JPH04269633A - Vibration-displacement detecting apparatus - Google Patents
Vibration-displacement detecting apparatusInfo
- Publication number
- JPH04269633A JPH04269633A JP2998591A JP2998591A JPH04269633A JP H04269633 A JPH04269633 A JP H04269633A JP 2998591 A JP2998591 A JP 2998591A JP 2998591 A JP2998591 A JP 2998591A JP H04269633 A JPH04269633 A JP H04269633A
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- waveform
- measured
- displacement detector
- vibration displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 52
- 238000000605 extraction Methods 0.000 claims description 23
- 238000001514 detection method Methods 0.000 claims description 14
- 238000012806 monitoring device Methods 0.000 claims description 12
- 239000000284 extract Substances 0.000 claims description 6
- 238000003745 diagnosis Methods 0.000 abstract description 4
- 230000010355 oscillation Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000012544 monitoring process Methods 0.000 description 6
- 238000007689 inspection Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は、インピダンス変化の計
測によりモータ、ポンプ等の工業用機器の振動変位量の
検出を行う所謂うず電流損方式の振動変位検出装置に関
するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a so-called eddy current loss type vibration displacement detection device for detecting the amount of vibration displacement of industrial equipment such as motors and pumps by measuring changes in impedance.
【0002】0002
【従来の技術】図6は従来の振動変位検出装置の構成を
示すブロック図である。この図において、例えば鉄鋼材
で形成された被測定体1は、図示を省略したモータ及び
ポンプ間のシャフトに連結されたものであり、図7に示
すような円形断面を有するものである。2. Description of the Related Art FIG. 6 is a block diagram showing the configuration of a conventional vibration displacement detection device. In this figure, a measured object 1 made of, for example, steel is connected to a shaft between a motor and a pump (not shown), and has a circular cross section as shown in FIG.
【0003】そして、被測定体1の端面から距離d離れ
た位置には振動変位検出器2が設けられており、その検
出信号は増幅装置3を介して監視装置4に送られるよう
になっている。A vibration displacement detector 2 is provided at a distance d from the end face of the object to be measured 1, and its detection signal is sent to a monitoring device 4 via an amplifier 3. There is.
【0004】次に、このような従来装置の動作につき説
明する。被測定体1が矢印方向の回転を開始すると、こ
の被測定体1は図6の左右方向に振動し、距離dの値が
周期的に変化する。Next, the operation of such a conventional device will be explained. When the measured object 1 starts rotating in the direction of the arrow, the measured object 1 vibrates in the left-right direction in FIG. 6, and the value of the distance d changes periodically.
【0005】一方、振動変位検出器2は、LC共振によ
る高周波磁界を発生させており、被測定体1は、この高
周波磁界中で振動することから、その表面にはうず電流
損が発生する。On the other hand, the vibration displacement detector 2 generates a high-frequency magnetic field due to LC resonance, and since the object to be measured 1 vibrates in this high-frequency magnetic field, eddy current loss occurs on its surface.
【0006】このうず電流損は、距離dの変化に対応し
ており、また、このうず電流損により、振動変位検出器
2と増幅装置3内の発振器とで形成される発振回路のイ
ンピダンスが変化するため、振動変位量を発振電圧(交
流電圧となる)の変化として表わすことができる。[0006] This eddy current loss corresponds to a change in distance d, and due to this eddy current loss, the impedance of the oscillation circuit formed by the vibration displacement detector 2 and the oscillator in the amplifier 3 changes. Therefore, the amount of vibration displacement can be expressed as a change in the oscillation voltage (which becomes an alternating current voltage).
【0007】そして、監視装置4は、この発振電圧を常
時監視しており、これが一定レベル以上になると、危険
レベルに達したものとみなし、警報を発生させると共に
、モータ及びポンプの運転を停止させる。[0007] The monitoring device 4 constantly monitors this oscillation voltage, and when it exceeds a certain level, it considers that the voltage has reached a dangerous level, issues an alarm, and stops the operation of the motor and pump. .
【0008】ところで、監視装置4が上記のような監視
動作を正確に行うためには、振動変位検出器2が正常な
動作を行なっていることが前提となる。そこで、この振
動変位検出器2が正常であるか否かの診断を定期的に行
う必要があるが、従来の診断は次のように行なわれてい
た。By the way, in order for the monitoring device 4 to accurately perform the monitoring operation as described above, it is a prerequisite that the vibration displacement detector 2 is operating normally. Therefore, it is necessary to periodically diagnose whether or not the vibration displacement detector 2 is normal, and conventional diagnosis has been carried out as follows.
【0009】すなわち、運転中の装置の設置個所から振
動変位検出器2を取外し、別の場所で模擬の被測定体を
加振台にセットすると共に、所定個所にこの振動変位検
出器2を取付けて加振試験を実施することにより、診断
を行なっていた。That is, the vibration displacement detector 2 is removed from the installation location of the device during operation, a simulated object to be measured is set on the vibration table at another location, and the vibration displacement detector 2 is installed at a predetermined location. Diagnosis was made by conducting vibration tests.
【0010】0010
【発明が解決しようとする課題】上記のように、振動変
位検出器2に対する診断を行うためにはこれを設置個所
から取外さなければならないため、モータ及びポンプの
運転を一旦停止させる必要がある。[Problems to be Solved by the Invention] As mentioned above, in order to diagnose the vibration displacement detector 2, it must be removed from the installation location, so it is necessary to temporarily stop the operation of the motor and pump. .
【0011】しかし、モータ、ポンプ等の工業用機器は
一定期間の運転継続を要求されるのが通常であり、実際
には運転を停止できるのは保守点検時等の限られた場合
のみである。[0011] However, industrial equipment such as motors and pumps are normally required to continue operating for a certain period of time, and in reality, operation can only be stopped in limited cases such as during maintenance inspections. .
【0012】したがって、運転中に振動変位検出器2が
故障したとしても、この故障の発見は次回の保守点検時
まで待たなければならず、それまで監視装置4は不正確
な監視動作を行う結果となっていた。Therefore, even if the vibration displacement detector 2 malfunctions during operation, the discovery of this malfunction must wait until the next maintenance inspection, and until then the monitoring device 4 performs inaccurate monitoring operations. It became.
【0013】本発明は上記事情に鑑みてなされたもので
あり、工業用機器の運転を停止させることなく振動変位
検出器の診断を行うことができ、もって振動変位に対す
る監視動作の信頼性を向上させることが可能な振動変位
検出装置を提供することを目的とするものである。The present invention has been made in view of the above circumstances, and it is possible to diagnose a vibration displacement detector without stopping the operation of industrial equipment, thereby improving the reliability of monitoring operation for vibration displacement. It is an object of the present invention to provide a vibration displacement detection device that can perform
【0014】[0014]
【課題を解決するための手段】本発明は上記課題を解決
するための手段として、回転体の振動変位量を測定する
ため該回転体に取付けられ、しかも、被測定対象部の一
部に変形部が形成された被測定体と、前記被測定体に高
周波磁界を印加し、該被測定体のうず電流損に基いて前
記回転体の振動変位量を検出する振動変位検出器と、前
記振動変位検出器からの検出信号の波形より、前記被測
定体の変形部に起因する振動成分を除去して基本波のみ
を取出す基本波取出し回路と、前記基本波取出し回路か
らの出力信号波形に基いて、前記回転体の振動変位量に
対する監視を行う監視装置と、前記振動変位検出器から
の検出信号の波形より、前記被測定体の変形部に起因す
る振動成分波形のみを取出す変形部振動波形取出し回路
と、前記変形部振動波形取出し回路からの出力信号波形
に基いて、前記振動変位検出器が正常に動作しているか
否かを診断する診断回路と、を備えた構成としたもので
ある。[Means for Solving the Problems] As a means for solving the above-mentioned problems, the present invention provides a device that is attached to a rotating body in order to measure the amount of vibrational displacement of the rotating body, and in which a part of the object to be measured is deformed. a vibration displacement detector that applies a high-frequency magnetic field to the object to be measured and detects the amount of vibrational displacement of the rotating body based on the eddy current loss of the object to be measured; A fundamental wave extraction circuit removes vibration components caused by the deformed portion of the object to be measured and extracts only the fundamental wave from the waveform of the detection signal from the displacement detector; a monitoring device that monitors the amount of vibration displacement of the rotating body; and a deformed portion vibration waveform that extracts only a vibration component waveform caused by the deformed portion of the measured object from the waveform of the detection signal from the vibration displacement detector. The structure includes an extraction circuit and a diagnostic circuit for diagnosing whether or not the vibration displacement detector is operating normally based on the output signal waveform from the deformed portion vibration waveform extraction circuit. .
【0015】[0015]
【作用】上記構成において、回転体に取付けられた被測
定体には回転と共に振動が発生するが、被測定体は振動
変位検出器により印加される高周波磁界中で振動するた
め、その表面にはうず電流が発生する。[Operation] In the above configuration, vibration occurs in the object to be measured attached to the rotating body as it rotates, but since the object to be measured vibrates in the high frequency magnetic field applied by the vibration displacement detector, the surface of the object to be measured vibrates. Eddy currents occur.
【0016】振動変位検出器は、このうず電流損に基い
て回転体の振動変位量に対応する検出信号を基本波取出
し回路及び変形部振動波形取出し回路に送出する。The vibration displacement detector sends a detection signal corresponding to the amount of vibration displacement of the rotating body to the fundamental wave extraction circuit and the deformed portion vibration waveform extraction circuit based on this eddy current loss.
【0017】この場合、検出信号の波形中には、基本波
の他に、被測定体の変形部に起因して生じる振動成分が
付加されているが、基本波取出し回路は、この振動成分
を除去して基本波のみを取出すようにする。そして、監
視装置は、この基本波取出し回路からの出力信号波形に
基いて、回転体の振動変位量に対する監視を行う。In this case, in addition to the fundamental wave, a vibration component caused by the deformed part of the object to be measured is added to the waveform of the detection signal, and the fundamental wave extraction circuit extracts this vibration component. Remove it so that only the fundamental wave is extracted. Then, the monitoring device monitors the amount of vibration displacement of the rotating body based on the output signal waveform from the fundamental wave extraction circuit.
【0018】一方、変形部振動波形取出し回路は、振動
変位検出器からの検出信号の波形中から、被測定体の変
形部に起因して生じる振動成分のみを取出すようにする
。そして、診断回路は、この取出した振動成分の波形に
基いて、振動変位検出器が正常に動作しているか否かを
診断するようにする。On the other hand, the deformed portion vibration waveform extracting circuit extracts only the vibration component caused by the deformed portion of the object to be measured from the waveform of the detection signal from the vibration displacement detector. Then, the diagnostic circuit diagnoses whether or not the vibration displacement detector is operating normally, based on the waveform of the extracted vibration component.
【0019】[0019]
【実施例】以下、本発明の実施例を図1乃至図5に基き
説明する。但し、図6と同様の構成要素には同一符号を
付して重複した説明を省略する。Embodiments Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 5. However, the same components as those in FIG. 6 are given the same reference numerals, and redundant explanation will be omitted.
【0020】図1は本発明の実施例の構成を示すブロッ
ク図である。この図において、被測定体101の一部に
は凹形の変形部101aが形成されている。なお、図2
は、この図1における被測定体101のII−II線に
沿う横断面図である。また、増幅装置3と監視装置4と
の間には診断装置102が設けられている。そして、こ
の診断装置102は、基本波取出し回路103、変形部
振動波形取出し回路104、及び診断回路105により
構成されている。FIG. 1 is a block diagram showing the configuration of an embodiment of the present invention. In this figure, a concave deformed portion 101a is formed in a part of the object 101 to be measured. In addition, Figure 2
is a cross-sectional view of the object to be measured 101 taken along line II-II in FIG. 1. FIG. Further, a diagnostic device 102 is provided between the amplifier device 3 and the monitoring device 4. The diagnostic device 102 includes a fundamental wave extraction circuit 103, a deformed portion vibration waveform extraction circuit 104, and a diagnostic circuit 105.
【0021】次に、以上のように構成される本実施例の
動作につき説明する。通常、振動変位検出器2からはL
C共振による高周波磁界が発生しており、被測定体10
1の表面にはうず電流が発生する。距離dが変化すれば
このうず電流損が変化するため、振動変位検出器2及び
増幅装置3内にある発振器からなる発振回路のインピダ
ンスが変化し、これらの変化は発振電圧の変化(交流電
流となる)となって現われる。これらの変化量は、規則
性があることから、距離dの変化量を発振電圧の変化量
としてとらえることができる。Next, the operation of this embodiment configured as above will be explained. Normally, the vibration displacement detector 2 outputs L
A high frequency magnetic field is generated due to C resonance, and the object to be measured 10
Eddy current is generated on the surface of 1. If the distance d changes, this eddy current loss changes, so the impedance of the oscillation circuit consisting of the oscillator in the vibration displacement detector 2 and the amplifier 3 changes, and these changes are caused by changes in the oscillation voltage (alternating current and It appears as (becomes). Since these amounts of change have regularity, the amount of change in the distance d can be taken as the amount of change in the oscillation voltage.
【0022】この発振電圧の変化量は増幅装置3を介し
て診断装置7へ入力され、基本波取出し回路103を通
して監視装置4へ入力される。また、基本波取出し回路
103の入力側及び、出力側の信号は変形部振動波形取
出し回路104を通して診断回路105へ入力される。
ここで回転振動体である被測定体101の振動検出部分
に凹形の変形部101aがあると、その部分のみ、振動
変位検出器2との距離dが急激に変化し、発振電圧も変
化することから増幅装置3の出力波形は、図3の様にな
る。The amount of change in the oscillation voltage is input to the diagnostic device 7 via the amplifier 3 and then input to the monitoring device 4 via the fundamental wave extraction circuit 103. Further, signals on the input side and output side of the fundamental wave extraction circuit 103 are inputted to the diagnostic circuit 105 through the deformed portion vibration waveform extraction circuit 104. Here, if there is a concave deformed part 101a in the vibration detection part of the measuring object 101, which is a rotating vibrating body, the distance d from the vibration displacement detector 2 changes rapidly in that part only, and the oscillation voltage also changes. Therefore, the output waveform of the amplifier 3 becomes as shown in FIG.
【0023】図3は増幅装置3の出力波形であり、また
、被測定体101の凹形の変形部101aと振動変位検
出器2とのギャップ(距離d)変化を含んだ電圧波形で
ある。図3において前記凹形の変形部101aの電圧変
化分は、被測定体101の振動の大小(距離dの大小)
にかかわらず一定の大きさとなる。このことにより、こ
の一定の大きさの波形を診断することができる。
そして、増幅装置3の出力は診断装置102の基本波取
出し回路103へ入力され、その出力のひとつは従来通
り監視装置4へ入力される。図4は、図3の波形より基
本波のみを取り出した波形を示したものである。FIG. 3 shows an output waveform of the amplifier 3, and also a voltage waveform including a change in the gap (distance d) between the concave deformed portion 101a of the object to be measured 101 and the vibration displacement detector 2. In FIG. 3, the voltage change of the concave deformed portion 101a is the magnitude of the vibration of the object to be measured 101 (the magnitude of the distance d).
The size remains constant regardless of the This allows the waveform of a certain size to be diagnosed. The output of the amplifying device 3 is input to the fundamental wave extraction circuit 103 of the diagnostic device 102, and one of the outputs is input to the monitoring device 4 as before. FIG. 4 shows a waveform obtained by extracting only the fundamental wave from the waveform shown in FIG.
【0024】そして、基本波取出し回路103の入力側
(増幅装置3の出力)と出力側との信号は変形部振動波
形取出し回路104へ入力される。変形部振動波形取出
し回路104では、前記二つの信号を相殺し、被測定体
101の凹形の変形部101aに相当する電圧が出力さ
れる。図3の波形と図4の波形とを相殺し検出した被測
定体101の凹形の変形部101aの電圧変化分の波形
を図5に示す。この波形の信号は診断回路105へ入力
される。Signals from the input side (output of the amplifier 3) and the output side of the fundamental wave extraction circuit 103 are input to the deformed portion vibration waveform extraction circuit 104. The deformed portion vibration waveform extraction circuit 104 cancels the two signals and outputs a voltage corresponding to the concave deformed portion 101a of the object to be measured 101. FIG. 5 shows a waveform of the voltage change of the concave deformed portion 101a of the object to be measured 101, which is detected by canceling the waveform of FIG. 3 and the waveform of FIG. This waveform signal is input to the diagnostic circuit 105.
【0025】診断回路105では変形部振動波形取出し
回路104の出力と、予め設定しておいたものであって
、且つ振動変位検出器102が正常である場合の被測定
体101の凹形の変形部101aに相当する電圧信号V
s とを、比較し、運転中における振動変位検出器2の
動作が正常か否かを診断する。そして、この診断結果は
監視装置4内の警報器、警報ランプ等に出力される。The diagnostic circuit 105 uses the output of the deformed portion vibration waveform extraction circuit 104 and the concave deformation of the object to be measured 101, which has been set in advance and when the vibration displacement detector 102 is normal. Voltage signal V corresponding to section 101a
s to diagnose whether or not the operation of the vibration displacement detector 2 during operation is normal. This diagnosis result is output to an alarm device, an alarm lamp, etc. in the monitoring device 4.
【0026】上記の実施例によると凹形の変形部101
aに対する振動波形が被測定体101の運転中にも常に
入力され、実運転中に振動監視システムが正常な否かを
診断する事ができる。したがって、機械の稼動率向上、
振動監視システムの異常の早期発見が可能となる。According to the above embodiment, the concave deformation portion 101
The vibration waveform for a is always inputted even while the object to be measured 101 is in operation, and it is possible to diagnose whether the vibration monitoring system is normal or not during actual operation. Therefore, improving machine availability,
Early detection of abnormalities in the vibration monitoring system becomes possible.
【0027】なお、上記実施例では被測定体101の変
形部101aを凹形として説明したが、凸形であっても
診断波形が異なるだけで同様に適用できることはいうま
でもない。In the above embodiment, the deformed portion 101a of the object to be measured 101 is described as having a concave shape, but it goes without saying that even if the deformed portion 101a of the object to be measured 101 has a convex shape, the present invention can be similarly applied, except that the diagnostic waveform is different.
【0028】[0028]
【発明の効果】以上のように、本発明によれば、被測定
体の一部に変形部を形成して、振動変位検出器からの検
出信号波形中に、この変形部に起因する振動成分が付加
されるようにし、この振動成分波形に基いて振動変位検
出器の動作に関する診断を行う構成としたので、モータ
,ポンプ等の工業用機器の運転を停止させることなく振
動変位検出器の診断を行うことができ、これら工業用機
器の振動変位に対する監視動作の信頼性を向上させるこ
とができる。As described above, according to the present invention, a deformed portion is formed in a part of the object to be measured, and vibration components caused by the deformed portion are contained in the detection signal waveform from the vibration displacement detector. is added, and the operation of the vibration displacement detector is diagnosed based on this vibration component waveform, so the vibration displacement detector can be diagnosed without stopping the operation of industrial equipment such as motors and pumps. This makes it possible to improve the reliability of monitoring operations for vibration displacement of these industrial devices.
【図1】本発明の実施例の構成を示すブロック図。FIG. 1 is a block diagram showing the configuration of an embodiment of the present invention.
【図2】図1のII−II線に沿う横断面図。FIG. 2 is a cross-sectional view taken along line II-II in FIG. 1.
【図3】図1の動作を説明するための波形図。FIG. 3 is a waveform diagram for explaining the operation of FIG. 1;
【図4】図1の動作を説明するための波形図。FIG. 4 is a waveform diagram for explaining the operation of FIG. 1;
【図5】図1の動作を説明するための波形図。FIG. 5 is a waveform diagram for explaining the operation of FIG. 1;
【図6】従来例の構成を示すブロック図。FIG. 6 is a block diagram showing the configuration of a conventional example.
【図7】図6のXII −XII 線に沿う横断面図。FIG. 7 is a cross-sectional view taken along line XII-XII in FIG. 6;
2 振動変位検出器 4 監視装置 101 被測定体 101a 変形部(凹部) 103 基本波取出し回路 104 変形部振動波形取出し回路 105 診断回路 2 Vibration displacement detector 4. Monitoring device 101 Object to be measured 101a Deformed part (concave part) 103 Fundamental wave extraction circuit 104 Deformed part vibration waveform extraction circuit 105 Diagnostic circuit
Claims (1)
回転体に取付けられ、しかも、被測定対象部の一部に変
形部が形成された被測定体と、前記被測定体に高周波磁
界を印加し、該被測定体のうず電流損に基いて前記回転
体の振動変位量を検出する振動変位検出器と、前記振動
変位検出器からの検出信号の波形より、前記被測定体の
変形部に起因する振動成分を除去して基本波のみを取出
す基本波取出し回路と、前記基本波取出し回路からの出
力信号波形に基いて、前記回転体の振動変位量に対する
監視を行う監視装置と、前記振動変位検出器からの検出
信号の波形より、前記被測定体の変形部に起因する振動
成分波形のみを取出す変形部振動波形取出し回路と、前
記変形部振動波形取出し回路からの出力信号波形に基い
て、前記振動変位検出器が正常に動作しているか否かを
診断する診断回路と、を備えた振動変位検出装置。1. An object to be measured that is attached to a rotating body in order to measure the amount of vibrational displacement of the rotating body, and in which a deformed part is formed in a part of the object to be measured, and a high-frequency magnetic field applied to the object to be measured. and a vibration displacement detector that detects the amount of vibration displacement of the rotating body based on the eddy current loss of the object to be measured, and a waveform of a detection signal from the vibration displacement detector to determine the deformation of the object to be measured. a fundamental wave extraction circuit that extracts only the fundamental wave by removing vibration components caused by the vibration component, and a monitoring device that monitors the amount of vibration displacement of the rotating body based on the output signal waveform from the fundamental wave extraction circuit; A deformed part vibration waveform extraction circuit extracts only the vibration component waveform caused by the deformed part of the object to be measured from the waveform of the detection signal from the vibration displacement detector, and an output signal waveform from the deformed part vibration waveform extraction circuit. a diagnostic circuit for diagnosing whether or not the vibration displacement detector is operating normally based on the vibration displacement detector.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2998591A JPH04269633A (en) | 1991-02-25 | 1991-02-25 | Vibration-displacement detecting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2998591A JPH04269633A (en) | 1991-02-25 | 1991-02-25 | Vibration-displacement detecting apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04269633A true JPH04269633A (en) | 1992-09-25 |
Family
ID=12291255
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2998591A Pending JPH04269633A (en) | 1991-02-25 | 1991-02-25 | Vibration-displacement detecting apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04269633A (en) |
-
1991
- 1991-02-25 JP JP2998591A patent/JPH04269633A/en active Pending
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