JPH04302409A - Plane inductance element - Google Patents

Plane inductance element

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Publication number
JPH04302409A
JPH04302409A JP6708291A JP6708291A JPH04302409A JP H04302409 A JPH04302409 A JP H04302409A JP 6708291 A JP6708291 A JP 6708291A JP 6708291 A JP6708291 A JP 6708291A JP H04302409 A JPH04302409 A JP H04302409A
Authority
JP
Japan
Prior art keywords
planar
windings
coils
inductance element
spiral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6708291A
Other languages
Japanese (ja)
Inventor
Tetsuya Yokogawa
哲也 横川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Lighting and Technology Corp
Original Assignee
Toshiba Lighting and Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Lighting and Technology Corp filed Critical Toshiba Lighting and Technology Corp
Priority to JP6708291A priority Critical patent/JPH04302409A/en
Publication of JPH04302409A publication Critical patent/JPH04302409A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To increase withstand voltage of a plane inductance element and reliability to a temperature thereof and to make inductance changeable. CONSTITUTION:A plurality of plane-like coils 14a, 14b are laminated. The coils 14a, 14b are connected mutually to allow a current flowing in the coils flow in the same direction and a wiring block set is thereby constituted. A plurality of wiring block sets 1a to 2c are laminated with insulating films 13a, 13b, respectively in between.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】〔発明の目的〕[Object of the invention]

【0002】0002

【産業上の利用分野】本発明は電源装置やインバータ、
発信器等のインダクタンス素子として好適な小型で薄型
の平面インダクタンス素子に係り、特に、平面状コイル
を改良した平面インダクタンス素子に関する。
[Industrial Application Field] The present invention is applicable to power supplies, inverters,
The present invention relates to a small and thin planar inductance element suitable as an inductance element for a transmitter and the like, and particularly to a planar inductance element that is an improved planar inductance element.

【0003】0003

【従来の技術】従来のインダクタンス素子としては銅線
をコイル状に巻いたものがあるが、このインダクタンス
は直径と巻数の2乗に比例するので、小型化と薄型化に
は限界があった。
2. Description of the Related Art Conventional inductance elements include copper wire wound into a coil, but since the inductance is proportional to the square of the diameter and the number of turns, there is a limit to miniaturization and thinning.

【0004】そこで、近年ではプリント回路基板に導体
をコイル状や渦巻状等に印刷したインダクタンス素子や
スライスコイル等の平面状コイルが提案されている。
[0004] Therefore, in recent years, planar coils such as inductance elements and sliced coils in which a conductor is printed in a coiled or spiral shape on a printed circuit board have been proposed.

【0005】スライスコイルは、導電性を有する所要幅
の帯状薄板に絶縁体を重ね合せて、まず、渦巻状に巻い
て渦巻状円筒形を形成し、次に、この渦巻円筒を軸方向
に所要長さでスライス(輪切り)することにより構成さ
れる。
[0005] A sliced coil is made by superimposing an insulator on a conductive thin strip having a desired width, first winding it in a spiral shape to form a spiral cylinder, and then rolling this spiral cylinder in the axial direction as required. Constructed by slicing lengths.

【0006】図7はこのような平面状コイル1の一例の
平面を示しており、これは導体2を一平面上にて中心O
a周りに渦巻状に巻いている。
FIG. 7 shows a plane of an example of such a planar coil 1, in which the conductor 2 is centered on one plane.
It is wrapped in a spiral around a.

【0007】また、この平面状コイル1は従来から平面
インダクタンス素子や図8で示す平面トランス3等に組
み立てられている。
Further, this planar coil 1 has conventionally been assembled into a planar inductance element, a planar transformer 3 shown in FIG. 8, and the like.

【0008】この平面トランス3は例えば上下一対の平
面状コイル1A,1Bを上下方向に同心状に積層し、こ
の積層体の上下両面をアモルファス合金やフェライト、
パーマロイ等の図中上下一対の磁性体4a,4bにより
挟持させ、一対の平面状コイル1A,1Bの一方1Aを
低圧側に、その他方1Bを高圧側に構成するものである
This planar transformer 3 has, for example, a pair of upper and lower planar coils 1A and 1B stacked concentrically in the vertical direction, and the upper and lower surfaces of this stacked body are made of amorphous alloy, ferrite, etc.
It is sandwiched between a pair of upper and lower magnetic bodies 4a and 4b in the figure, such as permalloy, and is configured such that one of the pair of planar coils 1A and 1B is on the low voltage side and the other 1B is on the high voltage side.

【0009】そして、高圧側平面状コイル1Bを、絶縁
被膜を被覆した1本の被覆導線で渦巻状に形成する方法
としては、図9および10で示す平面状コイル1B1 
,1B2 がある。
As a method of forming the high-voltage side planar coil 1B in a spiral shape using a single coated conductor coated with an insulating film, a planar coil 1B1 shown in FIGS. 9 and 10 is used.
, 1B2.

【0010】図9は平面状コイル1B1 の渦巻中心軸
Oaより一側部側の縦断面を一部省略して示しており、
この平面状コイル1B1 は、まず、被膜導線5aを、
渦巻中心軸Oa周りに、渦巻中心部にて例えば図中上か
ら下に向けてスパイラルに密に巻回する。
FIG. 9 shows a longitudinal section of the planar coil 1B1 on one side from the spiral central axis Oa, with a portion omitted.
This planar coil 1B1 first includes a coated conducting wire 5a,
It is tightly wound spirally around the spiral center axis Oa, for example, from the top to the bottom in the figure at the spiral center.

【0011】次に、その下端まで巻回したときは、次の
外周側へ移って今度は、下から上に向けてスパイラルに
かつ密に巻回し、上端に達した後は、さらにその外側へ
移って再び上から下に向けてスパイラルにかつ密に巻回
し、これの繰返しにより、所要径と厚さの渦巻状平面状
コイル1B1 を形成する。
[0011] Next, when it has been wound to the lower end, it moves to the next outer periphery and this time it is spirally and tightly wound from the bottom to the top, and after reaching the upper end, it continues to the outside. Then, it is again spirally and densely wound from top to bottom, and by repeating this process, a spiral planar coil 1B1 having the required diameter and thickness is formed.

【0012】しかし、この平面状コイル1B1 ではそ
の巻始め端aの電位Vaと、これと次の外周側で隣接す
る部分bの電位Vbとの電位差は、a部とb部との電流
の流れ方向が図中矢印で示すように逆向きであるので、
被覆導線5aのa部からb部までの電圧降下に対応して
大きくなり、しかも、高電圧側巻線で高電圧が印加され
るために、被覆導線5aの被覆絶縁のみでは不十分とな
る。
However, in this planar coil 1B1, the potential difference between the potential Va at the winding start end a and the potential Vb at the next adjacent part b on the outer circumferential side is determined by the current flow between parts a and b. Since the direction is opposite as shown by the arrow in the figure,
The voltage drop increases correspondingly to the voltage drop from section a to section b of the covered conductor 5a, and since a high voltage is applied to the high voltage side winding, the insulation of the covered conductor 5a alone is insufficient.

【0013】そこで、図11に示すように、絶縁テープ
6を平面状コイル1B1 の径方向に所要のピッチで巻
き付け、その絶縁耐圧を高める方法が考えられる。
Therefore, as shown in FIG. 11, a method can be considered to increase the dielectric strength of the coil 1B1 by wrapping an insulating tape 6 in the radial direction of the planar coil 1B1 at a predetermined pitch.

【0014】しかし、この方法では平面状コイル1B1
 全体の厚さが例えば数mm程度、またはそれ以下の非
常に薄いものであるので、この平面状コイル1B1 に
絶縁テープ6を巻き付けることは製造上極めて困難であ
る。
However, in this method, the planar coil 1B1
Since the overall thickness is very thin, for example, on the order of several mm or less, it is extremely difficult to wrap the insulating tape 6 around this planar coil 1B1 in terms of manufacturing.

【0015】一方、図10で示す平面状コイル1B2 
は例えば図中下端にて1本の被覆導線5bを、外周側か
ら渦巻中心に向けて平面渦巻状に巻回し、その中心部に
到達してから、その次の上段に移り、今度はその渦巻中
心部から外周側へ平面渦巻状に巻回し、これの繰返しに
より上下方向に複数段形成している。
On the other hand, a planar coil 1B2 shown in FIG.
For example, at the lower end in the figure, one coated conductor 5b is wound in a plane spiral shape from the outer circumference toward the center of the spiral, and after reaching the center, the wire is moved to the next upper stage, and this time the spiral winds. It is wound in a planar spiral shape from the center to the outer circumferential side, and by repeating this winding, multiple stages are formed in the vertical direction.

【0016】しかし、この平面状コイル1B2 におい
ても、例えば被覆導線5bの巻始め端cの電位Vcと、
これに直ぐ上で隣接する部分dの電位Vdとの電位差も
両部c,dの電流方向が逆向きであるので、両部分c,
d間の電圧降下に対応して大きくなり、しかも、高電圧
側巻線で高電圧が印加されるために、被覆導線5bの被
覆絶縁のみでは不十分となる。
However, even in this planar coil 1B2, for example, the potential Vc at the winding start end c of the covered conductor 5b,
The potential difference with the potential Vd of the portion d immediately above and adjacent to this is also because the current directions in both portions c and d are opposite, so both portions c,
d increases correspondingly to the voltage drop between d and moreover, since a high voltage is applied to the high-voltage side winding, the sheath insulation of the sheathed conductor 5b alone becomes insufficient.

【0017】このような高電位差は、渦巻中心部のe,
f部についても発生し、この中心部は一般に通風力が弱
く、放熱性が悪いので、図12に示すように温度上昇に
より、被覆導線5bの絶縁耐圧の低下を招く。
[0017] Such a high potential difference is caused by e,
This also occurs in the f section, and since the central part generally has weak ventilation and poor heat dissipation, the temperature rise causes a drop in the dielectric strength of the covered conductor 5b, as shown in FIG.

【0018】[0018]

【発明が解決しようとする課題】前記したように従来の
平面状コイル1B1,1B2 では、その被覆導線5a
,5bの径方向または厚さ方向で隣接する部分aとb、
cとd、eとf間の電位差が高く、耐電圧が不十分であ
る。このために、温度上昇に対する耐電圧の裕度が小さ
いために、温度上昇に対する信頼性が低い。
[Problems to be Solved by the Invention] As mentioned above, in the conventional planar coils 1B1 and 1B2, the covered conductor 5a
, 5b adjacent parts a and b in the radial direction or thickness direction,
The potential difference between c and d and between e and f is high, and the withstand voltage is insufficient. For this reason, the margin of withstand voltage against temperature rise is small, resulting in low reliability against temperature rise.

【0019】そこで本発明はこのような事情を考慮して
なされたもので、その目的は高耐電圧である上に、温度
上昇に対する信頼性が高い平面インダクタンス素子を提
供することにある。 〔発明の構成〕
The present invention has been made in consideration of these circumstances, and its object is to provide a planar inductance element that not only has a high withstand voltage but also has high reliability against temperature rises. [Structure of the invention]

【0020】[0020]

【課題を解決するための手段】本発明は前記課題を解決
するために次のように構成される。
[Means for Solving the Problems] In order to solve the above problems, the present invention is constructed as follows.

【0021】本願の請求項1に記載の発明(第1の発明
という)は、複数の平面状巻線を積層し、これら巻線同
士を、これら巻線に流れる電流の向きが同一方向になる
ように形成して1組の巻線ブロックを構成し、この巻線
ブロックの複数組を各ブロック毎に絶縁体を介して積層
したことを特徴とする。
The invention according to claim 1 of the present application (referred to as the first invention) is a structure in which a plurality of planar windings are laminated, and the direction of current flowing through these windings is the same. The present invention is characterized in that a plurality of sets of the winding blocks are formed by stacking each block with an insulator interposed therebetween.

【0022】また、本願の請求項2に記載の発明(第2
の発明という)は、複数の平面状巻線を積層し、これら
巻線同士を、これら巻線に流れる電流の向きが同一方向
になるように形成し、これら平面状巻線の少なくとも一
方を移動自在に構成したことを特徴とする。
[0022] Furthermore, the invention according to claim 2 of the present application (second
invention), a plurality of planar windings are stacked, these windings are formed so that the direction of current flowing through these windings is the same, and at least one of these planar windings is moved. It is characterized by being freely configured.

【0023】[0023]

【作用】〈第1の発明〉積層方向で隣接する複数の平面
巻線同士は電流の流れ方向が同一であるので、各平面状
巻線の積層方向で隣接する部分間の電位差は非常に小さ
い。
[Operation] <First invention> Since the current flow direction is the same between multiple planar windings that are adjacent to each other in the stacking direction, the potential difference between adjacent portions of each planar winding in the stacking direction is very small. .

【0024】しかも、複数の平面状巻線よりなる巻線ブ
ロック同士間には絶縁体を介在させているので、一層耐
電圧が高くなる。また、高耐電圧であるので、その耐電
圧に余裕があり、そのために、平面状巻線の通電発熱に
よる温度上昇で絶縁耐圧が低下しても、十分な耐圧を維
持し得る。
Moreover, since an insulator is interposed between the winding blocks made up of a plurality of planar windings, the withstand voltage is further increased. In addition, since it has a high withstand voltage, there is a margin in the withstand voltage, and therefore, even if the dielectric withstand voltage decreases due to a temperature rise due to heat generated by energization of the planar winding, a sufficient withstand voltage can be maintained.

【0025】〈第2の発明〉第1の発明において、積層
された複数の平面状巻線の少なくとも一方を移動し、こ
れら巻線の対向面積を制御することにより、これら平面
状巻線間の相互インダクタンスと線間容量を適宜可変し
、インダクタンスを制御することができる。
<Second invention> In the first invention, by moving at least one of the plurality of laminated planar windings and controlling the opposing areas of these windings, the distance between these planar windings is Inductance can be controlled by appropriately varying mutual inductance and line capacitance.

【0026】[0026]

【実施例】以下、本願第1、第2の発明の実施例を説明
する。
[Embodiments] Hereinafter, embodiments of the first and second inventions of the present application will be described.

【0027】図1は本願の第1の発明の一実施例の縦断
面図であり、図において、平面インダクタンス素子11
は例えば3組の平面状巻線ブロック12a,12b,1
2cを、中心軸Obを中心として同心状に図中上下方向
に積層し、各平面状巻線ブロック12a〜12c間には
電気絶縁フィルム13a,13bをそれぞれ介在させて
いる。
FIG. 1 is a longitudinal sectional view of an embodiment of the first invention of the present application, and in the figure, a planar inductance element 11
For example, three sets of planar winding blocks 12a, 12b, 1
2c are laminated concentrically in the vertical direction in the figure with the central axis Ob as the center, and electrical insulating films 13a and 13b are interposed between the planar winding blocks 12a to 12c, respectively.

【0028】各平面状巻線ブロック12a〜12cは図
2に示すように、例えば上下2段の平面状コイル14a
,14bを中心軸Obを中心として同心状に積層すると
共に、その最外周部同士を連絡線15cで上下方向に連
結している。
As shown in FIG. 2, each of the planar winding blocks 12a to 12c includes, for example, two stages of upper and lower planar coils 14a.
, 14b are laminated concentrically around the central axis Ob, and their outermost peripheries are vertically connected by a connecting line 15c.

【0029】このために、上下2段の平面状コイル14
a,14bの電流の流れる向きが図中矢印で示すように
同一となり、互いに隣接する部分同士の電位差が低減し
、被覆導線の絶縁被膜の耐電圧で十分となる。さらに、
各平面状巻線ブロック12a〜12c間には絶縁フィル
ム13a,13bをそれぞれ介在させているので、各平
面状コイル14a,14b間と、平面状巻線ブロック1
2a〜12c間の耐圧が十分に高くなる。
For this purpose, two stages of upper and lower planar coils 14
The direction of current flow in a and 14b becomes the same as shown by the arrows in the figure, the potential difference between mutually adjacent parts is reduced, and the withstand voltage of the insulating film of the covered conductor becomes sufficient. moreover,
Insulating films 13a and 13b are interposed between each of the planar winding blocks 12a to 12c, so that between each of the planar coils 14a and 14b, the planar winding block 1
The breakdown voltage between 2a and 12c becomes sufficiently high.

【0030】したがって、これらを平面トランスの高電
圧側巻線として使用し、これらに高電圧を印加する場合
でも、十分な耐圧を得ることができる。
Therefore, even when these are used as the high-voltage side winding of a planar transformer and a high voltage is applied to them, sufficient withstand voltage can be obtained.

【0031】図3は本願第2の発明の一実施例の平面図
であり、この平面インダクタンス素子15は前記したよ
うに電流の流れ方向が同一である、例えば上下2段の角
形渦巻状の平面状コイル15a,15bを、中心軸Oc
を中心にして同心状に重ね合せ、その一方、例えば上部
平面状コイル15aを中心軸Oc周りに回動自在に構成
したものである。
FIG. 3 is a plan view of an embodiment of the second invention of the present application, and this planar inductance element 15 has, as described above, a rectangular spiral-shaped planar structure with the same current flow direction, for example, two stages, upper and lower. The shaped coils 15a, 15b are aligned with the central axis Oc.
The upper planar coil 15a, for example, is configured to be rotatable around the central axis Oc.

【0032】本実施例によれば、上部平面状コイル15
aの回動角を適宜制御することにより、上下一対の平面
状コイル15a,15b間の対向面積を変えることがで
きるので、これら両コイル15a,15b間の相互イン
ダクタンスと線間容量を適宜変えて、全体としてインダ
クタンスを適宜制御することができる。
According to this embodiment, the upper planar coil 15
By appropriately controlling the rotation angle of a, the opposing area between the upper and lower pair of planar coils 15a and 15b can be changed, so the mutual inductance and line capacitance between these two coils 15a and 15b can be changed as appropriate. , the inductance as a whole can be appropriately controlled.

【0033】なお、図4で示す平面インダクタンス素子
16のように、上下2段の角型渦巻状の平面状コイル1
6a,16bの一方を、偏心移動し得るように構成して
もよく、その移動方法は問わない。また前記各平面状コ
イル15a,15b,16a,16bを図5で示すよう
に円形状渦巻17に形成し、あるいは、図6で示すよう
に三角形状渦巻18に形成してもよく、渦巻の形状には
限定されない。
Note that, like the planar inductance element 16 shown in FIG.
One of 6a and 16b may be configured to be able to move eccentrically, and the method of movement is not limited. Further, each of the planar coils 15a, 15b, 16a, 16b may be formed into a circular spiral 17 as shown in FIG. 5, or may be formed into a triangular spiral 18 as shown in FIG. is not limited to.

【0034】また、図2で示す平面インダクタンス素子
11では上下2段の平面状コイル14a,14bの渦巻
外周部を連絡線14cにより接続した場合について説明
したが、本発明はこれに限定されるものではなく、例え
ばこれら両平面状コイル14a,14bの渦巻内周部(
中心部)を連絡線14cで接続してもよく、あるいはこ
れら両平面状コイル14a,14bを、その上下連絡部
で折り返すようにして1本の被覆導線で渦巻状に形成し
てもよい。
Furthermore, in the planar inductance element 11 shown in FIG. 2, a case has been described in which the spiral outer peripheries of the upper and lower two stages of planar coils 14a and 14b are connected by the connecting wire 14c, but the present invention is not limited to this. Rather, for example, the spiral inner circumferences (
The two planar coils 14a and 14b may be formed into a spiral shape using a single coated conductive wire by folding back the upper and lower connecting portions of the coils 14a and 14b.

【0035】[0035]

【発明の効果】以上説明したように本願第1の発明は、
積層された複数の平面状巻線同士に流れる電流の向きが
共に同一であるので、これら平面状巻線間で隣接する部
分の電位差を低減することができる。
[Effects of the Invention] As explained above, the first invention of the present application is
Since the direction of current flowing through the plurality of stacked planar windings is the same, it is possible to reduce the potential difference between adjacent portions of the planar windings.

【0036】しかも、これら複数の平面状巻線を1組の
巻線ブロックとして、その複数組を積層し、各巻線ブロ
ック間に絶縁体を介在させたので、高電圧に対する耐圧
が十分に高くなる。
Moreover, since the plurality of planar windings are made into one set of winding blocks, the plurality of sets are laminated, and an insulator is interposed between each winding block, the withstand voltage against high voltage is sufficiently high. .

【0037】また、耐圧が十分に高いので、平面状巻線
の通電発熱による温度上昇により絶縁耐圧が若干低下し
ても、その耐圧はなお十分に余裕があるので、温度上昇
に対しても高い信頼性が得られる。
In addition, since the withstand voltage is sufficiently high, even if the dielectric withstand voltage slightly decreases due to the temperature rise due to heat generation in the planar winding, there is still a sufficient margin for the withstand voltage, so it is high enough to withstand temperature rises. Gain reliability.

【0038】また、第2の発明は積層された複数の平面
状巻線の少なくとも一方を移動させて、これら巻線同士
の対向面積を適宜制御することによりインダクタンスを
適宜調節することができる。
Furthermore, in the second aspect of the invention, the inductance can be appropriately adjusted by moving at least one of the plurality of stacked planar windings and appropriately controlling the opposing areas of these windings.

【図面の簡単な説明】[Brief explanation of drawings]

【図1】本願第1の発明の一実施例の縦断面図。FIG. 1 is a longitudinal sectional view of an embodiment of the first invention of the present application.

【図2】図1で示す要部の一部省略拡大図。FIG. 2 is a partially omitted enlarged view of the main part shown in FIG. 1;

【図3】本願第2の発明の一実施例の平面図。FIG. 3 is a plan view of an embodiment of the second invention of the present application.

【図4】本願第2の発明の他の実施例の平面図。FIG. 4 is a plan view of another embodiment of the second invention of the present application.

【図5】円形状渦巻を示す平面図。FIG. 5 is a plan view showing a circular spiral.

【図6】三角形状渦巻を示す平面図。FIG. 6 is a plan view showing a triangular spiral.

【図7】一般的な平面状コイルの平面図。FIG. 7 is a plan view of a general planar coil.

【図8】図7で示す平面状コイルを組み込んだ平面トラ
ンスの縦断面図。
8 is a longitudinal cross-sectional view of a planar transformer incorporating the planar coil shown in FIG. 7. FIG.

【図9】図8で示す高圧側巻線の巻線方法の一例を示す
模式図。
9 is a schematic diagram showing an example of a winding method for the high-voltage side winding shown in FIG. 8. FIG.

【図10】図8で示す高圧側巻線の他の形成方法を一部
省略して示す模式図。
FIG. 10 is a schematic diagram showing another method of forming the high-voltage side winding shown in FIG. 8, with some parts omitted;

【図11】図9で示す平面状コイルの改良例を一部省略
して示す模式図。
FIG. 11 is a schematic diagram showing an improved example of the planar coil shown in FIG. 9, with some parts omitted.

【図12】渦巻状の平面状コイルの絶縁耐圧と温度との
関係を示すグラフ。
FIG. 12 is a graph showing the relationship between the withstand voltage and temperature of a spiral planar coil.

【符号の説明】[Explanation of symbols]

11,15,16  平面インダクタンス素子12a〜
12c  平面状巻線ブロック13a,13b  絶縁
フィルム 14a,14b  上下一対の平面状コイル14c  
連絡線
11, 15, 16 Planar inductance element 12a~
12c Planar winding blocks 13a, 13b Insulating films 14a, 14b Pair of upper and lower planar coils 14c
contact line

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】  複数の平面状巻線を積層し、これら巻
線同士を、これら巻線に流れる電流の向きが同一方向に
なるように形成して1組の巻線ブロックを構成し、この
巻線ブロックの複数組を各ブロック毎に絶縁体を介して
積層したことを特徴とする平面インダクタンス素子。
Claim 1: A set of winding blocks is constructed by laminating a plurality of planar windings and forming these windings so that the direction of current flowing through these windings is the same. A planar inductance element characterized in that a plurality of sets of winding blocks are laminated with an insulator interposed between each block.
【請求項2】  複数の平面状巻線を積層し、これら巻
線同士を、これら巻線に流れる電流の向きが同一方向に
なるように形成し、これら平面状巻線の少なくとも一方
を、移動自在に構成したことを特徴とする平面インダク
タンス素子。
2. A plurality of planar windings are stacked, these windings are formed so that the direction of current flowing through these windings is the same, and at least one of these planar windings is moved. A planar inductance element characterized by being freely configured.
JP6708291A 1991-03-29 1991-03-29 Plane inductance element Pending JPH04302409A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6708291A JPH04302409A (en) 1991-03-29 1991-03-29 Plane inductance element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6708291A JPH04302409A (en) 1991-03-29 1991-03-29 Plane inductance element

Publications (1)

Publication Number Publication Date
JPH04302409A true JPH04302409A (en) 1992-10-26

Family

ID=13334600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6708291A Pending JPH04302409A (en) 1991-03-29 1991-03-29 Plane inductance element

Country Status (1)

Country Link
JP (1) JPH04302409A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017204404A (en) * 2016-05-12 2017-11-16 東京エレクトロン株式会社 Plasma processing device
WO2018079134A1 (en) * 2016-10-31 2018-05-03 株式会社江口高周波 Reactor
EP3486927A4 (en) * 2016-07-13 2020-03-25 Nippon Steel Corporation Inductance adjustment device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017204404A (en) * 2016-05-12 2017-11-16 東京エレクトロン株式会社 Plasma processing device
US10679867B2 (en) 2016-05-12 2020-06-09 Tokyo Electron Limited Plasma processing apparatus
EP3486927A4 (en) * 2016-07-13 2020-03-25 Nippon Steel Corporation Inductance adjustment device
US10878989B2 (en) 2016-07-13 2020-12-29 Nippon Steel Corporation Inductance adjusting device
WO2018079134A1 (en) * 2016-10-31 2018-05-03 株式会社江口高周波 Reactor
CN109564816A (en) * 2016-10-31 2019-04-02 株式会社江口高周波 Reactor
JPWO2018079134A1 (en) * 2016-10-31 2019-06-24 株式会社江口高周波 Reactor
RU2711516C1 (en) * 2016-10-31 2020-01-17 Егути Хай Фриквенси Ко., Лтд. Throttle

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