JPH0428646U - - Google Patents

Info

Publication number
JPH0428646U
JPH0428646U JP6943890U JP6943890U JPH0428646U JP H0428646 U JPH0428646 U JP H0428646U JP 6943890 U JP6943890 U JP 6943890U JP 6943890 U JP6943890 U JP 6943890U JP H0428646 U JPH0428646 U JP H0428646U
Authority
JP
Japan
Prior art keywords
processing tank
processing
communicates
tank
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6943890U
Other languages
English (en)
Japanese (ja)
Other versions
JP2505600Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990069438U priority Critical patent/JP2505600Y2/ja
Publication of JPH0428646U publication Critical patent/JPH0428646U/ja
Application granted granted Critical
Publication of JP2505600Y2 publication Critical patent/JP2505600Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP1990069438U 1990-06-29 1990-06-29 感光材料処理装置 Expired - Fee Related JP2505600Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990069438U JP2505600Y2 (ja) 1990-06-29 1990-06-29 感光材料処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990069438U JP2505600Y2 (ja) 1990-06-29 1990-06-29 感光材料処理装置

Publications (2)

Publication Number Publication Date
JPH0428646U true JPH0428646U (cs) 1992-03-06
JP2505600Y2 JP2505600Y2 (ja) 1996-07-31

Family

ID=31604742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990069438U Expired - Fee Related JP2505600Y2 (ja) 1990-06-29 1990-06-29 感光材料処理装置

Country Status (1)

Country Link
JP (1) JP2505600Y2 (cs)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0282249A (ja) * 1988-09-20 1990-03-22 Seiko Instr Inc 半導体製造装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0282249A (ja) * 1988-09-20 1990-03-22 Seiko Instr Inc 半導体製造装置

Also Published As

Publication number Publication date
JP2505600Y2 (ja) 1996-07-31

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees