JPH03170226A - Composite pollshing machine - Google Patents

Composite pollshing machine

Info

Publication number
JPH03170226A
JPH03170226A JP2317630A JP31763090A JPH03170226A JP H03170226 A JPH03170226 A JP H03170226A JP 2317630 A JP2317630 A JP 2317630A JP 31763090 A JP31763090 A JP 31763090A JP H03170226 A JPH03170226 A JP H03170226A
Authority
JP
Japan
Prior art keywords
workpiece
circuit
ultrasonic
vibrating rod
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2317630A
Other languages
Japanese (ja)
Inventor
Fen-Guo Kao
カオ フェン―グオ
Jian-Tsuo Wan
ウァン ジィアン―ツオ
Bei-Zuin He
ヘ ベイ―ヅィン
Jian-Yu Hyuan
ヒュアン ジィアン―ユ
Hai-Hon Kao
カオ ハイ―ホン
Hon Tao Sun
スン ホン―タオ
Hon-Bin Jan
ヤン ホン―ビン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BEIJING INST OF ELECTRO MACHINING
Original Assignee
BEIJING INST OF ELECTRO MACHINING
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BEIJING INST OF ELECTRO MACHINING filed Critical BEIJING INST OF ELECTRO MACHINING
Publication of JPH03170226A publication Critical patent/JPH03170226A/en
Pending legal-status Critical Current

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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

PURPOSE: To reduce the polishing consumption of a diamond at the time of ultrasonic machining by connecting both electrodes at the output end of a pulse generating circuit to a vibrating rod and workpiece, respectively. CONSTITUTION: A vibrating rod 13 having the frequency resonant with an ultrasonic frequency applies ultrasonic machining to a workpiece 40. When a high-frequency pulse voltage is fed between the vibrating rod 13 and the workpiece 40 by a pulse generating circuit 400, sparks are generated between the vibrating rod 13 and the workpiece 40 by a shock, and electric machining is applied to the workpiece 40. The vibrating rod 13 intermittently contacts the workpiece 40, the output of the pulse voltage of the high-frequency pulse generating circuit 400 is stopped at the instant of contact, the pulse voltage is outputted when the vibrating rod 13 is separated from the workpiece 40, thereby the output consumption of the high-frequency pulse generating circuit 400 is reduced.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は一種の研磨設備に関するものであり、特にダイ
ス加工及び修整用の複合型(超音波及び電気加工を同時
に採用)ラッピング・ボリンヤに関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a kind of polishing equipment, and particularly to a composite type (employing ultrasonic and electric machining simultaneously) lapping/boriner for die processing and repair. It is.

[従来の技術コ 引延し金属線材のダイスには、普通ダイヤモンドを使い
、従来、この種の材料における研磨には超音波又は機械
的手段を採用していた。
[Prior Art] Diamond is commonly used for dies for drawn metal wires, and conventionally ultrasonic or mechanical means have been employed for polishing this type of material.

[発明が解決しようとする課題コ このような従来技術は加工効力が低く、超音波加工時ダ
イヤモンドの研磨消耗が大きく、加工コストか高いとい
う問題点がある。
[Problems to be Solved by the Invention] Such conventional techniques have the problems of low machining efficiency, large polishing wear of diamond during ultrasonic machining, and high machining costs.

[課題を解決するための手段] 本発明は、このような課題を解訣する目的でなされたも
ので、振動棒を有する超音波j・ランスデューサーを設
けた竪柱を設置する機体と、振動棒の下方に設けられて
工作物を支持する支持軸と、この支持軸と連結した圧力
調節機構と、超音波研磨加工用の超音波を発生ずる超音
波発生回路と、ノ(振回路及び出力松幅回路を有してパ
ルス電圧を発生するパルス発生回路とを含み、工作物を
クランビングするクランプを設け、パルス発生回路の出
力端の両極をそれぞれ振動休とクランプに接続するもの
である。
[Means for Solving the Problems] The present invention was made for the purpose of solving such problems, and includes a machine body in which a vertical column is installed with an ultrasonic transducer having a vibration rod, and a vibration A support shaft provided below the rod to support the workpiece, a pressure adjustment mechanism connected to the support shaft, an ultrasonic generation circuit that generates ultrasonic waves for ultrasonic polishing, and It includes a pulse generation circuit having a pinwidth circuit and generating a pulse voltage, is provided with a clamp for clamping the workpiece, and both poles of the output end of the pulse generation circuit are connected to the vibration damper and the clamp, respectively.

また、当該研磨機は、パルス発生回路が振動棒と工作物
との当接しない場合だけにパルス電圧を出力し、逆に振
動棒と工作物とが当接する場合にはパルス電圧を出力し
ないようにパルス発生回路を制御する波形コンバーター
回路と、二つの入力端を有し、これらの入力端を共振回
路と波形コンバーター回路にそれぞれ接続し、出力端は
出力増幅回路の入力端に接続した変調回路とを有し、前
記波形コンバーター回路の入力端は超音波発生回路の出
力端に接続する。
In addition, the polishing machine has a pulse generating circuit that outputs a pulse voltage only when the vibrating rod and the workpiece do not come into contact with each other, and conversely, when the vibrating rod and the workpiece do not come into contact with each other, it does not output a pulse voltage. a waveform converter circuit that controls the pulse generation circuit, and a modulation circuit that has two input terminals, these input terminals are connected to the resonant circuit and the waveform converter circuit, respectively, and the output terminal is connected to the input terminal of the output amplifier circuit. and an input end of the waveform converter circuit is connected to an output end of the ultrasonic generation circuit.

前記圧力調節機構はガイドケースと、ガイドケス内に積
重ね同極対向的に同軸配置した二つの永久磁石と、この
永久磁石に固定連結した支持軸と永久磁石の磁気を強く
させるため、ガイドケスの下方に固定したエレクI・ロ
・マグネッ1・とを有する。
The pressure adjustment mechanism consists of a guide case, two permanent magnets arranged coaxially and stacked inside the guide case, a support shaft fixedly connected to the permanent magnets, and a support shaft fixedly connected to the permanent magnets. It has a fixed ELEC I, RO, MAGNET 1, and the like.

前記圧力調節機構を制御する圧力調節回路は増幅器とこ
の増幅器の入力端レベルの調節装置とからなり、圧力調
節楓構のエレクトロ・マグネットを増幅器の負荷とする
The pressure regulating circuit for controlling the pressure regulating mechanism is composed of an amplifier and an input level adjusting device of the amplifier, and the electromagnet of the pressure regulating mechanism is used as a load of the amplifier.

[作用コ 本発明は超音波加工及び電気加工の手段を同時に採用し
たことを特徴とし、その原理は超音波の振動周波数と共
゜二する周波数を有する振動棒は工作物に対して超音波
加工を行い、かつ振動棒と工作物との間に3周波数のパ
ルス電圧を通じると(この時振動棒は電極の役割もはた
す)振動棒と5 工作物の間にショックによる火花が生じて、工作物に対
する電気加工を行う。振動棒は断続的に工作物と接触し
、接触の瞬間には高周波数パルス発生回路のパルス電圧
の出力を停止し、振動棒が工作物から離れたときにはパ
ルス電圧を出力することにより高周波数パルス発生回路
の出力の消耗を下げる。
[Operation] The present invention is characterized in that it simultaneously employs ultrasonic machining and electric machining means, and the principle is that a vibrating rod having a frequency that is the same as the vibration frequency of ultrasonic waves is used to perform ultrasonic machining on a workpiece. When a pulse voltage of three frequencies is passed between the vibrating rod and the workpiece (at this time, the vibrating rod also serves as an electrode), sparks are generated due to the shock between the vibrating rod and the workpiece, and the workpiece is Perform electrical processing on objects. The vibrating rod is intermittently in contact with the workpiece, and at the moment of contact, the high-frequency pulse generation circuit stops outputting the pulse voltage, and when the vibrating rod leaves the workpiece, it outputs the pulse voltage to generate high-frequency pulses. Reduces output consumption of the generating circuit.

[実施例] 第1図に基づき本発明の実施例を説明する。[Example] An embodiment of the present invention will be described based on FIG.

本発明の実施例における複合型研磨機はベース(39)
と外殻(40)とからなる機体(90)とベースに固定
した竪柱(1)に取付けられた超音波トランスデューサ
ー(12)と、この超音波トランスデューサ−(12)
に設けられた研磨用振動棒(13)と、第2図に示され
る超音波発生回路(250)を有する電気装置(41)
からなる。
The composite polishing machine in the embodiment of the present invention has a base (39)
and an outer shell (40), an ultrasonic transducer (12) attached to a vertical column (1) fixed to the base, and this ultrasonic transducer (12)
an electric device (41) having a polishing vibrating rod (13) installed in the holder and an ultrasonic generation circuit (250) shown in FIG.
Consisting of

機体(90)にはx,  y移動機構と、回転機構と、
定位機構と、揺動機構と、x,  y移動機構に取付け
たテーブル(16)とを設ける。
The fuselage (90) includes an x, y movement mechanism, a rotation mechanism,
A localization mechanism, a swing mechanism, and a table (16) attached to the x, y movement mechanism are provided.

6 テーブル(16)の下方には圧力調節機措(49)を取
付け、工作物(46)を支持する支持輔(]8)が前記
圧力調節機構(49)から伸出しており、加工時、支持
軸(18)は工作物を振動棒に接触可能に支持し、支持
軸のエネルギー転達により圧力調節機構(49)は工作
物(46)と振動棒(13)間の接触圧力を調整する。
6 A pressure adjustment mechanism (49) is attached below the table (16), and a support member (]8) that supports the workpiece (46) extends from the pressure adjustment mechanism (49), and during machining, The support shaft (18) supports the workpiece so that it can contact the vibrating rod, and the pressure adjustment mechanism (49) adjusts the contact pressure between the workpiece (46) and the vibrating rod (13) by energy transfer of the support shaft. .

この実施例中本発明の電気装置(41)に含まれている
超音波発生回路は従来の技術と同様である。この回路は
、この超音波トランスデューサ(12)に設けられた振
動棒(13)に振動エネルギーを与えるように超音波ト
ランスデューザ(12)にサイン電圧を出力する。この
回路は第2図に示すように超音波源(1.00)及び共
振ネッ1・ワーク列に接続(2 0 0)とを有し、こ
れらの間に超音波1・ランスデューサー(12)を直列
に接続し、、共振ネットワーク(2 0 0)は出力を
超音波源(1.00)にフィードバックして超音波トラ
ンスデューサ−(12)を共振ネットワーク(2 0 
0)の共振周波数で振動させる。かつ超音波源(1.0
0)は、この共振周波数と同相の信号を波形コンハータ
ー回路(300)に出力する。
The ultrasonic generation circuit included in the electrical device (41) of the present invention in this embodiment is similar to that of the prior art. This circuit outputs a sine voltage to the ultrasonic transducer (12) so as to impart vibrational energy to a vibrating rod (13) provided on the ultrasonic transducer (12). As shown in Figure 2, this circuit has an ultrasonic source (1.00) and a connection (200) to the resonant network 1 work column, between which an ultrasonic transducer (12) is connected. are connected in series, and the resonance network (2 0 0) feeds back the output to the ultrasound source (1.00) to connect the ultrasound transducer (12) to the resonance network (2 0 0).
vibrate at a resonant frequency of 0). and an ultrasonic source (1.0
0) outputs a signal in phase with this resonance frequency to the waveform converter circuit (300).

この実施例中、本発明の複合型研磨機と一般の超音波型
研磨機との主な差別は、第2図の如く電気装置(41)
が波形コンバーター回路(3 0 0)とパルス発生回
路(4 0 0)を有することである。
In this embodiment, the main difference between the composite polishing machine of the present invention and a general ultrasonic polishing machine is that the electric device (41)
has a waveform converter circuit (300) and a pulse generation circuit (400).

超音波源(100)の一つの出力端は波形コンパター回
路(3 0 0)に、そしてこの波形コンバタ一回路(
300)の出力端はパルス発生回路(400)の入力端
に、また、このパルス発生回路(400)の出力端の両
極は振動棒(13)と工作物(46)(クランプを介し
て)にそれそれ接続されている。
One output end of the ultrasonic source (100) is connected to a waveform converter circuit (300) and this waveform converter circuit (
The output end of the pulse generating circuit (400) is connected to the input end of the pulse generating circuit (400), and both poles of the output end of this pulse generating circuit (400) are connected to the vibrating rod (13) and the workpiece (46) (via clamps). It's connected.

波形コンバーター回路(3 0 0)は第3図のように
、抵抗RI+  ”+4と、定電圧ダイオードD11と
フォト・カプラD12とからなり、この同路は超音波源
(100)からのサイン波信号を受信し、このサイン波
信号が正の半周期である場合には、矩形波形信号を出力
し、負の半周期である場合にはなにも出力しない。この
矩形波信号はパルス発生回路(400)に供給され、こ
の回路(400)は単に矩形波信号がある場合たけ高周
波数パルス電圧を出力する。
As shown in Fig. 3, the waveform converter circuit (300) consists of a resistor RI+4, a constant voltage diode D11, and a photocoupler D12, and this circuit receives a sine wave signal from an ultrasonic source (100). is received, and if this sine wave signal has a positive half cycle, it outputs a rectangular waveform signal, and if it has a negative half cycle, it outputs nothing.This rectangular wave signal is sent to the pulse generation circuit ( 400), this circuit (400) simply outputs a high frequency pulsed voltage in the presence of a square wave signal.

パルス発生回路(400)は第4図に示したように共振
回路(401)と、変調波入力端及び被変調波入力端を
有する変調回路(402)と、出力増幅回路(4 0 
3)とからなり、共振回路(401)から出力した連続
パルス波を変調回路(402)の披変調波入力端に供給
し、波形コンバーター回路(3 0 0)の出力を変調
波として変調回路(4 0 2)の変調波入力端に供給
し、これにより変調回路(402)は変調波の正パルス
か人力する場合だけに高周波数パルスを出力する。本発
明において、前記変調回路(4 0 2)をマルチブラ
イヤにしても、または出力のON/OFFが制御できる
一つの増幅器にしてもよい。変調同路(4 0 2)の
出力を出力増輻器(403)の入力端に供給して入力の
波形と同型であるが増幅された出力信号を得るようにす
る。
As shown in FIG. 4, the pulse generation circuit (400) includes a resonant circuit (401), a modulation circuit (402) having a modulated wave input terminal and a modulated wave input terminal, and an output amplification circuit (400).
3), the continuous pulse wave output from the resonant circuit (401) is supplied to the modulated wave input terminal of the modulation circuit (402), and the output of the waveform converter circuit (300) is used as the modulated wave to be used as the modulation circuit ( The modulating circuit (402) outputs a high frequency pulse only when the positive pulse of the modulated wave is input manually. In the present invention, the modulation circuit (4 0 2) may be a multiblier or may be a single amplifier whose output can be controlled to turn ON/OFF. The output of the modulating circuit (4 0 2) is fed to the input end of the power amplifier (403) to obtain an amplified output signal having the same waveform as the input waveform.

振動棒(13)は超音波発生回路(2 5 0)の9 出力信号の周波数により垂直に往復振動し、かつ前記出
力信号が負の半周期の状態にある場合、振動棒(13)
は下向け運動をし、正の半周期の場合には上向け運動を
して工作物(46)との接触状態から脱する。この時パ
ルス発牛同路(400)は高周波パルス電圧を出力して
振動棒(13)と工作物(46)との間にショックによ
る火花を発生させ、これにより電気加工を行う。振動棒
(13)が下向け運動をして工作物と接触した場合に、
パルス発生回路(400)は高周波パルスを出力しなく
なり、電気加工は停止される。上述説明の通り、超音波
加工及び電気加工を同時に採用した本発明の複合型加工
では、実際には超音波加工か行われる時、電気加工は停
止状態になることができる。
The vibrating rod (13) vertically reciprocates according to the frequency of the output signal of the ultrasonic generation circuit (250), and when the output signal is in a negative half-cycle state, the vibrating rod (13)
makes a downward movement, and in the case of a positive half cycle, makes an upward movement to break out of contact with the workpiece (46). At this time, the pulse generating circuit (400) outputs a high frequency pulse voltage to generate sparks due to shock between the vibrating rod (13) and the workpiece (46), thereby performing electrical machining. When the vibrating rod (13) moves downward and comes into contact with the workpiece,
The pulse generating circuit (400) stops outputting high frequency pulses, and electrical machining is stopped. As described above, in the composite machining of the present invention that simultaneously employs ultrasonic machining and electric machining, when the ultrasonic machining is actually performed, the electric machining can be stopped.

パルス発生回路(400)中の共振回路(40])、変
調回路(402)及び出力増幅同路(403)の真体的
tj’j a及びこれらの間の接続関係等はこの技術分
野の通常知識であるから詳細な説明は略する。
The true nature of the resonant circuit (40), the modulation circuit (402), and the output amplification circuit (403) in the pulse generation circuit (400) and the connection relationship between them are generally known in this technical field. Since this is knowledge, detailed explanation will be omitted.

1 0 出力J曽幅回路(4 0 3)の出力端の両極中の一つ
は振動棒(13)に、その他のーは第6図のクランプ(
88)を介して被加工工作物(46)に接続する。クラ
ンプ(88)は第5図(A)に示したように、工作物(
46)と嵌合でぎるリング(88A)にしてもよい。ボ
ルl−(89)によりリング(88A)を工作物(46
)に固定する。
One of the two poles at the output end of the 1 0 output J width circuit (4 0 3) is connected to the vibrating rod (13), and the other - is connected to the clamp (Fig. 6).
88) to the workpiece (46). As shown in FIG. 5(A), the clamp (88) is attached to the workpiece (
46) may be used as a ring (88A) that can be fitted into the ring. The ring (88A) is attached to the workpiece (46) by the bolt (89).
).

また、第5図(B)に示されるように、クランプ(88
)をスプリング・クリップ(88B)にして王作物(4
6)の外壁を扶持するようにすることもてきる。これは
ダイス加工には特に必要である。ゴム引布で工作物(4
6)の背面の穴をふさぐことにより、狛2図の加工領域
中の肢体状研賠材料(600)が流出することを避ける
ことができる。
In addition, as shown in FIG. 5(B), a clamp (88
) to the spring clip (88B) and the king crop (4
6) It is also possible to support the outer wall. This is especially necessary for die processing. Workpiece with rubberized cloth (4
By blocking the hole on the back side of 6), it is possible to prevent the limb-shaped abrasive material (600) in the processing area of Figure 2 from flowing out.

なお、超音波トランスデューサ−(12)と竪柱(1)
との間に絶縁層を設けることが必要であり、第1図に示
したように、絶縁板又は絶縁薄膜(10)等にすること
ができる。絶縁層は超音波トランスデューサ−(12)
と研磨機各部分との絶縁のため設ける。
In addition, the ultrasonic transducer (12) and the vertical column (1)
It is necessary to provide an insulating layer between the two, and as shown in FIG. 1, it can be an insulating plate or an insulating thin film (10). The insulation layer is an ultrasonic transducer (12)
Provided to insulate each part of the polishing machine.

圧力読節機+M(49)は朶6図に示したように、電磁
コイル(6])とコア(62)とからなるエレクトロ・
マグネット(67)と、ガイドケース(63)と支持軸
(18)と、支持軸を輔受けするベアリング(65)及
び永久磁石(64)(66)とを有する。永久磁石(6
4)は支持軸(18)に固定し、他の永久磁石(66)
は永久磁石(64)の下方に同極対向に位置され、これ
らの永久磁石(64),  (66)はガイドケース(
63)内に取付けられ、これらの外径はガイドケース(
63)の内径に適合されている。ガイドケース(63)
はエレクl・口・マグネット(67)に固定連結し、ベ
アリング(65)はガイドケース(63)内に固定し、
当該圧力.刈節機++l7 (4 9 )はテーブル(
16)の下方に同定する。
As shown in Figure 6, the pressure reading machine +M (49) is an electromagnetic coil consisting of an electromagnetic coil (6]) and a core (62).
It has a magnet (67), a guide case (63), a support shaft (18), a bearing (65) that receives the support shaft, and permanent magnets (64) and (66). Permanent magnet (6
4) is fixed to the support shaft (18), and the other permanent magnet (66)
are located below the permanent magnet (64) with the same polarity, and these permanent magnets (64) and (66) are connected to the guide case (
63), and their outer diameter is the guide case (
63). Guide case (63)
is fixedly connected to the Elec l/mouth/magnet (67), and the bearing (65) is fixed inside the guide case (63).
The pressure. Harvesting machine ++l7 (4 9) is a table (
16) is identified below.

永久磁石(64),  (66)は同匪対向に置いたの
で永久磁石(64)に固定された支持軸(18)には磁
気の相互作用により上に向けるエ直線方向の支持力が与
えられ、この支持力は被加工工?物(46)に伝達され
て振動棒(13)と工作物(46)との間の圧力を保持
することができる。
Since the permanent magnets (64) and (66) are placed facing each other, the support shaft (18) fixed to the permanent magnet (64) is given an upward supporting force in the linear direction by magnetic interaction. , Is this supporting force the workpiece? The pressure between the vibrating rod (13) and the workpiece (46) can be maintained by being transmitted to the object (46).

圧力調節機構(49)を制御する圧力調節回路(500
)は第7図に示す如く直流増幅器とこの直流増幅器の入
力レベルを調節する可変抵抗R2■とスイッチ(S1)
とからなり、かつエレクトロ・マグネッl−(67)の
電磁コイル(61)を直流増幅器の負萄とする。
A pressure adjustment circuit (500) that controls the pressure adjustment mechanism (49)
) is a DC amplifier, a variable resistor R2■ for adjusting the input level of this DC amplifier, and a switch (S1) as shown in Fig. 7.
and the electromagnetic coil (61) of the electromagnetic coil (67) is used as the negative output of the DC amplifier.

スイッチ(S1)の状態を変化し、又は可逆抵抗(R2
。)の抵抗値を調節することにより、電磁コイル(61
)の電流を変化させ、この結果、振動棒(13)と工作
物(46)との間の圧力を調節することができる。振動
棒(13)が工作物(46)から離れる時、これらの両
者間距離は加工の質と効力に一定の影響を勾えlよから
、圧力調節回路(5 0 0)を通じてこの距離を複合
型加工に一番有効な状態に達するように制御する。
Change the state of the switch (S1) or change the state of the reversible resistor (R2
. ) by adjusting the resistance value of the electromagnetic coil (61
) so that the pressure between the vibrating rod (13) and the workpiece (46) can be adjusted. When the vibrating rod (13) leaves the workpiece (46), the distance between them has a certain influence on the quality and effectiveness of machining, so this distance is compounded through the pressure regulating circuit (500). Control to reach the most effective state for mold processing.

本発明の研磨機はただ超音波加工手段だけでも実施でき
る。このとき、本実施例中のスイッチ(S1)をオフに
し、振動棒(13)と工作物(46)との江力を増加し
て超音波加工の効力を高める。
The polishing machine of the present invention can be implemented using only ultrasonic processing means. At this time, the switch (S1) in this embodiment is turned off to increase the force between the vibrating rod (13) and the workpiece (46) to enhance the effectiveness of the ultrasonic machining.

本発明の実施例中、超音波発生回路(250)の出力信
号周波数は18〜4 0 K H z、出力は10〜4
00W,パルス発生回路(400)の出力信号のパルス
周期は0.2〜2μs、周波数は0.1 〜1 .  
5 M H z ,ピーク電流は1〜5.OA,ピーク
電圧は50〜200V,振動棒(]3)と工作物(46
)間の静圧(加工の開始時、加工物(46)は振動棒(
13)に接触されるが、振動棒(13)が振動をまだ開
始していない時の圧力)は0.1〜4kg,振動棒(1
3)と工作物(46)間の放電間隔(加工進行時、振動
棒が振動により工作物から離れた距離)は2〜15μm
である。
In the embodiment of the present invention, the output signal frequency of the ultrasonic generating circuit (250) is 18~40KHz, and the output is 10~4KHz.
00W, the pulse period of the output signal of the pulse generation circuit (400) is 0.2 to 2 μs, and the frequency is 0.1 to 1.
5 MHz, peak current is 1-5. OA, peak voltage is 50-200V, vibrating rod (]3) and workpiece (46
) between the static pressure (at the start of machining, the workpiece (46) is placed under the vibrating rod (
13), but the pressure when the vibrating rod (13) has not yet started vibrating is 0.1 to 4 kg;
3) The discharge interval between the workpiece (46) (the distance the vibrating rod is separated from the workpiece due to vibration during machining) is 2 to 15 μm.
It is.

なお、本発明において、上述の実施例では電気加工は断
続的に動作するようにしたが、連続的に動作するように
してもよい。この場合には、高周波パルスの制御(モジ
ュレーティング)回路部分を設置する必要なく、即ち、
波形コンハーター回] 4 路(3 0 0)及び変調回路(4 0 2)を略し、
共振回路(401.)の出力端は出力増幅器(403)
の入力端に直接接続する。この実施例は、回路の構造か
簡単になるが、加工時ショー1・電流が大き《なって出
力の消耗か増える不利益かある。
In addition, in the present invention, although the electrical machining is operated intermittently in the above-described embodiment, it may be operated continuously. In this case, there is no need to install a control (modulating) circuit part for high frequency pulses, i.e.
Waveform converter circuit] 4 circuit (3 0 0) and modulation circuit (4 0 2) are abbreviated,
The output end of the resonant circuit (401.) is an output amplifier (403).
Connect directly to the input end of the Although this embodiment simplifies the circuit structure, it has the disadvantage that the current increases during machining, resulting in increased output consumption.

[発明の効果] 従来の技術と比べると、本発明は以下の利点を有する。[Effect of the invention] Compared with the conventional technology, the present invention has the following advantages.

電気加工及び超音波加工の複合型加工は加工効率が従来
の加工の三倍以上も高められる利点を有する。
The combined processing of electric processing and ultrasonic processing has the advantage that the processing efficiency can be increased by more than three times that of conventional processing.

圧力調節機構により振動棒と工作物間の圧力を容易、精
確に制御することができる利点も有する。
Another advantage is that the pressure between the vibrating rod and the workpiece can be easily and accurately controlled by the pressure adjustment mechanism.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例の構戊図、 第2図は本発明の実施例の電気回路のブロック回路図、 第3図は波形コンバーター回路図、 第4図はパルス発生回路図、 第5図(A),  (B)は加工物に電気を通じる1 
5 ためのクランプの実施例を示す斜視図、第6図は圧力調
節機構の要部断面図、 第7図は圧力調節回路図−Cある。 1 ・・ 竪柱 10 ・・・ 絶縁板 12 ・・・ 超音波トランスデューサ−13 ・・・
 振動棒 18 ・・・ 支持軸 46 ・・・ 工作物 49 ・・・ 圧力調節機構 63 ・・・ ガイドケース 64.66  ・・・ 永久磁石 67 ・・・ エレクI・口・マグネッ1・88 ・・
・ クランプ 88A  ・・・ 金属リング 88B  ・・・ スプリング・クリップ90 ・・・
 機体 250 ・・・ 超音波発生回路 300 ・・・ 超音波源 400 ・・・ パルス発生回路 ] 6 401 402 403 500 共振回路 変調回路 出力増幅器 圧力調節回路
Fig. 1 is a block diagram of an embodiment of the present invention; Fig. 2 is a block circuit diagram of an electric circuit of an embodiment of the invention; Fig. 3 is a waveform converter circuit diagram; Fig. 4 is a pulse generation circuit diagram; Figures 5 (A) and (B) show electricity passing through the workpiece.
5 is a perspective view showing an embodiment of the clamp, FIG. 6 is a sectional view of the main part of the pressure adjustment mechanism, and FIG. 7 is a pressure adjustment circuit diagram-C. 1... Vertical column 10... Insulating plate 12... Ultrasonic transducer-13...
Vibration rod 18... Support shaft 46... Workpiece 49... Pressure adjustment mechanism 63... Guide case 64, 66... Permanent magnet 67... Elec I/Mouth/Magnet 1/88...
・ Clamp 88A ... Metal ring 88B ... Spring clip 90 ...
Aircraft body 250 ... Ultrasonic generation circuit 300 ... Ultrasonic source 400 ... Pulse generation circuit] 6 401 402 403 500 Resonance circuit modulation circuit output amplifier pressure adjustment circuit

Claims (6)

【特許請求の範囲】[Claims] (1)振動棒を有する超音波トランスデューサーを設け
た竪柱を設置する機体と、振動棒の下方に設けられて工
作物を支持する支持軸と、この支持軸に連結した圧力調
節機構と、超音波研磨加工用超音波を発生する超音波発
生回路と、共振回路及び出力増幅回路を有してパルス電
圧を発生するパルス発生回路とを含み、パルス発生回路
の出力端の両極をそれぞれ振動棒と工作物に接続するこ
とを特徴とする複合型研磨機。
(1) A machine body in which a vertical column equipped with an ultrasonic transducer having a vibration rod is installed, a support shaft provided below the vibration rod to support a workpiece, and a pressure adjustment mechanism connected to this support shaft; It includes an ultrasonic generation circuit that generates ultrasonic waves for ultrasonic polishing, and a pulse generation circuit that has a resonance circuit and an output amplification circuit and generates a pulse voltage, and connects both poles of the output end of the pulse generation circuit to a vibrating rod. A composite polishing machine characterized by being connected to the workpiece.
(2)前記複合型研磨機は、パルス発生回路が振動棒と
工作物との当接しない場合だけにパルス電圧を出力し、
逆に振動棒と工作物とが当接する場合にはパルス電圧を
出力しないようにパルス発生回路を制御する波形コンバ
ーター回路と、二つの入力端を有し、これらの入力端を
共振回路と波形コンバーター回路にそれぞれ接続し、出
力端は出力増幅回路の入力端に接続した変調回路とを有
し、上記波形コンバーター回路の入力端は超音波源の出
力端に接続することを特徴とする前記特許請求の範囲(
1)に記載した複合型研磨機。
(2) The composite polishing machine outputs a pulse voltage only when the vibrating rod and the workpiece are not in contact with the pulse generating circuit,
Conversely, it has a waveform converter circuit that controls the pulse generation circuit so as not to output pulse voltage when the vibrating rod and the workpiece come into contact, and two input terminals, and these input terminals are connected to the resonance circuit and the waveform converter circuit. and a modulation circuit connected to the circuit, the output end of which is connected to the input end of the output amplification circuit, and the input end of the waveform converter circuit is connected to the output end of the ultrasonic source. range (
The composite polishing machine described in 1).
(3)前記圧力調節機構はガイドケースと、ガイドケー
ス内に積重ね同極対向して同軸に置いた二つの永久磁石
を含み、 一方の永久磁石に支持軸が固定され、永久磁石の磁気を
強くさせるためガイドケースの下方に固定したエレクト
ロ・マグネットを有することを特徴とする前記特許請求
の範囲(2)に記載した複合型研磨機。
(3) The pressure adjustment mechanism includes a guide case and two permanent magnets stacked inside the guide case and placed coaxially with the same polarity facing each other.A support shaft is fixed to one of the permanent magnets, and the magnetism of the permanent magnet is strengthened. 2. The composite polishing machine according to claim 2, further comprising an electro-magnet fixed below the guide case to allow the polishing to occur.
(4)前記圧力調節機構を制御する圧力調節回路は増幅
器とこの増幅器の入力端電圧の調節装置とからなり、圧
力調節機構のエレクトロ・マグネットを増幅器の負荷と
することを特徴とする前記特許請求の範囲(3)に記載
した複合型研磨機。
(4) The pressure regulating circuit for controlling the pressure regulating mechanism includes an amplifier and an input end voltage regulating device of the amplifier, and the electromagnet of the pressure regulating mechanism is used as a load of the amplifier. The compound polishing machine described in scope (3).
(5)前記超音波トランスデューサーと竪柱との間に絶
縁用の絶縁板を有することを特徴とする特許請求の範囲
(2)又は(3)又は(4)の複合型研磨機。
(5) The composite polishing machine according to claim (2), (3), or (4), further comprising an insulating plate for insulation between the ultrasonic transducer and the vertical column.
(6)前記パルス発生回路はその出力電圧をクランプを
介して工作物に通じ、このクランプは工作物をとりまく
スプリング・クリップまたは工作物に嵌合しかつボルト
により工作物に固定される金属リングであることを特徴
とする前記特許請求の範囲(1)又は(5)の複合型研
磨機。
(6) The pulse generating circuit passes its output voltage to the workpiece through a clamp, which clamp is a spring clip surrounding the workpiece or a metal ring that fits over the workpiece and is secured to the workpiece by a bolt. The composite polishing machine according to claim (1) or (5), characterized in that:
JP2317630A 1989-11-20 1990-11-20 Composite pollshing machine Pending JPH03170226A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP89219785 1989-11-20
CN89219785.4 1989-11-20

Publications (1)

Publication Number Publication Date
JPH03170226A true JPH03170226A (en) 1991-07-23

Family

ID=8202543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2317630A Pending JPH03170226A (en) 1989-11-20 1990-11-20 Composite pollshing machine

Country Status (1)

Country Link
JP (1) JPH03170226A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013094861A (en) * 2011-10-28 2013-05-20 Fdk Corp Polishing tool and surface treatment device using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013094861A (en) * 2011-10-28 2013-05-20 Fdk Corp Polishing tool and surface treatment device using the same

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