JPH04292993A - Transfer recording medium for forming resist pattern - Google Patents
Transfer recording medium for forming resist patternInfo
- Publication number
- JPH04292993A JPH04292993A JP3059161A JP5916191A JPH04292993A JP H04292993 A JPH04292993 A JP H04292993A JP 3059161 A JP3059161 A JP 3059161A JP 5916191 A JP5916191 A JP 5916191A JP H04292993 A JPH04292993 A JP H04292993A
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- transfer recording
- corrosion
- resin layer
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011347 resin Substances 0.000 claims abstract description 24
- 229920005989 resin Polymers 0.000 claims abstract description 24
- 238000005260 corrosion Methods 0.000 claims abstract description 22
- 230000007797 corrosion Effects 0.000 claims abstract description 22
- 239000000463 material Substances 0.000 claims abstract description 14
- 238000005530 etching Methods 0.000 claims abstract description 11
- 239000002253 acid Substances 0.000 claims abstract description 6
- 239000004840 adhesive resin Substances 0.000 claims abstract description 4
- 229920006223 adhesive resin Polymers 0.000 claims abstract description 4
- 230000007261 regionalization Effects 0.000 claims description 6
- 229920006122 polyamide resin Polymers 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 5
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 32
- 239000002184 metal Substances 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000010408 film Substances 0.000 description 7
- 239000004203 carnauba wax Substances 0.000 description 3
- 235000013869 carnauba wax Nutrition 0.000 description 3
- 229920006267 polyester film Polymers 0.000 description 3
- 239000001993 wax Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 241000209094 Oryza Species 0.000 description 2
- 235000007164 Oryza sativa Nutrition 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 235000009566 rice Nutrition 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000004204 candelilla wax Substances 0.000 description 1
- 235000013868 candelilla wax Nutrition 0.000 description 1
- 229940073532 candelilla wax Drugs 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- IUJAMGNYPWYUPM-UHFFFAOYSA-N hentriacontane Chemical compound CCCCCCCCCCCCCCCCCCCCCCCCCCCCCCC IUJAMGNYPWYUPM-UHFFFAOYSA-N 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 230000003381 solubilizing effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Impression-Transfer Materials And Handling Thereof (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、電気回路等の導電性の
パターンをエッチングによって形成するためのレジスト
層を、サーマルヘッド等の発熱記録体を用いて転写によ
って形成するための熱転写記録媒体に関するものである
。[Field of Industrial Application] The present invention relates to a thermal transfer recording medium for forming a resist layer for forming a conductive pattern such as an electric circuit by etching using a heat generating recording member such as a thermal head. It is something.
【０００２】0002
【従来の技術】プリント基板等の電気回路部品は、通常
、ガラスあるいはプラスティックフィルム等の絶縁性基
材上に銅等の金属の薄膜を設け、その上から耐蝕性の樹
脂によるパターニングを施した後、エッチングによって
パターンのない部分の金属の薄膜を除去する方法で作製
されている。[Prior Art] Electrical circuit components such as printed circuit boards are usually produced by forming a thin film of metal such as copper on an insulating base material such as glass or plastic film, and then patterning the film with a corrosion-resistant resin. It is manufactured using a method in which the thin metal film in areas without a pattern is removed by etching.
【０００３】この耐蝕性の樹脂によるパターンの形成は
、従来、スクリーン印刷等の印刷による方法、あるいは
感光性樹脂層を全面に形成した後にフォトマスクを介し
て感光性樹脂層を部分的に可溶化あるいは不溶化させて
除去する方法等で行われている。また、電子ビーム等を
用いた直接的なパターン形成も行われているが、これら
の方法においては、印刷用版やフォトマスクを作製する
必要があり、また装置的にも高価で複雑な設備を必要と
するため、小ロットの製品を短時間で製造するには不向
きであった。Conventionally, patterns have been formed using this corrosion-resistant resin by printing methods such as screen printing, or by forming a photosensitive resin layer on the entire surface and then partially solubilizing the photosensitive resin layer through a photomask. Alternatively, it is carried out by a method of insolubilizing and removing it. Direct pattern formation using electron beams, etc. is also being carried out, but these methods require the production of printing plates and photomasks, and require expensive and complicated equipment. This makes it unsuitable for manufacturing small lots of products in a short period of time.
【０００４】0004
【発明が解決しようとする課題】本発明は以上の様な従
来の状況に鑑みて成されたものであり、熱転写記録媒体
としての安定な性能を有すると共に、金属表面に耐蝕性
の樹脂によるパターンを容易に形成することが可能な熱
転写記録媒体を提供しようとするものである。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional situation, and has stable performance as a thermal transfer recording medium, as well as a pattern made of a corrosion-resistant resin on a metal surface. It is an object of the present invention to provide a thermal transfer recording medium that can be easily formed.
【０００５】[0005]
【課題を解決するための手段】このような課題を解決す
るために、熱転写記録媒体の構成をどのようにするかを
種々検討した結果、酸系のエッチング液に対して耐性を
有する耐蝕性樹脂層を設けた熱転写記録媒体を作製する
ことに成功した。[Means for Solving the Problems] In order to solve these problems, as a result of various studies on how to configure a thermal transfer recording medium, we developed a corrosion-resistant resin that is resistant to acid-based etching solutions. We succeeded in producing a thermal transfer recording medium with layers.
【０００６】サーマルヘッド等の発熱記録体を備えた熱
転写プリンターに使用する熱転写記録媒体としては、通
常は、ポリエステルフィルム等の耐熱性フィルムを基材
として、その片面に熱転写性インキ層を形成し、必要に
応じて基材の反対面にスティッキング防止のための耐熱
層を設けたものが用いられる。[0006] A thermal transfer recording medium used in a thermal transfer printer equipped with a heat-generating recording medium such as a thermal head is usually made of a heat-resistant film such as a polyester film as a base material, with a thermal transferable ink layer formed on one side of the base material. If necessary, a heat-resistant layer provided on the opposite side of the base material to prevent sticking may be used.
【０００７】このような従来の構成の熱転写記録媒体を
用いて金属層表面への耐蝕性のパターンの形成について
検討したところ、金属への転写性と密着性、エッチング
液に対する耐蝕性、エッチング後の洗浄性についていず
れも不十分であることがわかった。そこで、前記した様
に酸系のエッチング液に対して耐性を有する耐蝕性樹脂
層についての検討を行い、本発明のレジストパターン形
成用転写記録媒体を作製するに到った。[0007] When we investigated the formation of a corrosion-resistant pattern on the surface of a metal layer using a thermal transfer recording medium with such a conventional structure, we found that the transferability and adhesion to the metal, the corrosion resistance to etching solution, and the It was found that all cleaning properties were insufficient. Therefore, as described above, a study was conducted on a corrosion-resistant resin layer that is resistant to acid-based etching solutions, and the transfer recording medium for resist pattern formation of the present invention was produced.
【０００８】以下図面に従って本発明を詳細に説明する
。図１は本発明のレジストパターン形成用転写記録媒体
の構成を示す断面図で、フィルム状基材（１）の片面に
剥離層（２）と耐蝕性樹脂層（３）、および熱接着性樹
脂層（４）がこの順序で形成されたものであり、必要に
応じてフィルム状基材（１）の裏面にスティッキング防
止のための耐熱層を設けることができる。The present invention will be explained in detail below with reference to the drawings. FIG. 1 is a cross-sectional view showing the structure of the transfer recording medium for resist pattern formation of the present invention, in which a release layer (2), a corrosion-resistant resin layer (3), and a heat-adhesive resin are provided on one side of a film-like base material (1). The layers (4) are formed in this order, and if necessary, a heat-resistant layer for preventing sticking can be provided on the back surface of the film-like base material (1).
【０００９】フィルム状基材（１）は、材質および寸法
については特に制限はなく、通常の熱転写記録媒体に使
用される公知の材料が使用できるが、例えば、厚さ３μ
ｍ〜９μｍのポリエステルフィルム等の耐熱性フィルム
が使用できる。There are no particular restrictions on the material and dimensions of the film-like base material (1), and known materials used for ordinary thermal transfer recording media can be used.
A heat-resistant film such as a polyester film having a diameter of 1 to 9 μm can be used.
【００１０】剥離層（２）はフィルム状基材（１）と耐
蝕性樹脂層（３）との密着性の確保と熱転写時の剥離性
の制御を目的としたものであり、カルナウバワックス、
キャンデリラワックス、ライスワックス等の融点が６０
℃〜１００℃の範囲のワックス類を主成分とする層が好
適であり、厚さは０．５μｍ〜２μｍが適当である。The peeling layer (2) is intended to ensure adhesion between the film-like base material (1) and the corrosion-resistant resin layer (3) and to control peelability during thermal transfer, and is made of carnauba wax, carnauba wax,
The melting point of candelilla wax, rice wax, etc. is 60.
A layer containing wax as a main component at a temperature in the range of .degree. C. to 100.degree. C. is suitable, and the thickness is suitably 0.5 .mu.m to 2 .mu.m.
【００１１】耐蝕性樹脂層（３）は、エポキシ系樹脂、
ポリイミド系樹脂、フェノール系樹脂、メラミン系樹脂
等の、酸系のエッチング液に対する耐性を有する樹脂か
ら成る厚さ０．５μｍ〜５０μｍの層であり、加工性お
よび熱転写時の解像度の点からエポキシ系樹脂の厚さ０
．５μｍ〜１５μｍの層が好適である。[0011] The corrosion-resistant resin layer (3) is made of epoxy resin,
It is a layer with a thickness of 0.5 μm to 50 μm made of a resin such as polyimide resin, phenol resin, melamine resin, etc. that is resistant to acid-based etching solutions. Resin thickness 0
．． A layer of 5 μm to 15 μm is suitable.
【００１２】熱接着性樹脂層（４）は耐蝕性樹脂層（３
）を金属表面に熱接着させる役割を有しており、必要な
特性としては、耐蝕性樹脂層（３）との密着性がよいこ
と、加熱時に軟化あるいは溶融して金属表面に密着する
こと、金属表面との密着性がよいこと、室温近辺での金
属表面への感圧転移がないこと、等が挙げられ、これら
の条件を満たす材料としては、特に、軟化点が５０℃〜
２００℃の範囲のポリアミド樹脂を０．４μｍ〜２．０
μｍの厚さに形成したものが好ましい。The thermoadhesive resin layer (4) is a corrosion-resistant resin layer (3).
) has the role of thermally adhering the metal surface to the metal surface, and the required properties are that it has good adhesion to the corrosion-resistant resin layer (3), that it softens or melts when heated and adheres closely to the metal surface, Materials that meet these requirements include good adhesion to metal surfaces and no pressure-sensitive transition to metal surfaces near room temperature.
Polyamide resin in the range of 200℃ from 0.4μm to 2.0
Preferably, it is formed to a thickness of μm.
【００１３】[0013]
【作用】本発明の熱転写記録媒体は、従来の視覚的画像
の形成を主目的とした熱転写インキに代わって耐蝕性樹
脂を用いたこと、耐蝕性を低下させる原因のひとつであ
る顔料の着色剤を除去したこと、更にそれ自体では金属
層に対する密着性の不十分な耐蝕性樹脂を転移させるた
めに、特定の軟化点のポリアミド樹脂を接着層として設
けたことにより、金属表面に安定してレジスト層を形成
することが出来るようになったものである。[Function] The thermal transfer recording medium of the present invention uses a corrosion-resistant resin instead of a conventional thermal transfer ink whose main purpose is to form visual images, and uses a pigment coloring agent, which is one of the causes of decreasing corrosion resistance. In addition, in order to transfer the corrosion-resistant resin, which does not have sufficient adhesion to the metal layer by itself, a polyamide resin with a specific softening point was provided as an adhesive layer, thereby stably forming a resist on the metal surface. It is now possible to form layers.
【００１４】[0014]
【実施例】次に本発明のレジストパターン形成用熱転写
記録媒体の実施例を示す。EXAMPLES Next, examples of the thermal transfer recording medium for resist pattern formation of the present invention will be shown.
【００１５】厚さ５．７μｍのポリエステルフィルムの
片面に、カルナウバワックスとライスワックスの等量混
合物からなる厚さ１．２μｍの剥離層を形成し、その上
からエポキシ樹脂からなる厚さ１０μｍの耐蝕性樹脂層
と、軟化点８０℃のポリアミド樹脂からなる厚さ０．７
μｍの層とを順に設けて、熱転写記録媒体を得た。A 1.2 μm thick release layer made of a mixture of equal amounts of carnauba wax and rice wax is formed on one side of a 5.7 μm thick polyester film, and a 10 μm thick release layer made of epoxy resin is formed on top of this. Made of corrosion-resistant resin layer and polyamide resin with a softening point of 80°C, thickness 0.7
A thermal transfer recording medium was obtained by sequentially providing layers of .mu.m.
【００１６】次に、ヘッド密度８ｄｏｔ／ｍｍのライン
プリンターを用いてガラス基板上に設けた銅膜面にパタ
ーンを印字し、５０℃で４７°ボーメの塩化第二鉄によ
ってエッチングを行った後、５％の塩酸と純水で洗浄し
、乾燥したところ、パターン通りの導電膜層を有するプ
リント基板が得られた。Next, a pattern was printed on the surface of the copper film provided on the glass substrate using a line printer with a head density of 8 dots/mm, and after etching with ferric chloride at 47° Baume at 50°C, When washed with 5% hydrochloric acid and pure water and dried, a printed circuit board having a conductive film layer according to the pattern was obtained.
【００１７】[0017]
【発明の効果】本発明の熱転写記録媒体は以上の様な構
成であるので、金属の表面に耐蝕性のパターンを容易に
形成することができ、しかもそのパターンは金属の表面
に強固に密着すると共に、酸系のエッチング液に対する
耐性が大きいので、予定通りのパターンの導電膜の層が
形成できる。また、熱転写記録媒体としても保存性や取
り扱い適性も優れており、転写時の作業性や解像度が良
好である。[Effects of the Invention] Since the thermal transfer recording medium of the present invention has the above-described structure, a corrosion-resistant pattern can be easily formed on the metal surface, and the pattern firmly adheres to the metal surface. In addition, since it has high resistance to acid-based etching solutions, a conductive film layer with a predetermined pattern can be formed. Furthermore, it has excellent storage stability and handling suitability as a thermal transfer recording medium, and has good workability and resolution during transfer.
【図１】本発明の熱転写記録媒体の構成を示す断面図で
ある。FIG. 1 is a sectional view showing the structure of a thermal transfer recording medium of the present invention.
１ フィルム状基材 ２ 剥離層 ３ 耐蝕性樹脂層 ４ 熱接着性樹脂層 1 Film-like base material 2 Peeling layer 3 Corrosion-resistant resin layer 4 Thermoadhesive resin layer
Claims (2)
樹脂層、熱接着性樹脂層がこの順序で形成された熱転写
記録媒体であって、耐蝕性樹脂層が、酸系のエッチング
液に対して耐性を有していることを特徴とするレジスト
パターン形成用熱転写記録媒体。1. A thermal transfer recording medium in which a release layer, a corrosion-resistant resin layer, and a heat-adhesive resin layer are formed in this order on one side of a film-like base material, wherein the corrosion-resistant resin layer is formed by acid-based etching. A thermal transfer recording medium for resist pattern formation, characterized by having resistance to liquids.
とを特徴とする請求項１に記載のレジストパターン形成
用熱転写記録媒体。2. The thermal transfer recording medium for resist pattern formation according to claim 1, wherein the thermal adhesive resin layer is made of polyamide resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3059161A JPH04292993A (en) | 1991-03-22 | 1991-03-22 | Transfer recording medium for forming resist pattern |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3059161A JPH04292993A (en) | 1991-03-22 | 1991-03-22 | Transfer recording medium for forming resist pattern |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04292993A true JPH04292993A (en) | 1992-10-16 |
Family
ID=13105373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3059161A Pending JPH04292993A (en) | 1991-03-22 | 1991-03-22 | Transfer recording medium for forming resist pattern |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04292993A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997015173A1 (en) * | 1995-10-17 | 1997-04-24 | Minnesota Mining And Manufacturing Company | Method for radiation-induced thermal transfer of resist for flexible printed circuitry |
| JP2006294741A (en) * | 2005-04-07 | 2006-10-26 | General Technology Kk | Pattern formation method |
-
1991
- 1991-03-22 JP JP3059161A patent/JPH04292993A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997015173A1 (en) * | 1995-10-17 | 1997-04-24 | Minnesota Mining And Manufacturing Company | Method for radiation-induced thermal transfer of resist for flexible printed circuitry |
| JP2006294741A (en) * | 2005-04-07 | 2006-10-26 | General Technology Kk | Pattern formation method |
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