JPH0427503B2 - - Google Patents

Description

[Detailed description of the invention] (Technical field) The present invention relates to an ultrasound microscope.

(Prior art) In an ultrasonic microscope, the distance between an ultrasonic head equipped with a piezoelectric transducer and a sample stage on which a sample is placed is brought close, and the focus is adjusted automatically or manually using the output of the ultrasonic head. I try to do this. However, when performing focusing in this way, conventionally there was no special means to detect when the ultrasonic head and the sample were in contact, so even though they were in contact, both This often caused damage to the sample, the ultrasonic head, or its support mechanism. Further, during scanning of the sample, the ultrasonic head and the sample come into contact due to the unevenness of the sample surface, which may cause damage to the sample, the ultrasonic head, etc.

(Objective of the Invention) In view of the above-mentioned points, the object of the present invention is to provide an ultrasonic microscope appropriately configured to effectively prevent damage to the sample, ultrasonic head, etc. due to contact between the ultrasonic head and the sample. This is what we are trying to provide.

(Summary of the Invention) The ultrasonic microscope of the present invention holds an ultrasonic head having a piezoelectric transducer, and includes a support rod extending in a direction perpendicular to the projection direction of ultrasonic waves, and an air bearing for supporting the support rod. a fixing member that is held movably in the longitudinal direction through the support rod, and a power source and an energization detection circuit connected in series between the support rod and the fixing member, and the ultrasonic head is supported by contact with the sample. The present invention is characterized in that it includes a protection device that detects contact between the rod and the fixing member.

(Example) FIG. 1, FIG. 2, and FIG. 3 are a sectional view, a partial plan view, and a side view showing an example of the configuration of a main part of an ultrasonic microscope according to the present invention. The ultrasonic head 11 having a piezoelectric transducer is removably attached to approximately the center of a conductive support rod 12 extending in a direction perpendicular to the ultrasound projection direction. Leaf springs 18 and 19 are held on both sides by air bearings 13 and 14 to a conductive fixing member 15, and both ends of the plate springs are attached to the fixing member 15 via insulating members 16 and 17.
It is configured such that it can be supported in the longitudinal direction and displaceable in the longitudinal direction while being electrically insulated from the fixing member 15. A voice coil 20 is attached to one end of the support rod 12 so that its central axis is located in the longitudinal direction of the support rod 12 and on the outer periphery of a pole piece 21 forming a magnetic circuit. The magnetic circuit includes a pole piece 21, a magnet 22 provided at one end of this pole piece 21,
The magnetic flux generated from this magnet 22 is transmitted to the voice coil 2.
The ultrasonic head is composed of a ring-shaped yoke 23 disposed opposite to the pole piece 21 via the voice coil 20 so as to cross 0, and a yoke 24 connecting the yoke 23 and the magnet 22. The non-magnetic screw 2 is inserted through the non-magnetic sleeve 25 so that the tips of the screws 11 protrude from the yokes 23 and 24.
6 to attach it to the fixing member 15.

In this way, by supplying the required alternating current to the voice coil 20, the voice coil 20
The ultrasonic head 11 is then vibrated via the support rod 12 in a direction perpendicular to the projection direction of the ultrasonic waves to scan the sample placed below the ultrasonic head 11.

In this example, as shown in FIG.
and one leaf spring 1 held by the insulating member 16
The power supply terminals 27, 2 are connected to one end of 8, respectively.
8 is provided, and a protection device 29 is provided between these power supply terminals 27 and 28. In this example, this protection device 29 is
Power supply 30 connected in series between power supply terminals 27 and 28
and energization detection circuit 31, and this energization detection circuit 3
1, and an alarm circuit 32 having a lamp and a buzzer controlled by the output of the ultrasonic head 11 and the sample.
The support rod 12 is connected to the fixing member 1 at the portions 3 and 14.
The alarm circuit 32 is activated by the output of the energization detection circuit 30 when the contact point 5 is contacted.

In this way, contact between the ultrasonic head 11 and the sample can be detected by activation of the alarm circuit 32, so that, for example, movement of the sample stage in the direction of the ultrasonic head 11 can be stopped. Therefore, damage to the sample, the ultrasonic head 11, etc. can be effectively prevented.

Note that the present invention is not limited to the above-mentioned example, and many modifications and changes are possible. For example, in the above example, the alarm circuit 32 is driven by the output of the energization detection circuit 31, but the output can be used to cut off the energization to the voice coil 20, or move the sample stage away from the ultrasonic head 11. It can also be automatically moved in the direction of separation. Furthermore, in the above example, the sample stage is attached to the ultrasonic head 1.
The case where the ultrasonic head 1 is moved toward and away from the ultrasonic head 1 has been explained.
1. The same applies to the case where the entire component shown in FIG. 1, including its support and drive mechanism, is moved in the directions toward and away from the sample stage. Furthermore,
Means for vibrating the ultrasonic head 11 include, in addition to the voice coil described above, a piezoelectric bimorph plate,
It can also be configured using an eccentric cam, an electromagnet, etc.

(Effects of the Invention) As described above, in the present invention, since the contact between the sample and the ultrasonic head is detected, this makes it possible to effectively avoid unnecessary contact between the sample and the ultrasonic head. It can be prevented. Therefore, damage to the sample, the ultrasonic head, etc. can be effectively prevented.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view showing an example of the configuration of a main part of an ultrasonic microscope according to the present invention, FIG. 2 is a partial plan view of FIG. 1, and FIG. 3 is a side view of the same. 11... Ultrasonic head, 12... Support rod, 13,1
4...Air bearing, 15...Fixing member, 16,1
7... Insulating member, 18, 19... Leaf spring, 20... Voice coil, 21... Pole piece, 22... Magnet, 2
3, 24...Yoke, 25...Nonmagnetic sleeve, 26
...Screw, 27, 28...Power supply terminal, 29...Protective device, 30...Power source, 31...Electrification detection circuit, 32...Alarm circuit.

Claims (1)

[Claims] 1. A support rod that holds an ultrasonic head having a piezoelectric transducer and extends in a direction perpendicular to the projection direction of ultrasonic waves, and a fixing member that holds this support rod so that it can be displaced in the longitudinal direction via an air bearing. and a protection device having a power supply and an energization detection circuit connected in series between the support rod and the fixing member, and detecting contact between the support rod and the fixing member due to contact of the ultrasonic head with the sample. An ultrasound microscope characterized by comprising: