JPH09191626A - Resonance type scanner - Google Patents

Resonance type scanner

Info

Publication number
JPH09191626A
JPH09191626A JP2838496A JP2838496A JPH09191626A JP H09191626 A JPH09191626 A JP H09191626A JP 2838496 A JP2838496 A JP 2838496A JP 2838496 A JP2838496 A JP 2838496A JP H09191626 A JPH09191626 A JP H09191626A
Authority
JP
Japan
Prior art keywords
resonance
spring
vibrating
type scanner
permanent magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2838496A
Other languages
Japanese (ja)
Inventor
Satoshi Watanabe
慧 渡▲邊▼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OPUTORON KK
Original Assignee
OPUTORON KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OPUTORON KK filed Critical OPUTORON KK
Priority to JP2838496A priority Critical patent/JPH09191626A/en
Publication of JPH09191626A publication Critical patent/JPH09191626A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laser Beam Printer (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a long-life, small size and high speed resonance type scanner by realizing fixing of a vibrating section of a small size resonance type scanner and a spring for resonance with a simplified structure. SOLUTION: A resonance type scanner comprises a light scanning mirror 4 for reflecting the light such as a laser beam, a vibrating section having a driving permanent magnet 3 for generating a driving force and a holder 2 for fixing such magnet, a spring 1 for resonance, a magnetism generating section using a driving coil 5 which resonates the vibrating section by applying an AC voltage of the resonance frequency and a frame 6 for supporting the resonance spring 1 and driving coil 5. Here, both sides of the resonance spring 1 which will becomes the vibrating axis of the driving permanent magnet 3 are magnetized to N and S poles. In this structure, the resonance spring 1 and holder 2 are fixed to the frame by inserting the resonance spring 1 into two holes opened in the direction to the vibrating axis of the holder 2 and then bending it in the direction to the vibrating axis under the condition that a constant tension is applied in the axial direction.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、レーザプリンタなどに
おいてレーザビームを走査するために使用される小型高
速の共振型走査器に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a compact and high speed resonant scanner used for scanning a laser beam in a laser printer or the like.

【0002】[0002]

【従来の技術】従来、本発明の目的とする小型高速の共
振型走査器は存在せず、大型の共振型走査器では図5A
に示すように共振用スプリングと光走査用ミラーを含む
振動部を一体でプレス抜き加工をしたもの、または図5
Bに示す構造のものでは固定はロウ付、溶接、接着、ま
たは半田付が一般的である。
2. Description of the Related Art Conventionally, there is no small-sized and high-speed resonance type scanner as the object of the present invention, and a large-size resonance type scanner is shown in FIG.
As shown in Fig. 5, the vibrating part including the resonance spring and the optical scanning mirror is integrally press-punched, or Fig. 5
The structure shown in B is generally fixed by brazing, welding, bonding, or soldering.

【0003】[0003]

【発明が解決しようとする課題】小型で高い共振周波数
を必要とする共振型走査器を実現するためには、共振用
スプリングを含む振動部の慣性モーメントを小さくしな
ければならない。そのためには、光走査ミラー、駆動用
永久磁石及び共振用スプリングを含む振動部の重量をで
きる限り軽量化することが要求される。また走査用ミラ
ーの角変位を同一とした場合、共振用スプリングを許容
応力内で使用するためには線径が太いほどスプリングの
長さを長くしなければならない。この二つの理由で小型
高速の共振型走査器を実現するには細径の共振用スプリ
ングを使用しなければならない。さらに光走査ミラーを
含む振動部が振動軸を中心に安定に角変位するために
は、共振用スプリングに適切な軸方向の張力を与えるこ
とが、特に細径の共振用スプリングを使用する場合重要
である。
In order to realize a resonance type scanner that is compact and requires a high resonance frequency, the moment of inertia of the vibrating portion including the resonance spring must be reduced. For that purpose, it is required to reduce the weight of the vibrating portion including the optical scanning mirror, the driving permanent magnet and the resonance spring as much as possible. Further, in the case where the angular displacements of the scanning mirrors are the same, in order to use the resonance spring within the allowable stress, the larger the wire diameter, the longer the spring length must be. For these two reasons, a small diameter resonance spring must be used to realize a small and high speed resonance type scanner. Furthermore, in order for the vibrating part including the optical scanning mirror to be stably angularly displaced about the vibrating axis, it is important to apply an appropriate axial tension to the resonance spring, especially when using a resonance spring with a small diameter. Is.

【0004】従来の固定方法の場合、接着や半田付では
引っ張りとネジリの両方の力に耐えるには強度が不足で
ある。またロウ付・溶接などの固定方法では熱によりス
プリングの特性を劣化させるおそれがあった。また振動
部の重量を軽減させるためべースにアルミなどの軽金属
を使用すると、溶接・ロウ付何れの方法でも固定は不可
能であった。本発明は、上記事由に鑑みなされたもの
で、その目的とするところは小型、高速、大振幅、低電
力駆動することのできる共振型走査器を提供することに
ある。
In the case of the conventional fixing method, adhesion or soldering is insufficient in strength to withstand both pulling and twisting forces. Further, the fixing method such as brazing or welding may deteriorate the characteristics of the spring due to heat. Also, if a light metal such as aluminum is used for the base in order to reduce the weight of the vibrating part, it is impossible to fix it by either welding or brazing. The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a resonance type scanner that can be driven in a small size, high speed, large amplitude, and low power consumption.

【0005】[0005]

【課題を解決するための手段】前述した課題を解決する
ために、図2に示すようにホルダー2を薄い軽金属で作
り、両側に2個の孔を開け、その孔に共振用スプリング
1を通して直角に折り曲げ振動軸を形成する。ホルダー
2の上に駆動用永久磁石3と光走査用ミラー4を接着し
振動部を構成する。この振動部を走査器本体に取り付け
る際に共振用スプリングの軸方向に適当な張力を与える
ことにより、共振用スプリングと振動部のホルダー2と
は接着、溶接等の手段を要せず確実に固定される。
In order to solve the above-mentioned problems, as shown in FIG. 2, the holder 2 is made of thin light metal, two holes are formed on both sides, and the resonance spring 1 is passed through the holes at right angles. Form a bending vibration axis. The drive permanent magnet 3 and the optical scanning mirror 4 are bonded onto the holder 2 to form a vibrating section. By applying an appropriate tension in the axial direction of the resonance spring when the vibrating portion is attached to the scanner body, the resonance spring and the holder 2 of the vibrating portion are securely fixed without any means such as bonding or welding. To be done.

【0006】また請求項2記載のものは、駆動用永久磁
石に走査ミラーを接着するため、ミラー自体の強度は小
さくても振動による加速度で変形されず、薄く軽いミラ
ーを採用できるため振動部を軽量化でき、従ってより高
い共振周波数を得ることができる。この振動部を共振用
スプリング1の中心軸に対し三次元的重心となるよう各
部品を設計することで不要振動を押さえ安定した共振型
走査器ができる。
Further, according to the second aspect of the present invention, since the scanning mirror is adhered to the driving permanent magnet, even if the strength of the mirror itself is small, it is not deformed by acceleration due to vibration, and a thin and light mirror can be adopted, so that the vibrating portion is provided. The weight can be reduced, and thus a higher resonance frequency can be obtained. By designing each component so that the vibrating portion has a three-dimensional center of gravity with respect to the central axis of the resonance spring 1, it is possible to obtain a stable resonance type scanner that suppresses unnecessary vibration.

【0007】[0007]

【作用】請求項1による振動部の駆動用永久磁石3は図
4に示すように共振用スプリング1で形成される振動軸
と直行する方向にN,Sと磁化されている。振動部の下
に所定の距離を置いて配設されている磁気発生部の駆動
用コイル5に通電すると、同一極性の磁束が駆動用永久
磁石3を通過するため、振動軸の両側にそれぞれ吸引力
と反発力がはたらき、光走査用ミラー4を含む振動部は
振動軸を中心に角変位する。駆動用コイル5に振動部の
共振周波数と同一またはごく近い交流電圧を加えると、
上記の角変位が交互に発生し振動部は共振状態となり、
比較的小さな駆動電力で大きな角変位を得ることができ
る。
The driving permanent magnet 3 of the vibrating portion according to claim 1 is magnetized as N and S in the direction perpendicular to the vibration axis formed by the resonance spring 1 as shown in FIG. When the drive coil 5 of the magnetic field generator disposed at a predetermined distance below the vibrating section is energized, the magnetic flux of the same polarity passes through the drive permanent magnet 3, so that it is attracted to both sides of the vibrating shaft. The force and the repulsive force work, and the vibrating portion including the optical scanning mirror 4 is angularly displaced about the vibration axis. When an AC voltage that is the same as or very close to the resonance frequency of the vibrating section is applied to the drive coil 5,
The above-mentioned angular displacements occur alternately and the vibrating part becomes in resonance,
A large angular displacement can be obtained with a relatively small driving power.

【0008】共振用スプリングが角変位により受ける応
力は、振れ角度を一定とすれば線径が細いほど、また共
振用スプリングの長さが長いほど小さい。従って小型化
するには線径の細い共振用スプリングを使用するのが適
切である。また、共振用スプリングは細いほど駆動力は
小さくて済むため駆動用永久磁石3を小型化でき振動部
の重量は軽減される。結果として小型高速の共振型走査
器を実現できる。さらに共振用スプリング1に適切な張
力をかけることにより共振用スプリング1と振動部とが
確実に固定されるだけでなく、振れのない安定した振動
軸が形成される。
The stress applied to the resonance spring due to the angular displacement is smaller as the wire diameter is smaller and the length of the resonance spring is longer if the deflection angle is constant. Therefore, for miniaturization, it is appropriate to use a resonance spring having a small wire diameter. Further, the thinner the resonance spring, the smaller the driving force is, so that the driving permanent magnet 3 can be downsized and the weight of the vibrating portion can be reduced. As a result, a small-sized and high-speed resonant scanner can be realized. Further, by applying an appropriate tension to the resonance spring 1, not only the resonance spring 1 and the vibrating portion are securely fixed, but also a stable vibration axis without vibration is formed.

【0009】また請求項2に記載のものはガラスの表面
に反射層を形成したミラー4を駆動用永久磁石3に接着
することにより振動の加速度によるミラーの変形を防ぐ
ことができるため、薄いガラスが使用可能となり振動部
の重量を軽減することができ、また振動軸を中心とした
慣性モーメントも小さくなるため、より高い共振周波数
を得ることができる。
According to the second aspect of the present invention, since the mirror 4 having a reflective layer formed on the surface of the glass is adhered to the driving permanent magnet 3, deformation of the mirror due to acceleration of vibration can be prevented. Can be used, the weight of the vibrating portion can be reduced, and the moment of inertia about the vibrating axis is also reduced, so that a higher resonance frequency can be obtained.

【0010】[0010]

【実施例】本発明の実施例を図1乃至4に基づいて説明
する。図1に示す振動部はジュラルミン等の軽金属で作
られたホルダー2の上に駆動用永久磁石3を接着し、更
に駆動用永久磁石3の他面に薄いガラスで作られている
表面ミラーを接着したものである。共振用スプリング1
はホルダー2の両端にあけられた孔を貫通し、図1及び
図2に見られるごとく成形される。この振動部を図4に
見られるように走査器本体のフレーム6に固定する。こ
の際、共振用スプリング1には軸方向に一定の張力が加
えられる。この張力によって振動軸は理想的な直線とな
り、振動部は共振用スプリング1を軸として、安定に角
変位を行なうことができる状態となる。駆動用コイル5
に振動部の共振周波数または近い周波数の交流電流を流
すことにより、駆動用永久磁石3の両端に吸引力・反発
力が働き、振動部は共振状態となり小さな電力で大きな
角変位を得ることができる。走査用ミラーにレーザ光を
入射すると走査用ミラーの角変位により、レーザ光を走
査することができる。図3の実施例はホルダー2の両面
に各々駆動用永久磁石3、光走査ミラー4を接着したも
ので、共振用スプリング1が駆動用永久磁石を保持する
働きをするため、より大きな加速度により駆動用永久磁
石3が剥離するのを防ぐ効果がある。
Embodiments of the present invention will be described with reference to FIGS. The vibrating part shown in FIG. 1 has a drive permanent magnet 3 bonded on a holder 2 made of a light metal such as duralumin, and a surface mirror made of thin glass is bonded on the other surface of the drive permanent magnet 3. It was done. Resonance spring 1
Penetrates through holes provided at both ends of the holder 2 and is molded as seen in FIGS. This vibrating part is fixed to the frame 6 of the scanner body as seen in FIG. At this time, a constant tension is applied to the resonance spring 1 in the axial direction. Due to this tension, the vibrating axis becomes an ideal straight line, and the vibrating section is in a state in which stable angular displacement can be performed with the resonance spring 1 as the axis. Drive coil 5
By passing an alternating current having a resonance frequency or a frequency close to that of the vibrating portion, an attractive force / repulsive force is exerted on both ends of the driving permanent magnet 3, and the vibrating portion is brought into a resonance state to obtain a large angular displacement with a small electric power. . When laser light is incident on the scanning mirror, the laser light can be scanned by the angular displacement of the scanning mirror. In the embodiment shown in FIG. 3, a driving permanent magnet 3 and an optical scanning mirror 4 are adhered to both surfaces of a holder 2, respectively, and the resonance spring 1 functions to hold the driving permanent magnet. The permanent magnet 3 has an effect of preventing peeling.

【0011】[0011]

【発明の効果】請求項1に記載のものは光走査用ミラー
4、駆動用永久磁石3およびホルダー2含む振動部と共
振用スプリング1とを溶接または接着などの手段を必要
とせず固定でき、高い共振周波数で振動する際に生じる
大きな加速度に耐えるものである。試作の結果によれば
15×20×13mmという従来品に比べ体積比で5分
の1から10分の1という小型にもかかわらず1KHz
で±10゜以上の高い周波数、大振幅で1011回以上
の半永久的ともいえる寿命を得ることができた。
According to the first aspect of the present invention, the vibrating portion including the optical scanning mirror 4, the driving permanent magnet 3 and the holder 2 and the resonance spring 1 can be fixed without any means such as welding or adhesion. It withstands the large acceleration that occurs when vibrating at a high resonance frequency. According to the result of the trial production, it is 1KHz despite the small size of 1/5 to 1/10 in volume ratio as compared with the conventional product of 15 × 20 × 13 mm.
It was possible to obtain a semi-permanent life of 10 11 times or more with a high frequency of ± 10 ° or more and a large amplitude.

【0012】[0012]

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の第1実施例を示す斜視図である。FIG. 1 is a perspective view showing a first embodiment of the present invention.

【図2】 本発明の第1実施例を示す側面図である。FIG. 2 is a side view showing the first embodiment of the present invention.

【図3】 本発明の第2実施例を示す側面図である。FIG. 3 is a side view showing a second embodiment of the present invention.

【図4】 本発明の第1実施例を使用した共振型走査器
を示す側面図である。
FIG. 4 is a side view showing a resonance type scanner using the first embodiment of the present invention.

【図5】 従来例を示す斜視図である。FIG. 5 is a perspective view showing a conventional example.

【符号の説明】[Explanation of symbols]

1,21,31 共振用スプリング 2,22,32 ホルダー 3 駆動用永久磁石 4 光走査用ミラー 5 駆動用コイル 6 フレーム 1, 21, 31 Resonance spring 2, 22, 32 Holder 3 Driving permanent magnet 4 Optical scanning mirror 5 Driving coil 6 Frame

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 フレームに両端を固定されたピアノ線等
によるネジリバネ(以下、共振用スプリングという)の
中央に、光走査用ミラー、駆動用永久磁石、およびそれ
らを保持するホルダーから成る振動部を固定し、駆動用
コイルに振動部の共振周波数または共振周波数に近い交
流電流を流すことにより振動部を振動させ、光を走査す
る共振型走査器において、振動部に開けられた2個の孔
に、共振用スプリングを通して振動軸方向に折り曲げ、
軸方向に一定の張力を加えることにより共振用スプリン
グと振動部とを固定することを特徴とする共振型走査
器。
1. A vibrating section consisting of an optical scanning mirror, a driving permanent magnet, and a holder for holding them in the center of a torsion spring (hereinafter referred to as a resonance spring) formed by a piano wire or the like having both ends fixed to a frame. In a resonance-type scanner that is fixed and causes the vibration frequency to vibrate by causing an alternating current near or to the resonance frequency of the vibration frequency to flow in the driving coil, and to scan light, the two holes formed in the vibration frequency , Bending through the resonance spring in the vibration axis direction,
A resonance type scanner characterized in that a resonance spring and a vibrating portion are fixed by applying a constant tension in an axial direction.
【請求項2】 駆動用平板永久磁石に光走査用ミラーを
接着し、ミラーの剛性を強化する手段を有する共振型走
査器。
2. A resonance type scanner having means for adhering an optical scanning mirror to a driving plate permanent magnet to enhance the rigidity of the mirror.
JP2838496A 1996-01-10 1996-01-10 Resonance type scanner Pending JPH09191626A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2838496A JPH09191626A (en) 1996-01-10 1996-01-10 Resonance type scanner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2838496A JPH09191626A (en) 1996-01-10 1996-01-10 Resonance type scanner

Publications (1)

Publication Number Publication Date
JPH09191626A true JPH09191626A (en) 1997-07-22

Family

ID=12247171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2838496A Pending JPH09191626A (en) 1996-01-10 1996-01-10 Resonance type scanner

Country Status (1)

Country Link
JP (1) JPH09191626A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002311372A (en) * 2001-04-16 2002-10-23 Anritsu Corp Optical scanner and method for manufacturing it
JP2007272139A (en) * 2006-03-31 2007-10-18 Citizen Miyota Co Ltd Planar actuator
JP2011039313A (en) * 2009-08-12 2011-02-24 Seiko Epson Corp Optical deflector and method of manufacturing optical deflector
JP2017003744A (en) * 2015-06-09 2017-01-05 セイコーエプソン株式会社 Optical device and image display device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002311372A (en) * 2001-04-16 2002-10-23 Anritsu Corp Optical scanner and method for manufacturing it
JP2007272139A (en) * 2006-03-31 2007-10-18 Citizen Miyota Co Ltd Planar actuator
JP2011039313A (en) * 2009-08-12 2011-02-24 Seiko Epson Corp Optical deflector and method of manufacturing optical deflector
JP2017003744A (en) * 2015-06-09 2017-01-05 セイコーエプソン株式会社 Optical device and image display device

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