JPH04321948A - Optical information recording medium - Google Patents

Optical information recording medium

Info

Publication number
JPH04321948A
JPH04321948A JP3116636A JP11663691A JPH04321948A JP H04321948 A JPH04321948 A JP H04321948A JP 3116636 A JP3116636 A JP 3116636A JP 11663691 A JP11663691 A JP 11663691A JP H04321948 A JPH04321948 A JP H04321948A
Authority
JP
Japan
Prior art keywords
transparent substrate
oxide layer
recording medium
optical
information recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3116636A
Other languages
Japanese (ja)
Inventor
Katsusuke Shimazaki
勝輔 島崎
Yukinori Yamada
幸憲 山田
Hitoshi Kosho
均 古性
Norio Ota
憲雄 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxell Ltd
Original Assignee
Hitachi Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Maxell Ltd filed Critical Hitachi Maxell Ltd
Priority to JP3116636A priority Critical patent/JPH04321948A/en
Publication of JPH04321948A publication Critical patent/JPH04321948A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To provide an errorless, durable high-performance optical information recording medium by improving the adhesion of the recording film to a transparent substrate and preventing the oxidation of the recording film. CONSTITUTION:An oxide layer 1 consisting of >=1 kind selected from a group of the oxides of Si, Zr, Y, Mg, Ti, Ta, Ca and Al and a nitride layer 2 consisting of >=1 kind selected from a group of the nitrides of Si, Zr, Y, Mg, Ti, Ta, Ca and Al are formed between a plastic transparent substrate 7 of polycarbonate, etc., and an optical recording film 3. The adhesion to the substrate 7 is improved by the oxide layer 1, and the oxygen, moisture, etc., are not infiltrated and diffused from the oxide layer 1 since the nitride layer 2 is formed between the oxide layer 1 and the recording film 3.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、例えば光デイスクなど
の光情報記録媒体に係り、特に透明基板と光記録膜との
間に形成される下地層に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to optical information recording media such as optical disks, and more particularly to an underlayer formed between a transparent substrate and an optical recording film.

【0002】0002

【従来の技術】光デイスクは、プリグルーブやプリピツ
トなどの信号パターンが形成された透明な基板上に直接
、または下地層を介して光記録膜が形成された構造とな
つている。そして集光されたレーザ光が透明基板を透過
して前記信号パターンに到達し、その信号パターンに対
応した反射光を光学的に読み取るようになつている。
2. Description of the Related Art Optical disks have a structure in which an optical recording film is formed directly or via an underlayer on a transparent substrate on which signal patterns such as pregrooves and prepits are formed. The focused laser light passes through the transparent substrate and reaches the signal pattern, and the reflected light corresponding to the signal pattern is optically read.

【0003】従来より透明基板と光記録膜との間に、酸
化物ならびに窒化物などの透明薄層を設けて、光学多重
干渉膜、保護膜として機能させる検討が種々行われてい
る。
Conventionally, various studies have been made to provide a transparent thin layer of oxide or nitride between a transparent substrate and an optical recording film to function as an optical multiple interference film or a protective film.

【0004】また、一方、光学的な透明度、平面の平滑
性、成形性ならびに経済性などの理由から例えばポリカ
ーボネートなどの合成樹脂製の透明基板が一般に使用さ
れている。
On the other hand, a transparent substrate made of synthetic resin such as polycarbonate is generally used for reasons such as optical transparency, flat surface smoothness, moldability, and economic efficiency.

【0005】[0005]

【発明が解決しようとする課題】ところで前記酸化物層
を蒸着法やスパツタリング法で形成すると、化学的に不
安定となり、酸素が遊離しやすく、その遊離した酸素が
光記録膜中に徐々に拡散し、その結果、光記録膜を酸化
して、情報の記録、再生、消去特性が劣化してしまう。
[Problems to be Solved by the Invention] However, when the oxide layer is formed by vapor deposition or sputtering, it becomes chemically unstable and oxygen is likely to be liberated, and the liberated oxygen gradually diffuses into the optical recording film. However, as a result, the optical recording film is oxidized and information recording, reproduction, and erasing characteristics deteriorate.

【0006】一方、窒化物層はポリカーボネートなどの
合成樹脂製透明基板に対する密着性が弱いため、光記録
膜の下地層とした場合、長い期間のうちには透明基板と
下地層との間において剥離を生じ、データストレージと
しての機能が低下する。このようなことから、従来の光
情報記録媒体では信頼性に問題があつた。
On the other hand, the nitride layer has weak adhesion to a transparent substrate made of synthetic resin such as polycarbonate, so when used as an underlayer for an optical recording film, it may peel off between the transparent substrate and the underlayer over a long period of time. This causes the data storage function to deteriorate. For this reason, conventional optical information recording media have had problems with reliability.

【0007】本発明の目的は、このような従来技術の欠
点を解消し、信頼性の高い光情報記録媒体を提供するに
ある。
[0007] An object of the present invention is to eliminate such drawbacks of the prior art and provide a highly reliable optical information recording medium.

【0008】[0008]

【課題を解決するための手段】前記目的を達成するため
、本発明は、透明基板と、該透明基板上に形成された光
記録膜とを有し、前記透明基板側から集光したレーザ光
を該光記録膜に照射することにより、情報の記録、再生
、消去を行う光情報記録媒体において、前記透明基板と
光記録膜の間に、例えばSi,Zr,Y,Mg,Ti,
Ta,Ca,Alのグループから選択された少なくとも
1種以上の金属または半金属の酸化物層と、例えばSi
,Zr,Y,Mg,Ti,Ta,Ca,Alのグループ
から選択された少なくとも1種以上の金属または半金属
の窒化物層とを、順次形成したことを特徴とするもので
ある。
[Means for Solving the Problems] In order to achieve the above object, the present invention includes a transparent substrate and an optical recording film formed on the transparent substrate, and a laser beam focused from the transparent substrate side. In an optical information recording medium in which information is recorded, reproduced, and erased by irradiating the optical recording film with a material such as Si, Zr, Y, Mg, Ti,
an oxide layer of at least one metal or metalloid selected from the group of Ta, Ca, and Al; and an oxide layer of, for example, Si.
, Zr, Y, Mg, Ti, Ta, Ca, and Al.

【0009】[0009]

【作用】合成樹脂製の透明基板(特にポリカーボネート
製の透明基板)に対して酸化物層は密着力が強い。そこ
で透明基板上に直接酸化物層を形成することにより、光
記録膜の剥離を防止することができる。さらにその上に
化学的に安定な窒化物層を配置することにより、前記酸
化物層から光記録膜への酸素、水分などの侵入、拡散を
阻止して光記録膜を保護することができる。このような
ことから、信頼性ならびに耐久性に優れた光情報記録媒
体を提供することができる。
[Operation] The oxide layer has strong adhesion to a transparent substrate made of synthetic resin (especially a transparent substrate made of polycarbonate). Therefore, by forming an oxide layer directly on the transparent substrate, peeling of the optical recording film can be prevented. Further, by disposing a chemically stable nitride layer thereon, the optical recording film can be protected by preventing oxygen, moisture, etc. from entering and diffusing from the oxide layer into the optical recording film. For this reason, it is possible to provide an optical information recording medium with excellent reliability and durability.

【0010】0010

【実施例】本発明において前記酸化物層を形成する材料
として、例えばSi,Zr,Y,Mg,Ti,Ta,C
a,Alのグループから選択された少なくとも1種以上
の金属または半金属の酸化物が使用される。この酸化物
層の膜厚は、30〜800Åの範囲に規制されている。 この酸化物層の膜厚が30Å未満であると、膜はその初
期成長過程たる島状状態にあるため、充分な密着力を得
ることができない。また酸化物層の膜厚が800Åを超
えると、膜の粒界サイズが数百Åに至り、信号を再生す
る際のノイズの上昇として影響を現す。このような理由
から、酸化物層の膜厚は前述の範囲に規制する方が望ま
しい。
[Example] In the present invention, materials for forming the oxide layer include, for example, Si, Zr, Y, Mg, Ti, Ta, and C.
An oxide of at least one metal or metalloid selected from the group consisting of a and Al is used. The thickness of this oxide layer is limited to a range of 30 to 800 Å. If the thickness of this oxide layer is less than 30 Å, the film will be in an island-like state during its initial growth stage, making it impossible to obtain sufficient adhesion. Furthermore, when the thickness of the oxide layer exceeds 800 Å, the grain boundary size of the film reaches several hundred Å, which causes an effect as an increase in noise when reproducing signals. For these reasons, it is preferable to limit the thickness of the oxide layer within the above-mentioned range.

【0011】また前記窒化物層を形成する材料として、
例えばSi,Zr,Y,Mg,Ti,Ta,Ca,Al
のグループから選択された少なくとも1種以上の金属ま
たは半金属の窒化物が使用される。この窒化物層の膜厚
は、500〜2000Åの範囲に規制されている。この
窒化物層の膜厚が500Å未満であると、透明基板や下
地層から拡散してくる水分や酸素などを効果的に遮蔽す
ることがてきない。また窒化物層の膜厚が2000Åを
超えると、膜の圧縮応力が強くなり、前記酸化物層によ
る接着力の増加および付加的に効力をもたらしている応
力緩和効果もおよばなくなる。またこの領域を外れると
、窒化物層のもう1つの働きである光学多重干渉の機能
も失つてしまう。このような理由から、窒化物層の膜厚
は前述の範囲に規制する方が望ましい。
[0011] Furthermore, as a material for forming the nitride layer,
For example, Si, Zr, Y, Mg, Ti, Ta, Ca, Al
A nitride of at least one metal or metalloid selected from the group of is used. The thickness of this nitride layer is limited to a range of 500 to 2000 Å. If the thickness of the nitride layer is less than 500 Å, it will not be possible to effectively block moisture, oxygen, etc. that diffuse from the transparent substrate or underlying layer. Furthermore, if the thickness of the nitride layer exceeds 2000 Å, the compressive stress of the film becomes strong, and the increased adhesion and additional stress relaxation effect provided by the oxide layer are no longer comparable. Further, outside this range, the nitride layer also loses its optical multiple interference function, which is another function. For these reasons, it is desirable to limit the thickness of the nitride layer within the above-mentioned range.

【0012】次に本発明の実施例を図とともに説明する
。図1は、実施例に係る密着貼り合わせタイプの光デイ
スクの要部拡大断面図である。
Next, an embodiment of the present invention will be explained with reference to the drawings. FIG. 1 is an enlarged sectional view of a main part of a closely bonded type optical disk according to an embodiment.

【0013】図1において、図中の7はトラツキング用
の案内溝ならびにプリピツトパターンが上面に形成され
た円板状の透明基板、1は透明基板7の上に直接形成さ
れた酸化物層、2はその酸化物層1の上に形成された窒
化物層、3は光磁気記録膜、4は例えばSiNなどの窒
化物からなる保護層、5は反射層である。
In FIG. 1, reference numeral 7 denotes a disk-shaped transparent substrate on which a tracking guide groove and a prepit pattern are formed, and 1 denotes an oxide layer formed directly on the transparent substrate 7. , 2 is a nitride layer formed on the oxide layer 1, 3 is a magneto-optical recording film, 4 is a protective layer made of nitride such as SiN, and 5 is a reflective layer.

【0014】このように透明基板7、酸化物層1、窒化
物層2、光磁気記録膜3、保護層4ならびに反射層5の
積層体からなるデイスク単板が製作される。そしてこの
2枚のデイスク単板を反射層5が互いに内側を向くよう
にして、接着剤層6を介して貼り合わせることによつて
密着貼り合わせタイプの光デイスクが製作される。
[0014] In this way, a disk single plate is manufactured which is made up of a laminate of the transparent substrate 7, the oxide layer 1, the nitride layer 2, the magneto-optical recording film 3, the protective layer 4 and the reflective layer 5. Then, by bonding these two disk single plates together via an adhesive layer 6 with the reflective layers 5 facing inward, a close bonding type optical disk is manufactured.

【0015】前記透明基板7としては、光学的に透明度
が高く、耐熱性に優れ、しかも成形性が良いなどの理由
からポリカーボネートが使用される。また、ポリカーボ
ネートの他に例えばポリメチルメタクリレート、、エポ
キシ樹脂などのプラスチツクを用いることもできる。
Polycarbonate is used as the transparent substrate 7 because it has high optical transparency, excellent heat resistance, and good moldability. In addition to polycarbonate, plastics such as polymethyl methacrylate and epoxy resin can also be used.

【0016】前記酸化物層1として、例えばSiO2 
,ZrO2 ,Ta2 O5 ,MgO,Y2 O3 
,Al2 O3 ,CaOなどの金属あるいは半金属の
酸化物が使用される。この酸化物層1の膜厚は、前述の
ような理由から30〜800Åの範囲に規制されている
As the oxide layer 1, for example, SiO2
, ZrO2 , Ta2 O5 , MgO, Y2 O3
, Al2O3, CaO, or other metal or metalloid oxides are used. The thickness of this oxide layer 1 is limited to a range of 30 to 800 Å for the reasons mentioned above.

【0017】前記窒化物層2として、例えばAlN,B
N,Si3 N4 ,TaN,TiNなどの金属あるい
は半金属の窒化物が使用される。この窒化物層2の膜厚
は、前述のような理由から500〜2000Åの範囲に
規制されている。
As the nitride layer 2, for example, AlN, B
Nitrides of metals or semimetals such as N, Si3 N4, TaN, and TiN are used. The thickness of this nitride layer 2 is limited to a range of 500 to 2000 Å for the reasons mentioned above.

【0018】前記光磁気記録膜3として、例えばGd−
Fe、Tb−Fe、Dy−Fe、Gd−Co、Tb−C
o、Dy−Coなどの2元合金、Ge−Tb−Fe、G
e−Tb−Co、Tb−Dy−Fe、Gd−Fe−Co
、Tb−Fe−Co、Dy−Fe−Coなどの3元合金
、Gd−Tb−Fe−Co、Tb−Dy−Fe−Co、
Gd−Tb−Fe−Geなどの4元合金などが使用され
る。また、メチン鎖を有するインドール系シアニン色素
などからなる有機化合物を使用することもできる。
The magneto-optical recording film 3 may be made of, for example, Gd-
Fe, Tb-Fe, Dy-Fe, Gd-Co, Tb-C
o, binary alloys such as Dy-Co, Ge-Tb-Fe, G
e-Tb-Co, Tb-Dy-Fe, Gd-Fe-Co
, Tb-Fe-Co, ternary alloys such as Dy-Fe-Co, Gd-Tb-Fe-Co, Tb-Dy-Fe-Co,
Quaternary alloys such as Gd-Tb-Fe-Ge are used. Furthermore, an organic compound such as an indole cyanine dye having a methine chain can also be used.

【0019】前記反射層5としては、例えばAl、Ti
、Crあるいはこれらの合金などが使用される。
The reflective layer 5 may be made of, for example, Al or Ti.
, Cr or alloys thereof are used.

【0020】前記接着剤層6としては、例えばアクリル
系樹脂、エポキシ系樹脂あるいはホツトメルト系樹脂な
どが使用される。
As the adhesive layer 6, for example, acrylic resin, epoxy resin, or hot melt resin is used.

【0021】次に本発明の具体例と比較例について説明
する。なお、例示中のPCはポリカーボネート製の透明
基板を、カツコ書きの数字は膜厚を、それぞれ示してい
る。
Next, specific examples of the present invention and comparative examples will be explained. Note that the PC in the example indicates a transparent substrate made of polycarbonate, and the numbers in brackets indicate the film thickness.

【0022】(具体例1)(Specific example 1)

【0023】(具体例2)(Specific example 2)

【0024】(具体例3)(Specific example 3)

【0025】(具体例4)(Specific example 4)

【0026】(具体例5)(Specific example 5)

【0027】(具体例6)(Specific example 6)

【0028】(具体例7)(Specific example 7)

【0029】(具体例8)(Specific example 8)

【0030】(具体例9)(Specific example 9)

【0031】(具体例10)(Specific example 10)

【0032】(比較例1)(Comparative Example 1)

【0033】(比較例2)(Comparative Example 2)

【0034】[0034]

【発明の効果】この本発明の具体例1〜10の光デイス
ク単板と、従来例に係る比較例1、2の光デイスク単板
とを80℃、90%RHの環境下において加速試験を行
つた結果を図2に示す。
Effects of the Invention: The optical disc veneers of Specific Examples 1 to 10 of the present invention and the optical disc veneers of Comparative Examples 1 and 2 according to the conventional example were subjected to an accelerated test in an environment of 80° C. and 90% RH. The results are shown in Figure 2.

【0035】この図から明らかなように、従来のもの、
特に透明基板上にSiOのみの下地層を形成し、その上
に直接光記録膜を形成した比較例2のものは、ビツトエ
ラーレートが非常に高い。これに比較して本発明のもの
は、いずれのものにおいてもビツトエラーレートが非常
に低く、長期間経過しても性能的に安定していること、
即ち、信頼性の高い光情報記録媒体であることが立証で
きる。
As is clear from this figure, the conventional
In particular, Comparative Example 2, in which a base layer made of SiO was formed on a transparent substrate and an optical recording film was directly formed thereon, had a very high bit error rate. In comparison, the devices of the present invention have extremely low bit error rates and are stable in performance even after a long period of time.
That is, it can be verified that the optical information recording medium is highly reliable.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】本発明の実施例に係る密着貼り合わせ型光デイ
スクの要部拡大断面図である。
FIG. 1 is an enlarged cross-sectional view of essential parts of a closely bonded optical disk according to an embodiment of the present invention.

【図2】本発明ならびに従来例に係る光デイスク単板の
ビツトエラー特性図である。
FIG. 2 is a diagram showing bit error characteristics of a single optical disk according to the present invention and a conventional example.

【符号の説明】[Explanation of symbols]

1  酸化物層 2  窒化物層 3  光記録膜 4  保護層 5  反射層 6  接着剤層 7  透明基板 1 Oxide layer 2 Nitride layer 3 Optical recording film 4 Protective layer 5 Reflective layer 6 Adhesive layer 7 Transparent substrate

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】  透明基板と、該透明基板上に形成され
た光記録膜とを有し、前記透明基板側から集光したレー
ザ光を該光記録膜に照射することにより、情報の記録、
再生、消去を行う光情報記録媒体において、前記透明基
板と光記録膜の間に、金属または半金属の酸化物層と、
金属または半金属の窒化物層とを順次形成したことを特
徴とする光情報記録媒体。
1. A transparent substrate and an optical recording film formed on the transparent substrate, and recording of information by irradiating the optical recording film with a laser beam focused from the transparent substrate side.
In an optical information recording medium for reproducing and erasing, a metal or semimetal oxide layer is provided between the transparent substrate and the optical recording film;
1. An optical information recording medium characterized in that metal or metalloid nitride layers are sequentially formed.
【請求項2】  請求項1記載において、前記酸化物層
ならびに窒化物層が、Si,Zr,Y,Mg,Ti,T
a,Ca,Alのグループから選択された少なくとも1
種以上の酸化物ならびに窒化物であることを特徴とする
光情報記録媒体。
2. The oxide layer and the nitride layer include Si, Zr, Y, Mg, Ti, and T.
At least one selected from the group of a, Ca, Al
An optical information recording medium characterized by being made of oxides and nitrides of at least one species.
【請求項3】  請求項1記載において、前記酸化物層
の膜厚が30〜800Å、前記窒化物層の膜厚が500
〜2000Åの範囲に規制されていることを特徴とする
光情報記録媒体。
3. The method according to claim 1, wherein the oxide layer has a thickness of 30 to 800 Å, and the nitride layer has a thickness of 500 Å.
An optical information recording medium characterized in that the optical information recording medium is regulated within a range of ~2000 Å.
【請求項4】  請求項1記載において、前記透明基板
がポリカーボネートであることを特徴とする光情報記録
媒体。
4. The optical information recording medium according to claim 1, wherein the transparent substrate is made of polycarbonate.
JP3116636A 1991-04-22 1991-04-22 Optical information recording medium Pending JPH04321948A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3116636A JPH04321948A (en) 1991-04-22 1991-04-22 Optical information recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3116636A JPH04321948A (en) 1991-04-22 1991-04-22 Optical information recording medium

Publications (1)

Publication Number Publication Date
JPH04321948A true JPH04321948A (en) 1992-11-11

Family

ID=14692110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3116636A Pending JPH04321948A (en) 1991-04-22 1991-04-22 Optical information recording medium

Country Status (1)

Country Link
JP (1) JPH04321948A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6153063A (en) * 1996-03-11 2000-11-28 Matsushita Electric Industrial Co., Ltd. Optical information recording medium, producing method thereof and method of recording/erasing/reproducing information
US6268034B1 (en) 1998-08-05 2001-07-31 Matsushita Electric Industrial Co., Ltd. Optical information recording medium and method for producing the same, method for recording and reproducing information thereon and recording/reproducing apparatus
US6343062B1 (en) 1997-09-26 2002-01-29 Matsushita Electric Industrial Co., Ltd Optical disk device and optical disk for recording and reproducing high-density signals
US6388984B2 (en) 1997-08-28 2002-05-14 Matsushita Electric Industrial Co., Ltd. Optical information recording medium and its recording and reproducing method
US6821707B2 (en) 1996-03-11 2004-11-23 Matsushita Electric Industrial Co., Ltd. Optical information recording medium, producing method thereof and method of recording/erasing/reproducing information

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6153063A (en) * 1996-03-11 2000-11-28 Matsushita Electric Industrial Co., Ltd. Optical information recording medium, producing method thereof and method of recording/erasing/reproducing information
US6821707B2 (en) 1996-03-11 2004-11-23 Matsushita Electric Industrial Co., Ltd. Optical information recording medium, producing method thereof and method of recording/erasing/reproducing information
US7037413B1 (en) 1996-03-11 2006-05-02 Matsushita Electric Industrial Co., Ltd. Optical information recording medium, producing method thereof and method of recording/erasing/reproducing information
US6388984B2 (en) 1997-08-28 2002-05-14 Matsushita Electric Industrial Co., Ltd. Optical information recording medium and its recording and reproducing method
US6343062B1 (en) 1997-09-26 2002-01-29 Matsushita Electric Industrial Co., Ltd Optical disk device and optical disk for recording and reproducing high-density signals
US6268034B1 (en) 1998-08-05 2001-07-31 Matsushita Electric Industrial Co., Ltd. Optical information recording medium and method for producing the same, method for recording and reproducing information thereon and recording/reproducing apparatus

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