JPH0426058B2 - - Google Patents
Info
- Publication number
- JPH0426058B2 JPH0426058B2 JP58204711A JP20471183A JPH0426058B2 JP H0426058 B2 JPH0426058 B2 JP H0426058B2 JP 58204711 A JP58204711 A JP 58204711A JP 20471183 A JP20471183 A JP 20471183A JP H0426058 B2 JPH0426058 B2 JP H0426058B2
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic head
- counterbalance
- ultrasonic
- head
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005284 excitation Effects 0.000 claims description 6
- 238000002604 ultrasonography Methods 0.000 claims description 6
- 230000005484 gravity Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
- B23Q11/0032—Arrangements for preventing or isolating vibrations in parts of the machine
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
- G01N29/265—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the sensor relative to a stationary material
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/18—Methods or devices for transmitting, conducting or directing sound
- G10K11/26—Sound-focusing or directing, e.g. scanning
- G10K11/35—Sound-focusing or directing, e.g. scanning using mechanical steering of transducers or their beams
- G10K11/352—Sound-focusing or directing, e.g. scanning using mechanical steering of transducers or their beams by moving the transducer
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
Description
【発明の詳細な説明】
技術分野
本発明は、超音波顕微鏡において試料を走査す
るために圧電トランスジユーサを有する超音波ヘ
ツドを直線的に振動させる加振装置に関するもの
である。TECHNICAL FIELD The present invention relates to an excitation device for linearly vibrating an ultrasonic head having a piezoelectric transducer in order to scan a sample in an ultrasonic microscope.
従来技術
従来の加振装置として、例えば第１図に示すよ
うに、圧電トランスジユーサを有する超音波ヘツ
ド１を支持棒２の一端部に保持し、この支持棒２
の他端部を、磁石３、ヨーク４およびポールピー
ス５を有する磁気回路の磁束を横切るようにヨー
ク４とポールピース５との間に巻装したボイスコ
イル６に連結すると共に、板ばね７によりボイス
コイル６の軸方向で、超音波ヘツド１からの超音
波の投射方向と直交する方向に変位可能に支持し
て、ボイスコイル６に所要の交番電流を供給する
ことにより超音波ヘツド１を振動させるようにし
たものがある。Prior Art As a conventional vibration excitation device, for example, as shown in FIG. 1, an ultrasonic head 1 having a piezoelectric transducer is held at one end of a support rod 2.
The other end is connected to a voice coil 6 wound between the yoke 4 and the pole piece 5 so as to cross the magnetic flux of the magnetic circuit having the magnet 3, the yoke 4, and the pole piece 5, and is connected by a leaf spring 7. The ultrasonic head 1 is vibrated by supporting the voice coil 6 so that it can be displaced in the axial direction in a direction orthogonal to the projection direction of the ultrasonic waves from the ultrasonic head 1, and supplying a required alternating current to the voice coil 6. There is something that lets you do it.
しかし、第１図に示す従来の加振装置において
は、超音波ヘツド１、支持棒２およびボイスコイ
ル６の振動に応じて重心が移動し、これにより加
振装置全体が縦方向、例えば超音波ヘツド１から
の超音波の投射方向に振動して焦点位置がその縦
振動に応じて変化すると共に、この縦振動が試料
台等にも伝達されるために解像度の高い超音波像
が得られない欠点がある。 However, in the conventional vibration excitation device shown in FIG. Ultrasonic waves from head 1 vibrate in the projection direction, and the focal position changes according to the longitudinal vibrations, and this longitudinal vibration is also transmitted to the sample stage, etc., making it impossible to obtain high-resolution ultrasonic images. There are drawbacks.
発明の目的
本発明の目的は、上述した欠点を除去し、縦方
向の不所望な振動が発生しないよう適切に構成し
た超音波顕微鏡の加振装置を提供しようとするも
のである。OBJECTS OF THE INVENTION It is an object of the present invention to eliminate the above-mentioned drawbacks and to provide a vibrating device for an ultrasound microscope that is suitably constructed so that undesired vertical vibrations do not occur.
発明の概要
本発明の加振装置は、圧電トランスジユーサを
有する超音波ヘツドと、これとほゞ同質量のカウ
ンタバランスとを同軸上でこれら超音波ヘツドと
カウンタバランスとの中央を中心として対称に振
動させる駆動機構を具えることを特徴とするもの
である。Summary of the Invention The vibration excitation device of the present invention comprises an ultrasonic head having a piezoelectric transducer and a counterbalance having substantially the same mass as the ultrasonic head, which are coaxially arranged symmetrically about the center of the ultrasonic head and the counterbalance. The device is characterized in that it includes a drive mechanism that vibrates.
実施例
第２図は本発明の加振装置の一例の構成を示す
ものである。この加振装置は、第１図に示すもの
を左右対称に配置して構成したもので、ヨーク８
は左右対称な形状を有する一体のものを用いてい
る。支持棒２，２′、磁石３，３′、ポールピース
５，５′、ボイスコイル６，６′および板ばね７，
７′はそれぞれほゞ同一形状で同質量のものを用
い、また支持棒２′の先端部には、支持棒２の先
端部に保持する超音波ヘツド１とほゞ同質量のカ
ウンタバランス９を取付ける。このようにして、
ボイスコイル６および６′に振幅の等しい所要の
交番電流を供給して、超音波ヘツド１およびカウ
ンタバランス９を同軸上で互いに反対方向に対称
に振動させる。Embodiment FIG. 2 shows the configuration of an example of the vibration device of the present invention. This vibration device is constructed by symmetrically arranging the devices shown in FIG.
uses an integral piece with a symmetrical shape. Support rods 2, 2', magnets 3, 3', pole pieces 5, 5', voice coils 6, 6', and leaf springs 7,
7' have approximately the same shape and the same mass, and a counterbalance 9 having approximately the same mass as the ultrasonic head 1 held at the tip of the support rod 2 is attached to the tip of the support rod 2'. Install. In this way,
A required alternating current of equal amplitude is supplied to the voice coils 6 and 6' to vibrate the ultrasonic head 1 and the counterbalance 9 symmetrically on the same axis in opposite directions.
このようにすれば、加振装置の重心は、常に超
音波ヘツド１とカウンタバランス９との中央の位
置Ｐに維持されるから、重心の移動による不所望
な縦方向の振動の発生を有効に防止することがで
き、常に解像度の高い超音波像を得ることができ
る。 In this way, the center of gravity of the vibrating device is always maintained at the center position P between the ultrasonic head 1 and the counterbalance 9, thereby effectively preventing the generation of undesired vertical vibrations due to movement of the center of gravity. This makes it possible to always obtain high-resolution ultrasound images.
なお、第２図においてカウンタバランス９は、
圧電トランスジユーサを有する超音波ヘツドをも
つて構成することもできる。このようにすれば、
同時に二つの超音波像を得ることができる。ま
た、超音波ヘツドを所定の方向に振動させる手段
は、上述ししたボイスコイルを用いる以外、圧電
バイモルフ板、偏心カム、電磁石等を用いて構成
することもできる。 In addition, in FIG. 2, the counterbalance 9 is
It can also be constructed with an ultrasonic head having a piezoelectric transducer. If you do this,
Two ultrasound images can be obtained at the same time. Further, the means for vibrating the ultrasonic head in a predetermined direction may be constructed using a piezoelectric bimorph plate, an eccentric cam, an electromagnet, etc., in addition to using the voice coil described above.
発明の効果
以上述べたように、本発明においては、試料に
超音波を投射するための圧電トランスジユーサを
有する超音波ヘツドと、これとほゞ同質量のカウ
ンタバランスとを、同軸上でそれらの中央を中心
として所定の走査方向で対称に振動させるように
したから、重心の移動がなく、したがつて加振装
置全体の不所望な縦方向の振動の発生を有効に防
止でき、常に高解像度の超音波像を得ることがで
きる。Effects of the Invention As described above, in the present invention, an ultrasonic head having a piezoelectric transducer for projecting ultrasonic waves onto a sample and a counterbalance having approximately the same mass as the ultrasonic head are coaxially connected to each other. Since the vibration is symmetrical in a predetermined scanning direction with the center of the vibrating device as its center, there is no movement of the center of gravity, which effectively prevents the generation of undesirable vertical vibrations of the entire vibrating device, and the High-resolution ultrasound images can be obtained.
第１図は従来の加振装置の構成を示す断面図、
第２図は本発明の加振装置の一例の構成を示す断
面図である。
１…超音波ヘツド、２，２′…支持棒、３，
３′…磁石、５，５′…ポールピース、６，６′…
ボイスコイル、７，７′…板ばね、８…ヨーク、
９…カウンタバランス。
Figure 1 is a cross-sectional view showing the configuration of a conventional vibration excitation device.
FIG. 2 is a sectional view showing the configuration of an example of the vibration device of the present invention. 1... Ultrasonic head, 2, 2'... Support rod, 3,
3'...Magnet, 5,5'...Pole piece, 6,6'...
Voice coil, 7, 7'... leaf spring, 8... yoke,
9...Counter balance.
Claims (1)
と、これとほゞ同質量のカウンタバランスとを、
同軸上でこれら超音波ヘツドとカウンタバランス
との中央を中心として対称に振動させる駆動機構
を具えることを特徴とする超音波顕微鏡の加振装
置。1. An ultrasonic head having a piezoelectric transducer and a counterbalance of approximately the same mass as the ultrasonic head,
A vibration excitation device for an ultrasound microscope, comprising a drive mechanism that vibrates symmetrically about the center of the ultrasound head and the counterbalance on the same axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58204711A JPS6097253A (en) | 1983-11-02 | 1983-11-02 | Vibration applying apparatus for ultrasonic microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58204711A JPS6097253A (en) | 1983-11-02 | 1983-11-02 | Vibration applying apparatus for ultrasonic microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6097253A JPS6097253A (en) | 1985-05-31 |
| JPH0426058B2 true JPH0426058B2 (en) | 1992-05-06 |
Family
ID=16495042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58204711A Granted JPS6097253A (en) | 1983-11-02 | 1983-11-02 | Vibration applying apparatus for ultrasonic microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6097253A (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4781067A (en) * | 1987-04-30 | 1988-11-01 | Sonoscan, Inc. | Balanced scanning mechanism |
| US7478571B2 (en) * | 2006-04-07 | 2009-01-20 | Bio-Rad Laboratories, Inc. | Balancing means for high-speed scanning |
| CN101879688A (en) * | 2010-07-28 | 2010-11-10 | 齐齐哈尔二机床(集团)有限责任公司 | Balancing motion shock-absorbing device for heavy punch |
| FR3016045B1 (en) * | 2014-01-02 | 2017-09-29 | Aircelle Sa | DEVICE AND ASSEMBLY FOR NON-DESTRUCTIVE CONTROL OF A COMPOSITE WORKPIECE, AND NON-DESTRUCTIVE CONTROL METHOD OF ULTRASOUND COMPOSITE WORKPIECE IN TRANSMISSION |
| CN108655805A (en) * | 2018-05-07 | 2018-10-16 | 芜湖撼江智能科技有限公司 | A kind of Metal Cutting Machine Tool being convenient to clean |
| CN109660101A (en) * | 2019-01-25 | 2019-04-19 | 信利光电股份有限公司 | A kind of linear oscillator mould group |
| KR102036058B1 (en) * | 2019-05-10 | 2019-10-24 | 부경대학교 산학협력단 | Apparatus for Fast scanning with scanning acoustic microscopy |
-
1983
- 1983-11-02 JP JP58204711A patent/JPS6097253A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6097253A (en) | 1985-05-31 |
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