JPH043495Y2 - - Google Patents
Info
- Publication number
- JPH043495Y2 JPH043495Y2 JP14302483U JP14302483U JPH043495Y2 JP H043495 Y2 JPH043495 Y2 JP H043495Y2 JP 14302483 U JP14302483 U JP 14302483U JP 14302483 U JP14302483 U JP 14302483U JP H043495 Y2 JPH043495 Y2 JP H043495Y2
- Authority
- JP
- Japan
- Prior art keywords
- heating
- furnace
- infrared
- annealing
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 37
- 239000004065 semiconductor Substances 0.000 description 24
- 235000012431 wafers Nutrition 0.000 description 24
- 238000001816 cooling Methods 0.000 description 19
- 238000000137 annealing Methods 0.000 description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 11
- 239000010453 quartz Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 230000002159 abnormal effect Effects 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14302483U JPS6049627U (ja) | 1983-09-13 | 1983-09-13 | 赤外線加熱装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14302483U JPS6049627U (ja) | 1983-09-13 | 1983-09-13 | 赤外線加熱装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6049627U JPS6049627U (ja) | 1985-04-08 |
| JPH043495Y2 true JPH043495Y2 (enrdf_load_html_response) | 1992-02-04 |
Family
ID=30319381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14302483U Granted JPS6049627U (ja) | 1983-09-13 | 1983-09-13 | 赤外線加熱装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6049627U (enrdf_load_html_response) |
-
1983
- 1983-09-13 JP JP14302483U patent/JPS6049627U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6049627U (ja) | 1985-04-08 |
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