JPH0429743U - - Google Patents
Info
- Publication number
- JPH0429743U JPH0429743U JP7092790U JP7092790U JPH0429743U JP H0429743 U JPH0429743 U JP H0429743U JP 7092790 U JP7092790 U JP 7092790U JP 7092790 U JP7092790 U JP 7092790U JP H0429743 U JPH0429743 U JP H0429743U
- Authority
- JP
- Japan
- Prior art keywords
- air
- clean room
- space
- path
- members
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims 1
- 238000005192 partition Methods 0.000 claims 1
- 238000000638 solvent extraction Methods 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7092790U JPH0429743U (it) | 1990-07-02 | 1990-07-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7092790U JPH0429743U (it) | 1990-07-02 | 1990-07-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0429743U true JPH0429743U (it) | 1992-03-10 |
Family
ID=31607515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7092790U Pending JPH0429743U (it) | 1990-07-02 | 1990-07-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0429743U (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013050272A (ja) * | 2011-08-31 | 2013-03-14 | Taisei Corp | クリーンルーム |
-
1990
- 1990-07-02 JP JP7092790U patent/JPH0429743U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013050272A (ja) * | 2011-08-31 | 2013-03-14 | Taisei Corp | クリーンルーム |