JPH04345739A - Specimen contamination preventive device used for electron microscope and the like - Google Patents

Abstract

PURPOSE:To effectively solve a problem such as an image trouble or the constraint of an inclination angle due to the contact of a cold finger part by integrating the cold finger part of a device tip part into a specimen inclination device via a thermal insulator in a specimen contamination preventive device used for an electron microscope. CONSTITUTION:The slight motion in X and Y directions can be made with a slight motion shaft 12 and by Y axis movement in an inclination mechanism 2 when a specimen 7 placed on the tip of a specimen holder 1 is moved. The mechanism 2 can be inclined in an inclination direction 14 with a spherical supporting point 3 as a supporting point. Here, a cold finger 5 must be kept clear because the specimen 7 irradiated with an electron beam 15 is contaminated by a hydrocarbon system residual gas generated in this vicinity. However this is impossible due to the constraint of the size and the inclination angle of the holder 1 and to solve this problem, the finger 5 is integrated into the supporting point 3 via a thermal insulator 6 to be neared to the specimen 7. The cooling of the finger 5 can be realized by immersing a cooling transmission wire 8 and a cooling shaft 9 into a refrigerant 10 in a main body 4.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] The present invention relates to improving the functionality of a sample contamination prevention device used in an electron microscope, and in particular, by providing a mechanism that allows the sample contamination prevention device to be tilted in synchronization with the sample tilt, thereby preventing contamination and improving the tilt angle. Concerning improvements in contact prevention.

0002

[Prior Art] A conventional sample contamination prevention device is the Electron Microscope Experimental Physics Course 2 published by Kyoritsu Publishing Co., Ltd.
As described on page 114 of 3, a fixed type cold finger was built in near the sample holder, but since it is necessary to consider the case where a sample tilted holder etc. is used, a cold finger is installed close to the sample. I was in a state where I couldn't do anything.

0003

SUMMARY OF THE INVENTION In the above-mentioned prior art, in order to prevent contact between the sample holder and the cold finger during tilting, a gap is required to provide a margin for the tilt angle. The purpose of the present invention is to improve the function of a sample contamination prevention device used in an electron microscope. The solution is to synchronize the sample contamination prevention device with a tiltable function.

0004

[Means for Solving the Problems] In order to achieve the above object, the cold finger portion at the tip of the sample contamination prevention device is separated from a thermal insulator and incorporated into the sample tilting device, whereby the sample tilting device can be tilted in synchronization with the sample tilting device. is possible and achieved.

[0005]

[Operation] In order to reduce sample contamination that occurs during image observation using an electron microscope, etc., a method is widely used in which a cold finger is installed near the sample, liquid nitrogen is used as a coolant, and contaminants are trapped in the cold finger. There is. On the other hand, since the specimen holder requires a tilt angle, a certain degree of dimensional tolerance is required between the specimen and the cold finger, which may result in insufficient effects or insufficient gap between the objective lens and the cold finger to be attached. There was a problem that I couldn't do it.

As a means of solving these problems, by making the cold finger tiltable in synchronization with the tilt of the sample, it is possible to bring the cold finger as close as possible to the sample, thereby reducing sample contamination. This can be reduced.

[0007]

[Embodiment] An embodiment of the present invention will be described below with reference to FIG.

FIG. 1 is a structural diagram for reducing sample contamination of a sample contamination prevention device used in an electron microscope or the like.

A sample 7 is placed at the tip of the sample holder 1. The sample can be moved in X and Y directions using a fine movement shaft 12 and a Y-axis fine movement built into the tilting mechanism 2. Further, the tilting mechanism uses a spherical fulcrum 4 as a fulcrum, and is capable of tilting in a tilting direction 14. When the sample is irradiated with the electron beam 15, the sample becomes contaminated due to residual hydrocarbon gas in the vicinity of the sample. On the other hand, if the cold finger is brought close to the sample, a sufficient trapping effect can be obtained, but considering the tilt and movement of the sample, there are also constraints such as the size and tilt angle of the sample holder, and the cold finger cannot be brought close, causing problems. It became.

As a means of solving this problem, by incorporating the cold finger 6 into a spherical fulcrum via the insulator 7, it is synchronized with the sample holder and can be tilted, making it possible to bring the cold finger as close as possible to the sample. becomes. To cool the cold finger, the cooling transmission line 8 and the cooling shaft 9 are vacuum-sealed from the main body 4 by a bellows seal 16, and the cold finger enters the refrigerant 10 to be cooled.

As described above, according to this embodiment, it is possible to approach the sample and provide a cold finger regardless of the inclination of the sample holder, thereby reducing hydrocarbons near the sample and reducing sample contamination. There is an effect that

0012

According to the present invention, in a sample contamination prevention device used in an electron microscope, problems such as image disturbance and tilt angle restrictions due to contact between the sample holder and the cold finger part of the sample contamination prevention tip that occur when the sample is tilted can be solved. The problem has been resolved, and the effects are remarkable.

[Brief explanation of the drawing]

FIG. 1 is a structural diagram of an embodiment of the present invention.

[Explanation of symbols]

1... Sample holder, 2... Tilt mechanism, 3... Spherical fulcrum, 4...
Main body, 5... Cold finger, 6... Insulator, 7... Sample, 8... Cooling transmission line, 9... Cooling shaft, 10... Coolant, 11... Lower objective lens, 12... Fine movement axis, 13... Upper objective lens, 14
...Inclination direction, 15...Electron beam passage, 16...Bellows seal.

Claims (1)

[Claims] 1. A sample contamination prevention device for use in an electron microscope, etc., characterized in that a cold finger section of the sample contamination prevention device used in an electron microscope, etc. has a structure capable of tilting in synchronization with a sample tilting mechanism section.