JPH0428038Y2 - - Google Patents
Info
- Publication number
- JPH0428038Y2 JPH0428038Y2 JP16975383U JP16975383U JPH0428038Y2 JP H0428038 Y2 JPH0428038 Y2 JP H0428038Y2 JP 16975383 U JP16975383 U JP 16975383U JP 16975383 U JP16975383 U JP 16975383U JP H0428038 Y2 JPH0428038 Y2 JP H0428038Y2
- Authority
- JP
- Japan
- Prior art keywords
- diffraction grating
- holder
- legs
- stand
- tips
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002093 peripheral effect Effects 0.000 description 8
- 238000003754 machining Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
Landscapes
- Spectrometry And Color Measurement (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Description
【考案の詳細な説明】
(イ) 産業上の利用分野
本考案は分光器における回折格子取付け装置
(ロ) 従来技術
回折格子の取付けにおいては、回折格子取付け
の傾きの微調整が可能なこと、及び回折格子の交
換の場合、取付けの再現性が高いことが要求され
る。回折格子の傾きの微調整は第1図に示すx,
y,z3軸まわりの回転微調整で、各部品の加工精
度を高くして微調整なしで、回折格子の取付け位
置の精度を得るようにする場合もあるが、一般的
には微調整可能な方が望ましい。[Detailed description of the invention] (a) Industrial application field The present invention is a diffraction grating mounting device for a spectrometer (b) Prior art When installing a diffraction grating, the inclination of the diffraction grating can be finely adjusted; In the case of diffraction grating replacement, high reproducibility of installation is required. Fine adjustment of the inclination of the diffraction grating is done by
In some cases, fine adjustment of the rotation around the y and z three axes can be used to increase the machining accuracy of each part and obtain the accuracy of the mounting position of the diffraction grating without fine adjustment, but in general, fine adjustment is possible. It is preferable.
精密機械の設計思想として運動学的設計と工作
機械的設計と呼ばれる二つのものがある。物体を
直線運動させる構造を得るのに蟻と蟻溝の嵌合を
用いるのが工作機械的設計で、この構造は強度及
び剛性が大きいと云う特徴を有するが、高精度の
工作を必要とし、蟻溝と蟻との間の部品の交換性
が乏しく、重量が大となり、軽快な運動が困難等
の欠点がある。運動学的設計の考え方は、物体に
は6個の運動の自由度(3軸方向の並進、3軸ま
わりの回転、合計6個)があり、物体に拘束点を
一つ加える毎に運動の自由度が1つ減るから、要
求される運動に対して必要最小限の拘束点で物体
を支持拘束すると云うものである。直線運動の場
合、自由度は1であるから、拘束点は5点が必要
でかつ充分である。具体的には移動体に先端が球
になつた3本の脚A,B,Cを取付け、基台表面
を平面に仕上げて一本の直線のV溝を設け、上記
3脚のうち2本B,CをこのV溝に入れ、残りの
一本Aを基体の表面上に置く。この場合移動体の
支持点は脚Aの先端の一点と脚B,Cの先端が
夫々2点でV溝の斜面に当つていることで、四点
あり、全部で5点となつて直線運動に対する必要
かつ充分の拘束条件となつている。この例から予
想されるように、運動学的設計によると、運動の
精度は基台の平面度とV溝の直線性とで決まり、
蟻と蟻溝のような相互適合のための高精度加工を
必要とせず、従つて基台に対し移動体を交換して
も、がたつきも無理な力が加わることもなく、確
実に運動及び位置の精度を再現させることがで
き、構造は簡単で軽量である。しかし強度とか剛
性においては工作機構的設計の構造には及ばな
い。 There are two design philosophies for precision machines: kinematic design and machine tool design. Machine tool design uses the fitting of dovetails and dovetail grooves to create a structure that allows objects to move in a straight line.This structure has the characteristics of high strength and rigidity, but requires high-precision machining. There are disadvantages such as poor interchangeability of parts between the dovetail groove and the dovetail, increased weight, and difficulty in nimble movement. The concept of kinematic design is that an object has six degrees of freedom of movement (translation along three axes, rotation around three axes, six in total), and each time a constraint point is added to the object, the degree of freedom of movement is increased. Since the degree of freedom is reduced by one, the object is supported and constrained at the minimum necessary constraint points for the required movement. In the case of linear motion, the degree of freedom is one, so five constraint points are necessary and sufficient. Specifically, three legs A, B, and C with spherical tips are attached to the moving body, the base surface is finished flat and a straight V groove is provided, and two of the three legs are Put wires B and C into this V-groove, and place the remaining wire A on the surface of the base. In this case, the supporting points of the moving object are four points, one point at the tip of leg A, and two points each at the tips of legs B and C, making it 5 points in total, and the moving body is moving in a straight line. This is a necessary and sufficient constraint on the As expected from this example, according to the kinematic design, the accuracy of the movement is determined by the flatness of the base and the straightness of the V-groove.
There is no need for high-precision machining for mutual compatibility such as dovetail and dovetail grooves, and therefore even if the moving body is replaced with respect to the base, it will move reliably without rattling or applying excessive force. It is possible to reproduce position accuracy and position accuracy, and the structure is simple and lightweight. However, in terms of strength and rigidity, it is not comparable to structures designed using machine mechanisms.
運動学的設計の構造は上述したような特徴を有
するから、余り大きな負荷の加わらない精密機械
によく用いられており、分光器における取付け位
置微調整可能な回折格子の取付け構造にも採用さ
れている。第2図はそのような従来例の一つであ
る。この図でGは回折格子、Hは回折格子ホルダ
である。回折格子GはホルダHに固定されてお
り、格子GとホルダHとが一体で交換部分となつ
ている。ホルダHが分光器の回折格子台Bに位置
調整可能に運動学的設計構造で取付けられる(キ
ネマチツクマウント)。この構造では回折格子ホ
ルダHが台Bに対してy軸、z軸まわりに調整可
能である。ホルダHは位置調整を終れば台Bに対
し不動であるから、台BとホルダHとの間の拘束
点の数は6個が必要かつ充分である。ホルダHに
は3本のねじ1,2,3が貫通させてあり、これ
らの各ねじの先端は球面になつている。ねじ1の
先端は台Bのヒボツト穴1′に嵌り、ねじ2の先
端は台BのV溝2′に係合し、ねじ3の先端は台
Bの平面部に当接している。ピボツトによる支持
は3軸まわりの回転が可能だから3点による拘束
に相当し、全体で6点支持になつていて、ホルダ
Hは台Bに対して位置が一つに決まつている。ね
じ1を回わすことによりz軸まわりの調整、ねじ
3を回わすことによりy軸まわりの調整が行われ
る。この構造はホルダHをばねによつて台Bに引
付けるようにして構造を安定させている。ホルダ
Hが第2図のように台B上に水平に載置される場
合はこれでよいが、第2図の構造を垂直に起した
位置関係とする必要がある場合、交換部分である
回折格子とホルダHの一体部分の重量が大きい
と、構造的な剛性が不充分である。即ち重量はピ
ボツト穴1′とV溝2′の斜面とねじ1,2の先端
部との当りで支持されるので、第3図に示すよう
にねじ1,2の先端の球面とピボツト穴1′、V
溝2′等の斜面との当りは正しい当り状態の点線
位置からずれて片当りの実線位置になり、eなる
隙間が生じて、この分だけ構造上の遊びとなり外
部振動等の影響を受け易くなる。この隙間をなく
すために、ホルダHを台Bに引付ける力を強くす
ると、ホルダHに加わる力が大となつて歪を生
じ、キネマチツクマウントの本来の価値を失う結
果となる。 Because the kinematically designed structure has the above-mentioned characteristics, it is often used in precision machines that do not apply a large load, and is also used in the mounting structure of diffraction gratings in spectrometers, where the mounting position can be finely adjusted. There is. FIG. 2 is one such conventional example. In this figure, G is a diffraction grating and H is a diffraction grating holder. The diffraction grating G is fixed to the holder H, and the grating G and the holder H are integrated and serve as a replaceable part. A holder H is mounted on the diffraction grating base B of the spectrometer in a kinematically designed structure in a position adjustable manner (kinematic mount). In this structure, the diffraction grating holder H can be adjusted around the y-axis and the z-axis with respect to the table B. Since the holder H is immovable with respect to the stand B after the position adjustment is completed, six restraining points between the stand B and the holder H are necessary and sufficient. Three screws 1, 2, and 3 pass through the holder H, and each screw has a spherical tip. The tip of the screw 1 fits into the pivot hole 1' of the base B, the tip of the screw 2 engages with the V-groove 2' of the base B, and the tip of the screw 3 contacts the flat surface of the base B. Since support by pivots allows rotation around three axes, it corresponds to restraint at three points, resulting in a total of six points of support, and the position of holder H relative to base B is fixed at one point. By turning the screw 1, adjustment around the z-axis is performed, and by turning the screw 3, adjustment around the y-axis is performed. This structure stabilizes the structure by attracting the holder H to the stand B by means of a spring. This is fine when the holder H is placed horizontally on the table B as shown in Figure 2, but if the structure shown in Figure 2 needs to be placed vertically, the replacement part, the diffraction If the weight of the integral part of the grid and holder H is large, the structural rigidity will be insufficient. That is, since the weight is supported by the contact between the slopes of the pivot hole 1' and the V-groove 2' and the tips of the screws 1 and 2, the spherical surfaces of the tips of the screws 1 and 2 and the pivot hole 1 are supported as shown in FIG. ', V
The contact with the slope of the groove 2' etc. deviates from the dotted line position of correct contact state to the solid line position of uneven contact, creating a gap e, which causes structural play and is susceptible to external vibrations etc. Become. If the force that attracts the holder H to the base B is increased in order to eliminate this gap, the force applied to the holder H will increase, causing distortion, resulting in the loss of the original value of the kinematic mount.
(ハ) 目的
本考案は上述した従来のキネマチツクマウント
による回折格子ホルダの欠点を改善し、充分な剛
性を備えしかもホルダ交換時の取付けの再現性は
失わない回折格子ホルダの取付構造を目的として
いる。(c) Purpose The present invention aims to improve the drawbacks of the conventional kinematic mount diffraction grating holder described above, and to provide a diffraction grating holder mounting structure that has sufficient rigidity and does not lose reproducibility in mounting when replacing the holder. There is.
(ニ) 構成
本考案は、回折格子の格子面を垂直に保持する
回折格子取付け装置において、回折格子ホルダに
3脚を設け、この3脚のうちの一つの先端を上記
ホルダを支承する少なくとも下部に周壁面を突設
された回折格子台の垂直平面部に形成された水平
方向のV溝に係合させ、他の2脚の先端は上記V
溝の上下において上記回折格子台の垂直平面部に
当接させ、回折格子ホルダの重量は同ホルダ外周
下面と上記回折格子台の下部周壁面の上面との間
の重力方向の当たりで支承させることによつて、
上記3脚の先端の回折格子台との当り点にはホル
ダの重量が全く作用しないようにした回折格子取
付け構造に係る。(D) Structure The present invention provides a diffraction grating mounting device for vertically holding the grating plane of a diffraction grating, in which a diffraction grating holder is provided with three legs, and the tip of one of the three legs is connected to at least the lower part that supports the holder. The surrounding wall surface is engaged with the horizontal V-groove formed in the vertical plane part of the protruding diffraction grating stand, and the tips of the other two legs
The upper and lower portions of the groove should be brought into contact with the vertical plane portion of the diffraction grating holder, and the weight of the diffraction grating holder should be supported by the contact in the direction of gravity between the lower outer circumferential surface of the holder and the upper surface of the lower peripheral wall surface of the diffraction grating holder. According to
The present invention relates to a diffraction grating mounting structure in which the weight of the holder does not act at all on the contact points of the tips of the three legs with the diffraction grating stand.
(ホ) 実施例
第4図以下に本考案の一実施例を示す。第4図
において、Bは回折格子台で第2図のBに相当
し、不図示の波長駆動機構によつて水平軸Zのま
わりに回転駆動されるようになつている。Hが回
折格子台Bに位置調整可能に取付けられる回折格
子ホルダで第2図のHに相当しており、Gはホル
ダHに取付けられた回折格子である。回折格子ホ
ルダHには3本の脚1,2,3が取付けられてい
る。これらの脚はねじであつてホルダHに螺合し
ており、脚は回わすことにより進退させることが
できる。これらの脚1,2,3の先端は球面にな
つており、脚1の先端は回折格子台Bに形成され
たz軸と平行なV溝1″に係合させてあり、他の
2脚2,3の先端は台Bの平面部Bfに当接させ
てある。これらの関係は第5図の断面図によく表
現されている。ホルダHには第5図に見られるよ
うに裏面3個所に植込みボルト4が植立してあ
り、このボルトは台Bに穿つた孔Bhを貫通して
おり、ボルト4の外径に比し、孔Bhは充分大き
く両者の関係は完全にルーズであり、ボルト4の
頭と台Bの裏面との間に圧縮ばね5が介装されて
いて、ホルダHは台Bに向つて引付けられてい
る。以上の構造により回折格子ホルダHは脚1と
V溝1″との間の2点の接点と、脚2,3の先端
と台Bの平面部Bfとの当接点2点の計4点で支
持され、ホルダHは回折格子面の法線(第4図で
図の紙面に垂直)即ち第1図で説明したx軸まわ
りの回転とz軸方向の摺動の2自由度が残つてい
る。この2つの自由度のうち、回折格子ホルダH
の重量の作用方向の運動の自由度はx軸まわりの
回転であり、従来例では、この自由度をも脚1,
2,3等の先端とピボツト穴又はV溝の斜面とで
支承していたのである。本考案では第5図に示さ
れているように回折格子台Bを周壁Bwを有する
盆形とし、回折格子ホルダHはこの周壁の内側に
ゆるく嵌合させ、第4図に見えているようにホル
ダHの下周部円周方向約120°にわたつて突条Hs
を突出させ、この突条Hsを台Bの周壁Bwの内面
に当接させることで、ホルダHの総重量を支承さ
せ、x軸まわりの回転とz軸方向の摺動を拘束し
ている。更に上記突条部と回折格子台周壁との間
の当りを確実にするためホルダHの頂部周面に押
え部材6を当接させ、押え部材6と回折格子台B
との間に圧縮ばね7を介装してホルダHを押えて
いる。押え部材6にはねじ8が立てゝあり、これ
を引張ることによつてホルダHへの押えを解除す
ることができる。(E) Embodiment An embodiment of the present invention is shown in Figure 4 and below. In FIG. 4, B represents a diffraction grating stand, which corresponds to B in FIG. 2, and is rotated around a horizontal axis Z by a wavelength drive mechanism (not shown). H is a diffraction grating holder attached to the diffraction grating stand B so that its position can be adjusted, and corresponds to H in FIG. 2, and G is a diffraction grating attached to the holder H. Three legs 1, 2, and 3 are attached to the diffraction grating holder H. These legs are screws and are screwed into the holder H, and can be moved forward and backward by turning them. The tips of these legs 1, 2, and 3 are spherical, and the tip of leg 1 is engaged with a V groove 1'' parallel to the z-axis formed on the diffraction grating base B, and the other two legs The tips of 2 and 3 are brought into contact with the flat surface Bf of the stand B.The relationship between them is well expressed in the cross-sectional view of Fig. 5.As seen in Fig. 5, the holder H has a back surface 3 A stud bolt 4 is installed at this location, and this bolt passes through a hole Bh drilled in the base B. Compared to the outer diameter of the bolt 4, the hole Bh is sufficiently large and the relationship between the two is completely loose. A compression spring 5 is interposed between the head of the bolt 4 and the back surface of the base B, and the holder H is attracted toward the base B. With the above structure, the diffraction grating holder H is attached to the leg 1. The holder H is supported at four points in total: two points of contact between the base and the V-groove 1'', and two points of contact between the tips of the legs 2 and 3 and the flat part Bf of the table B. Two degrees of freedom remain: rotation around the line (perpendicular to the plane of the drawing in FIG. 4), ie, rotation around the x-axis and sliding in the z-axis direction as explained in FIG. Of these two degrees of freedom, the diffraction grating holder H
The degree of freedom of movement of the weight in the action direction is rotation around the x-axis, and in the conventional example, this degree of freedom is also used for legs 1,
It was supported by the tips of the 2nd and 3rd grade and the pivot hole or the slope of the V-groove. In the present invention, as shown in FIG. 5, the diffraction grating stand B is shaped like a tray with a peripheral wall Bw, and the diffraction grating holder H is loosely fitted inside this peripheral wall, as shown in FIG. A protrusion Hs extending approximately 120° in the circumferential direction on the lower circumference of the holder H
By protruding and bringing this protrusion Hs into contact with the inner surface of the peripheral wall Bw of the stand B, the total weight of the holder H is supported, and rotation around the x-axis and sliding in the z-axis direction are restrained. Furthermore, in order to ensure contact between the protrusion and the peripheral wall of the diffraction grating table, a presser member 6 is brought into contact with the top peripheral surface of the holder H, and the presser member 6 and the diffraction grating table B are brought into contact with each other.
A compression spring 7 is interposed between the holder H and the holder H. The holding member 6 has a screw 8, and by pulling this screw, the holding on the holder H can be released.
上述の構成において、脚2,3は回折格子Gの
格子線に直交するy軸に沿つて配置されており、
脚1を回わして進退させることにより、格子Gの
y軸まわりの回転位置調節が行われる。また脚1
はz軸上に配置されているので、脚2,3の進退
によつて格子Gのz軸まわりの回転位置調整がで
きる。 In the above configuration, the legs 2 and 3 are arranged along the y-axis orthogonal to the grating lines of the diffraction grating G,
By rotating the legs 1 and moving them forward and backward, the rotational position of the grating G around the y-axis is adjusted. Also leg 1
Since it is arranged on the z-axis, the rotational position of the grating G around the z-axis can be adjusted by moving the legs 2 and 3 back and forth.
上述実施例では回折格子ホルダHの重量を支え
る受け部は図面上では回折格子台Bの周壁Bwの
内面とホルダHの下周の円周突条間の線当りにな
つているが、実際には凹面(周壁Bw内面)とそ
れよりわづかに曲率の小さい凸面(突条Hs)と
の間の点当りであり、運動学的な拘束条件を満足
しつゝ、しかもホルダHの重量を支承するのがV
溝等の斜面でなく、重量の作用方向に垂直な面で
しかも相対曲率の小さな点当りであるから点当り
でも充分な支持力が得られる。 In the above-mentioned embodiment, the receiving part that supports the weight of the diffraction grating holder H is in contact with the line between the inner surface of the peripheral wall Bw of the diffraction grating stand B and the circumferential protrusion on the lower periphery of the holder H in the drawing, but in reality is the point between the concave surface (inner surface of the peripheral wall Bw) and the convex surface (projection Hs) with a slightly smaller curvature than that, and satisfies the kinematic constraint conditions while supporting the weight of the holder H. It is V who does
Since the contact is not on an inclined surface such as a groove, but on a point perpendicular to the direction of action of the weight and has a small relative curvature, sufficient supporting force can be obtained even on a point contact.
(ヘ) 効果
本考案は上述したように回折格子ホルダは3脚
支持によつているから、取付け位置決めの再現性
がよく、かつ回折格子ホルダの横重量が上記3脚
支持の支持部に作用せず、横重量は別途これを支
承しているので、回折格子支持構造の剛性が高
く、回折格子ホルダが垂直面或は傾斜した面内で
回折格子台に取付けられるような場合には特に効
果の大きいものである。(f) Effect As mentioned above, in the present invention, since the diffraction grating holder is supported by three legs, the reproducibility of mounting positioning is good, and the lateral weight of the diffraction grating holder does not act on the support part of the three legs. First, the lateral weight is supported separately, so this is especially effective when the diffraction grating support structure has high rigidity and the diffraction grating holder is mounted on the diffraction grating stand in a vertical or inclined plane. It's big.
第1図は回折格子の取付け位置調整の3軸を示
す斜視図、第2図は従来例の斜視図、第3図は同
従来例の要部拡大断面図、第4図は本考案の一実
施例の正面図、第5図は同実施例の縦断側面図で
ある。
G……回折格子、H……回折格子ホルダ、B…
…回折格子台、1,2,3……脚。
Fig. 1 is a perspective view showing the three axes for adjusting the mounting position of the diffraction grating, Fig. 2 is a perspective view of a conventional example, Fig. 3 is an enlarged sectional view of the main part of the conventional example, and Fig. 4 is an example of the present invention. FIG. 5 is a front view of the embodiment, and FIG. 5 is a longitudinal sectional side view of the embodiment. G... Diffraction grating, H... Diffraction grating holder, B...
...Diffraction grating stand, 1, 2, 3...legs.
Claims (1)
付け装置において、回折格子を固定する回折格子
ホルダに進退調節可能に、先端に球面を有する三
つの脚を一つの三角形の頂点に位置するように取
付け、この三つの脚の中の一つの先端を、上記回
折格子ホルダを垂直面部において保持せしめる回
折格子台の垂直面に水平方向に形成されたV溝に
係合させ、他の二つの脚の先端夫々を、上記V溝
の上下で上記回折格子台の垂直面部に当接させ、
回折格子ホルダの外周下面を回折格子台下部に突
設された下部周壁面上に当接させて同格子ホルダ
の重量を回折格子台下部周壁面で支承させた回折
格子取付け装置。 In a diffraction grating mounting device that holds the grating plane of a diffraction grating perpendicularly, three legs with spherical surfaces at their tips are attached to the diffraction grating holder, which fixes the diffraction grating, so that they can be adjusted forward and backward, and are located at the vertices of one triangle. , the tip of one of these three legs is engaged with a V-groove formed horizontally on the vertical surface of the diffraction grating stand that holds the diffraction grating holder on the vertical surface, and the tips of the other two legs are abutting the vertical surface portion of the diffraction grating stand above and below the V-groove, respectively;
A diffraction grating mounting device in which the lower outer circumferential surface of a diffraction grating holder is brought into contact with a lower circumferential wall surface protruding from the lower part of the diffraction grating stand, so that the weight of the grating holder is supported by the lower circumferential wall surface of the diffraction grating stand.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16975383U JPS6076234U (en) | 1983-10-31 | 1983-10-31 | Diffraction grating mounting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16975383U JPS6076234U (en) | 1983-10-31 | 1983-10-31 | Diffraction grating mounting device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6076234U JPS6076234U (en) | 1985-05-28 |
JPH0428038Y2 true JPH0428038Y2 (en) | 1992-07-07 |
Family
ID=30370774
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16975383U Granted JPS6076234U (en) | 1983-10-31 | 1983-10-31 | Diffraction grating mounting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6076234U (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4612370B2 (en) * | 2004-09-10 | 2011-01-12 | 株式会社山武 | Position adjustment mechanism |
-
1983
- 1983-10-31 JP JP16975383U patent/JPS6076234U/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6076234U (en) | 1985-05-28 |
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