JPH0432533U - - Google Patents
Info
- Publication number
- JPH0432533U JPH0432533U JP7352890U JP7352890U JPH0432533U JP H0432533 U JPH0432533 U JP H0432533U JP 7352890 U JP7352890 U JP 7352890U JP 7352890 U JP7352890 U JP 7352890U JP H0432533 U JPH0432533 U JP H0432533U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- quartz
- wafer loading
- standing
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 claims 6
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7352890U JPH0432533U (enExample) | 1990-07-11 | 1990-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7352890U JPH0432533U (enExample) | 1990-07-11 | 1990-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0432533U true JPH0432533U (enExample) | 1992-03-17 |
Family
ID=31612419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7352890U Pending JPH0432533U (enExample) | 1990-07-11 | 1990-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0432533U (enExample) |
-
1990
- 1990-07-11 JP JP7352890U patent/JPH0432533U/ja active Pending