JPH04313543A - Board conveying device - Google Patents

Abstract

PURPOSE:To perform constantly reliable entrance of a flexible board between a pair of upper and lower conveyance rollers by providing a reticulate base sheet guide member. CONSTITUTION:Reticulate board guide members 21 having an escape part 22 to escape a roller 13 of a conveyance roller 11 are located above and below a base sheet conveyance surface between shafts 12 and 12 of upper and lower conveyance rollers 11 and 11. Dislocation of a flexible board 2 from a base sheet conveyance surface owing to a warp, a twist, or bending is prevented from occurring in a way that the upper and lower base sheet guide members 21 are arranged in a manner to approach the base sheet conveyance surface as much as possible without interrupting rotation of the conveyance roller 11. Thereby, the flexible board 2 is caused to constantly reliably enter between a set of the upper and lower conveyance rollers 11 by means of the upper and lower base sheet guide members 21. Besides, no trouble occurs to spray of chemicals 4, such as a developer.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer device for transferring flexible substrates.

0002

2. Description of the Related Art For example, a method for manufacturing a flexible wiring board includes coating a liquid or film photoresist on a flexible board made of a single-sided or double-sided copper-clad film with a polyimide base film and cut into sheets. There is a method in which the photoresist is laminated, then exposed with an exposure device, developed with a developing device, etched with an etching device, and then stripped with a stripping device. In this case, the developing device sprays the developer using the spray nozzle while conveying the flexible substrate at a constant speed. Further, in the etching apparatus, the etching liquid is sprayed using a spray nozzle while the flexible substrate is being transported at a constant speed. Further, in the stripping device, a stripping liquid is sprayed using a spray nozzle while the flexible substrate is being conveyed at a constant speed. For this reason, such a chemical spraying device such as a developing device is equipped with a substrate transport device for transporting the flexible substrate at a constant speed.

FIGS. 4 and 5 show an example of such a conventional chemical spraying device. In this chemical liquid spraying device, a sheet-like flexible substrate 2 made of a double-sided copper-clad film is conveyed at a constant speed by a substrate conveying device 1, while a chemical liquid 4 such as a developer is sprayed by upper and lower spray nozzles 3. There is. Among these, the substrate transport device 1 has a plurality of upper and lower transport rollers 11 arranged at equal intervals in the horizontal direction, and when a motor (not shown) is driven, the upper transport roller 11 is rotated counterclockwise in FIG. At the same time, the lower conveyance roller 11 is rotated clockwise in the figure. The conveyance roller 11 has a structure in which a plurality of disc-shaped rollers 13 are provided on a shaft 12 at equal intervals. The flexible substrate 2 has a size of, for example, 500 mm x 500 mm and a thickness of about 100 μm, and is made of a base film made of polyimide or the like with copper foil laminated on both sides, and through holes are formed as necessary. ing. Then, the substrate transport device 1
When the upper conveying roller 11 rotates counterclockwise in FIG. 4 and the lower conveying roller 11 rotates clockwise in the figure due to the drive of the motor, the flexible substrate 2 moves rightward at a constant speed. A chemical solution 4 such as a developer is sprayed onto both upper and lower surfaces of the flexible substrate 2 by upper and lower spray nozzles 3, respectively.

0004

[Problems to be Solved by the Invention] However, in the conventional substrate transport device 1 in such a chemical spraying device,
Since the flexible substrate 2 is flexible, the flexible substrate 2 tends to warp or twist, and the leading part of the flexible substrate 2 tends to bend downward or upward due to the influence of the spray pressure of the chemical solution 4. Therefore, the leading part of the flexible substrate 2 does not smoothly enter between the pair of upper and lower transport rollers 11, and the board is transported with a large deviation in the normal direction to the board transport surface, as shown in FIG. As a result, the deviated flexible substrate 2 becomes a defective product, which not only lowers the yield, but also requires the equipment to be stopped to remove the deviated flexible substrate 2, resulting in reduced operation time. There was a problem that the rate decreased. SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate transport device that can always reliably transport a substrate between a pair of upper and lower transport rollers.

[0005]

[Means for Solving the Problems] In the present invention, conveyance rollers each having a plurality of rollers provided at intervals on a shaft are disposed above and below a substrate conveyance surface, and a large number of pairs of these conveyance rollers are arranged above and below a substrate conveyance surface. In a substrate transport device disposed at intervals in a direction along a substrate transport surface, the substrates are disposed above and below the substrate transport surface between the shaft of the upper transport roller and the shaft of the lower transport roller. A net-like substrate guide member is provided to correct deviation from the conveying surface.

[0006]

[Operation] According to the present invention, since the net-like substrate guide members are provided above and below the substrate transfer surface between the shaft of the upper transfer roller and the shaft of the lower transfer roller, the upper and lower substrate guide members By arranging the board as close as possible to the substrate transport surface without interfering with the rotation of the transport roller, it is possible to correct deviations of the board from the substrate transport surface due to warpage, twisting, bending, etc. The substrate guide member allows the substrate to always enter between the pair of upper and lower transport rollers, and since the substrate guide member has a net shape, there is no problem in spraying a chemical solution such as a developer onto the substrate. You can avoid it.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIGS. 1 and 2 show the main parts of a chemical liquid spraying device to which an embodiment of the present invention is applied. In these figures, the same parts as in FIGS. 4 and 5 are designated by the same reference numerals, and the explanation thereof will be omitted as appropriate.

In this chemical spraying device, the transport rollers 1 are disposed above and below the substrate transport surface between the shaft 12 of the upper transport roller 11 and the shaft 12 of the lower transport roller 11.
It has a structure in which a net-like substrate guide member 21 having an escape portion 22 for allowing the first roller 13 to escape is provided.

Therefore, in this chemical spraying device, by arranging the upper and lower substrate guide members 21 as close as possible to the substrate transport surface without interfering with the rotation of the transport roller 11, it is possible to prevent warping, twisting, bending, etc. Deviation of the flexible substrate 2 from the substrate conveyance surface can be corrected, and therefore the flexible substrate 2 can always be reliably entered between the pair of upper and lower conveyance rollers 11 by the upper and lower substrate guide members 21. Since the substrate guide member 21 has a net shape, spraying of the chemical solution 4 such as a developer onto the flexible substrate 2 can be prevented from occurring in any way.

In the above embodiment, the roller 13 of the conveying roller 11 is a simple disc-shaped roller with a smooth outer circumferential surface, but the roller 13 is not limited to this. For example, as shown in FIG. Alternatively, a spline shaft-shaped roller 13a having an uneven outer peripheral surface may be used.

[0011]

As explained above, according to the present invention, net-like substrate guide members are provided above and below the substrate conveying surface between the shaft of the upper conveying roller and the shaft of the lower conveying roller. Therefore, by arranging the upper and lower substrate guide members as close as possible to the substrate transport surface without interfering with the rotation of the transport rollers, deviation of the board from the substrate transport surface due to warping, twisting, or bending can be corrected. Therefore, the upper and lower substrate guide members can always ensure that the substrate enters between the pair of upper and lower transport rollers, which can improve yield and operation rate. Since the member has a net shape, spraying of a chemical solution such as a developer onto the substrate can be prevented from occurring.

[Brief explanation of drawings]

FIG. 1 is a front view of main parts of a chemical liquid spraying device to which an embodiment of the present invention is applied.

FIG. 2 is a plan view of the chemical liquid spraying device.

FIG. 3 is a front view of main parts of a chemical liquid spraying device to which another embodiment of the present invention is applied.

FIG. 4 is a partial front view of an example of a conventional chemical spray device.

FIG. 5 is a plan view of this conventional chemical liquid spraying device.

[Explanation of symbols]

1　Substrate transport device 2 Flexible board 3 Spray nozzle 4. Chemical solution 11 Conveyance roller 12 Shaft 13 Roller 21 Board guide member 22 Escape part

Claims (1)

[Claims] 1. Conveyance rollers each having a plurality of rollers provided at intervals on a shaft are arranged above and below a substrate conveyance surface, and a large number of pairs of upper and lower conveyance rollers are arranged at intervals in a direction along the substrate conveyance surface. In the substrate transport device, the deviation of the substrate from the substrate transport surface is corrected above and below the substrate transport surface between the shaft of the upper transport roller and the shaft of the lower transport roller. 1. A substrate conveyance device, characterized in that a net-like substrate guide member is provided.