JPH04349912A - Fully metallic filter - Google Patents

Abstract

PURPOSE:To eliminate a liquid sump by providing a separable bottomed element filtering a fluid in bodies through which the fluid flows and providing a flange held between the bodies to be sealed to said element. CONSTITUTION:When a first body 5 is threaded with a union nut 7 to unify a body 2, a flange 4 is held between first and second bodies 6 through a gasket 24 to be sealed. At this time, since the first and second bodies 5, 6 are prevented from relative rotation, the flange 4 and the gasket 24 are not twisted. The fluid flowing from the inflow passage 8 of the body 2 to an outflow passage 16 is filtered by the element 3 provided on the way. Since the element 3 is held by the separable element 2 through the flange 4, the element 3 can be easily replaced. Since there is no spring in the body 2, no liquid sump is formed.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to improvements in all-metal filters used in piping handling high-purity gas, such as in semiconductor manufacturing equipment.

0002

2. Description of the Related Art Conventionally, as this type of all-metal filter, one shown in FIG. 5 is known. The all-metal filter 100 basically includes a separable body 101 through which fluid flows, a bottomed cylindrical element 102 disposed inside the body 102 to filter fluid, and an element 102 inside the body 101. A spring 103 is provided to press against and seal the element 102. Since all the components of this type of product are made of metal, there is no problem of contamination of high-purity gas due to degassing compared to products made of resin, and the body is separable and the element is Since it is only compressed by a spring, the element can be replaced more easily than when the element is welded to the body. However, since this type of device uses a spring, there is a problem in that small gaps are created between the spring and the element, and between the spring and the body, resulting in the formation of liquid pools. For this reason, the substitution performance when flowing different types of gases was poor.

0003

[Problems to be Solved by the Invention] The present invention was devised in view of the above-mentioned problems and to solve the problems. We provide manufactured filters.

0004

[Means for Solving the Problems] The present invention basically consists of:
It consists of a separable body through which fluid flows, a bottomed cylindrical element placed inside the body to filter fluid, and a flange provided on the element and held by the body for sealing. There are certain characteristics.

[0005]

[Operation] The flange is provided on a cylindrical element with a bottom. The flanged element is housed inside the separable body. When the elements are housed inside the bodies, the bodies are combined. When the bodies are assembled, the flange is clamped to the body and sealed. The fluid flowing through the body is filtered by elements provided along the way. Since the element is held in a separable body via a flange, it can be easily replaced. There are no springs inside the body, so no liquid pools will form.

[0006]

Embodiments Hereinafter, embodiments of the present invention will be explained based on the drawings. FIG. 1 is a longitudinal sectional side view showing an all-metal filter according to a first embodiment of the present invention. FIG. 2 is a perspective view of essential parts. The all-metal filter 1 is mainly composed of a body 2, an element 3, and a flange 4. The body 2 is separable and allows fluid to flow therethrough, and in this example, it is made of metal such as stainless steel and has a substantially cylindrical shape, and includes a first body 5 on the left side and a second body 6 on the right side in FIG. and a union nut 7 for attaching these in a separable manner. The first body 5 has an inflow passage 8, a tapered hole 9, an element accommodation cavity 10, a flange accommodation cavity 11, and a rotation prevention recess 12 formed inside from the left side, and a square part 13 and a male A screw 14 is formed. The second body 6 is
A tapered hole 15 and an outflow passage 16 are formed inside from the left side, and a rotation stop convex portion 17 and a stepped portion 18 that fit into the rotation stop recess 12 are formed outside from the left side. The union nut 7 has a female screw 19 that fits the male screw 14 from the left side, an inner flange 20 that fits the stepped portion 18, and a square portion 21 on the outside. The element 3 is a cylindrical element with a bottom that is placed inside the body 2 and filters the fluid. In this example, the element 3 is made of sintered material such as stainless steel that has a uniform pore size with an absolute diameter of 2 μm or less and allows the fluid to pass through. It is made of metal and has a peripheral wall 22 and a bottom wall 23 that closes the left side of the peripheral wall 22, and the right side is open. The flange 4 is provided on the element 3 and is clamped and sealed by the body 2. In this example, the flange 4 is made of a metal such as stainless steel that does not allow fluid to pass through, and has an annular shape. It is fixed by welding on the side, and gasket 2
4 and is held between a first body 5 and a second body 6. The gasket 24 is made of metal such as stainless steel and has an annular shape. Next, the operation will be explained based on such a configuration. The flange 4 is fixedly provided on the open side of the peripheral wall 22 of the element 3 by welding. The element 3 provided with the flange 4 is housed inside the first body 5 so that the element 3 is located in the element housing cavity 10 and the flange 4 is located in the flange housing cavity 11, respectively. At this time, gaskets 24 are arranged on both sides of the flange 4. When the element 3 is housed inside the first body 5, the first body 5 and the second body 6 are fitted together, and the first body 5 and the union nut 7 are screwed together, so that the bodies 2 are combined. be done. At this time, in the first body 5 and the second body 6, the rotation preventing recess 12 and the rotation preventing protrusion 17 are engaged, so that
Relative rotation is stopped. When body 2 is combined,
The flange 4 is sandwiched between the first body 5 and the second body 6 via the gasket 24 and sealed. At this time, since the first body 5 and the second body 6 are relatively prevented from rotating, the flange 4 and the gasket 24 are not twisted. The fluid flowing from the inflow path 8 to the outflow path 16 of the body 2 is filtered by the element 3 provided midway. Since the element 3 is held by the separable body 2 via the flange 4, it can be easily replaced. Since there is no spring inside the body 2, no liquid pool is formed.

Next, a second embodiment of the present invention will be explained based on FIG. 3. The second embodiment differs from the first embodiment in that the gasket 24 is omitted and that the first body 5 and the second body 6 are provided with a convex peripheral portion 25 that increases the clamping pressure with the flange 4. In this way, the number of parts is reduced, and the element 3 provided with the flange 4 can be replaced easily.

Next, a third embodiment of the present invention will be explained based on FIG. 4. In the third embodiment, the outer peripheral part of the flange 4 held by the body 2 is made of metal such as stainless steel through which fluid does not pass, and the rest of the flange 4 and the element 3 are made of a sintered metal such as stainless steel through which fluid passes. This embodiment differs from the first embodiment in that these are integrally formed. In this way, the fluid is filtered even in a part of the flange 4, so that the filtration area is increased.

[0009] In the previous embodiment, the body 2 was composed of the first body 5, the second body 6, and the union nut 7, but the present invention is not limited to this. In the previous embodiment, the first body 5 and the second body 6 have a rotation preventing recess 1 in the first body 5.
2 and the second body 6 are provided with the rotation preventing protrusions 17, but the present invention is not limited to this, and for example, these may be reversed.

0010

[Effects of the Invention] As described above, according to the present invention,
The following excellent effects can be achieved. (1) Consisting of a body, element, and flange,
In particular, since the element is provided with a flange and is held by the body, a spring is not required and no liquid pool is formed. Therefore, it has excellent substitution performance when flowing different types of gases. Also, since no spring is required, special surface treatment to clean the inner surface can be easily applied. (2) If the element and flange are welded, the existing element can be used. (3) When the outer periphery of the flange is made of a metal such as stainless steel through which fluids do not pass, and the rest of the flange and the element are made of sintered metal such as stainless steel through which fluids pass, and these are integrally formed. In this case, part of the flange can also contribute to the filtration action, increasing the filtration area.

[Brief explanation of the drawing]

FIG. 1 is a vertical cross-sectional side view showing an all-metal filter according to a first embodiment of the present invention.

FIG. 2 is a perspective view of the main part of FIG. 1.

FIG. 3 is an enlarged longitudinal cross-sectional side view of essential parts showing an all-metal filter according to a second embodiment of the present invention.

FIG. 4 is a longitudinal cross-sectional side view of essential parts showing an all-metal filter according to a third embodiment of the present invention.

FIG. 5 is an enlarged longitudinal cross-sectional side view of the main parts of a conventional all-metal filter.

[Explanation of symbols]

1 All-metal filter 2 Body 3 Element 4 Flange

Claims (1)

[Claims] Claim 1: A separable, fluid-communicating body;
An all-metal filter characterized by comprising a bottomed cylindrical element placed inside a body to filter fluid, and a flange provided on the element and clamped by the body for sealing.