JPH0427365U - - Google Patents
Info
- Publication number
- JPH0427365U JPH0427365U JP6822590U JP6822590U JPH0427365U JP H0427365 U JPH0427365 U JP H0427365U JP 6822590 U JP6822590 U JP 6822590U JP 6822590 U JP6822590 U JP 6822590U JP H0427365 U JPH0427365 U JP H0427365U
- Authority
- JP
- Japan
- Prior art keywords
- storage
- clean storage
- clean
- heat exchanger
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Central Air Conditioning (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990068225U JPH083901Y2 (ja) | 1990-06-27 | 1990-06-27 | 冷却機能付きクリーン対応保管庫 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990068225U JPH083901Y2 (ja) | 1990-06-27 | 1990-06-27 | 冷却機能付きクリーン対応保管庫 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0427365U true JPH0427365U (US06168655-20010102-C00055.png) | 1992-03-04 |
JPH083901Y2 JPH083901Y2 (ja) | 1996-01-31 |
Family
ID=31602476
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990068225U Expired - Fee Related JPH083901Y2 (ja) | 1990-06-27 | 1990-06-27 | 冷却機能付きクリーン対応保管庫 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH083901Y2 (US06168655-20010102-C00055.png) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4977860U (US06168655-20010102-C00055.png) * | 1972-10-20 | 1974-07-05 | ||
JPS5737640A (en) * | 1980-08-20 | 1982-03-02 | Shimizu Constr Co Ltd | System for varying draft of air in clean room |
JPS5911653A (ja) * | 1982-07-12 | 1984-01-21 | Toshiba Corp | 冷却装置 |
JPS60232442A (ja) * | 1984-04-28 | 1985-11-19 | Mitsubishi Electric Corp | 空気調和装置 |
JPS6428725U (US06168655-20010102-C00055.png) * | 1987-08-10 | 1989-02-20 |
-
1990
- 1990-06-27 JP JP1990068225U patent/JPH083901Y2/ja not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4977860U (US06168655-20010102-C00055.png) * | 1972-10-20 | 1974-07-05 | ||
JPS5737640A (en) * | 1980-08-20 | 1982-03-02 | Shimizu Constr Co Ltd | System for varying draft of air in clean room |
JPS5911653A (ja) * | 1982-07-12 | 1984-01-21 | Toshiba Corp | 冷却装置 |
JPS60232442A (ja) * | 1984-04-28 | 1985-11-19 | Mitsubishi Electric Corp | 空気調和装置 |
JPS6428725U (US06168655-20010102-C00055.png) * | 1987-08-10 | 1989-02-20 |
Also Published As
Publication number | Publication date |
---|---|
JPH083901Y2 (ja) | 1996-01-31 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |