JPH04305217A - Gas adsorbing and separating device and method - Google Patents

Gas adsorbing and separating device and method

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Publication number
JPH04305217A
JPH04305217A JP3067427A JP6742791A JPH04305217A JP H04305217 A JPH04305217 A JP H04305217A JP 3067427 A JP3067427 A JP 3067427A JP 6742791 A JP6742791 A JP 6742791A JP H04305217 A JPH04305217 A JP H04305217A
Authority
JP
Japan
Prior art keywords
gas
flow rate
adsorption
raw material
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3067427A
Other languages
Japanese (ja)
Other versions
JP3195982B2 (en
Inventor
Tadashi Kunimi
国見 忠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Oxygen Co Ltd
Nippon Sanso Corp
Original Assignee
Japan Oxygen Co Ltd
Nippon Sanso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Oxygen Co Ltd, Nippon Sanso Corp filed Critical Japan Oxygen Co Ltd
Priority to JP06742791A priority Critical patent/JP3195982B2/en
Publication of JPH04305217A publication Critical patent/JPH04305217A/en
Application granted granted Critical
Publication of JP3195982B2 publication Critical patent/JP3195982B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Separation Of Gases By Adsorption (AREA)

Abstract

PURPOSE:To provide the gas adsorbing and separating device and method which eliminates the fluctuation in the supply pressure and flow rate of a refined gas at the time of a regeneration stage and can make stable operation of a process using the refined gas. CONSTITUTION:The gas adsorbing and separating device which executes purging or pressure charging of adsorption column by successively changing over the plural adsorption columns A, B to an adsorption stage and a regeneration stage and introducing a part of the refined gas in a refined gas leading out route T to the adsorption column in the purging or pressure charging stage during the regeneration stage is provided with a flow rate detector 14a which detects the flow rate of the refined gas to be used for the purging or pressure charging in a pressure charging gas introducing route U. Flow rate computing parts 15, 16 and a setter 17 which operate on the detected value of the flow rate detector 14a are provided in order to control the supply rate of the gaseous raw material of a gaseous raw material supply route S and the flow rate of the gaseous raw materials is controlled by a flow rate indicating controller 11.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、ガス吸着分離装置及び
方法に関し、特に原料空気精製用に用いるのに好適なガ
ス吸着分離装置及び方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas adsorption separation apparatus and method, and more particularly to a gas adsorption separation apparatus and method suitable for use in raw air purification.

【0002】0002

【従来の技術】ガス吸着分離装置は、ガス中の特定成分
、例えば上記空気液化分離装置の原料空気精製用に用い
られるガス吸着分離装置においては、原料空気中の水分
や炭酸ガスを吸着する吸着剤を充填した複数の吸着塔を
、順次吸着(精製)工程と再生工程とに切換えて原料空
気の精製を行っている。
[Prior Art] Gas adsorption separation devices are used to purify specific components in gases, such as moisture and carbon dioxide gas in the feed air, for example, gas adsorption separation devices used to purify raw air in the air liquefaction separation device mentioned above. The raw air is purified by sequentially switching a plurality of adsorption towers filled with the agent to an adsorption (purification) process and a regeneration process.

【0003】上記再生工程は、装置の構成によって異な
るが、通常、圧力変動式の場合は、吸着塔内のガスを放
出する放圧段階,精製ガスの一部を吸着塔内に逆方向か
ら導入して塔内をパージするパージ段階,精製ガスの一
部を吸着塔内に導入して塔内を吸着圧力まで昇圧する充
圧段階を行い、吸着剤の再生を行う。また、温度差再正
式の場合は、吸着塔内のガスを放出する放圧段階,加熱
ガスを吸着塔内に逆方向から導入して吸着剤を加熱再生
する加熱再生段階,吸着剤を吸着温度まで冷却する冷却
段階,精製ガスの一部を吸着塔内に導入して塔内を吸着
圧力まで昇圧する充圧段階を行う。
[0003] The above regeneration process differs depending on the configuration of the equipment, but in the case of a pressure fluctuation type, there is usually a pressure relief stage in which the gas in the adsorption tower is released, and a part of the purified gas is introduced into the adsorption tower from the opposite direction. The adsorbent is regenerated by performing a purge stage in which the inside of the column is purged, and a pressurizing stage in which a part of the purified gas is introduced into the adsorption tower and the pressure inside the tower is raised to the adsorption pressure. In addition, in the case of temperature difference re-formulation, there is a pressure release stage in which the gas in the adsorption tower is released, a heating regeneration stage in which heated gas is introduced into the adsorption tower from the opposite direction to heat and regenerate the adsorbent, and a heating regeneration stage in which the adsorbent is heated to the adsorption temperature. There is a cooling stage in which a portion of the purified gas is cooled down to the adsorption tower, and a charging stage in which a portion of the purified gas is introduced into the adsorption tower and the pressure inside the tower is increased to the adsorption pressure.

【0004】0004

【発明が解決しようとする課題】上記のような再生工程
を行う吸着分離装置において、上記パージ段階や充圧段
階では、精製ガスの一部を使用するため、精製後のガス
を使用するプロセスに供給するガスの流量や圧力が変動
してしまう。従って、上記プロセスが空気液化分離装置
の場合は、精留塔や凝縮器等の安定運転が妨げられ、製
品純度に影響を及ぼすおそれもある。
[Problems to be Solved by the Invention] In the adsorption separation device that performs the regeneration process as described above, a part of the purified gas is used in the purging stage and the charging stage, so it is difficult to use the purified gas in the process that uses the purified gas. The flow rate and pressure of the supplied gas will fluctuate. Therefore, if the above process is an air liquefaction separation device, stable operation of the rectification column, condenser, etc. may be hindered, and product purity may be affected.

【0005】そこで本発明は、上記再生工程時の精製ガ
ス供給圧力や流量の変動を無くし、精製ガスを使用する
プロセスの安定運転を図れるガス吸着分離装置及び方法
を提供することを目的としている。
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a gas adsorption separation apparatus and method that can eliminate fluctuations in the purified gas supply pressure and flow rate during the regeneration step and ensure stable operation of a process using purified gas.

【0006】[0006]

【課題を解決するための手段】上記した目的を達成する
ため、本発明のガス吸着分離装置は、順次吸着工程と再
生工程とに切換えられる複数の吸着塔と、吸着工程にあ
る吸着塔に原料ガスを供給する原料ガス供給経路及び該
吸着塔から分離後の精製ガスを導出する精製ガス導出経
路と、再生工程中のパージ段階あるいは充圧段階にある
吸着塔に前記精製ガス導出経路内の精製ガスの一部を導
入して吸着塔のパージあるいは充圧を行う充圧ガス導入
経路と、複数の吸着塔を順次吸着工程と再生工程とに切
換える複数の切換弁とを備えたガス吸着分離装置におい
て、前記充圧ガス導入経路に、パージ用あるいは充圧用
に用いる精製ガスの流量を検出する流量検出器を設ける
とともに、前記原料ガス供給経路に、該流量検出器の検
出値に基づいて原料ガスの供給量を制御する流量制御器
を設けたことを特徴としている。
[Means for Solving the Problems] In order to achieve the above object, the gas adsorption separation apparatus of the present invention includes a plurality of adsorption towers that are sequentially switched to an adsorption process and a regeneration process, and a raw material to an adsorption tower that is in the adsorption process. A raw material gas supply route for supplying gas, a purified gas derivation route for deriving purified gas after separation from the adsorption tower, and a purified gas derivation route in the purified gas derivation route to the adsorption tower in the purge stage or pressurization stage during the regeneration process. A gas adsorption separation device equipped with a pressurized gas introduction path that introduces a portion of the gas to purge or pressurize the adsorption tower, and a plurality of switching valves that sequentially switch the plurality of adsorption towers to an adsorption process and a regeneration process. A flow rate detector for detecting the flow rate of purified gas used for purging or charging is provided in the pressurized gas introduction path, and a flow rate detector for detecting the flow rate of purified gas used for purge or pressurization is provided in the raw material gas supply path based on the detected value of the flow rate detector. It is characterized by being equipped with a flow rate controller that controls the supply amount.

【0007】また、本発明のガス吸着分離方法は、原料
ガスを切換え使用する複数の吸着塔に導入して吸着分離
により特定成分ガスを分離精製し、製品ガスを取り出す
とともに、該製品ガスの一部を再生工程のパージガス及
び/又は充圧ガスとして使用するガス吸着分離装置の運
転方法において、前記再生工程中の製品ガスによるパー
ジ及び/又は充圧段階時に、該パージガス及び/又は充
圧ガスの流量を検出して、吸着塔入口原料ガスの流量を
制御することを特徴としている。
In addition, in the gas adsorption separation method of the present invention, a raw material gas is introduced into a plurality of adsorption towers that are switched and used, a specific component gas is separated and purified by adsorption separation, a product gas is taken out, and a part of the product gas is In the method of operating a gas adsorption separation device in which the product gas is used as purge gas and/or charging gas in the regeneration process, during the purge and/or charging stage with the product gas during the regeneration process, the purge gas and/or the charging gas is It is characterized by detecting the flow rate and controlling the flow rate of the raw material gas at the entrance of the adsorption tower.

【0008】[0008]

【作  用】上記構成によれば、パージ用あるいは充圧
用に用いられる精製ガスの流量に応じて原料ガスの供給
量を増して精製ガスを増量できるので、ガス吸着分離装
置から精製ガスを使用するプロセスへ供給する精製ガス
の流量や圧力を一定に保つことができる。
[Operation] According to the above configuration, the amount of purified gas can be increased by increasing the supply amount of raw material gas according to the flow rate of purified gas used for purging or charging, so purified gas can be used from the gas adsorption separation device. The flow rate and pressure of purified gas supplied to the process can be kept constant.

【0009】[0009]

【実施例】以下、本発明を、空気液化分離装置の原料空
気精製用に用いた一実施例に基づいて、さらに詳細に説
明する。
EXAMPLE Hereinafter, the present invention will be explained in more detail based on an example in which the present invention is used for purifying raw air in an air liquefaction separation device.

【0010】本実施例に示すガス吸着分離装置は、所定
の吸着剤を充填した2基の吸着塔A,Bを有するもので
、該吸着塔に原料ガスを供給する原料ガス供給経路Sに
は、圧縮機1,逆止弁2,入口弁3a,3bが設けられ
、精製ガスを導出する精製ガス導出経路Tには、出口弁
4a,4bが設けられている。また、吸着塔A,Bの再
生用としては、吸着塔A,B内のガスを放出排気するた
めの排気弁5a,5bと、吸着剤を加熱再生するための
加熱ガス及び吸着剤を吸着温度まで冷却する冷却ガスを
導入する再生弁6a,6bと、再生工程終期の充圧段階
で精製ガスを吸着塔に導入する充圧ガス導入経路Uには
、精製ガスの流量を調節する流量調節弁7及び導入方向
を切換える充圧弁8a,8bとが設けられている。
The gas adsorption separation apparatus shown in this embodiment has two adsorption towers A and B filled with a predetermined adsorbent. , a compressor 1, a check valve 2, and inlet valves 3a and 3b are provided, and a purified gas derivation path T for deriving purified gas is provided with outlet valves 4a and 4b. In addition, for the regeneration of the adsorption towers A and B, exhaust valves 5a and 5b are provided for releasing and exhausting the gas in the adsorption towers A and B, and heated gas and adsorbent for heating and regenerating the adsorbent are heated to the adsorption temperature. Regeneration valves 6a and 6b that introduce cooling gas to cool down to 7 and charging valves 8a and 8b for switching the introduction direction are provided.

【0011】このガス吸着分離装置は、従来装置と同様
に、例えば一方の吸着塔Aが吸着工程にある時は、入口
弁3a,出口弁4aが開いて原料ガス、例えば原料空気
が吸着塔Aに導入され、精製後のガスが供給管9に導出
される。
[0011] In this gas adsorption separation apparatus, like the conventional apparatus, for example, when one of the adsorption towers A is in the adsorption process, the inlet valve 3a and the outlet valve 4a are opened and the raw material gas, for example, the raw air, is transferred to the adsorption tower A. The purified gas is led out to the supply pipe 9.

【0012】このとき、他方の吸着塔Bは再生工程にあ
り、入口弁3b,出口弁4bが閉じられた状態で、まず
排気弁5bが開いて塔内のガスを排気して圧力を略大気
圧に下げる。次いで再生弁6bが開き、図示しない加熱
器で所定温度に加熱された加熱ガスが吸着塔Bに逆方向
から導入されて吸着剤の加熱再生が行われる。加熱再生
が終了すると、弁状態はそのままに再生弁6bから低温
ガスが導入され、吸着塔B内の吸着剤が吸着温度まで冷
却される。冷却後、排気弁5b,再生弁6bが閉じられ
ると、流量調節弁7と充圧弁8bとが開いて所定量の精
製ガスが吸着塔B内に導入され、塔内を吸着運転圧力、
例えば5kg/cm2 Gにまで高める充圧が行われる
At this time, the other adsorption tower B is in the regeneration process, and with the inlet valve 3b and outlet valve 4b closed, the exhaust valve 5b is first opened to exhaust the gas in the tower and increase the pressure. lower to atmospheric pressure. Next, the regeneration valve 6b is opened, and heated gas heated to a predetermined temperature by a heater (not shown) is introduced into the adsorption tower B from the opposite direction to perform heating regeneration of the adsorbent. When the heating regeneration is completed, low temperature gas is introduced from the regeneration valve 6b while the valve state remains unchanged, and the adsorbent in the adsorption tower B is cooled to the adsorption temperature. After cooling, when the exhaust valve 5b and the regeneration valve 6b are closed, the flow rate control valve 7 and the pressure filling valve 8b are opened and a predetermined amount of purified gas is introduced into the adsorption tower B, and the adsorption operating pressure inside the tower is increased.
For example, the charging pressure is increased to 5 kg/cm2G.

【0013】上記充圧が終了すると、入口弁3a,出口
弁4aが閉じ、入口弁3b,出口弁4bが開いて吸着塔
Bが吸着工程に入り、吸着塔Aは再生工程に入る。
When the above-mentioned charging is completed, the inlet valve 3a and the outlet valve 4a are closed, the inlet valve 3b and the outlet valve 4b are opened, and the adsorption tower B enters the adsorption process, and the adsorption tower A enters the regeneration process.

【0014】そして、前記出口弁4a,4bから供給管
9を介して後工程のプロセスに供給するガスの流量や圧
力を調整する調整手段として、原料ガス供給経路Sには
、圧縮機1の吸入量を調節するガイドベーン10と、圧
縮機1の吐出流量に応じて該ガイドベーン10を制御す
る流量指示調節計11と、圧縮機1の吐出圧力に応じて
放出弁12を開閉する圧力指示調節計13とが設けられ
、充圧ガス導入経路Uには、前記充圧用製品ガスの流量
を検出する流量検出器14aの検出値に応じて前記流量
調節弁7を制御する流量指示調節計14とが設けられて
おり、さらに前記充圧時の精製ガスの流量変動を防止す
るため、前記流量検出器14aの検出値に基づいて原料
ガスの供給量を制御する流量演算器15,16及び設定
器17とが設けられている。
[0014]The raw material gas supply path S is provided with a suction port of the compressor 1 as an adjustment means for adjusting the flow rate and pressure of the gas supplied from the outlet valves 4a and 4b to the subsequent process through the supply pipe 9. A guide vane 10 that adjusts the flow rate, a flow rate indicating controller 11 that controls the guide vane 10 according to the discharge flow rate of the compressor 1, and a pressure indicating regulator that opens and closes the discharge valve 12 according to the discharge pressure of the compressor 1. A total of 13 is provided in the charging gas introduction path U, and a flow rate indicating controller 14 that controls the flow rate regulating valve 7 according to the detected value of the flow rate detector 14a that detects the flow rate of the product gas for charging. Further, in order to prevent fluctuations in the flow rate of purified gas during the pressurization, flow rate calculators 15 and 16 and a setting device are provided to control the supply amount of the raw material gas based on the detected value of the flow rate detector 14a. 17 are provided.

【0015】上記流量演算器15,16及び設定器17
は、流量演算器15が充圧用製品ガスの流量信号を圧縮
機1の流量制御用信号に変換し、設定器17に設定され
た設定値に基づいて流量演算器16が前記流量指示調節
計11に流量補正信号を出力するように構成されている
[0015] The flow rate calculators 15 and 16 and the setting device 17
The flow rate calculator 15 converts the flow rate signal of the product gas for pressurization into a flow rate control signal for the compressor 1, and the flow rate calculator 16 converts the flow rate signal of the product gas for charging into a flow rate control signal for the compressor 1 based on the set value set in the setting device 17. It is configured to output a flow rate correction signal to.

【0016】即ち、充圧弁8a,8bの一方から吸着塔
A,Bのいずれかに製品ガスの一部が導入された時は、
流量検出器14aが充圧用に使用される製品ガスの流量
を測定し、この流量信号を流量演算器15が圧縮機1の
流量指示調節計11の計器スケールに見合った値に変換
し、設定器17が製品ガス量に対する原料ガス量の割合
に基づいて原料ガスの増量分を設定し、この増量分を流
量演算器16が流量指示調節計11の現設定値に加算す
る。これにより、流量指示調節計11がガイドベーン1
0を開いて原料ガスを増量する。例えば、精製ガス10
0部に対して原料空気110部が必要な場合、充圧ガス
に10部を用いれば原料ガス11部を増量するようにす
る。
That is, when a part of the product gas is introduced into either adsorption tower A or B from one of the filling valves 8a and 8b,
The flow rate detector 14a measures the flow rate of the product gas used for charging, and the flow rate calculator 15 converts this flow rate signal into a value suitable for the instrument scale of the flow rate indicator controller 11 of the compressor 1. 17 sets an increase in the amount of raw material gas based on the ratio of the amount of raw material gas to the amount of product gas, and the flow rate calculator 16 adds this increased amount to the current setting value of the flow rate indicator controller 11. As a result, the flow rate indicating controller 11 is set to the guide vane 1.
0 and increase the amount of raw material gas. For example, purified gas 10
If 110 parts of raw material air is required for 0 parts, if 10 parts is used as the filling gas, the amount of raw material gas will be increased by 11 parts.

【0017】従って、充圧段階で製品ガスの一部が充圧
用に使用され、供給管9から供給する精製ガス量が減少
するような場合でも、上記流量検出器14a,流量演算
器15,16,設定器17,流量指示調節計11が作動
して原料空気量を増量し、吸着塔A,Bで精製され、出
口弁4a,4bから供給管9を経て後工程のプロセスに
供給する精製ガス量を一定量に保つことができ、後工程
のプロセス、例えば空気液化分離装置の運転を安定化す
ることができ、製品純度等が悪化するなどの事故を防止
できる。
Therefore, even if a part of the product gas is used for pressurization in the pressurization stage and the amount of purified gas supplied from the supply pipe 9 is reduced, the flow rate detector 14a and the flow rate calculators 15, 16 , the setting device 17, and the flow rate indicating controller 11 operate to increase the amount of raw air, and the purified gas is purified in the adsorption towers A and B and supplied to the subsequent process from the outlet valves 4a and 4b via the supply pipe 9. The amount can be maintained at a constant level, the operation of subsequent processes such as air liquefaction separation equipment can be stabilized, and accidents such as deterioration of product purity can be prevented.

【0018】尚、上記実施例では、空気液化分離装置の
前処理設備に用いられる空気精製用に本発明のガス吸着
分離装置を適用し、温度差再生方式で運転する状態で説
明したが、精製ガスの流量を一定に保つ必要がある他の
ガス吸着分離装置にも、吸着塔の数や再生方式にかかわ
らず、同様に適用することができる。
In the above embodiment, the gas adsorption separation device of the present invention is applied to air purification used in the pretreatment equipment of an air liquefaction separation device, and is operated in a temperature difference regeneration system. The present invention can be similarly applied to other gas adsorption separation devices that require a constant gas flow rate, regardless of the number of adsorption towers or regeneration method.

【0019】[0019]

【発明の効果】以上説明したように、本発明によれば、
精製ガスの流量を常に一定に保つことができるので、後
工程のプロセスの安定運転が図れ、例えば空気液化分離
装置では、この精製工程以降の各種工程、例えば精留工
程を安定して行うことができ、製品純度等を一定の範囲
に保つことができる。
[Effects of the Invention] As explained above, according to the present invention,
Since the flow rate of purified gas can always be kept constant, it is possible to ensure stable operation of subsequent processes.For example, in air liquefaction separation equipment, various processes after this purification process, such as rectification processes, can be performed stably. This allows product purity to be maintained within a certain range.

【0020】特に本発明では、充圧に用いる精製ガスの
流量を検出して原料ガスの流量を制御するので、工程時
間に基づいて制御したり、精製ガス供給経路の流量を検
出するものに比べて精度や応答速度に優れており、確実
な制御を行うことができる。
In particular, in the present invention, since the flow rate of the raw material gas is controlled by detecting the flow rate of the purified gas used for charging, the flow rate of the raw material gas is controlled based on the process time or the flow rate of the purified gas supply path is detected. It has excellent accuracy and response speed, and can perform reliable control.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】  本発明の一実施例を示すガス吸着分離装置
の系統図である。
FIG. 1 is a system diagram of a gas adsorption separation device showing an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1…圧縮機    3a,3b…入口弁    4a,
4b…出口弁    5a,5b…排 気弁    6a,6b…再生弁    7…流量調節
弁    8a,8b…充圧弁 9…供給管    10…ガイドベーン    11…
流量指示調節計    14…流量指 示調節計    14a…流量検出器    15,1
6…流量演算器    17…設定器 A,B…吸着塔    S…原料ガス供給経路    
T…精製ガス導出経路    U…充 圧ガス導入経路
1... Compressor 3a, 3b... Inlet valve 4a,
4b...Outlet valve 5a, 5b...Exhaust valve 6a, 6b...Regeneration valve 7...Flow control valve 8a, 8b...Pressure valve 9...Supply pipe 10...Guide vane 11...
Flow rate indicating controller 14...Flow rate indicating controller 14a...Flow rate detector 15,1
6... Flow rate calculator 17... Setting device A, B... Adsorption tower S... Raw material gas supply route
T...Purified gas lead-out route U...Purified gas introduction route

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】  順次吸着工程と再生工程とに切換えら
れる複数の吸着塔と、吸着工程にある吸着塔に原料ガス
を供給する原料ガス供給経路及び該吸着塔から分離後の
精製ガスを導出する精製ガス導出経路と、再生工程中の
パージ段階あるいは充圧段階にある吸着塔に前記精製ガ
ス導出経路内の精製ガスの一部を導入して吸着塔のパー
ジあるいは充圧を行う充圧ガス導入経路と、複数の吸着
塔を順次吸着工程と再生工程とに切換える複数の切換弁
とを備えたガス吸着分離装置において、前記充圧ガス導
入経路に、パージ用あるいは充圧用に用いる精製ガスの
流量を検出する流量検出器を設けるとともに、前記原料
ガス供給経路に、該流量検出器の検出値に基づいて原料
ガスの供給量を制御する流量制御器を設けたことを特徴
とするガス吸着分離装置。
Claim 1: A plurality of adsorption towers that are sequentially switched to an adsorption step and a regeneration step, a raw material gas supply route that supplies raw material gas to the adsorption tower in the adsorption step, and a purified gas after separation from the adsorption tower. A part of the purified gas in the purified gas derivation path is introduced into the purified gas derivation path and the adsorption tower in the purge stage or pressurization stage during the regeneration process to purge or pressurize the adsorption tower. In a gas adsorption separation device equipped with a passage and a plurality of switching valves that sequentially switch a plurality of adsorption towers to an adsorption process and a regeneration process, the flow rate of purified gas used for purging or charging is added to the pressurized gas introduction route. A gas adsorption separation device characterized in that a flow rate detector is provided to detect the flow rate, and a flow rate controller is provided in the source gas supply path to control the supply amount of the source gas based on the detected value of the flow rate detector. .
【請求項2】  原料ガスを切換え使用する複数の吸着
塔に導入して吸着分離により特定成分ガスを分離精製し
、製品ガスを取り出すとともに、該製品ガスの一部を再
生工程のパージガス及び/又は充圧ガスとして使用する
ガス吸着分離方法において、前記再生工程中の製品ガス
によるパージ及び/又は充圧段階時に、該パージガス及
び/又は充圧ガスの流量を検出して、吸着塔入口原料ガ
スの流量を制御することを特徴とするガス吸着分離方法
[Claim 2] A raw material gas is introduced into a plurality of adsorption towers that are used selectively to separate and purify specific component gases by adsorption separation, and a product gas is taken out, and a part of the product gas is used as a purge gas for the regeneration process and/or In a gas adsorption separation method using the gas as a charging gas, the flow rate of the purge gas and/or the charging gas is detected during the purging and/or charging stage with the product gas during the regeneration process, and the flow rate of the raw material gas at the entrance of the adsorption tower is detected. A gas adsorption separation method characterized by controlling the flow rate.
JP06742791A 1991-03-30 1991-03-30 Temperature difference regeneration type gas adsorption separation apparatus and method Expired - Lifetime JP3195982B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP06742791A JP3195982B2 (en) 1991-03-30 1991-03-30 Temperature difference regeneration type gas adsorption separation apparatus and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06742791A JP3195982B2 (en) 1991-03-30 1991-03-30 Temperature difference regeneration type gas adsorption separation apparatus and method

Publications (2)

Publication Number Publication Date
JPH04305217A true JPH04305217A (en) 1992-10-28
JP3195982B2 JP3195982B2 (en) 2001-08-06

Family

ID=13344607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP06742791A Expired - Lifetime JP3195982B2 (en) 1991-03-30 1991-03-30 Temperature difference regeneration type gas adsorption separation apparatus and method

Country Status (1)

Country Link
JP (1) JP3195982B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007203270A (en) * 2006-02-06 2007-08-16 Air Liquide Japan Ltd Method and apparatus for producing compressed air
JP2014188508A (en) * 2013-03-28 2014-10-06 Jfe Steel Corp Gas separation method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007203270A (en) * 2006-02-06 2007-08-16 Air Liquide Japan Ltd Method and apparatus for producing compressed air
JP4608444B2 (en) * 2006-02-06 2011-01-12 日本エア・リキード株式会社 Compressed air manufacturing method and manufacturing apparatus
JP2014188508A (en) * 2013-03-28 2014-10-06 Jfe Steel Corp Gas separation method

Also Published As

Publication number Publication date
JP3195982B2 (en) 2001-08-06

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