JPH0427365U - - Google Patents

Info

Publication number
JPH0427365U
JPH0427365U JP6822590U JP6822590U JPH0427365U JP H0427365 U JPH0427365 U JP H0427365U JP 6822590 U JP6822590 U JP 6822590U JP 6822590 U JP6822590 U JP 6822590U JP H0427365 U JPH0427365 U JP H0427365U
Authority
JP
Japan
Prior art keywords
storage
clean storage
clean
heat exchanger
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6822590U
Other languages
English (en)
Japanese (ja)
Other versions
JPH083901Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990068225U priority Critical patent/JPH083901Y2/ja
Publication of JPH0427365U publication Critical patent/JPH0427365U/ja
Application granted granted Critical
Publication of JPH083901Y2 publication Critical patent/JPH083901Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Central Air Conditioning (AREA)
JP1990068225U 1990-06-27 1990-06-27 冷却機能付きクリーン対応保管庫 Expired - Fee Related JPH083901Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990068225U JPH083901Y2 (ja) 1990-06-27 1990-06-27 冷却機能付きクリーン対応保管庫

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990068225U JPH083901Y2 (ja) 1990-06-27 1990-06-27 冷却機能付きクリーン対応保管庫

Publications (2)

Publication Number Publication Date
JPH0427365U true JPH0427365U (US06168655-20010102-C00055.png) 1992-03-04
JPH083901Y2 JPH083901Y2 (ja) 1996-01-31

Family

ID=31602476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990068225U Expired - Fee Related JPH083901Y2 (ja) 1990-06-27 1990-06-27 冷却機能付きクリーン対応保管庫

Country Status (1)

Country Link
JP (1) JPH083901Y2 (US06168655-20010102-C00055.png)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4977860U (US06168655-20010102-C00055.png) * 1972-10-20 1974-07-05
JPS5737640A (en) * 1980-08-20 1982-03-02 Shimizu Constr Co Ltd System for varying draft of air in clean room
JPS5911653A (ja) * 1982-07-12 1984-01-21 Toshiba Corp 冷却装置
JPS60232442A (ja) * 1984-04-28 1985-11-19 Mitsubishi Electric Corp 空気調和装置
JPS6428725U (US06168655-20010102-C00055.png) * 1987-08-10 1989-02-20

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4977860U (US06168655-20010102-C00055.png) * 1972-10-20 1974-07-05
JPS5737640A (en) * 1980-08-20 1982-03-02 Shimizu Constr Co Ltd System for varying draft of air in clean room
JPS5911653A (ja) * 1982-07-12 1984-01-21 Toshiba Corp 冷却装置
JPS60232442A (ja) * 1984-04-28 1985-11-19 Mitsubishi Electric Corp 空気調和装置
JPS6428725U (US06168655-20010102-C00055.png) * 1987-08-10 1989-02-20

Also Published As

Publication number Publication date
JPH083901Y2 (ja) 1996-01-31

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees