1991-05-31 | Production of photosensitive resin composition, photosensitive element, and printed circuit board |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04353850A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06348009A (en) * | 1993-06-10 | 1994-12-22 | Nippon Kayaku Co Ltd | Resist ink composition and its hardened product |
JP2005331932A (en) * | 2004-04-22 | 2005-12-02 | Showa Denko Kk | Photosensitive resin composition, cured product thereof, and manufacturing method of printed circuit board using those |
-
1991
- 1991-05-31 JP JP3129626A patent/JPH04353850A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06348009A (en) * | 1993-06-10 | 1994-12-22 | Nippon Kayaku Co Ltd | Resist ink composition and its hardened product |
JP2005331932A (en) * | 2004-04-22 | 2005-12-02 | Showa Denko Kk | Photosensitive resin composition, cured product thereof, and manufacturing method of printed circuit board using those |
JP4587865B2 (en) * | 2004-04-22 | 2010-11-24 | 昭和電工株式会社 | Photosensitive resin composition, cured product thereof, and method for producing printed wiring board using them |
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