JPH04339585A - Drilling machine - Google Patents

Drilling machine

Info

Publication number
JPH04339585A
JPH04339585A JP3135324A JP13532491A JPH04339585A JP H04339585 A JPH04339585 A JP H04339585A JP 3135324 A JP3135324 A JP 3135324A JP 13532491 A JP13532491 A JP 13532491A JP H04339585 A JPH04339585 A JP H04339585A
Authority
JP
Japan
Prior art keywords
work
position
mask
light source
executed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3135324A
Other versions
JP2672203B2 (en
Inventor
Akira Goto
Fumio Ichikawa
Kazuaki Masuda
Masayuki Nishiwaki
Takeshi Origasa
Takashi Watanabe
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP3135324A priority Critical patent/JP2672203B2/en
Priority claimed from AT91119757T external-priority patent/AT176416T/en
Publication of JPH04339585A publication Critical patent/JPH04339585A/en
Application granted granted Critical
Publication of JP2672203B2 publication Critical patent/JP2672203B2/en
Anticipated expiration legal-status Critical
Application status is Expired - Lifetime legal-status Critical

Links

Abstract

PURPOSE:To shorten the time for processing and to execute positioning with high accuracy by projecting a laser beam as a light image of a prescribed shape to a work via the fine hole of a mask, measuring the position of the work, and drilling the work by moving the work. CONSTITUTION:The laser beam P emitted by a laser light source 10 is passed through a mask 30 and is made into a prescribed shape. The work W is irradiated with this beam, by which the work is drilled. The position of the groove of the work W is measured by illuminating the work W with a projecting optical system 50 from the side of the laser light source 10. The hole position of the work W is measured by measuring optical systems 70, 80 from the opposite image of the laser light source 10. Exact positioning is executed by subjecting the data of both to image processing and comparing the data with a computer. Since the drilling is executed via the mask 30, many holes can be simultaneously bored. The work W is processed while the processing position of the work is observed and, therefore, the positioning is executed with high accuracy.
JP3135324A 1991-05-13 1991-05-13 Hole drilling machine Expired - Lifetime JP2672203B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3135324A JP2672203B2 (en) 1991-05-13 1991-05-13 Hole drilling machine

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP3135324A JP2672203B2 (en) 1991-05-13 1991-05-13 Hole drilling machine
AT91119757T AT176416T (en) 1990-11-21 1991-11-19 Laser processing device
DE69130854T DE69130854T2 (en) 1990-11-21 1991-11-19 Laser processing device
US07/794,862 US5389954A (en) 1990-11-21 1991-11-19 Laser process apparatus for forming holes in a workpiece
EP91119757A EP0488033B1 (en) 1990-11-21 1991-11-19 Laser process apparatus
DE69130854A DE69130854D1 (en) 1990-11-21 1991-11-19 Laser processing device
CA002055899A CA2055899C (en) 1990-11-21 1991-11-20 Laser process apparatus

Publications (2)

Publication Number Publication Date
JPH04339585A true JPH04339585A (en) 1992-11-26
JP2672203B2 JP2672203B2 (en) 1997-11-05

Family

ID=15149099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3135324A Expired - Lifetime JP2672203B2 (en) 1991-05-13 1991-05-13 Hole drilling machine

Country Status (1)

Country Link
JP (1) JP2672203B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07308788A (en) * 1994-05-16 1995-11-28 Sanyo Electric Co Ltd Optical machining method and production of photovoltaic power device
EP0670221A3 (en) * 1994-03-04 1997-01-08 Canon Kk Ink jet recording head and method of manufacture therefor, and laser processing apparatus and ink jet recording apparatus.
EP0836906A1 (en) * 1996-10-16 1998-04-22 Canon Kabushiki Kaisha A laser processing method, and ink jet recording head, and a system for manufacturing ink jet recording heads
US6387601B1 (en) 1998-05-19 2002-05-14 Canon Kabushiki Kaisha Method for manufacturing an ink jet recording head, and an ink jet recording head manufactured by such method
US6760973B1 (en) * 1999-06-30 2004-07-13 Canon Kabushiki Kaisha Laser working method and method for producing ink jet recording head

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5639190A (en) * 1979-09-07 1981-04-14 Matsushita Electric Ind Co Ltd Laser processing machine
JPS63144889A (en) * 1986-12-05 1988-06-17 Nikon Corp Laser beam processing device
JPH01321088A (en) * 1988-06-21 1989-12-27 Hamamatsu Photonics Kk Piercing method by laser beam

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5639190A (en) * 1979-09-07 1981-04-14 Matsushita Electric Ind Co Ltd Laser processing machine
JPS63144889A (en) * 1986-12-05 1988-06-17 Nikon Corp Laser beam processing device
JPH01321088A (en) * 1988-06-21 1989-12-27 Hamamatsu Photonics Kk Piercing method by laser beam

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0670221A3 (en) * 1994-03-04 1997-01-08 Canon Kk Ink jet recording head and method of manufacture therefor, and laser processing apparatus and ink jet recording apparatus.
US5940957A (en) * 1994-03-04 1999-08-24 Canon Kabushiki Kaisha Laser process for making a filter for an ink jet
USRE38710E1 (en) * 1994-03-04 2005-03-15 Canon Kabushiki Kaisha Laser process for making a filter for an ink jet
JPH07308788A (en) * 1994-05-16 1995-11-28 Sanyo Electric Co Ltd Optical machining method and production of photovoltaic power device
EP0836906A1 (en) * 1996-10-16 1998-04-22 Canon Kabushiki Kaisha A laser processing method, and ink jet recording head, and a system for manufacturing ink jet recording heads
US6048049A (en) * 1996-10-16 2000-04-11 Canon Kabushiki Kaisha Laser processing method, an ink jet recording head, and a system for manufacturing ink jet recording heads
US6387601B1 (en) 1998-05-19 2002-05-14 Canon Kabushiki Kaisha Method for manufacturing an ink jet recording head, and an ink jet recording head manufactured by such method
US6760973B1 (en) * 1999-06-30 2004-07-13 Canon Kabushiki Kaisha Laser working method and method for producing ink jet recording head

Also Published As

Publication number Publication date
JP2672203B2 (en) 1997-11-05

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