JPH04275395A - Si3n4-based sliding material and production thereof - Google Patents

Abstract

PURPOSE:To obtain the title sliding material excellent in resistance to corrosion, wear and heat, to be used in a wide range of rotary mechanical parts, by providing the sliding surface of a sliding material body consisting of Si3N4 with an amorphous ion-implanted section in a spiral fashion. CONSTITUTION:The sliding surface 2 of a sliding material body 1 consisting of Si3N4 is provided with masking so as to leave a non-masked portion in a spiral fashion, and ions such as of nitrogen or argon are implanted into such non-masked portion 3 at a specified accelerating voltage to form an amorphous ion-implanted section 3 in a spiral fashion.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] The present invention relates to a Si3 N4 sliding material and a method for producing the same, and more specifically, Si3 N4 is used as a sliding material for a wide range of rotating machine parts and has excellent corrosion resistance, abrasion resistance, and heat resistance. The present invention relates to an N4-based sliding material and a method for manufacturing the same.

0002

[Prior art and problems to be solved] Generally, Si3
N4-based sliding materials have excellent corrosion resistance, wear resistance, heat resistance, etc., so they have a long life and are indispensable for mechanical seals, bearings, etc. used under harsh conditions.

[0003] In a mechanical seal, if fine spiral grooves are formed on the sliding surface, a pumping action occurs during sliding, thereby preventing leakage from rotating parts. Further, if a fine spiral groove is formed in the thrust bearing, the fluid inside the device can be used as the working fluid of the bearing, and the structure of the device can be made more compact and energy-saving.

[0004] Conventionally, as a method for forming such fine spiral grooves, there is a method of covering the surface of the Si3N4-based sliding material with a photoresist and corroding the exposed portion by a method such as plasma etching.

[0005] However, the method of forming such grooves requires complicated steps, is extremely costly, and is technically difficult.

An object of the present invention is that when used in a mechanical seal, it can generate a pumping action during sliding to prevent leakage from rotating parts, and when used in a thrust bearing, it can use the fluid inside the device as the working fluid of the bearing. It is an object of the present invention to provide a Si3N4-based sliding material that can be used and a method for manufacturing the Si3N4-based sliding material that can be manufactured at low cost through simple steps.

[0007]

[Means for Solving the Problems] In order to achieve the above object, the present invention provides an ion implantation section provided in a spiral shape on the sliding surface of a sliding material body made of Si3N4 material, The implantation part is made into an amorphous material by injecting ions such as nitrogen or argon at a predetermined accelerating voltage, and the sliding material main body is an annular body whose axial end surface forms a sliding surface. Adopted and also Si3N
4 Masking is applied to the sliding surface of the sliding material main body made of abrasive material so that the unmasked part remains in a spiral shape, and ions of nitrogen, argon, etc. are applied to the unmasked part at a specified acceleration. This method employs a method in which the ion implantation is performed by applying a voltage to form an ion implantation part, and the ion implantation part is made amorphous.

[0008]

[Operation] By employing the above-mentioned means, the present invention injects ions into the sliding surface of the sliding material body in a spiral manner.
When an amorphous ion-implanted portion is formed in a spiral shape and used as a sliding material for rotating machine parts, the ion-implanted portion is selectively removed and spiral grooves are formed on the sliding surface. Ru.

[0009]

Embodiments Hereinafter, embodiments of the present invention will be explained based on the drawings. FIG. 1 is a perspective view showing an example of the Si3N4-based sliding material of the present invention.

[0010] This Si3 N4-based sliding material 4 is Si3
An annular sliding material body 1 made of N4 material, a sliding surface 2 formed on the axial end face of this sliding material body 1, and ions formed in a spiral shape on the surface layer of this sliding surface 2. It is composed of an injection section 3.

[0011] The ion implantation section 3 is one in which ions of nitrogen, argon, etc. are implanted into the sliding surface 2 of the sliding material main body 1 at a predetermined accelerating voltage, and Si3 N4 is made amorphous.

[0012] The Si according to the present invention configured as described above
3 In the N4-based sliding material 4, the ion-implanted portion 3
As a result of the ion implantation, the Si3 N4 becomes amorphous and is softened compared to the other sliding surfaces 2. Therefore, the amount of wear per unit time during sliding of the ion-implanted part 3 is about four times that of normal Si3N4,
The Si3 N4 in the ion implantation part 3 is selectively removed, and a spiral groove is formed in the sliding surface 2.

That is, Si3 was ion-implanted using Ar+ as the ion species and at an accelerating voltage of 800 keV.
When the N4-based sliding material 4 is slid for 4 hours under water lubrication, grooves with a depth of 0.5 μm are formed.

[0014] Therefore, when the Si3N4-based sliding material 4 is used as a sliding material for mechanical seals, bearings, etc., the ion-implanted part 3 wears out faster than normal parts.
A spiral groove of a predetermined shape is gradually formed, and in a mechanical seal, a pumping action occurs when sliding, preventing leakage from rotating parts.
In bearings, the fluid inside the device can be used as the working fluid for the bearing.

[0015] Next, an embodiment of a method for producing a Si3N4-based sliding material will be described. 2 and 3 show an example of a method for manufacturing a Si3 N4 sliding material used for mechanical seals.

In order to manufacture this Si3N4-based sliding material 14, first, as shown in FIG. 2, an annular sliding material body 11 made of Si3N4 material is prepared, Masking 15 is applied so that an unmasked portion 16 remains in a spiral shape on the sliding surface 12, which is the end face in the axial direction of the sliding material body, and then ions of nitrogen, argon, etc. 11 sliding surface 12
into the unmasked portion 16 of the mask.

As a result, as shown in FIG. 3, the unmasked portion 16 of the sliding surface 12 of the sliding material body 11
Ions are implanted into the ion implantation portion 13 to form a spiral shape.

[0018] Also, the Si3N of this ion implantation part 13
4 becomes amorphous as a result of ion implantation, and is softer than the other sliding surfaces 12. Therefore, the ion implantation portion 13 is selectively removed during sliding, and a spiral groove is formed in the sliding surface 12.

For example, the ion implantation conditions may be set such that the ion species is A.
Ion implantation is performed at r+ with an accelerating voltage value of 800 keV, and after the ion implantation, the Si3 N4-based sliding material 14 is slid for 4 hours under water lubrication to form a groove with a depth of 0.5 μm.

Further, the thickness of the amorphous ion implanted portion 13 is proportional to the accelerating voltage value during the ion implantation.

[0021] When the Si3N4-based sliding material 14 manufactured by the manufacturing method of the present invention is used for the sliding member of a mechanical seal, the ion-implanted portion 13 is selectively removed during the process of use. As a result, a spiral groove is gradually formed, which creates a pumping action during sliding and prevents leakage from the rotating parts.

[0022] Next, another embodiment of the method for manufacturing a Si3N4-based sliding material will be described. 4 and 5 show an example of a method for manufacturing a Si3 N4 sliding material used in thrust bearings.

In order to manufacture this Si3N4-based sliding material 24, first, as shown in FIG. 4, an annular sliding material body 21 made of Si3N4 material is prepared, Masking 25 is applied so that an unmasked portion 26 remains in a spiral shape on the sliding surface 22, which is the end face in the axial direction of the sliding material main body. 21 sliding surface 22
injection into the unmasked portion 26 of the mask.

As a result, as shown in FIG. 5, the unmasked portion 26 of the sliding surface 22 of the sliding material body 21
Ions are implanted into the ion implantation portion 23 to form a spiral shape.

[0025] Also, the Si3N of this ion implantation part 23
4 becomes amorphous as a result of ion implantation, and is softer than the other sliding surfaces 22. Therefore, the ion implantation part 23 is selectively removed during sliding, and a spiral groove is formed in the sliding surface 22.

For example, the ion implantation conditions may be set such that the ion species is A.
Ion implantation is performed at r+ with an accelerating voltage value of 800 keV, and after the ion implantation, the Si3 N4 sliding material 24 is slid for 4 hours under water lubrication to form a groove with a depth of 0.5 μm.

Furthermore, the thickness of the amorphous ion implanted portion 23 is proportional to the accelerating voltage value during the ion implantation.

When the Si3N4-based sliding material 24 manufactured by the manufacturing method of the present invention is used for the sliding member of the thrust bearing, the ion-implanted portion 23 is selectively removed during the process of use. As a result, a spiral groove is gradually formed, allowing the fluid inside the device to be used as the working fluid for the bearing.

[0029]

[Effects of the Invention] By having the above-described structure, the present invention provides a spiral ion-implanted portion on the sliding surface of the sliding material body made of Si3N4, thereby creating a mechanical seal,
In the process of using it as a sliding material in bearings, etc., the ion-implanted part is selectively removed to form a spiral groove, and in mechanical seals, a pumping action occurs during sliding to prevent leakage from rotating parts. In the bearing, the fluid inside the device can be used as the working fluid of the bearing, making it possible to make the structure of the device more compact and save energy. Moreover, the manufacturing process is simple and it can be manufactured at low cost, which is an excellent effect.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing an example of a Si3 N4-based sliding material according to the present invention.

FIG. 2 is a diagram illustrating a state before ion implantation in one embodiment of the method for manufacturing a Si3 N4-based sliding material according to the present invention.

FIG. 3 is a diagram illustrating the state after ion implantation in one embodiment of the method for manufacturing a Si3 N4-based sliding material according to the present invention.

FIG. 4 is a diagram illustrating a state before ion implantation in another embodiment of the method for manufacturing a Si3 N4-based sliding material according to the present invention.

FIG. 5 is a diagram illustrating the state after ion implantation in another embodiment of the method for manufacturing a Si3 N4-based sliding material according to the present invention.

[Explanation of symbols]

1, 11, 21...Sliding material body 2, 12, 22...Sliding surface 3, 13, 23...Ion implantation part 4, 14, 24...Si3 N4-based sliding material 15, 25
……masking

Claims (3)

[Claims] [Claim 1] An ion implantation section is provided in a spiral shape on the sliding surface of the sliding material body made of Si3N4, and the ion implantation section is injected with ions of nitrogen, argon, etc. at a predetermined accelerating voltage. A Si3 N4-based sliding material characterized by being amorphous. 2. The Si according to claim 1, wherein the sliding material main body is an annular body whose axial end surface forms a sliding surface.
3 N4-based sliding material. [Claim 3] The sliding surface of the sliding material body made of Si3N4 is masked so that the unmasked portion remains in a spiral shape, and the unmasked portion is filled with nitrogen, argon, etc. ions are implanted at a predetermined acceleration voltage to form an ion-implanted part, and the ion-implanted part is made amorphous.
Method for manufacturing N4-based sliding material.