JPS6097256A - Vibration applying apparatus of ultrasonic microscope - Google Patents
Vibration applying apparatus of ultrasonic microscopeInfo
- Publication number
- JPS6097256A JPS6097256A JP58204714A JP20471483A JPS6097256A JP S6097256 A JPS6097256 A JP S6097256A JP 58204714 A JP58204714 A JP 58204714A JP 20471483 A JP20471483 A JP 20471483A JP S6097256 A JPS6097256 A JP S6097256A
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- voice coil
- ultrasonic
- yoke
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004907 flux Effects 0.000 claims description 5
- 230000004304 visual acuity Effects 0.000 abstract 1
- 238000002604 ultrasonography Methods 0.000 description 6
- 230000005284 excitation Effects 0.000 description 3
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
- G01N29/265—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the sensor relative to a stationary material
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/18—Methods or devices for transmitting, conducting or directing sound
- G10K11/26—Sound-focusing or directing, e.g. scanning
- G10K11/35—Sound-focusing or directing, e.g. scanning using mechanical steering of transducers or their beams
- G10K11/352—Sound-focusing or directing, e.g. scanning using mechanical steering of transducers or their beams by moving the transducer
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
Abstract
Description
【発明の詳細な説明】
（技術分野）
本発明は、超音波顕微鏡において試料を走査するために
圧電トランスジューサを有する超音波ヘッドを直線的に
振動させる加振装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to an excitation device that linearly vibrates an ultrasonic head having a piezoelectric transducer in order to scan a sample in an ultrasonic microscope.
（従来技術）
従来の加振装置として、例えば第１図に示すように、圧
電トランスジューサを有する超音波ヘッド１を支持棒２
の一端部に着脱自在に保持し、この支持棒２の他端部を
、磁石８、ヨーク４およびポールピース５を有する磁気
回路の磁束を横切るようにヨーク４とポールピース６と
の間に笹装したボイスコイル６に連結すると共に、板は
ね７によりボイスコイル６の軸方向で、超音波ヘッド１
からの超音波の投射方向と直交する方向に変位可能に支
持して、ボイスコイル６に所要の交番電流を供給するこ
とにより超音波ヘッド１を振動させるようにしたものが
ある。(Prior Art) As a conventional vibration device, for example, as shown in FIG. 1, an ultrasonic head 1 having a piezoelectric transducer is mounted on a support rod 2.
The support rod 2 is held detachably at one end, and the other end of the support rod 2 is inserted between the yoke 4 and the pole piece 6 so as to cross the magnetic flux of the magnetic circuit having the magnet 8, the yoke 4, and the pole piece 5. The ultrasonic head 1 is connected to the equipped voice coil 6, and the plate spring 7 connects the ultrasonic head 1 to the
There is one in which the ultrasonic head 1 is supported so as to be displaceable in a direction orthogonal to the direction in which ultrasonic waves are projected from the head, and the ultrasonic head 1 is vibrated by supplying a required alternating current to the voice coil 6.
しかし、第１図に示す従来の加振装置においては、超音
波ヘッド１を支持する支持棒２を、超音波ヘッドｌの片
側において一枚の板ばね７によってその長手方向に振動
可能に支持しているため、振動範囲すなわち走査領域が
大きいと、走査方向と直交する超音波の投射方向に不所
望な振動が生じて、超音波ヘッド１と試料との間の距離
が変動し、解像変の良好な幅音波像が得られない不具合
があると共に、超音波ヘッドｌの先端が磁気回路を構成
するヨーク４から穿出していないために、観察する試料
が大きいと、これが加振装置の外匣に当接するため試料
台上に載置できず、このため所望の領域を走査できない
等の不具合がある。However, in the conventional vibration device shown in FIG. 1, the support rod 2 that supports the ultrasonic head 1 is supported by a single plate spring 7 on one side of the ultrasonic head l so that it can vibrate in the longitudinal direction. Therefore, if the vibration range, that is, the scanning area is large, undesired vibrations will occur in the ultrasound projection direction perpendicular to the scanning direction, causing the distance between the ultrasound head 1 and the sample to fluctuate, resulting in resolution changes. In addition to the problem of not being able to obtain a good width sound wave image, the tip of the ultrasonic head l does not protrude from the yoke 4 that constitutes the magnetic circuit. Since it comes into contact with the outer box, it cannot be placed on the sample stage, which causes problems such as the inability to scan a desired area.
（発明の目的）
本発明の目的は、上述した不具合を解決し、試料の大き
さに制限を受けることなく、その所望の領域の超音波像
を高解像度で得られるよう適切に構成した超音波顕微鏡
の加振装置を提供しようとするものである。(Objective of the Invention) The object of the present invention is to solve the above-mentioned problems and to provide an ultrasonic wave appropriately configured to obtain an ultrasonic image of a desired region with high resolution without being limited by the size of the sample. The present invention aims to provide a vibrating device for a microscope.
（発明の概要）
本発明の加振装置は、両端部において長手方向に変位可
能に支持された軸に、該軸の周囲を置うように巻装した
ボイスコイルを保持すると共に圧電トランスジューサを
有する超音波ヘッドを保持し、前記ボイスコイルの内外
に該ボイスコイルを横切る磁束を発生させる磁気回路を
構成する磁性部材を配置し、前記超音波ヘッドの先端を
超音波の投射方向にみて前記磁気回路を構成する磁性部
材よりも突出させたことを特徴とするものである。(Summary of the Invention) The vibration device of the present invention holds a voice coil wound around a shaft supported at both ends so as to be displaceable in the longitudinal direction, and has a piezoelectric transducer. A magnetic member constituting a magnetic circuit that holds an ultrasonic head and generates a magnetic flux that crosses the voice coil is disposed inside and outside the voice coil, and when the tip of the ultrasonic head is viewed in the ultrasound projection direction, the magnetic circuit It is characterized by being made to protrude more than the magnetic member constituting the magnetic member.
（実 施 例）
第２図Ａ〜Ｄは本発明の加振装置の一例の構成を示すも
のである。本例では、軸１１の一端部にその長手方向に
延在して直交する板状の支持枠１２を取付け、この支持
枠１２に軸１１の周囲を諸うようにボイスコイル１３を
巻装すると共に１軸１】の長手方向と直交する方向が超
音波の投射方向となるように圧電トランスジューサを有
する超音波ヘッド１４を取付ける。軸１１の他端部は、
超音波ヘッド１４の先端が超音波の投射方向にみて、一
体に取付けたポールピース１５、磁石１６およびヨーク
１７よりも咲出するように、これらポールピース］５、
磁石１６およびヨーク１７を貫通して延在させ、そのヨ
ーク１７がら突出する端部、を析ばね１８を介して長手
方向に変位可能にヨーク１７に取付ける。このヨーク１
７には、超音波ヘッド１４を取付けた部分を除くボイス
コイル１８の′外周に沿ってこれと対向するヨーク１９
を取付け、このヨーク１９に支持枠１２を取付けた側の
軸１１の端部を板ばね２０を介して長手方向に変位可能
に取付ける。また、磁石１６から発生する磁束が、ボイ
スコイル１８を横切るように、ボイスコイル１８の内側
で、超音波ヘッド１４を取付けた部分を除くボイスコイ
ル１８と支持枠１２とによって画成される三つの空間に
、ボイスコイル１８を介してヨーク１９と対向するよう
にヨーク２１ａ、２１ｂおよび２１Ｃをボールビーフ１
５に連結して延在させる。(Embodiment) FIGS. 2A to 2D show the configuration of an example of the vibration device of the present invention. In this example, a plate-shaped support frame 12 is attached to one end of the shaft 11, extending in the longitudinal direction and perpendicular to the shaft, and a voice coil 13 is wound around the support frame 12 around the shaft 11. The ultrasonic head 14 having a piezoelectric transducer is mounted so that the projection direction of the ultrasonic wave is a direction perpendicular to the longitudinal direction of the ultrasonic head 14 and the longitudinal direction of the axes 1 and 1. The other end of the shaft 11 is
These pole pieces are arranged so that the tip of the ultrasonic head 14 extends beyond the integrally attached pole piece 15, magnet 16, and yoke 17 when viewed in the ultrasonic projection direction.
It extends through the magnet 16 and the yoke 17, and its end protruding from the yoke 17 is attached to the yoke 17 via a spring 18 so as to be displaceable in the longitudinal direction. This yoke 1
7 includes a yoke 19 facing along the outer periphery of the voice coil 18 excluding the portion where the ultrasonic head 14 is attached.
The end of the shaft 11 on the side to which the support frame 12 is attached is attached to the yoke 19 via a leaf spring 20 so as to be displaceable in the longitudinal direction. In addition, the magnetic flux generated from the magnet 16 crosses the voice coil 18 in three areas defined by the voice coil 18 and the support frame 12, excluding the part where the ultrasonic head 14 is attached, inside the voice coil 18. The yokes 21a, 21b and 21C are arranged in the space so as to face the yoke 19 via the voice coil 18.
5 and extend it.
第２図Ａはボイスコイル１８．ヨーク１７．１９および
板ばね１８．２０を軸１１に沿った断面で示す正面図で
、第２１ＪＢは軸１１を中心とする一方の側の平面図を
、第２図Ｏは第２図ＡのＩ−’Ｉ線断面図を、第２図り
は左側面図を表わす。Figure 2A shows the voice coil 18. 21JB is a front view showing the yoke 17.19 and the leaf spring 18.20 in cross section along the axis 11, FIG. 21JB is a plan view of one side centered on the axis 11, and FIG. A sectional view taken along line I-'I is shown, and the second figure shows a left side view.
このようにして、ボイスコイル１Ｂに所要の交番電流を
供給することにより、軸１１．支持枠１２、ボイスコイ
ル１Ｂと一体に超音波ヘッド１４をＣ音波の投射方向と
直交する方向に振動させて超音波ヘッド１４の下方に配
置される試料を走査する。In this way, by supplying the required alternating current to the voice coil 1B, the shaft 11. The ultrasonic head 14 is vibrated together with the support frame 12 and the voice coil 1B in a direction perpendicular to the projection direction of the C-sonic waves to scan a sample placed below the ultrasonic head 14.
（発明の効果）
以上、実施例で説明したように、本発明によればボイス
コイル１８および超音波ヘッド１４を支持枠１２を介し
て保持する軸１１を、その両端部において長手方向に変
位可能に板ばね１８，２０を介してヨーク１７．１９に
支持したから、走査領域が大きくても、超音波の投射方
向での不所望な振動を有効に防止することができると共
に、コンパクトにできる。また、超音波ヘッド１４の先
端を、こわを駆動するボイスフィル１Ｂおよび磁気回路
を構成するヨーク１７．１９よりも超音波の投射方向に
みて突出させたから、試料が大きくてもこれを試料台上
に有効に載置することができる。したがって、試料の大
きさに制限されることなく、その所望の領域の超音波を
高解像度で得ることができ、本発明の目的を達成するこ
とができる。(Effects of the Invention) As described above in the embodiments, according to the present invention, the shaft 11 that holds the voice coil 18 and the ultrasonic head 14 via the support frame 12 can be displaced in the longitudinal direction at both ends thereof. Since it is supported by the yokes 17 and 19 via leaf springs 18 and 20, even if the scanning area is large, it is possible to effectively prevent undesired vibrations in the direction of projection of the ultrasonic waves and to make it compact. In addition, since the tip of the ultrasonic head 14 is made to protrude in the ultrasound projection direction beyond the voice fill 1B that drives the stiffness and the yoke 17.19 that constitutes the magnetic circuit, even if the sample is large, it cannot be placed on the sample stage. It can be placed effectively in Therefore, it is possible to obtain ultrasonic waves in a desired region with high resolution without being limited by the size of the sample, and the object of the present invention can be achieved.
第１図は従来の加振装置の構成を示す断面図、第２図Ａ
−Ｄは本発明の加振装置の一例の構成を示す図である。
１１・・・軸 １２・・・支持枠
１８・・・ボイスコイル １４・・・超音波ヘッド１５
・・・ポールピース １−６・・・磁石１７・・・ヨー
ク １８・・・板ばね
１９・・・ヨーク ２０・・・板ばね
２１ａ、２１ｂ、２１０ ＝・・ヨー り。
第１図
手続補正書
昭和５９年４− 月１８ 日
１、事件の表示
昭和５８年 特 許 願第２０４．７１４ 号２、発明
の名称
超音波顕微鏡の加振装置
３、補正をする者
事件との関係 特許出願人
（０３７） オリンパス光学工業株式会社５゜
６、補正の対象 明細書の「特許請求の範囲」 「発明
の詳細な説明ｊの欄７、補正の内容 （別紙の通り）
１、明細書簡１頁第ａ〜１８行の特許請求の範囲を下記
のとおり訂正する。
［２、特許請求の範囲
１ 両端部において長手方向に変位可能に支持された軸
に、該軸の円囲を覆うように巻装したボイスコイルを保
持すると共に圧電トランスジューサを有する超音波ヘッ
ドを保持し、前記ボイスフィルの内外に該ボイスコイル
を横切る磁束を発生だせる磁気回路を構成する磁性部材
を配置し、前記超音波ヘッドの先端を前記磁気回路を構
成する磁性部材よりも超音波の投射方向に突出させたこ
とを特徴とする超音波顕微鏡の加振装置。」
、２．明細書第１頁第１７行の「圧電トランスジューサ
を有する」を「超音波を送受信あるいは受信するトラン
スジューサと超音波を集束する音響レンズとから構成さ
れる」に訂正する０３、同第Φ頁第３〜４行の「超音波
の投射方向にみて」を削除し、
同頁第５行の「突出」の前に「超音波の投射方向に」【
加入する。
４同第６頁第９竹の「］２を介して保持する」を「１２
に直接取付けることによりコンパクトにすることができ
、更に支持枠１２を介してボイスコイル１８および超音
波ヘッド１４を保持する」に訂正し、
同頁第１３〜１４行の「できる−ｍ−できる。」′４ｒ
：ｒできる。」に訂正し、
同頁第１７行の「みて」を削除する。Figure 1 is a sectional view showing the configuration of a conventional vibration excitation device, Figure 2A
-D is a diagram showing the configuration of an example of the vibration device of the present invention. 11... Axis 12... Support frame 18... Voice coil 14... Ultrasonic head 15
... Pole piece 1-6... Magnet 17... Yoke 18... Leaf spring 19... Yoke 20... Leaf springs 21a, 21b, 210 =... Yaw. Figure 1 Procedural Amendment Document April 18, 1982 1. Indication of the Case 1988 Patent Application No. 204.714 2. Title of Invention Vibration Device for Ultrasonic Microscope 3. Person Making the Amendment Relationship between Patent Applicant (037) Olympus Optical Industry Co., Ltd. 5゜6, Subject of amendment "Claims" in the specification "Detailed Description of the Invention J, Column 7, Contents of amendment (as attached) 1. The claims in lines a to 18 of page 1 of the specification letter are amended as follows: [2.Claim 1 A shaft supported at both ends so as to be displaceable in the longitudinal direction, with a circumference of the shaft A voice coil wound over the voice coil is held and an ultrasonic head having a piezoelectric transducer is held, and magnetic members constituting a magnetic circuit capable of generating magnetic flux across the voice coil are arranged inside and outside the voice fill, and the 2. An excitation device for an ultrasonic microscope, characterized in that the tip of the ultrasonic head protrudes in the ultrasonic projection direction beyond the magnetic member constituting the magnetic circuit.'',2. 03, page 1, line 17 of the specification, "comprising a piezoelectric transducer" is corrected to "composed of a transducer that transmits and receives ultrasonic waves, and an acoustic lens that focuses the ultrasonic waves," page Φ 3 of the same specification. ~Delete “Looking in the direction of ultrasound projection” in line 4, and add “in the direction of ultrasound projection” before “protrusion” in line 5 of the same page.
join. 4 Same page 6, No. 9 Bamboo, “hold through 2” is changed to “12
It can be made compact by directly attaching it to the holder, and the voice coil 18 and the ultrasonic head 14 can be held through the support frame 12.'', and the line 13-14 of the same page has been corrected to ``Can-m-Can. '4r
:r I can. ” and delete “Mite” from line 17 of the same page.
Claims (1)
に、該軸の周囲を雪うように巻装したボイスコイルを保
持すると共に圧電トランスジューサを有する超音波ヘッ
ドを保持し、前記ボイスフィルの内外に該ボイスコイル
を横切る磁束を発生させる磁気回路を構成する磁性部材
を配置し、前記超音波ヘッドの先端を超音波の投射方向
にみて前記磁気回路を構成する磁性部材よりも穿出させ
たことを特徴とする超音波顕微鏡の加振装置。1. A shaft supported at both ends so as to be displaceable in the longitudinal direction holds a voice coil wound around the shaft in a snow-like manner, and also holds an ultrasonic head having a piezoelectric transducer, and A magnetic member constituting a magnetic circuit that generates a magnetic flux across the voice coil is arranged, and the tip of the ultrasonic head is made to protrude beyond the magnetic member constituting the magnetic circuit when viewed in the ultrasonic projection direction. A vibrating device for an ultrasonic microscope characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58204714A JPS6097256A (en) | 1983-11-02 | 1983-11-02 | Vibration applying apparatus of ultrasonic microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58204714A JPS6097256A (en) | 1983-11-02 | 1983-11-02 | Vibration applying apparatus of ultrasonic microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6097256A true JPS6097256A (en) | 1985-05-31 |
Family
ID=16495089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58204714A Pending JPS6097256A (en) | 1983-11-02 | 1983-11-02 | Vibration applying apparatus of ultrasonic microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6097256A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4995711A (en) * | 1988-12-16 | 1991-02-26 | Hitachi, Ltd. | Slide table |
| WO1995007793A3 (en) * | 1993-09-13 | 1995-11-30 | United Technologies Corp | Force and position controlled manipulator |
-
1983
- 1983-11-02 JP JP58204714A patent/JPS6097256A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4995711A (en) * | 1988-12-16 | 1991-02-26 | Hitachi, Ltd. | Slide table |
| WO1995007793A3 (en) * | 1993-09-13 | 1995-11-30 | United Technologies Corp | Force and position controlled manipulator |
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